Patents
Sitemap › B81 - Micro-structural technology › B81C - Processes or apparatus specially adapted for the manufacture or treatment of micro-structural devices or systems › B81C 1 - Manufacture or treatment of devices or systems in or on a substrate
Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526)
12/2003
12/11/2003CA2487715A1 Fluorochemical treatment for silicon articles
12/10/2003EP1369380A2 Microfluidic component and analysis device
12/09/2003US6661070 Micromechanical and microoptomechanical structures with single crystal silicon exposure step
12/09/2003US6661069 Micro-electromechanical varactor with enhanced tuning range
12/09/2003US6660192 Molded waveguides
12/04/2003WO2003100969A1 Method of producing a microsystem structure with lateral gaps and corresponding microsystem structure
12/04/2003WO2003100859A2 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies and corresponding component
12/04/2003WO2003100846A2 Glass material for use at high frequencies
12/04/2003WO2003099707A2 Method of altering the properties of a thin film and substrate implementing said method
12/04/2003WO2003083912A3 Field-assisted fusion bonding
12/04/2003WO2002084748A3 Method for producing optically transparent regions in a silicon substrate
12/04/2003US20030224565 Method of making a thick microstructural oxide layer and device utilizing same
12/04/2003US20030221968 Electrochemical fabrication method and apparatus for producing three-dimensional structures having improved surface finish
12/04/2003CA2485185A1 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies
12/04/2003CA2484794A1 Glass material for use at high frequencies
12/03/2003EP1366927A1 Thermal transfer of microstructured layers
12/03/2003EP1366518A1 In-situ cap and method of fabricating same for an integrated circuit device
12/03/2003CN1459653A Fine component, its mfg. method and product using same
12/02/2003US6656368 Nonstick layer for a micromechanical component
12/02/2003US6655964 Low cost integrated out-of-plane micro-device structures and method of making
12/02/2003US6655923 Micromechanic pump
12/02/2003US6655011 Method for fabricating a switch structure
11/2003
11/27/2003WO2003097238A1 Device for the actively-controlled and localised deposition of at least one biological solution
11/27/2003WO2003070846A3 Drying resist with a solvent bath and supercritical co2
11/27/2003WO2003064581A8 Methods and compositions for chemically treating a substrate using foam technology
11/27/2003WO2003024865A3 Method for producing micro-electromechanical components
11/27/2003WO2003008139A3 Etching process for micromachining crystalline materials and devices fabricated thereby
11/27/2003WO2003005420A3 Method and apparatus for fabricating structures using chemically selective endpoint detection
11/27/2003WO2002065187A3 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method
11/27/2003WO2002065186A3 Pivoting optical micromirror, array for such micromirrors and method for making same
11/27/2003US20030219992 Replication and transfer of microstructures and nanostructures
11/26/2003EP1364398A1 Method for microfabricating structures using silicon-on-insulator material
11/26/2003EP1364396A2 Microprotrusion array and methods of making a microprotrusion
11/26/2003EP1363851A2 Micromachined component and method of manufacture
11/26/2003EP1363850A2 Bi-stable micro-actuator and optical switch
11/26/2003EP1363763A1 Process of stripe coating to produce microstructured composite articles
11/25/2003US6653702 Semiconductor pressure sensor having strain gauge and circuit portion on semiconductor substrate
11/25/2003US6653244 Monolithic three-dimensional structures
11/25/2003US6653211 Semiconductor substrate, SOI substrate and manufacturing method therefor
11/20/2003WO2003096123A1 Reversal imprint technique
11/20/2003WO2003095712A2 Method of and apparatus for forming three-dimensional structures integral with semiconductor based circuitry
11/20/2003WO2003095711A2 Electrochemically fabricated structures having dielectric or active bases
11/20/2003WO2003095708A2 Methods of and apparatus for molding structures
11/20/2003WO2003095190A1 An improved adhesive microstructure and method of forming same
11/20/2003WO2003036737A3 Stiffened surface micromachined structures and process for fabricating the same
11/20/2003WO2003023082A3 System and process for automated microcontact printing
11/20/2003WO2002070233A8 Process of stripe coating to produce microstructured composite articles
11/20/2003WO2002057179A3 Fabrication of silicon micro mechanical structures
11/20/2003WO2002022492A8 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
11/20/2003US20030215577 Photolithography process for creating high resolution patterns, using a template, applying a polymerizable composition, electrochemical polymerization, etching to form a pattern
