| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 04/01/2004 | WO2004027843A1 Surface processing method |
| 04/01/2004 | WO2004027460A2 Replication and transfer of microstructures and nanostructures |
| 04/01/2004 | WO2004027367A1 Soi component comprising margins for separation |
| 04/01/2004 | WO2004026760A2 Device and method |
| 04/01/2004 | WO2004026759A2 Method for producing insulation structures |
| 04/01/2004 | WO2003087935A3 Nanoimprint resist |
| 04/01/2004 | US20040063325 Semiconductor device having MEMS |
| 04/01/2004 | US20040063322 Wafer-level transfer of membranes with gas-phase etching and wet etching methods |
| 04/01/2004 | US20040063237 Fabricating complex micro-electromechanical systems using a dummy handling substrate |
| 04/01/2004 | US20040063199 Patterning nanofeatures over large areas |
| 04/01/2004 | US20040061961 Articulating hinge; optical routing; electrically controlled |
| 04/01/2004 | US20040061924 Monolithic MEMS device for optical switches |
| 04/01/2004 | US20040061192 Fabricating complex micro-electromechanical systems using a flip bonding technique |
| 04/01/2004 | US20040060897 Method for forming a microstructure from a monocrystalline substrate |
| 04/01/2004 | DE10241390B3 Process for structuring a flat substrate made from glassy material for electrically contacting microelectronic or micromechanical components comprises preparing a semiconductor flat substrate, reducing its thickness, and further processing |
| 04/01/2004 | DE10239307A1 Verfahren zum selektiven Waferbonden A method for selectively wafer bonding |
| 03/31/2004 | EP1403211A2 Surfactant-enhanced protection of micromechanical components from galvanic degradation |
| 03/31/2004 | CN1486277A Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 03/30/2004 | US6714105 Micro electro-mechanical system method |
| 03/30/2004 | US6713827 Micro-structures and methods for their manufacture |
| 03/30/2004 | US6713403 Method for manufacturing semiconductor device |
| 03/30/2004 | US6713367 Self-aligned vertical combdrive actuator and method of fabrication |
| 03/30/2004 | US6712983 Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same |
| 03/25/2004 | WO2004025726A2 Method for selectively covering a micro machined surface |
| 03/25/2004 | WO2004024619A1 Method for processing substrate |
| 03/25/2004 | WO2004024327A1 Microfluidic apparatus with integrated porous-substrates/sensor for real-time(bio)chemical molecule detection |
| 03/25/2004 | WO2003088354A3 Method for producing a copy protection for an electronic circuit and corresponding component |
| 03/25/2004 | WO2003070625A3 Thin film encapsulation of mems devices |
| 03/25/2004 | WO2003065050A3 Method of manufacturing an accelerometer |
| 03/25/2004 | WO2002091402A3 Bistable magnetic actuator |
| 03/25/2004 | US20040059449 Selecting a material for use as the expansive element |
| 03/25/2004 | US20040057101 Reduced formation of asperities in contact micro-structures |
| 03/25/2004 | US20040056741 Electromagnetic actuator, optical scanner and method of preparing electromagnetic actuator |
| 03/25/2004 | US20040055655 Method of forming a microstructure using maskless lithography |
| 03/25/2004 | US20040055151 Micro systems |
| 03/25/2004 | US20040055136 Microscale nozzle method for manufacturing the same |
| 03/25/2004 | DE10243010A1 Device used as an acceleration sensor or rotary sensor has a covering layer with a smooth surface formed on the walls of the structure |
| 03/25/2004 | DE10242661A1 Production of insulating structures used in the production of micromechanical sensors and in acceleration sensors for vehicle air bags comprises forming trenches in a substrate, and forming a functional structure in the substrate material |
| 03/25/2004 | CA2498669A1 Method for selectively covering a micro machined surface |
| 03/24/2004 | EP1400488A2 Fabrication of MEMS devices with spin-on glass |
| 03/24/2004 | EP1400487A2 Semiconductor unit having MEMS |
| 03/24/2004 | CN1484611A Production device and production method for silicon-based structure |
| 03/24/2004 | CN1143121C Method for making angular rate sensor |
| 03/23/2004 | US6710461 Solder bumps formed on conductor plugs; damage prevention |
| 03/23/2004 | US6710417 Armor coated MEMS devices |
| 03/23/2004 | US6709948 Process for manufacturing a two-axis mirror |
| 03/23/2004 | US6709604 Parylene micro check valve and fabrication method thereof |
| 03/18/2004 | WO2004023210A1 Method for producing a pattern formation mold |
| 03/18/2004 | WO2004022478A1 Soi polysilicon trench refill perimeter oxide anchor scheme |
| 03/18/2004 | WO2003100846A3 Glass material for use at high frequencies |
| 03/18/2004 | WO2003090933A3 Method and structures for improved assembly of mems devices employing a centrifuge |
| 03/18/2004 | WO2003055791A3 Improved etch process for etching microstructures |
| 03/18/2004 | US20040053507 Method for fabricating a micro machine |
