Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
09/2003
09/18/2003US20030175530 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same
09/18/2003US20030174383 Making arrays of tiltable micromirrors, e.g., small mirrors, which can reflect light by making a flip-chip arrangement by etching into a first substrate to form mesas which act as the spacers inbetween which a second substrate is bonded moveable
09/18/2003US20030173330 Micromechanical component and method for producing the same
09/18/2003US20030173206 Process for making at least one nanotube between two electrically conducting elements and device for implementing such a process
09/17/2003EP1344746A2 MEMS device and fabrication method thereof
09/17/2003EP1344745A2 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same
09/17/2003EP1343973A1 Apparatus and methods for conducting assays and high throughput screening
09/17/2003CN1442710A 可变光学衰减器 Variable Optical Attenuator
09/17/2003CN1442511A Convex angle compensation method of crystal orientation on silicon by potassium hydroxide solution
09/16/2003US6621392 Micro electromechanical switch having self-aligned spacers
09/16/2003US6621174 Apparatus for fabricating encapsulated micro-channels in a substrate
09/16/2003US6621104 Integrated optoelectronic thin-film sensor and method of producing same
09/11/2003US20030170880 Microchip device for chemotaxis observation
09/11/2003US20030170053 Device for transferring a pattern to an object
09/11/2003US20030169996 Variable optical attenuator
09/11/2003US20030168659 Stress control of semiconductor microstructures for thin film growth
09/10/2003EP1341655A2 Method of making a product with a micro or nano sized structure and product
09/10/2003CN1441276A Method for producing silicon part and silicon part, and optical part using said silicon part
09/10/2003CN1440924A Microelectronic mechanism system structure and its producing method
09/09/2003US6618186 Micro-electromechanical system
09/09/2003US6617657 Process for manufacture of micro electromechanical devices having high electrical isolation
09/09/2003US6617191 Method for anodizing silicon substrates for surface type acceleration sensors
09/09/2003US6617098 Includes the application of a plurality of layers of masking material that are patterned to provide a plurality of etching masks; particularly making micro-machined movable structures.
09/09/2003US6616853 Method for reducing leaching in metal-coated MEMS
09/09/2003US6615496 Micromachined cutting blade formed from {211}-oriented silicon
09/04/2003WO2003073164A2 Novel planarization method for multi-layer lithography processing
09/04/2003WO2003022732A3 Method for the production of a membrane
09/04/2003WO2002063288A8 Microfluidic devices
09/04/2003US20030166342 Integrated method for release and passivation of MEMS structures
09/04/2003US20030166310 Method of reinforcing a mechanical microstructure
09/04/2003US20030164575 Applying to molding surface continuous lines of a flowable, curable resin; contacting resin with a substrate; curing resin; and transferring resin to substrate
09/03/2003EP1340258A2 Thermally enhanced microcircuit package and method of forming same
09/03/2003EP1246730B1 Thermal transfer of microstructured layers
09/03/2003CN1440464A High density protein arrays for screening of protein activity
09/03/2003CN1440454A Biological identification system with integrated sensor chip
09/03/2003CN1439598A Dry deeply etching silicone wafer manufacture
09/02/2003US6613560 Polymerase chain reaction (PCR); device does not contain silicon and is thermally, chemically and mechanically stable; reduces electroosmotic flow and unwanted adsorption of solute
09/02/2003US6613243 Method of making a 3-D structure using an erodable mask formed from a film having a composition that varies in its direction of thickness
08/2003
08/28/2003WO2003070846A2 Drying resist with a solvent bath and supercritical co2
08/28/2003WO2003070625A2 Thin film encapsulation of mems devices
08/28/2003WO2003005421A3 Fabricating structures using chemo-mechanical polishing and chemically-selective endpoint detection
08/28/2003US20030162402 Method of through-etching substrate
08/28/2003US20030162318 Silicon device manufacturing method, silicon device, and optical component
08/28/2003US20030160023 Method of manufacturing a fluid injection device
08/28/2003US20030159509 Gyroscope and fabrication method thereof
08/27/2003EP1337458A1 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof
08/27/2003EP0700580B1 Method for fabricating suspension members for micromachined sensors
