| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 07/31/2003 | WO2003063223A1 Method for making a gas permeable enclosure for micromachine devices |
| 07/31/2003 | WO2003062137A2 Method of making a thick microstructural oxide layer and device utilizing same |
| 07/31/2003 | WO2003062134A1 'low power silicon thermal sensors and microfluidic devices based on the use of porous silicon sealed air cavity technology or microchannel technology' |
| 07/31/2003 | WO2002046091A3 Method for producing a fluid component, fluid component and an analysis device |
| 07/31/2003 | US20030143773 Process for sealing devices incorporating microstructures |
| 07/31/2003 | US20030141562 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same |
| 07/31/2003 | US20030141561 Method for producing a micromechanical component, and a component produced according to said method |
| 07/31/2003 | US20030141276 Nano-size imprinting stamp using spacer technique |
| 07/31/2003 | US20030140627 Thermal bend actuator |
| 07/30/2003 | EP1330867A1 Actuating member and method for producing the same |
| 07/30/2003 | EP1330411A1 Thermoelastic actuator design |
| 07/30/2003 | EP1330274A2 Microneedle structure and production method therefor |
| 07/30/2003 | EP1311863A4 Accelerometer with folded beams |
| 07/30/2003 | CN1433379A Gear and method of making the same |
| 07/30/2003 | CN1433358A Thermal transfer of microstructured layers |
| 07/29/2003 | US6599840 Material removal method for forming a structure |
| 07/24/2003 | WO2003059804A2 Method for producing a film having microscopic and nanometric surface structures, and one such film |
| 07/24/2003 | US20030139056 Differential etching of semiconductors |
| 07/24/2003 | US20030139040 Nonstick layer for a micromechanical component |
| 07/24/2003 | US20030139018 Method of fabricating devices incorporating microelectromechanicl systems using uv curable tapes |
| 07/24/2003 | US20030139014 Method of fabricating a device having a desired non-planar surface or profile and device produced thereby |
| 07/24/2003 | US20030138986 Microelectronic mechanical system and methods |
| 07/24/2003 | US20030138588 Methods for reducing the curvature in boron-doped silicon micromachined structures |
| 07/24/2003 | US20030138555 Thermal transfer of microstructured layers |
| 07/24/2003 | US20030138191 Optical switch with mobile components and method for making same |
| 07/24/2003 | US20030136654 Acceleration switch |
| 07/24/2003 | US20030136509 Adhesion methods for manufacturing multilaminate devices |
| 07/23/2003 | CN1431680A Method for forming structure of fine sizes |
| 07/22/2003 | US6597065 Thermally enhanced semiconductor chip having integrated bonds over active circuits |
| 07/22/2003 | US6596648 Material removal method for forming a structure |
| 07/22/2003 | US6596642 Material removal method for forming a structure |
| 07/22/2003 | US6595787 Low cost integrated out-of-plane micro-device structures and method of making |
| 07/22/2003 | US6595232 Placing mixture of organic binder and precursor between mold and substrate, heating under vacuum to thermoform mixture onto substrate in shape of mold, presintering, assembling with second substrate, heating to form one-piece recessed structure |
| 07/22/2003 | US6595202 Device and method for creating aerosols for drug delivery |
| 07/17/2003 | WO2003057619A2 Apparatus and method for nanoscale and microscale mechanical machining and processing |
| 07/17/2003 | WO2003057618A2 Method for producing a protective covering for a component |
| 07/17/2003 | WO2002062698A3 Method for producing surface micromechanical structures, and sensor |
| 07/17/2003 | US20030134445 Systems and methods for thermal isolation of a silicon structure |
| 07/17/2003 | US20030132444 Semiconductor device and method of fabricating the same |
| 07/17/2003 | US20030132199 Wafer protection device |
| 07/16/2003 | EP1326712A2 Microvolume immunoabsorbant assays with amplified electrochemical detection |
| 07/16/2003 | EP1226090A4 Gas sensor and fabrication method thereof |
| 07/16/2003 | CN1430703A Micromachined fluidic device and method for making same |
| 07/16/2003 | CN1430577A Improved thermal bend actuator |
| 07/16/2003 | CN1429762A Cantilever with step-type structure and its manufacture method |
| 07/15/2003 | US6593163 Double-sided trench fill for electrical isolation of microelectromechanical system structures |
| 07/15/2003 | US6593065 Method of fabricating nanometer-scale flowchannels and trenches with self-aligned electrodes and the structures formed by the same |
| 07/10/2003 | WO2003056657A1 A component for electromagnetic waves and a method for manufacturing the same |
| 07/10/2003 | WO2003056611A2 Resistless lithography method for producing fine structures |