| 03/18/2004 | US20040053505 Method of etching variable depth features in a crystalline substrate |
| 03/18/2004 | US20040053434 Microelectronic mechanical system and methods |
| 03/18/2004 | US20040053354 Methods for optically immobilizing very small objects and their use |
| 03/18/2004 | US20040052657 Micromachined fluidic device and method for making same |
| 03/18/2004 | US20040051154 Microfluidic apparatus with integrated porous-substrate/sensor for real-time (bio)chemical molecule detection |
| 03/18/2004 | US20040050161 Micromechanical component and method for producing the same |
| 03/18/2004 | US20040049918 Gear and method of making the same |
| 03/18/2004 | DE10241450A1 Production of a deformation sensor used in common rail diesel engines and in fuel injection engines comprises applying a sacrificial layer on or in a substrate, applying an activated layer on the sacrificial layer and further processing |
| 03/18/2004 | DE10240056A1 Hochtemperaturstabiler Metallemitter sowie Verfahren zur Herstellung High Temperature Stable metal emitter and methods of making |
| 03/17/2004 | EP1398298A2 Process of making an all-silicon microphone |
| 03/17/2004 | EP1398297A2 Electronic component with carbon nanotube interconnects and method of manufacturing the same |
| 03/17/2004 | EP1398296A2 A method for making three-dimensional structures having nanometric and micrometric dimensions |
| 03/17/2004 | EP1397211A1 Method of manufacturing a microfluidic structure, in particular a biochip, and structure obtained by said method |
| 03/16/2004 | US6706549 Multi-functional micro electromechanical devices and method of bulk manufacturing same |
| 03/16/2004 | US6706202 Method for shaped optical MEMS components with stressed thin films |
| 03/16/2004 | US6706200 Method for fabricating ESI device using smile and delayed LOCOS techniques |
| 03/16/2004 | US6706165 Forming electroconductive pattern |
| 03/16/2004 | US6705152 Nanostructured ceramic platform for micromachined devices and device arrays |
| 03/11/2004 | WO2004021451A2 High-temperature stable metal emitter and method for the production thereof |
| 03/11/2004 | WO2004021084A2 Decal transfer microfabrication |
| 03/11/2004 | WO2004020703A2 Method for producing metal or ceramic microcomponents |
| 03/11/2004 | WO2004020329A1 Microelectromechanical system comb actuator and manufacturing method thereof |
| 03/11/2004 | WO2003059804A3 Method for producing a film having microscopic and nanometric surface structures, and one such film |
| 03/11/2004 | WO2002100474A3 Microneedles for minimally invasive drug delivery and method of manufacturing the same |
| 03/11/2004 | US20040048484 Shadow mask and method of producing the same |
| 03/11/2004 | US20040048449 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 03/11/2004 | US20040048410 SOI polysilicon trench refill perimeter oxide anchor scheme |
| 03/11/2004 | US20040048403 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 03/11/2004 | US20040046119 SPM sensor and process for producing it |
| 03/11/2004 | CA2495978A1 Decal transfer microfabrication |
| 03/10/2004 | EP1396022A2 Thin films and production methods thereof |
| 03/10/2004 | CN1481011A Method for integral manufacturing integrated circuit parts and micro electro-mechanical component |
| 03/10/2004 | CN1480981A Electronic component and its mfg. method |
| 03/09/2004 | US6703582 Energy-efficient method and system for processing target material using an amplified, wavelength-shifted pulse train |
| 03/09/2004 | US6703132 Magnetoresistance sensor element and method of fabricating the magnetoresistance element |
| 03/09/2004 | US6702950 Method for fabricating LC device using latent masking and delayed LOCOS techniques |
| 03/09/2004 | US6701779 Perpendicular torsion micro-electromechanical switch |
| 03/04/2004 | WO2004019362A1 Diaphragm activated micro-electromechanical switch |
| 03/04/2004 | WO2004018348A2 Layer system comprising a silicon layer and a passivation layer, method for producing a passivation layer on a silicon layer and the use of said system and method |
| 03/04/2004 | WO2003031912A3 Tuning fork gyroscope |
| 03/04/2004 | US20040042969 Supplying fine drops; machining; atomizing liquids; heating with carrier gas; drying; distillation; aqueous solution of hydrogen fluoride for etching silica |
| 03/04/2004 | US20040042937 Photopolymers; exposure to light; three-dimensional pattern |
| 03/04/2004 | US20040042287 Functional device, method of manufacturing therefor and driver circuit |
| 03/04/2004 | US20040041154 Nonconductor substrate enclosing carbon nanotubes; electrodes |
| 03/04/2004 | US20040040655 Substrate processing device and processing method |
| 03/04/2004 | US20040040653 Forming pattern on surface of silicone elastomer; oxidation; bonding to substrate |
| 03/04/2004 | US20040040585 Displacement support coupled to substrate; cantilever structure; cantilever structure; spring; washing interior of pipes; carbon dioxide in aqueous solution |