| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 04/24/2003 | US20030077881 Method for manipulating MEMS devices, integrated on a wafer semiconductor and intended to be diced one from the other, and relevant support |
| 04/24/2003 | US20030077876 Method of anodically bonding a multilayer device with a free mass |
| 04/24/2003 | US20030077642 Apparatus for use in the detection of microorganisms, chemical compounds and the measurement of membrane transport |
| 04/24/2003 | US20030077020 Bi-stable micro-actuator and optical switch |
| 04/24/2003 | US20030076006 Electrostatic actuator |
| 04/24/2003 | US20030075794 Miniaturized device to protect the mechanical and electrical components of the Micro-Electromechanical System |
| 04/24/2003 | US20030075780 Anisotropic etching of a semiconductor device using tilted etching holes |
| 04/23/2003 | EP1304768A2 Spring structure |
| 04/23/2003 | EP1304309A2 Method for the manufacture of a micromechanical device with a moving structure |
| 04/23/2003 | EP0864094B1 Structure comprising an insulated part in a solid substrate and method for producing same |
| 04/23/2003 | EP0792518B1 Method for fabricating a self-limiting silicon based interconnect for testing bare semiconductor dice |
| 04/23/2003 | CN1413261A Deposited thin films and their use in detection, attachment and bio-medical application |
| 04/22/2003 | US6552839 Optical switch |
| 04/22/2003 | US6551851 Production of diaphragms over a cavity by grinding to reduce wafer thickness |
| 04/22/2003 | US6551849 Method for fabricating arrays of micro-needles |
| 04/17/2003 | WO2003032377A1 Method for joining a silicon plate to another plate |
| 04/17/2003 | WO2003031912A2 Tuning fork gyroscope |
| 04/17/2003 | WO2003031321A2 Hybrid mems fabrication method and new optical mems device |
| 04/17/2003 | WO2003031320A1 Thin film structural member, method of manufacturing the member, and switching element using the member |
| 04/17/2003 | WO2003031318A2 Method for producing cavities having an optically transparent wall |
| 04/17/2003 | WO2003031136A2 Methods for patterning using liquid embossing |
| 04/17/2003 | WO2003031096A2 Patterned structure reproduction using nonsticking mold |
| 04/17/2003 | WO2002047172A9 A high frequency interconnect system using micromachined plugs and sockets |
| 04/17/2003 | WO2002025697A3 Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto |
| 04/17/2003 | US20030073261 Self-aligned vertical combdrive actuator and method of fabrication |
| 04/17/2003 | US20030071330 Strength and durability of a spring structure is increased by providing a stress-balancing pad formed on the unlifted anchor portion of the spring metal finger |
| 04/17/2003 | US20030071016 Patterned structure reproduction using nonsticking mold |
| 04/17/2003 | US20030070569 Micro-stencil |
| 04/17/2003 | CA2462347A1 Patterned structure reproduction using nonsticking mold |
| 04/16/2003 | EP1302772A1 Acceleration switch |
| 04/16/2003 | EP1301432A1 Method of fabricating devices incorporating microelectromechanical systems using uv curable tapes |
| 04/15/2003 | US6548321 Method of anodically bonding a multilayer device with a free mass |
| 04/15/2003 | US6548185 Feathery copper fiber body, process for production thereof, and copper microcoil |
| 04/15/2003 | US6547975 Magnetic pole fabrication process and device |
| 04/10/2003 | WO2003030234A1 Method for forming a cavity structure on soi substrate and cavity structure formed on soi substrate |
| 04/10/2003 | WO2003029803A1 A microfluidic device and manufacture thereof |
| 04/10/2003 | WO2003028970A1 Method of producing resin molded product |
| 04/10/2003 | WO2003009318A8 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
| 04/10/2003 | US20030068838 Silicon pressure micro-sensing device and the fabrication process |
| 04/10/2003 | US20030068471 Method for forming barrier structures on a substrate and the resulting article |
| 04/10/2003 | US20030067049 Etching process for micromachining crystalline materials and devices fabricated thereby |
| 04/10/2003 | US20030066749 Exposure surface to flux; controlling concentration |
| 04/10/2003 | US20030066351 Tuning fork gyroscope |
| 04/09/2003 | EP1299905A1 Method for cutting a block of material and for forming a thin film |
| 04/08/2003 | US6545796 Article comprising a freestanding micro-tube and method therefor |
| 04/08/2003 | US6545299 Structures using chemo-mechanical polishing and chemically-selective endpoint detection |
| 04/08/2003 | US6544898 Method for improved die release of a semiconductor device from a wafer |
| 04/08/2003 | US6544811 Micromachined device having electrically isolated components and a method for making the same |
| 04/08/2003 | US6544810 Capacitively sensed micromachined component and method of manufacturing |
| 04/08/2003 | US6544655 Semiconductors reduced; silicon wafer having reduced out-of-plane curvature |
