| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 03/13/2003 | WO2003020633A1 Micro device and its manufacturing method |
| 03/13/2003 | WO2002084335A3 Light transmissive substrate for an optical mems device |
| 03/13/2003 | WO2002057180A3 Soi/glass process for forming thin silicon micromachined structures |
| 03/13/2003 | WO2002043615A3 Microfabricated elastomeric valve and pump systems |
| 03/13/2003 | US20030049878 Micromechanical component and corresponding production method |
| 03/13/2003 | US20030047740 Semiconductor device and method of fabricating the same |
| 03/13/2003 | US20030047535 System and process for automated microcontact printing |
| 03/13/2003 | US20030047195 Placing the substrate in a pressure chamber; circulating fluid including dense phase carbon dioxide (CO2) through the chamber such that fluid contacts the substrate; cyclically modulating the phase of the CO2 during circulation |
| 03/12/2003 | EP1290711A2 Method for forming barrier structures on a substrate and the resulting article |
| 03/12/2003 | EP1289876A1 Microstructure and method for the production thereof |
| 03/12/2003 | CN1402033A Functional device, mfg. method thereof and drive circuit |
| 03/12/2003 | CN1401557A Method for mfg. microoptical electromechanical device |
| 03/12/2003 | CN1103115C Integrated microstructures of semiconductor material and method of fabricating same |
| 03/11/2003 | US6531417 Thermally driven micro-pump buried in a silicon substrate and method for fabricating the same |
| 03/11/2003 | US6531332 Surface micromachining using a thick release process |
| 03/11/2003 | US6531232 System for assembling substrates to bonding zones provided with cavities |
| 03/06/2003 | WO2003018464A2 Shaped microcomponents via reactive conversion of synthetic microtemplates |
| 03/06/2003 | US20030045040 Method for the production of a field-effect structure and field-effect structure |
| 03/06/2003 | US20030045019 Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials |
| 03/06/2003 | US20030044515 Shaped microcomponents via reactive conversion of synthetic microtemplates |
| 03/06/2003 | US20030042561 Micromechanical device and method of manufacture thereof |
| 03/05/2003 | EP1288696A1 Optical scanner and method of fabricating the same |
| 03/05/2003 | EP1287594A2 Laser system for processing target material |
| 03/04/2003 | US6528724 Microdevice and its production method |
| 03/04/2003 | US6528391 Controlled cleavage process and device for patterned films |
| 02/27/2003 | WO2003016965A1 Stress tuned blazed grating light valve |
| 02/27/2003 | WO2003016205A2 Mems and method of manufacturing mems |
| 02/27/2003 | WO2003016204A1 Actuator and switch |
| 02/27/2003 | WO2002052644A3 Thermally enhanced microcircuit package and method of forming same |
| 02/27/2003 | US20030039693 Three-dimensional biocatalyst |
| 02/27/2003 | US20030039089 Optical scanner and method of fabricating the same |
| 02/27/2003 | US20030039021 MEMS mirror |
| 02/27/2003 | US20030038558 Micro-actuator and method of manufacturing the actuator |
| 02/27/2003 | US20030038033 Process for fabricating high aspect ratio embossing tool and microstructures |
| 02/26/2003 | EP1285879A2 Method of aligning structures on opposite sides of a wafer |
| 02/26/2003 | EP1285298A2 Optical backplane interface using mems |
| 02/26/2003 | EP1284821A2 Microfluidic systems including three-dimensionally arrayed channel networks |
| 02/25/2003 | US6525352 Method to reduce release time of micromachined devices |
| 02/20/2003 | WO2003015145A1 Micromachining method using ionbeam |
| 02/20/2003 | WO2003014009A2 A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in mems |
| 02/20/2003 | WO2002081363A3 Method for producing a semiconductor component and a semiconductor component produced according to this method |
| 02/20/2003 | US20030035192 Micromirror unit fabrication method and micromirror unit made by the same |
| 02/20/2003 | US20030035189 Stress tuned blazed grating light valve |
| 02/20/2003 | US20030034542 Functional device, method of manufacturing therefor and driver circuit |
| 02/20/2003 | US20030033712 Method for assembling micro devices and related apparatus |
| 02/19/2003 | EP1283957A1 Micromachined fluidic device and method for making same |
| 02/19/2003 | EP1283909A1 High density protein arrays for screening of protein activity |
| 02/19/2003 | EP1283748A2 Patterning of surfaces utilizing microfluidic stamps including three-dimensionally arrayed channel networks |
| 02/18/2003 | US6522015 Micromachine stacked wirebonded package |
| 02/18/2003 | US6521513 Silicon wafer configuration and method for forming same |
| 02/18/2003 | US6521447 For simultaneous treatment of multiple individual samples (DNA) in independent thermal protocols; for use in polymerase chain reactions |
