| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 09/29/2004 | EP1461828A1 Method of fabricating micro-electromechanical switches on cmos compatible substrates |
| 09/29/2004 | EP1461287A2 Hybrid mems fabrication method and new optical mems device |
| 09/29/2004 | EP1461286A1 Differential stress reduction in thin films |
| 09/29/2004 | EP1255690B1 Method for fabricating micro-structures with various surface properties in multilayer body by plasma etching |
| 09/29/2004 | EP1169650B1 Different sacrificial layer thickness under fixed and movable electrodes (capacitive acceleration sensor) |
| 09/29/2004 | CN1533359A Thin films and producton methods thereof |
| 09/29/2004 | CN1532137A Method for producing cantilever beam type micro electromechanical system |
| 09/28/2004 | US6798862 X-ray mask and method for providing same |
| 09/28/2004 | US6797899 Acceleration switch |
| 09/28/2004 | US6797631 High sensitive micro-cantilever sensor and fabricating method thereof |
| 09/28/2004 | US6797589 Insulating micro-structure and method of manufacturing same |
| 09/28/2004 | US6797211 Mechanical patterning of a device layer |
| 09/23/2004 | WO2004081263A1 Electroplating pcb components |
| 09/23/2004 | WO2004080886A1 Mems devices on a nanometer scale |
| 09/23/2004 | WO2003101887A3 Three-dimentional components prepared by thick film technology and method of producing thereof |
| 09/23/2004 | US20040186419 Microneedles for minimally invasive drug delivery |
| 09/23/2004 | US20040184134 Optical modulator, display device and manufacturing method for same |
| 09/23/2004 | US20040183214 Depositing a sacrificial layer over mechanical structure; depositing a first encapsulation layer over the sacrificial layer; forming vent through the encapsulation layer to expose portion of the sacrificial layer; removing sacrificial layer to form chamber; introducing gas into the chamber; depositing |
| 09/23/2004 | US20040182716 Method for electrochemically forming structures including non-parallel mating of contact masks and substrates |
| 09/23/2004 | US20040182713 Article including a metal atom precursor is disproportionally exposed to electromagnetic radiation in an amount and intensity sufficient to convert some of the precursor to elemental meta; additional conductive material may then be deposited onto the elemental metal to produce a microstructure |
| 09/23/2004 | DE10325206B3 Process for preparation of a structural part in which the specific functional structures, i.e. etching troughs, are formed by anisotropic wet etching useful in production of single crystal semiconductors |
| 09/22/2004 | EP1460038A2 Electromechanical system having a controlled atmosphere, and method of fabricating same |
| 09/22/2004 | EP1460036A1 Mems element manufacturing method |
| 09/22/2004 | EP1460035A1 Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display |
| 09/22/2004 | EP0865664B1 Process for anisotropic plasma etching of different substrates |
| 09/21/2004 | US6795225 Micromirror unit with torsion connector having nonconstant width |
| 09/21/2004 | US6794737 Spring structure with stress-balancing layer |
| 09/21/2004 | US6794271 Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge |
| 09/21/2004 | US6794196 Deposited thin films and their use in detection, attachment and bio-medical applications |
| 09/21/2004 | US6794119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| 09/21/2004 | US6793974 Selecting a material for use as the expansive element |
| 09/21/2004 | US6793830 Method for forming a microstructure from a monocrystalline substrate |
| 09/21/2004 | US6793753 Method of making a microfabricated elastomeric valve |
| 09/21/2004 | US6792940 Device and method for creating aerosols for drug delivery |
| 09/16/2004 | WO2004079450A1 Method for manufacturing a patterned structure |
| 09/16/2004 | WO2004079373A1 Capacitive acceleration sensor |
| 09/16/2004 | WO2004028952A3 Small scale wires with microelectromechanical devices |
| 09/16/2004 | US20040180519 Method of making cavities in a semiconductor wafer |
| 09/16/2004 | US20040180179 Method for making three-dimensional structures having nanometric and micrometric dimensions |
| 09/16/2004 | US20040178537 Injection molding techniques for forming a microfluidic structure having at least one flash free aperture |
| 09/16/2004 | US20040178523 Molded waveguides |
| 09/16/2004 | US20040178171 Sloped trench etching process |
| 09/16/2004 | DE10308860A1 Separating semiconducting wafers with exposed micromechanical structures into chips involves sawing from front by standard saw blade, cleaning, drying, heating to thermal film transition temperature |
| 09/16/2004 | DE102004010907A1 Optische Vorrichtung mit Mikrolinsen-Anordnung, sowie Verfahren zu ihrer Herstellung An optical device with micro lens array, and to processes for their preparation |
| 09/16/2004 | DE102004008334A1 Verfahren zum lokalen Ätzen eines Substrats und Vorrichtung zur Durchführung des Verfahrens A method for locally etching a substrate and apparatus for carrying out the method |
| 09/15/2004 | EP1456870A2 Resistless lithography method for producing fine structures |
| 09/15/2004 | EP1456116A1 Method and device for producing a component with a mobile structure |