| 04/08/2003 | US6544090 Etching a foamed glass layer; forming cavity patterns separated by ribs |
| 04/03/2003 | WO2003028058A1 A micromechanical switch and method of manufacturing the same |
| 04/03/2003 | WO2003027643A1 Armor coated mems devices |
| 04/03/2003 | US20030064240 Feathery copper fiber body, process for production thereof, and copper microcoil |
| 04/03/2003 | US20030064149 Dissolving a coating material in carbon dioxide(CO2); depositing the dissolved material on at least one exposed surface of the device |
| 04/03/2003 | US20030063841 Optical switcher used for broadcast station |
| 04/03/2003 | US20030062334 Method for forming a micro-pattern on a substrate by using capillary force |
| 04/03/2003 | US20030062332 Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge |
| 04/03/2003 | US20030062193 Flexible structure with integrated sensor/actuator |
| 04/03/2003 | US20030062089 Microfluidic device and manufacture thereof |
| 04/03/2003 | US20030061687 Simultaneously introducing target solution at a known concentration into the chambers of a microfluidic device; solvent concentration is varied in each of the chambers to provide a large number of crystallization environments |
| 04/02/2003 | EP1296886A2 Micromechanical component and method for producing the same |
| 04/01/2003 | US6542282 Post metal etch clean process using soft mask |
| 04/01/2003 | US6541834 Silicon pressure micro-sensing device and the fabrication process |
| 04/01/2003 | US6541833 Micromechanical component with sealed membrane openings and method of fabricating a micromechanical component |
| 04/01/2003 | US6541386 Method for producing a structure with narrow pores |
| 03/27/2003 | WO2003025981A1 Monolithic three-dimensional structures |
| 03/27/2003 | WO2003024865A2 Method for producing micro-electromechanical components |
| 03/27/2003 | WO2002010684A9 Three-axes sensor and a method of making same |
| 03/27/2003 | US20030060051 Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques |
| 03/27/2003 | US20030059973 Micromechanical switch and method of manufacturing the same |
| 03/27/2003 | US20030059622 Etching grooves in silicon wafer for optical fibers |
| 03/27/2003 | US20030059344 A printing plate comprising a silica substrate and a plurality of pins, each pin was formed by reactive ion etching to remove selected areas of wafer without covered by the photoresist layer |
| 03/27/2003 | US20030057412 Armor coated MEMS devices |
| 03/26/2003 | EP1295635A1 Pin plate for use in array printing and method for making the pin plate |
| 03/26/2003 | EP1295319A2 Etch stop layer system for sige devices |
| 03/26/2003 | EP1295180A2 Process for producing microfluidic articles |
| 03/26/2003 | EP1294636A1 Method of fabricating devices incorporating microelectromechanical systems using at least one uv curable tape |
| 03/26/2003 | EP1294635A1 Improved thermal bend actuator |
| 03/26/2003 | CN1405847A Anti-adsorption method for drying crystal wafer using centrifugal force and apparatus thereof |
| 03/25/2003 | US6538328 Structure including metal film formed on entire surface of front face, film including external gold layer resistant to reactive agent and forming protective layer against etching of at least one zone by potassium hydroxide reactive agent |
| 03/24/2003 | CA2399197A1 Pin plate for use in array printing and method for making the pin plate |
| 03/20/2003 | WO2003023849A1 Microelectronic mechanical system and methods |
| 03/20/2003 | WO2003023840A2 Methods and apparatus for cleaning and/or treating a substrate using co¿2? |
| 03/20/2003 | WO2003023082A2 System and process for automated microcontact printing |
| 03/20/2003 | WO2003022732A2 Method for the production of a membrane |
| 03/20/2003 | WO2003022731A1 Flexible structure with integrated sensor/actuator |
| 03/20/2003 | WO2003022571A1 Process for the production of patterned ceramic green-sheets and multilayered ceramic devices |
| 03/20/2003 | WO2002072189A3 Method of manufacturing microneedle structures using soft lithography and photolithography |
| 03/20/2003 | WO2002060811A3 Mems singulation process utilizing protective coating |
| 03/20/2003 | US20030054588 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 03/20/2003 | US20030054578 Monolithic three-dimensional structures |
| 03/20/2003 | US20030052392 Support for microelectronic, microoptoelectronic or micromechanical devices |
| 03/19/2003 | EP1293259A2 Device and method for creating aerosols for drug delivery |
| 03/18/2003 | US6534876 Flip-chip micromachine package |
| 03/18/2003 | US6534838 Semiconductor device and method of fabricating the same |
| 03/18/2003 | US6534413 Method to remove metal and silicon oxide during gas-phase sacrificial oxide etch |
| 03/18/2003 | US6534249 Method of making low cost integrated out-of-plane micro-device structures |
| 03/18/2003 | US6533949 Microneedle structure and production method therefor |
| 03/13/2003 | WO2003020634A2 A method of fabrication of a sensor |