08/27/2003CN1438825A Method for making photoelectric device and apparatus thereof, photoelectric apparatus, electronic instrument
08/26/2003US6610605 Method and apparatus for fabricating encapsulated micro-channels in a substrate
08/26/2003US6610582 Field-assisted fusion bonding
08/26/2003US6610556 Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit
08/21/2003WO2003069413A1 A method for fabricating a structure for a microelectromechanical systems (mems) device
08/21/2003WO2003068672A2 Fabrication of ultra-shallow channels for microfluidic devices and systems
08/21/2003WO2002068319A3 Bi-stable micro-actuator and optical switch
08/21/2003WO2002048023A3 Method for improving the polysilicon structures of a mems device by masking to inhibit anodic etching of the mems polysilicon structures
08/21/2003US20030157809 Method for TMAH etching of CMOS integrated circuits
08/21/2003US20030155995 Micro relay of which movable contact remains separated from ground contact in non-operating state
08/21/2003US20030155643 Thin film encapsulation of MEMS devices
08/21/2003US20030155632 Multilayer; silver, silica, silicon and silicon oxynitride layers
08/20/2003EP1336097A2 Microfluidic device based sample injection system for analytical devices
08/20/2003EP1335885A1 Method for anodic bonding at low temperatures
08/20/2003CN1437714A Device for transferring a pattern to an object
08/20/2003CN1436717A Method for producing carbon nano-tube device and carbon nano tube device
08/19/2003US6607934 Micro-electromechanical process for fabrication of integrated multi-frequency communication passive components
08/14/2003WO2003066515A2 Microengineered electrical connectors
08/14/2003WO2003018464A3 Shaped microcomponents via reactive conversion of synthetic microtemplates
08/14/2003WO2002064496A3 Method for forming microelectronic spring structures on a substrate
08/14/2003WO2002011189A3 A tunneling sensor or switch and a method of making same
08/14/2003US20030153115 Micromachined device having electrically isolated components and a method for making the same
08/14/2003US20030152872 Stacking layers on substrate; patterning; forming apertures;depositing photosensitive materials; radiation
08/14/2003US20030151104 Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same
08/14/2003US20030151020 Manufacturing substrates with difficult to polish features using reverse mask etching and chemical mechanical planarization techniques.
08/13/2003EP1334347A1 Microfabricated crossflow devices and methods
08/13/2003EP1334060A1 Micromechanical component and corresponding production method
08/13/2003EP1179139B1 Micromechanic pump
08/13/2003EP0981710A4 Low-power thermopneumatic microvalve
08/13/2003CN1436150A Microstructure and method for production thereof
08/13/2003CN1435728A Nanosize making die using spacer technique
08/07/2003WO2003065434A1 Method of treating surface, semiconductor device, process for producing semiconductor device, and apparatus for treatment
08/07/2003WO2003065122A1 Method of joining a workpiece and a microstructure by light exposure
08/07/2003WO2003065104A1 Aperture edge in a digital micromirror housing
08/07/2003WO2003065052A2 Method of manufacturing an accelerometer
08/07/2003WO2003065050A2 Method of manufacturing an accelerometer
08/07/2003WO2003064581A1 Methods and compositions for chemically treating a substrate using foam technology
08/07/2003US20030148553 Methods for dicing wafer stacks to provide access to interior structures
08/07/2003US20030148550 Method of fabricating micro-electromechanical switches on cmos compatible substrates
08/07/2003US20030148548 Micro-structures and methods for their manufacture
08/07/2003US20030148222 Three dimensional microstructures and method of making
08/06/2003EP1333508A2 Method of manufacturing a carbon nanotube device and carbon nanotube device
08/06/2003EP1333485A2 Methods for dicing wafer stacks to provide access to interior structures
08/06/2003EP1333324A2 Nano-size imprinting stamp
08/06/2003EP1333008A2 Systems and methods for thermal isolation of a silicon structure
08/06/2003EP1332106A2 Method for producing glass-silicon-glass sandwich structures
08/06/2003CN1434488A Chip protector
08/05/2003US6603591 Microminiature movable device
08/05/2003US6602791 Manufacture of integrated fluidic devices
08/05/2003US6602433 Gas delivery system
08/05/2003US6602427 Micromachined optical mechanical modulator based transmitter/receiver module
08/05/2003US6602397 Method for producing a filter
08/05/2003US6601452 Semiconductor pressure sensor having rounded corner portion of diaphragm
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