| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 01/21/2004 | EP1381523A1 Freestanding polymer mems structures with anti stiction |
| 01/21/2004 | CN1469154A Method for centralized producing device chip with shared substrate |
| 01/21/2004 | CN1468798A Making process of micro suspension structure |
| 01/20/2004 | US6679995 Method of micromechanical manufacturing of a semiconductor element, in particular an acceleration sensor |
| 01/15/2004 | WO2004006278A2 Nanostructure field emission cathode |
| 01/15/2004 | WO2004006003A1 A device having a light-absorbing mask a method for fabricating same |
| 01/15/2004 | WO2003057618A3 Method for producing a protective covering for a component |
| 01/15/2004 | WO2002091439A9 Fabrication of a microelectromechanical system (mems) device |
| 01/15/2004 | US20040009673 Method and system for imprint lithography using an electric field |
| 01/15/2004 | US20040009624 Semiconductor wafer comprising micro-machined components and a method for fabricating the semiconductor wafer |
| 01/15/2004 | US20040009614 Micromachined apparatus for collection, separation and analysis of polynucleotides, proteins, peptides, receptors, chelators and/or antibodies; high throughput assays; microfluidics |
| 01/14/2004 | EP1380422A1 Method of manufacturing microstructure, method of manufacturing liquid discharge head, and liquid discharge head |
| 01/14/2004 | EP1379463A2 Method for producing a semiconductor component and a semiconductor component produced according to this method |
| 01/14/2004 | CN1467521A Micro mirror unit and method of making the same |
| 01/14/2004 | CN1134888C Method of forming groove in surface of mother substrate |
| 01/14/2004 | CA2490975A1 A device having a light-absorbing mask and a method for fabricating same |
| 01/08/2004 | WO2004003981A1 Conductive etch stop for etching a sacrificial layer |
| 01/08/2004 | WO2004003965A2 Mems capping method and apparatus |
| 01/08/2004 | WO2004003620A1 Reduced formation of asperities in contact micro-structures |
| 01/08/2004 | WO2004003256A1 Anisotropic dry etching of cu-containing layers |
| 01/08/2004 | WO2003090281A3 Single crystal silicon membranes for microelectromechanical applications |
| 01/08/2004 | US20040005735 Dicing method for micro electro mechanical system chip |
| 01/08/2004 | US20040005734 Dicing method for micro electro mechanical system chip |
| 01/08/2004 | US20040004282 Thermally enhanced semiconductor chip having integrated bonds over active circuits |
| 01/08/2004 | US20040004058 Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings |
| 01/08/2004 | US20040004002 Electrochemically fabricated structures having dielectric or active bases and methods of and apparatus for producing such structures |
| 01/08/2004 | DE10206832B4 Verfahren zur Herstellung mikromechanischer Bauelemente mittels anodischem Bonden und mikromechanisches Bauelement A process for preparing micromechanical components by means of anodic bonding and micromechanical component |
| 01/07/2004 | EP1378487A1 Nanostructure, Electron Emitting Device, Carbon Nanotube Device, and Method of Producing the Same |
| 01/07/2004 | EP1378486A1 Nanostructure, electron emitting device, carbon nanotube device, and method of producing the same |
| 01/07/2004 | EP1377338A2 Method of manufacturing microneedle structures using soft lithography and photolithography |
| 01/06/2004 | US6674350 Electromagnetic actuator, optical scanner and method of preparing electromagnetic actuator |
| 01/06/2004 | US6674141 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 01/06/2004 | US6674140 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 01/06/2004 | US6673694 Method for microfabricating structures using silicon-on-insulator material |
| 01/06/2004 | US6673253 Method of fabricating integrated LC/ESI device using smile, latent masking, and delayed locos techniques. |
| 01/06/2004 | US6673252 Method of fabricating a refractive silicon microlens |
| 01/06/2004 | US6671939 Method for producing a piezoelectric/electrostrictive device |
| 01/02/2004 | EP1376663A2 Method and system for forming a semiconductor device |
| 01/02/2004 | EP1375417A2 Bridges for microelectromechanical structures |
| 01/02/2004 | EP1375416A1 Micro-electro-mechanical device, in particular micro-actuator for hard-disk drive, and manufacturing process thereof |
| 01/02/2004 | EP1374304A1 High frequency integrated circuit (hfic) microsystems assembly and method for fabricating the same |
| 01/02/2004 | EP1374288A2 Method of plasma etching organic antireflective coating |
| 01/02/2004 | EP1373129A2 Method for producing micromechanic sensors and sensors produced by said method |
| 01/01/2004 | US20040002216 Method and system for forming a semiconductor device |
| 01/01/2004 | US20040002215 Whole wafer MEMS release process |
| 12/31/2003 | WO2004000722A1 Patterning nanofeatures over large areas |