| 02/18/2003 | US6521324 Thermal transfer of microstructured layers |
| 02/18/2003 | US6520197 Continuous laminar fluid mixing in micro-electromechanical systems |
| 02/13/2003 | WO2003012491A2 Mems mirror |
| 02/13/2003 | WO2003011748A2 Micro-machined ultrasonic transducer (mut) substrate that limits the lateral propagation of acoustic energy |
| 02/13/2003 | WO2003011747A1 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors |
| 02/13/2003 | WO2002097054A3 Shaped microcomponents via reactive conversion of biologically-derived microtemplates |
| 02/13/2003 | WO2002079814A3 Method for fabricating a through-wafer optical mems device having an anti-reflective coating |
| 02/13/2003 | WO2002060584A3 Method for carrying out a biochemical protocol in continuous flow in a microreactor |
| 02/13/2003 | US20030032299 Method of aligning structures on opposite sides of a wafer |
| 02/13/2003 | US20030032293 High sensitive micro-cantilever sensor and fabricating method thereof |
| 02/13/2003 | US20030032215 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
| 02/13/2003 | US20030029724 Providing substrate comprising the set of microchannel structures; providing a lid-forming material; applying side of material having thermoglue against surface carrying microchannel structures; heating; cooling |
| 02/13/2003 | DE10151130C1 Production of micromechanical component having moving structure comprises preparing component with structure embedded in layer, partially exposing embedded structure by forming recess in layer, and further processing |
| 02/12/2003 | CN1397091A Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compound used therefor |
| 02/11/2003 | US6518194 Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation |
| 02/11/2003 | US6518192 Two etchant etch method |
| 02/11/2003 | US6517736 Thin film gasket process |
| 02/06/2003 | WO2002074686A3 A method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 02/06/2003 | WO2002050874A3 Mems device having an actuator with curved electrodes |
| 02/06/2003 | WO2002030486A9 Microfluidic device based sample injection system for analytical devices |
| 02/06/2003 | WO2001089787A9 Microfluidic systems including three-dimensionally arrayed channel networks |
| 02/06/2003 | US20030028106 Micro-machined ultrasonic transducer ( MUT) substrate that limits the lateral propagation of acoustic energy |
| 02/06/2003 | US20030027370 Process for fabricating a microelectromechanical optical component |
| 02/06/2003 | US20030026740 Microfluidic devices |
| 02/06/2003 | US20030024632 Process for forming metal micro-patterns on plastic substrate |
| 02/06/2003 | US20030024526 Device and method for creating aerosols for drug delivery |
| 02/05/2003 | EP1281664A1 Method of manufacture of an optical microelectromechanical device |
| 02/05/2003 | EP1281663A2 Method of manufacture of micromechanical structures |
| 02/05/2003 | EP1281108A2 Method and system for self-replicating manufacturing stations |
| 02/04/2003 | US6514786 Method of manufacturing acceleration sensor |
| 02/04/2003 | US6514670 Method for designing and manufacturing a micromechanical device |
| 01/31/2003 | CA2394108A1 Procedure for manufacturing a microelectromechanical optical component |
| 01/30/2003 | WO2003009318A2 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
| 01/30/2003 | WO2003009317A2 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 01/30/2003 | WO2003008139A2 Etching process for micromachining crystalline materials and devices fabricated thereby |
| 01/30/2003 | US20030022516 Method of manufacturing three-dimensional structure and method of manufacturing oscillator |
| 01/30/2003 | US20030022505 Micro-fluidic devices |
| 01/30/2003 | US20030021523 Hybrid MEMS fabrication method and new optical MEMS device |
| 01/30/2003 | US20030021004 Method for fabricating a through-wafer optical MEMS device having an anti-reflective coating |
| 01/30/2003 | US20030020130 Combined wet and dry etching process for micromachining of crystalline materials |
| 01/30/2003 | US20030020062 MEMS and method of manufacturing MEMS |
| 01/30/2003 | US20030019833 Microfabricated elastomeric valve and pump systems |
| 01/30/2003 | US20030019832 Staggered torsional electrostatic combdrive and method of forming same |
| 01/29/2003 | EP1279639A2 Micro-fluidic devices |
| 01/29/2003 | EP1279071A1 Multi depth substrate fabrication processes |
| 01/29/2003 | EP1278821A1 Biological identification system with integrated sensor chip |
| 01/29/2003 | EP1157407A4 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 01/29/2003 | EP0951617B1 Micropump with a built-in intermediate part |
| 01/29/2003 | EP0702796B1 Microelectromechanical lateral accelerometer |