| 07/10/2003 | WO2003055791A2 Improved etch process for etching microstructures |
| 07/10/2003 | WO2003055789A1 Mems element manufacturing method |
| 07/10/2003 | WO2003055788A1 Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display |
| 07/10/2003 | WO2003020634A3 A method of fabrication of a sensor |
| 07/10/2003 | US20030129845 Methods for reducing the curvature in boron-doped silicon micromachined structures |
| 07/10/2003 | US20030129843 Planarizing recess etch |
| 07/10/2003 | US20030129542 Contact planarization materials that generate no volatile byproducts or residue during curing |
| 07/10/2003 | US20030129374 Self-aligned micro hinges |
| 07/10/2003 | US20030128803 X-ray mask and method for providing same |
| 07/10/2003 | US20030127698 Cantilever having step-up structure and method for manufacturing the same |
| 07/10/2003 | US20030127429 Method for forming fine grooves and stamper and structure with fine grooves |
| 07/09/2003 | EP1325886A1 Method of reinforcing a mechanical microstructure |
| 07/09/2003 | EP1325885A2 Self-aligned micro hinges |
| 07/09/2003 | EP1325884A2 MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same |
| 07/09/2003 | CN1428818A Method for making ceramic base plate form flat surface by using porous material |
| 07/08/2003 | US6591027 Bi-stable micro-actuator and optical switch |
| 07/08/2003 | US6590267 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 07/08/2003 | US6589579 Production of particles for introduction into food using a stable microjet and a monodisperse aerosol formed when the microjet dissociates; functional foods |
| 07/03/2003 | WO2003054938A1 Method of fabricating micro-electromechanical switches on cmos compatible substrates |
| 07/03/2003 | WO2003054925A2 Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein |
| 07/03/2003 | WO2003053844A1 Method and device for producing a component with a mobile structure |
| 07/03/2003 | WO2003031096A3 Patterned structure reproduction using nonsticking mold |
| 07/03/2003 | US20030124786 Method of manufacturing acceleration sensor |
| 07/03/2003 | US20030124761 Method for depositing polycrystalline sige suitable for micromachining and devices obtained thereof |
| 07/03/2003 | US20030124758 Insulating micro-structure and method of manufacturing same |
| 07/03/2003 | US20030124462 Removing sacrificial layers during the process of fabricating micro-mechanical devices with a solution of super- critical carbon dioxide. A mixture of super-critical carbon dioxide with other solvents, co-solvents and surfactants is used for |
| 07/03/2003 | US20030122227 Accelerometer protected by caps applied at the wafer scale |
| 07/03/2003 | US20030122205 MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same |
| 07/02/2003 | EP1323671A1 Process for the fabrication of at least one nanotube between two electrically conductive elements and device for carrying out this process |
| 07/02/2003 | EP1322545A2 Method of trimming micro-machined electromechanical sensors (mems) devices |
| 07/02/2003 | EP1015669A4 Article, method, and apparatus for electrochemical fabrication |
| 07/02/2003 | CN1427749A Deposited thin film and their use in separation and sarcrificial layer applications |
| 07/01/2003 | US6587613 Hybrid MEMS fabrication method and new optical MEMS device |
| 07/01/2003 | US6586315 Whole wafer MEMS release process |
| 06/26/2003 | WO2003051765A2 Method of dividing a substrate into a plurality of individual chip parts |
| 06/26/2003 | US20030119278 Substrates bonded with oxide affinity agent and bonding method |
| 06/26/2003 | US20030119275 Process for manufacturing a two-axis mirror |
| 06/26/2003 | US20030118278 Micromirror actuator and manufacturing method thereof |
| 06/26/2003 | US20030118277 Digital optical switch apparatus and process for manufacturing same |
| 06/26/2003 | US20030116815 Separating silicon wafer into narrow gap; controlling width; etching |
| 06/26/2003 | US20030116813 Multilayer; substrate, doped layer, covering; monolithic integrated circuit |
| 06/26/2003 | US20030116532 Method for trench etching |
| 06/26/2003 | US20030115960 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 06/25/2003 | EP1198344B1 Method for producing microcomponents |
| 06/24/2003 | US6583920 Method of manufacturing a microstructure |
| 06/24/2003 | US6582999 Controlled cleavage process using pressurized fluid |
| 06/24/2003 | US6582985 SOI/glass process for forming thin silicon micromachined structures |
| 06/19/2003 | WO2003050852A2 Complex microdevices and appparatus and methods for fabricating such devices |
| 06/19/2003 | WO2003050035A2 Adhesiveless microfluidic device fabrication |
| 06/19/2003 | US20030113983 Method and device for controlled cleaving process |
| 06/19/2003 | US20030111603 Infrared light detection array and method of producing the same |