| 12/31/2003 | WO2004000720A1 Fabrication of a reflective spatial light modulator |
| 12/31/2003 | WO2004000718A2 Bridges for microelectromechanical structures |
| 12/31/2003 | WO2004000569A1 Complex microstructure film |
| 12/31/2003 | WO2004000567A1 Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool |
| 12/31/2003 | WO2003088347A3 Method for connecting substrates and composite element |
| 12/31/2003 | WO2003062137A3 Method of making a thick microstructural oxide layer and device utilizing same |
| 12/31/2003 | CA2490265A1 Complex microstructure film |
| 12/30/2003 | US6669644 Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy |
| 12/30/2003 | US6669537 Resin diamond blade and optical waveguide manufacturing method using the blade |
| 12/25/2003 | US20030235991 Substrate etch method and device |
| 12/25/2003 | US20030235930 Multi-impression nanofeature production |
| 12/25/2003 | US20030235678 Complex microstructure film |
| 12/25/2003 | US20030234703 Bridges for microelectromechanical structures |
| 12/25/2003 | US20030234179 Methods of and apparatus for molding structures using sacrificial metal patterns |
| 12/25/2003 | US20030234075 Method for cutting a block of material and forming a thin film |
| 12/24/2003 | WO2003106955A1 Sensor and method for producing a sensor |
| 12/24/2003 | WO2003106329A2 Microelectromechanical device with integrated conductive shield |
| 12/24/2003 | WO2003106327A1 Component and method for producing the same |
| 12/24/2003 | WO2003066515A3 Microengineered electrical connectors |
| 12/24/2003 | WO2003056611A3 Resistless lithography method for producing fine structures |
| 12/24/2003 | WO2003024865A8 Method for producing micro-electromechanical components |
| 12/24/2003 | WO2003011748A3 Micro-machined ultrasonic transducer (mut) substrate that limits the lateral propagation of acoustic energy |
| 12/24/2003 | WO2002090243A3 Thick sandwich wafer for mems fabrication |
| 12/24/2003 | CA2490393A1 Microelectromechanical device with integrated conductive shield |
| 12/23/2003 | US6667837 Method and apparatus for configuring an aperture edge |
| 12/23/2003 | US6667245 CMOS-compatible MEM switches and method of making |
| 12/23/2003 | US6667237 Method and apparatus for patterning fine dimensions |
| 12/23/2003 | CA2340059C Micromechanical sensor and method for producing same |
| 12/18/2003 | WO2003105198A1 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 12/18/2003 | WO2003073164A3 Novel planarization method for multi-layer lithography processing |
| 12/18/2003 | US20030230793 Support for microelectronic, microoptoelectronic or micromechanical devices |
| 12/18/2003 | US20030230472 Multi-seal fluid conductor electrical switch device and method of manufacture therefor |
| 12/18/2003 | US20030230147 Microelectromechanical device with integrated conductive shield |
| 12/17/2003 | EP1371605A2 Optical micro systems |
| 12/16/2003 | US6664126 Process for fabrication of 3-dimensional micromechanisms |
| 12/16/2003 | US6664123 Method for etching metal layer on a scale of nanometers |
| 12/16/2003 | US6664027 Methods and apparatus for manufacturing electronic and electromechanical elements and devices by thin-film deposition and imaging |
| 12/16/2003 | US6663820 Method of manufacturing microneedle structures using soft lithography and photolithography |
| 12/16/2003 | US6663789 Bonded substrate structures and method for fabricating bonded substrate structures |
| 12/16/2003 | US6663784 Method for producing three-dimensional structures by means of an etching process |
| 12/16/2003 | US6663231 Monolithic nozzle assembly formed with mono-crystalline silicon wafer and method for manufacturing the same |
| 12/16/2003 | US6662427 Method of forming a cavity structure with a thin bottom base plate |
| 12/11/2003 | WO2003102966A2 Method of forming atomic force microscope tips |
| 12/11/2003 | WO2003102549A1 Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same |
| 12/11/2003 | WO2003101889A1 Mthod of producing micro component |
| 12/11/2003 | WO2003101888A2 Fluorochemical treatment for silicon articles |
| 12/11/2003 | WO2003101887A2 Three-dimentional components prepared by thick film technology and method of producing thereof |
| 12/11/2003 | WO2003101886A2 A method and apparatus for fabricating encapsulated micro-channels in a substrate |
| 12/11/2003 | US20030228759 Method for forming finely-structured parts, finely-structured parts formed thereby, and product using such finely-structured part |
| 12/11/2003 | US20030228418 Replication of nanoperiodic surface structures |
| 12/11/2003 | US20030227700 Micro mirror unit and method of making the same |
| 12/11/2003 | US20030227094 Wafer level packaging of micro electromechanical device |
| 12/11/2003 | US20030226818 Reaction product of silicon and fluorinated olefin |
| 12/11/2003 | US20030226604 Method of fabrication of a microfluidic device |