B81C 1 - Manufacture or treatment of devices or systems in or on a substrate

Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
12/2002
12/05/2002	WO2002096795A1 Device for light modulation by reflection and method for the production thereof
12/05/2002	WO2002096640A1 Recessed patterns in a multilayered ceramic package
12/05/2002	US20020182872 Material removal method for forming a structure
12/05/2002	US20020182816 Material removal method for forming a structure
12/05/2002	US20020181838 Optical MEMS device and package having a light-transmissive opening or window
12/05/2002	US20020181110 Device having a barrier layer located therein and a method of manufacture therefor
12/05/2002	US20020180031 Semiconductor device
12/05/2002	US20020179563 Application of a strain-compensated heavily doped etch stop for silicon structure formation
12/05/2002	US20020178817 Accelerometer with folded beams
12/04/2002	EP1263056A2 Method of controlling stress in a polycrystalline SiGe layer deposited on a substrate
12/04/2002	EP0996547B1 The production of microstructures for use in assays
12/03/2002	US6488872 Microfabricated devices and method of manufacturing the same
11/2002
11/28/2002	WO2002095799A2 Thin films and production methods thereof
11/28/2002	US20020175323 Gated fabrication of nanostructure field emission cathode material within a device
11/28/2002	US20020174951 Surface isolation device
11/28/2002	US20020174937 Methods and apparatus for manufacturing patterned ceramic green-sheets and multilayered ceramic devices
11/28/2002	US20020174936 Cast-on-resist (COR) methods; Multilayered Microfluidic Device (MMD) for example
11/28/2002	US20020174935 Methods for manufacturing patterned ceramic green-sheets and multilayered ceramic packages
11/28/2002	US20020174686 Method for producing microchannels having circular cross-sections in glass
11/27/2002	EP1261023A2 Atomic resolution storage system
11/27/2002	EP1260481A2 Atomic resolution storage system
11/27/2002	EP1259980A1 Two etchant etch method
11/26/2002	US6486041 Method and device for controlled cleaving process
11/26/2002	US6484395 Ultra-miniature electrical contacts and method of manufacture
11/21/2002	US20020173032 For simultaneous treatment of multiple individual samples (DNA) in independent thermal protocols; for use in polymerase chain reactions
11/21/2002	US20020171150 Method for producing a micromechanical structure and a micromechanical structure
11/21/2002	US20020171080 Thin films and production methods thereof
11/21/2002	US20020170875 Method for production of a semiconductor component and a semiconductor component produced by said method
11/21/2002	US20020170175 Method for producing micromechanical structures
11/20/2002	EP1258035A1 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
11/20/2002	EP1257496A2 Method for producing a micromechanical component, and a component produced according to said method
11/20/2002	CN1380245A Production method of millimetric wave voltage-controlled phase shifter for microelectronic machine
11/19/2002	US6483111 Thermal infrared-detector array and method of fabrication thereof
11/19/2002	US6481453 Microfluidic branch metering systems and methods
11/19/2002	US6481294 Sensor array for a capacitance measuring fingerprint sensor, and method for producing such a sensor array
11/14/2002	WO2002091439A1 Fabrication of a microelectromechanical system (mems) device
11/14/2002	WO2002091402A2 Bistable magnetic actuator
11/14/2002	WO2002090245A2 Methods of forming microstructure devices
11/14/2002	WO2002090243A2 Thick sandwich wafer for mems fabrication
11/14/2002	WO2002075794A3 A method for making a micromechanical device by using a sacrificial substrate
11/14/2002	WO2002010702A3 Micro-machined absolute pressure sensor
11/14/2002	US20020168825 Method for etching metal layer on a scale of nanometers
11/14/2002	US20020168810 Lateral nanostructures by vertical processing
11/14/2002	US20020168589 Controlling patterns; conformal layer before photoresist
11/14/2002	US20020166838 Sloped trench etching process
11/14/2002	US20020166582 Microfluidic branch metering systems and methods
11/13/2002	EP1256126A1 Etching solution and method
11/13/2002	EP1255690A2 Method for fabricating micro-structures with various surface properties in multilayer body by plasma etching
11/13/2002	EP1082740B1 Micro-mechanical elements
11/13/2002	CN1379731A Gas sensor and fabrication method thereof
