Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
06/2003
06/18/2003EP1319239A2 Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto
06/17/2003US6580138 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same
06/12/2003WO2003049156A2 System and method for micro electro mechanical etching
06/12/2003US20030108922 Electrochemical method for detecting water born pathogens
06/12/2003US20030107794 Micro mirror array
06/12/2003US20030107137 Micromechanical device contact terminals free of particle generation
06/12/2003US20030106799 Prevents overflow of floodwater from sewer out-fall line; may contain deodorizer
06/11/2003EP1317399A2 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
06/11/2003CN1423755A MEMS optical switch and method of manufacture
06/11/2003CN1423141A 光学开关 Optical Switch
06/10/2003US6576991 Device with integrated circuit protected against attacks made by the controlled destruction of an additional layer
06/10/2003US6576900 Methods of sampling specimens for microanalysis
06/10/2003US6576489 Methods of forming microstructure devices
06/10/2003US6576301 Micromachining tool over the first abrasive layer, irradiating a beam of electrothermal energy to form a deposition pattern thereon, depositing conductive material in the deposition pattern forming a horizontal portion of the contactor
06/05/2003WO2003045837A2 Stress control of semiconductor microstructures for thin film growth
06/05/2003WO2003045836A1 Differential stress reduction in thin films
06/05/2003WO2002064495A3 Enhanced sacrificial layer etching technique for microstructure release
06/05/2003WO2002051741A3 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method
06/05/2003US20030104765 Resin diamond blade and optical waveguide manufacturing method using the blade
06/05/2003US20030104651 Low temperature hermetic sealing method having passivation layer
06/05/2003US20030104649 Method for making CMOS-based monolithic micro electromechanical system (MEMS) integrated circuits and integrated circuits made thereby
06/05/2003US20030104648 Micromechanical component and method of manufacturing a micromechanical component
06/05/2003US20030102603 Molding of protective caps
06/05/2003US20030102552 In-situ cap and method of fabricating same for an integrated circuit device
06/05/2003US20030102284 Method for fabricating micro-structures with various surface properties in multi-layer body by plasma etching
06/04/2003EP1316993A1 Differential etching of semiconductors
06/04/2003EP1315993A2 Micromirror elements, package for the micromirror elements, and protection system therefor
06/04/2003EP1007873A4 Thermal microvalves
06/03/2003US6574026 Magnetically-packaged optical MEMs device
06/03/2003US6573156 Low defect method for die singulation and for structural support for handling thin film devices
06/03/2003US6572944 Structure for fabricating a special-purpose die using a polymerizable tape
06/03/2003US6572742 Apparatus for electrochemical fabrication using a conformable mask
05/2003
05/29/2003US20030099763 Shaped microcomponent via reactive conversion of biologically-derived microtemplates
05/29/2003US20030099028 Micro-mechanical device having anti-stiction layer and method of manufacturing the device
05/29/2003US20030098021 Device and method for creating aerosols for drug delivery
05/27/2003US6569702 Triple layer isolation for silicon microstructure and structures formed using the same
05/27/2003US6569701 Method for fabricating an isolated microelectromechanical system device
05/27/2003US6569607 Overcoating substrate with photoresists; exposure; development
05/22/2003WO2002051743A3 Thin silicon micromachined structures
05/22/2003US20030096310 Microfluidic free interface diffusion techniques
05/21/2003EP1312683A2 Micro-electrical detector on-chip
05/21/2003EP1312580A1 Process for sealing devices incorporating microstructures
05/21/2003EP1311863A1 Accelerometer with folded beams
05/21/2003EP1311310A2 Microneedle array module and method of fabricating the same
05/21/2003EP1039971B1 Device and method for creating aerosols for drug delivery
05/20/2003US6566617 Micromachine switch and its production method
05/20/2003US6566251 Method for selective deposition of materials in micromachined molds
05/20/2003US6565765 Method for manufacturing a sensor having a membrane
05/15/2003WO2003040801A1 Digital optical switch apparatus and process for manufacturing same
05/15/2003WO2002036485A8 Valve integrally associated with microfluidic liquid transport assembly
05/15/2003US20030092229 Use of protective caps as masks at a wafer scale