| 09/15/2004 | EP1456115A2 Method of dividing a substrate into a plurality of individual chip parts |
| 09/15/2004 | EP1294635A4 Improved thermal bend actuator |
| 09/14/2004 | US6791660 Method for manufacturing electrooptical device and apparatus for manufacturing the same, electrooptical device and electronic appliances |
| 09/14/2004 | US6790787 Structure having narrow pores |
| 09/14/2004 | US6790779 Anisotropic dry etching technique for deep bulk silicon etching |
| 09/14/2004 | US6790747 Method and device for controlled cleaving process |
| 09/14/2004 | US6790377 Method for electrochemical fabrication |
| 09/14/2004 | US6790372 Microneedle array module and method of fabricating the same |
| 09/14/2004 | US6789423 Micro inertia sensor and method of manufacturing the same |
| 09/10/2004 | WO2004077536A1 Production method for antenna and production device for antenna |
| 09/10/2004 | WO2004076342A1 Separating semiconductor wafers having exposed micromechanical structures into individual chips |
| 09/10/2004 | WO2004076339A2 Method for manufacturing microstructures having multiple microelements with through-holes |
| 09/10/2004 | WO2004064090A3 Methods and structure for improving wafer bow control |
| 09/10/2004 | WO2003101888A3 Fluorochemical treatment for silicon articles |
| 09/10/2004 | CA2517988A1 Method for manufacturing microstructures having multiple microelements with through-holes |
| 09/09/2004 | US20040173862 Optical device having micro lens array and method for manufacturing the same |
| 09/09/2004 | US20040173575 Method of releasing devices from a substrate |
| 09/09/2004 | DE10308048A1 Producing carrier elements from a network unit, by partitioning network unit along designated breaking points such that the unit is cut from these points towards a defined distance until reaching the channels within the unit |
| 09/08/2004 | EP1453758A2 Adhesiveless microfluidic device fabrication |
| 09/08/2004 | CN1527793A Method for forming microelectronic spring structures on a substrate |
| 09/08/2004 | CN1527134A Manufacture of ture 3D microelectronic mechanical system based on composite imprinting photoetched material |
| 09/08/2004 | CN1526636A Microstructure mold core making technology |
| 09/07/2004 | US6788840 Bi-stable micro-actuator and optical switch |
| 09/07/2004 | US6787968 To prevent a polymer cantilever from sticking to the substrate |
| 09/07/2004 | US6787929 Semiconductor device having a flat protective adhesive sheet |
| 09/07/2004 | US6787866 Semiconductor device having a moveable member therein and a protective member disposed thereon |
| 09/07/2004 | US6787384 Functional device, method of manufacturing therefor and driver circuit |
| 09/07/2004 | US6787187 Micromechanical device fabrication |
| 09/02/2004 | WO2004016546A3 Layer system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereof |
| 09/02/2004 | US20040171186 Method of protecting microfabricated devices with protective caps |
| 09/02/2004 | US20040169284 Semiconductor wafer comprising micro-machined components and a method for fabricating the semiconductor wafer |
| 09/02/2004 | US20040169003 On substrate; hardness; wear resistance |
| 09/02/2004 | US20040168613 Composition and method to form a release layer |
| 09/01/2004 | EP1076826B1 Method for producing micromechanical components |
| 09/01/2004 | CN1164793C Chemical preparation method of controllable metal nano conductor |
| 08/31/2004 | US6784539 Thermally enhanced semiconductor chip having integrated bonds over active circuits |
| 08/31/2004 | US6783643 Exposure surface to flux; controlling concentration |
| 08/31/2004 | US6782900 Methods and apparatus for cleaning and/or treating a substrate using CO2 |
| 08/26/2004 | WO2004072705A1 Bi-stable micro-actuator and optical switch |
| 08/26/2004 | WO2004071944A1 Method for the production of a component comprising a semiconductor carrier and component |
| 08/26/2004 | WO2004071943A2 Electronic device and its manufacturing method device |
| 08/26/2004 | WO2004071942A1 Mems element and method of producing the same, and diffraction type mems element |
| 08/26/2004 | WO2004071153A2 Method of forming sub-micron-size structures over a substrate |
| 08/26/2004 | WO2004037712A3 Method for producing a packaged integrated circuit with a microcavity |
| 08/26/2004 | WO2004033365A3 Method of forming a sensor for detecting motion |
| 08/26/2004 | US20040166664 Thin film-structure and a method for producing the same |
| 08/26/2004 | US20040166649 Layer transfer method |
| 08/26/2004 | US20040166330 Thin film-structure and a method for producing the same |
| 08/26/2004 | US20040164454 Method for manufacturing microstructures having multiple microelements with through-holes |
| 08/26/2004 | US20040164368 High reflector tunable stress coating, such as for a MEMS mirror |
| 08/26/2004 | US20040163226 Method for manufacturing a micro-actuator |
| 08/26/2004 | DE10306129A1 Production of a component with a semiconductor support used in micro-electronics comprises etching recesses in a porous material to form a thermally coupled region defined by the recesses, and forming a structure over one region |
| 08/26/2004 | DE10130916B4 Verfahren zum anisotropen Strukturieren von Materialien A method for anisotropic structuring of materials |