| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 01/21/2015 | EP2825310A2 Systems and methods for containing biological samples |
| 01/21/2015 | CN204111306U 一种微纳结构封闭管道 A micro nano structure in closed conduits |
| 01/21/2015 | CN104303103A 用于薄膜嵌段共聚物的取向控制的酸酐共聚物的面涂层 For controlling alignment of the top coat film anhydride copolymer block copolymer |
| 01/21/2015 | CN104302400A 用于容纳生物样品的系统和方法 System and method for accommodating a biological sample |
| 01/21/2015 | CN104302349A 制造聚合物微针的新方法 A new method for producing polymer microneedles |
| 01/21/2015 | CN104301839A Mems器件、接口电路及其制作方法 Mems devices, interface circuit and its production method |
| 01/21/2015 | CN104297843A 微机电可调氮化物谐振光栅制备方法 Nitride resonant MEMS tunable grating preparation |
| 01/21/2015 | CN104297522A 一种mems悬臂梁式加速度计及其制造工艺 One kind of mems cantilever accelerometer and its manufacturing process |
| 01/21/2015 | CN104297520A 一种单片嵌入结构集成硅加速度和压力复合传感器 Embed a monolithic structure integrated silicon accelerometer and pressure sensor complex |
| 01/21/2015 | CN104297224A 一种sers基底材料及其热点激发方法与表征 Methods and Evaluation of an sers excite the base material and its hot |
| 01/21/2015 | CN104296799A 微型传感器本体及其制造方法、微型传感器 Miniature sensor body and its manufacturing method, micro-sensors |
| 01/21/2015 | CN104296784A 一种mems检测装置及其制造工艺 Mems one kind of detecting device and the manufacturing process |
| 01/21/2015 | CN104291266A 通过形成碳化硅层来减小微机电系统的粘滞 By forming a silicon carbide layer to reduce the viscosity of the micro-electromechanical systems |
| 01/21/2015 | CN104291265A 在薄聚合物膜上连续制造数字微米尺度图案 In continuous manufacturing thin polymer film digital micrometer scale pattern |
| 01/21/2015 | CN104291264A 一种基于纳米压电纤维的柔性能量捕获器件及其制备方法 A capture device and fabrication method based on flexible energy piezoelectric nano fibers |
| 01/21/2015 | CN104291263A 一种金刚石桥膜结构微型红外光源芯片及制备方法 A line of diamond film structure miniature infrared light bridge chip and preparation method |
| 01/21/2015 | CN104291262A 具有嵌入式声道的电容性感测结构 Capacitive sensing structure with embedded channels |
| 01/21/2015 | CN104290317A 在薄聚合物膜上连续制造数字微米尺度图案 In continuous manufacturing thin polymer film digital micrometer scale pattern |
| 01/21/2015 | CN103293204B 由激活循环控制电化学性质的氧化铱微电极的制备方法 Preparation by the active circulation control of the electrochemical properties of iridium oxide microelectrodes |
| 01/21/2015 | CN102944544B 一种循环使用表面增强拉曼散射基底及其制备方法和应用 A circular base using surface-enhanced Raman scattering and its preparation method and application |
| 01/21/2015 | CN102928596B 血清肿瘤标志物检测的巨磁阻抗效应生物传感器 Serum tumor markers of GMI biosensors |
| 01/21/2015 | CN102786023B 一种无盖板的碳纳米管器件结构及其制作方法 Cover a non-carbon nanotube device structure and fabrication method thereof |
| 01/21/2015 | CN102730630B 一种制造ZnO纳米结构和纳米紫外传感器的方法 A method of producing a ZnO nanostructure and nano ultraviolet sensor |
| 01/21/2015 | CN102556932B 一种电极点间距可调整的微电极阵列 An electrode spacing adjustable microelectrode array |
| 01/21/2015 | CN102367165B 一种基于soi的mems器件电极互连方法 Mems device electrode interconnection method based soi |
| 01/20/2015 | US8937380 Die edge protection for pressure sensor packages |
| 01/20/2015 | US8936960 Method for fabricating an integrated device |
| 01/20/2015 | US8936959 Integrated rf MEMS, control systems and methods |
| 01/19/2015 | CA2856917A1 Ultrasonic sensor microarray and method of manufacturing same |
| 01/15/2015 | WO2015005592A1 Apparatus for manufacturing micro-channel and method for manufacturing micro-channel using same |
| 01/15/2015 | WO2015005193A1 Substrate for diaphragm-type resonant mems devices, diaphragm-type resonant mems device and method for manufacturing same |
| 01/15/2015 | WO2015003656A1 Glass substrate etching method |
| 01/15/2015 | WO2015003264A1 Mems device and method of manufacturing |
| 01/15/2015 | US20150014799 Electronic device, method of manufacturing electronic device, physical quantity sensor, electronic apparatus, moving object |