05/15/2003US20030089394 Plugging a device having an access passageway communicating the vacuum microcavity with ambient
05/15/2003US20030089182 Flexible structure with integrated sensor/actuator
05/14/2003CN1417615A Optical scanning head and its making process
05/14/2003CN1417574A Microelectronic detector on chip
05/13/2003US6563184 Single crystal tunneling sensor or switch with silicon beam structure and a method of making same
05/13/2003US6563079 Method for machining work by laser beam
05/13/2003US6562642 Micro-structures and methods for their manufacture
05/13/2003US6561208 Fluidic impedances in microfluidic system
05/08/2003WO2003038887A1 Contact planarization materials that generate no volatile byproducts or residue during curing
05/08/2003WO2003038449A1 Micro-sensor
05/08/2003WO2003037783A1 Method for manufacturing metal microstructure
05/08/2003WO2003037782A2 Micromechanical component and method for producing same
05/08/2003WO2002084707A3 Method of etching shaped cavities and associated on-chip devices and micro-machined structures
05/08/2003WO2002051742A3 Micromechanical component and corresponding production method
05/08/2003US20030087468 Membrane structures for micro-devices, micro-devices including same and methods for making same
05/08/2003US20030085719 Micro-electrical detector on-chip
05/08/2003US20030085109 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip
05/08/2003CA2462613A1 Contact planarization materials that generate no volatile byproducts or residue during curing
05/07/2003EP1307904A2 Methods for reducing the curvature in boron-doped silicon micromachined structures
05/07/2003CN1415479A Constructional body with through hole, its mfg. method and liquid discharge head
05/07/2003CN1415478A Constructional body with through hole, its mfg. method and liquid discharge head
05/06/2003US6558802 Silicon-on-silicon hybrid wafer assembly
05/06/2003US6558559 Method of manufacturing micromechanical surface structures by vapor-phase etching
05/06/2003US6557834 Device and method for fluid aeration via gas forced through a liquid within an orifice of a pressure chamber
05/06/2003US6557607 Apparatus for manufacturing micro-structure
05/06/2003US6557414 Inertia sensor and method of fabricating the same
05/02/2003EP1306869A1 Electrostatic actuator
05/02/2003EP1305640A2 A mem sensor and a method of making same
05/02/2003EP1305586A2 Micro-machined absolute pressure sensor
05/02/2003EP1305570A2 Three-axes sensor and a method of making same
05/02/2003EP1305257A2 A tunneling sensor or switch and a method of making same
05/02/2003EP1305256A2 A mem gyroscope and a method of making same
05/01/2003WO2003036737A2 Stiffened surface micromachined structures and process for fabricating the same
05/01/2003WO2003035932A1 Method for forming a micro-pattern on a substrate by using capillary force
05/01/2003WO2002059942A3 Actuator and micromirror for fast beam steering and method of fabricating the same
05/01/2003US20030082928 Method for fabricating an isolated microelectromechanical system device
05/01/2003US20030082485 Methods for patterning using liquid embossing
05/01/2003US20030081068 Structure provided with through hole, method of manufacture therefor, and liquid discharge head
05/01/2003US20030080478 Method of fabricating micro device and method of manufacturing mold for molding the same
05/01/2003US20030080359 Structure with through hole, production method thereof, and liquid discharge head
04/2003
04/29/2003US6556737 Silicon bulk-micromachined electromagnetic fiber-optics bypass microswitch
04/29/2003US6556418 Micromechanical component and process for its fabrication
04/29/2003US6555901 Semiconductor device including eutectic bonding portion and method for manufacturing the same
04/29/2003US6555441 Method of aligning structures on opposite sides of a wafer
04/29/2003US6555417 Method and device for protecting micro electromechanical system structures during dicing of a wafer
04/29/2003US6555404 Method of manufacturing a dual wafer tunneling gyroscope
04/29/2003US6555201 Method for fabricating a microelectromechanical bearing
04/29/2003US6554202 Creation of a stabilized capillary microjet which breaks up to form a monodisperse aerosol. Directed streams of ink for ink jet printers, or directed streams of solutions containing biological molecules for the preparation of microarrays.
04/24/2003WO2003034469A2 Method of fabricating a device having a desired non-planar surface or profile and device produced thereby
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