11/13/2002	CN1379712A Deposited thin film void-column network materials
11/12/2002	US6479395 Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings
11/12/2002	US6479315 Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step
11/12/2002	US6479314 Method of producing vacuum container
11/12/2002	US6479311 Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning
11/12/2002	US6478974 Microfabricated filter and shell constructed with a permeable membrane
11/07/2002	US20020164879 Methods of forming microstructure devices
11/07/2002	US20020164876 Method for finishing polysilicon or amorphous substrate structures
11/07/2002	US20020164833 Etch mask patterning; photolithography
11/06/2002	EP1254717A1 Manufacture of integrated fluidic devices
11/06/2002	EP1254451A1 Magnetic pole fabrication process and device
11/06/2002	EP1254249A1 Deposited thin films and their use in detection, attachment, and bio-medical applications
11/05/2002	US6477303 MEMS optical backplane interface
11/05/2002	US6477225 X-ray mask and method for providing same
11/05/2002	US6476381 Nano-pattern lithographic fabrication using pulled micro-pipette and method thereof
11/05/2002	US6475570 Diluent assisted lubrication of micromechanical devices
11/05/2002	US6475369 Method for electrochemical fabrication
10/2002
10/31/2002	WO2002086586A1 Mirror device, optical switch, thin film elastic structure, and thin film elastic structure producing method
10/31/2002	WO2002085639A1 Edge transfer lithography
10/31/2002	US20020160611 Forming a membrane over the holes of a circuit to avoid the holes reducing the surface area available on the platform; ultrahigh density data storage applications; Micro-Electro-Mechanical Systems (MEMS)
10/31/2002	US20020160583 MEMS relay and mehtod of fabricating the same
10/31/2002	US20020160561 Manufacture of integrated fluidic devices
10/31/2002	US20020159918 Micro-fabricated stamp array for depositing biologic diagnostic testing samples on bio-bindable surface
10/31/2002	US20020159218 Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap
10/31/2002	US20020159170 Micromirror unit and method of making the same
10/31/2002	US20020158293 Micro structure for vertical displacement detection and fabricating method thereof
10/31/2002	US20020158040 Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
10/31/2002	US20020158039 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
10/30/2002	EP1253108A2 Method of fabricating suspended microstructures
10/30/2002	EP1252028A2 Temporary bridge for micro machined structures
10/30/2002	EP1251956A1 Method for covering a microfluidic assembly
10/29/2002	US6472290 Isolation in micromachined single crystal silicon using deep trench insulation
10/29/2002	US6472235 Apparatus and method for preparing backside-ground wafers for testing
10/29/2002	US6471903 Method for manufacturing an intracutaneous microneedle array
10/29/2002	US6471833 High etch rate method for plasma etching silicon nitride
10/29/2002	US6470747 Dynamical quantity sensor
10/24/2002	WO2002084748A2 Method for producing optically transparent regions in a silicon substrate
10/24/2002	WO2002084707A2 Method of etching shaped cavities and associated on-chip devices and micro-machined structures
10/24/2002	WO2002084335A2 Light transmissive substrate for an optical mems device
10/24/2002	WO2002044078A9 Method of manufacturing ultra-precise, self-assembled micro systems
10/24/2002	WO2001049362A8 Method of forming vertical, hollow needles within a semiconductor substrate
10/24/2002	US20020155737 Microneedle array module and method of fabricating the same
10/24/2002	US20020155711 Micromechanical part and method for its manufacture
10/24/2002	US20020155660 Method for producing a microelectronic structure
10/24/2002	US20020155635 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes
10/24/2002	US20020153625 Stamper-forming electrode material, stamper-forming thin film, and method of manufacturing optical disk
10/24/2002	US20020153621 Device and method for fluid aeration via gas forced through a liquid within an orifice of a pressure chamber
10/23/2002	EP1183642B1 Integrated circuit device which is secured against attacks resulting from controlled destruction of an additional layer
10/22/2002	US6469421 Piezoelectric device and production method thereof
10/22/2002	US6468916 Etching polymer layer

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