| 01/15/2015 | US20150014798 Assembly for a mems environmental sensor device having improved resistance, and corresponding manufacturing process |
| 01/15/2015 | US20150014797 Mems device having a microphone structure, and method for the production thereof |
| 01/15/2015 | US20150014794 Integrated Circuit Provided with a Device for Detecting its Spatial Orientation and/or a Modification of this Orientation |
| 01/15/2015 | DE102014212340A1 MEMS-Mikrofon mit Niederdruckbereich zwischen Membran und Gegenelektrode MEMS microphone with low-pressure region between the membrane and the counter electrode |
| 01/15/2015 | DE102013213717A1 MEMS-Bauelement mit einer Mikrofonstruktur und Verfahren zu dessen Herstellung MEMS device having a microphone structure and process for its preparation |
| 01/15/2015 | DE102013212202A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 01/14/2015 | EP2824066A1 Reducing the effect of glass charging in mems devices |
| 01/14/2015 | EP2823351A1 A mems iris diaphragm for an optical system and method for adjusting a size of an aperture thereof |
| 01/14/2015 | EP2823276A2 Micromechanical measuring element, and method for producing a micromechanical measuring element |
| 01/14/2015 | EP2823273A1 Method for producing a pressure sensor and corresponding sensor |
| 01/14/2015 | EP2822892A2 Atomic layer deposition strengthening members and method of manufacture |
| 01/14/2015 | CN104280696A 三轴传感器及其制备工艺 Triaxial sensor and its preparation process |
| 01/14/2015 | CN104280569A 抑制横向干扰的三维集成微机械加速度传感器及制作方法 Lateral inhibition interference dimensional integrated micromachined accelerometers and production methods |
| 01/14/2015 | CN104280085A 一种气体流量传感器及其制作方法 A gas flow sensor and manufacturing method thereof |
| 01/14/2015 | CN104276764A 玻璃衬底的工艺方法 Process for the glass substrate |
| 01/14/2015 | CN104276540A 微机械部件及微机械部件的制造方法 Method of manufacturing micro-mechanical components and micro-mechanical components |
| 01/14/2015 | CN104276539A 检测芯片及其使用方法 Detection chip and method of use |
| 01/14/2015 | CN102633229B 一种利用两次离子束刻蚀技术制备成像面为平面的超透镜制备方法 Preparation of a flat superlens using two ion beam etching technique for the imaging surface preparation |
| 01/14/2015 | CN102627255B 基于微纳集成加工技术的可植入三维减阻微流道及制备方法 Implantable drag dimensional microfluidic channel and the preparation method based on integrated micro-nano processing technology |
| 01/14/2015 | CN102602876B Mems器件及其制造方法 Mems device and manufacturing method thereof |
| 01/14/2015 | CN102538834B 同平面传感器与制作方法 Flat sensor and method of making same |
| 01/14/2015 | CN102476786B 加速度和压力传感器单硅片集成芯片及制作方法 Acceleration and pressure sensors integrated single silicon chip and production methods |
| 01/14/2015 | CN102336386B 一种三维实体针尖柔性微电极阵列及其制作方法 A three-dimensional solid tip flexible microelectrode array and its manufacturing method |
| 01/13/2015 | US8934648 Support apparatus for microphone diaphragm |
| 01/13/2015 | US8932893 Method of fabricating MEMS device having release etch stop layer |
| 01/13/2015 | US8932874 Control over ammonium fluoride levels in oxide etchant |
| 01/13/2015 | US8932473 Method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method |
| 01/13/2015 | US8931347 Fluid pressure sensor and measurement probe |
| 01/13/2015 | CA2730378C Method for packaging semiconductors at a wafer level |
| 01/08/2015 | US20150011035 Method for fabricating an integrated device |
| 01/08/2015 | US20150008788 Low temperature ceramic microelectromechanical structures |
| 01/08/2015 | US20150008543 Mems capacitive pressure sensors and fabrication method thereof |
| 01/08/2015 | US20150008542 Micromechanical component and manufacturing method for a micromechanical component |
| 01/08/2015 | US20150008541 Mems pressure sensors and fabrication method thereof |
| 01/08/2015 | US20150008540 Mems-cmos integrated devices, and methods of integration at wafer level |