11/20/2003US20030213770 Method for processing by laser, apparatus for processing by laser, and three-dimensional structure
11/20/2003CA2485717A1 An improved adhesive microstructure and method of forming same
11/19/2003EP1362827A1 Method of fabrication of a microfluidic device
11/19/2003EP1362005A2 Method for forming microelectronic spring structures on a substrate
11/19/2003CN2586586Y Polymeride composite graphite oxide super thin film
11/19/2003CN1457319A Gyroscope and fabrication method thereof
11/18/2003US6649498 Metal film protection of the surface of a structure formed on a semiconductor substrate during etching of the substrate by a KOH etchant
11/16/2003CA2428980A1 Method of fabrication of a microfluidic device
11/13/2003US20030211761 Low cost integrated out-of-plane micro-device structures and method of making
11/13/2003US20030211752 Method of smoothing a trench sidewall after a deep trench silicon etch process
11/13/2003US20030211650 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
11/13/2003US20030210849 Bi-stable micro-actuator and optical switch
11/13/2003US20030210124 Micro electromechanical switch having self-aligned spacers
11/13/2003US20030208911 Micromachined cutting blade formed from {211}-oriented silicon
11/13/2003US20030208888 Inclined polymeric projections
11/12/2003EP1360713A1 Light emitting semiconductor package
11/12/2003EP1360552A1 Fabrication of structures of metal/semiconductor compound by x-ray/euv projection lithography
11/12/2003EP1360144A1 Gyroscope and fabrication method thereof
11/12/2003EP1360143A2 Method for producing surface micromechanical structures, and sensor
11/12/2003CN1454835A Method of manufacturing monolithic integration of movable micro physical construction on monocrystalline silicon substrate
11/11/2003US6647087 Exposure method
11/11/2003US6646314 Method for producing a micromechanical structure and a micromechanical structure
11/11/2003US6645800 Method for the production of a field-effect structure
11/11/2003US6645793 Manufacturing method and manufacturing device of microstructure
11/11/2003US6645432 Microfluidic systems including three-dimensionally arrayed channel networks
11/06/2003WO2003092048A2 Micro electro-mechanical system method
11/06/2003WO2003090985A1 Device and method for transferring a pattern to a substrate
11/06/2003WO2003090937A1 Apparatus and method of fabricating small-scale devices
11/06/2003WO2003090933A2 Method and structures for improved assembly of mems devices employing a centrifuge
11/06/2003WO2003034469A3 Method of fabricating a device having a desired non-planar surface or profile and device produced thereby
11/06/2003WO2003001565A3 Method for improved die release of a semiconductor device from a wafer
11/06/2003US20030207487 Single crystal, dual wafer, tunneling sensor and a method of making same
11/06/2003US20030207467 Used to assay simultaneously the presence, amount, and/or function of proteins present in a protein sample/chip, or to assay the presence, relative specificity, and binding affinity of each probe in a mixture of probes for each of the proteins
11/06/2003US20030207335 For preparation of kits and biosensors for disease diagnosis and compound analyses
11/06/2003US20030205556 Capillary with glass internal surface
11/05/2003EP1359593A1 SPM sensor and method for its manufacture
11/05/2003EP1358489A1 Accelerometer protected by caps applied at the wafer scale
11/04/2003US6642154 Method and apparatus for fabricating structures using chemically selective endpoint detection
11/04/2003US6642126 Process for manufacturing a semiconductor wafer with passivation layer mask for etching with mechanical removal
11/04/2003US6642067 Method of trimming micro-machined electromechanical sensors (MEMS) devices
10/2003
10/30/2003WO2003090281A2 Single crystal silicon membranes for microelectromechanical applications
10/30/2003US20030201852 Micro electro-mechanical system method
10/30/2003US20030201513 Multi-level integrated circuit for wide-gap substrate bonding
10/30/2003US20030201249 Process for fabricating high aspect ratio embossing tool and microstructures
10/29/2003EP1356513A1 Molding of protective caps
10/29/2003EP1356511A1 Use of protective caps as masks at a wafer scale
10/29/2003EP1355848A2 Method for producing a fluid component, fluid component and an analysis device
10/29/2003EP1355739A2 Method for carrying out a biochemical protocol in continuous flow in a microreactor
10/29/2003CN1452202A Bistable electromagnetic microdriver and mfg. method thereof
10/29/2003CN1126173C Semiconductor integrated capacitive acceleration sensor and relative fabrication method
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