| 01/08/2015 | US20150007939 Devices and Methods for Solder Flow Control in Three-Dimensional Microstructures |
| 01/08/2015 | DE102013213065A1 Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element and manufacturing method for a micromechanical component |
| 01/08/2015 | DE102013212102A1 Mikromechanisches Bauteil, Mikrospiegelvorrichtung und Herstellungsverfahren für ein mikromechanisches Bauteil Micromechanical element, micro-mirror device and manufacturing method for a micromechanical component |
| 01/08/2015 | DE102013212095A1 Mikro-elektromechanischer Reflektor und Verfahren zum Herstellen eines mikro-elektromechanischen Reflektors Micro-electro-mechanical reflector and method of manufacturing a micro-electro-mechanical reflector |
| 01/08/2015 | DE102013211872A1 Mikro-elektromechanischer Reflektor und Verfahren zum Herstellen eines mikro-elektromechanischen Reflektors Micro-electro-mechanical reflector and method of manufacturing a micro-electro-mechanical reflector |
| 01/08/2015 | DE102012222426B4 Herstellungsverfahren für ein mikromechanisches Bauelement Manufacturing method for a micromechanical component |
| 01/08/2015 | DE102010029072B4 Mikroelektromechanisches Translationsschwingersystem Micro-electromechanical transducer translation system |
| 01/08/2015 | DE102005004878B4 Mikromechanischer kapazitiver Drucksensor und entsprechendes Herstellungsverfahren The micromechanical capacitive pressure sensor and method of manufacture |
| 01/07/2015 | CN204085748U 压阻式压力传感器 Piezoresistive pressure sensor |
| 01/07/2015 | CN204085595U 一种气体流量传感器 A gas flow sensor |
| 01/07/2015 | CN104266781A 压阻式压力传感器及其制造方法 Piezoresistive pressure sensor and its manufacturing method |
| 01/07/2015 | CN104261346A 一种微机械结构牺牲层及微机械结构制作方法 A micro mechanical structure of the sacrificial layer and method of making micro-mechanical structure |
| 01/07/2015 | CN104261345A 干法刻蚀微电机系统牺牲层的方法 Methods sacrificial layer dry etching micro-electromechanical systems |
| 01/07/2015 | CN104261344A 聚酰亚胺涂布及烘烤方法 Polyimide coating and baking methods |
| 01/07/2015 | CN104261343A 一种基于静电直写的低成本微纳结构刻蚀方法 An electrostatic cost write-etching method based on micro and nano structures |
| 01/07/2015 | CN104261342A 电场及梯度结构协同驱动水下油定向运动器件及制备方法和应用 Synergy Drive electric field gradient structure and the directional movement of underwater oil and preparation method and application devices |
| 01/07/2015 | CN102826501B 石英纤维表面微结构及其制备方法 Quartz fiber surface microstructure and its preparation method |
| 01/07/2015 | CN102642805B 一种制备碳化硅微纳米针尖的方法 A method of preparing silicon carbide micro-nano tip |
| 01/07/2015 | CN102583223B 基于CuS准一维纳米结构的纳米太阳能电池的制备方法 Preparation of quasi-one-dimensional nanostructures based CuS nano solar cells |
| 01/07/2015 | CN102556952B 金属杯-柱复合纳米结构阵列及其制备方法 Metal cup - column composite nanostructure arrays and its preparation method |
| 01/06/2015 | US8928099 Micromechanical component and method for the manufacture of same |
| 01/06/2015 | US8928098 Semiconductor package and fabrication method thereof |
| 01/06/2015 | US8927464 Assembly and deposition of materials using a superhydrophobic surface structure |
| 01/01/2015 | US20150004739 Method for embedding controlled-cavity mems package in integration board |
| 01/01/2015 | US20150004732 Method of fabricating integrated structure for mems device and semiconductor device |
| 01/01/2015 | US20150001653 MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it |
| 01/01/2015 | US20150001651 Mems device having a suspended diaphragm and manufacturing process thereof |
| 01/01/2015 | US20150001647 MEMS Microphone with Low Pressure Region Between Diaphragm and Counter Electrode |
| 01/01/2015 | US20150001645 Mems device incorporating a fluidic path, and manufacturing process thereof |
| 01/01/2015 | US20150001632 Mems device and fabrication method |
| 01/01/2015 | US20150000402 Oscillation frequency measuring system and method for a mems sensor |