| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
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| 02/05/2015 | US20150037974 Method of patterning platinum layer |
| 02/05/2015 | US20150037921 Method for manufacturing acoustic wave device |
| 02/05/2015 | US20150037210 Method for producing a functional unit and corresponding functional unit |
| 02/05/2015 | US20150035387 Mems switch device and method of fabrication |
| 02/05/2015 | US20150035091 Process for manufacturing a packaged device, in particular a packaged micro-electro-mechanical sensor, having an accessible structure, such as a mems microphone and packaged device obtained thereby |
| 02/05/2015 | US20150035090 Stacked die package for mems resonator system |
| 02/05/2015 | US20150035089 Mems device and method of forming the same |
| 02/05/2015 | US20150034620 Wafer bonding method for use in making a mems gyroscope |
| 02/05/2015 | US20150033878 Method for producing a pressure sensor and corresponding sensor |
| 02/05/2015 | DE102013012731A1 Verfahren zur Herstellung eines Gaskonverters und entsprechender Gaskonverter A method of manufacturing a gas converter and the appropriate gas converter |
| 02/05/2015 | DE102012021222B4 Verfahren zur Herstellung einer nanoporösen Schicht auf einem Substrat A process for producing a nano-porous layer on a substrate |
| 02/04/2015 | EP2832193A2 A deformable apparatus and method |
| 02/04/2015 | EP2830989A1 Cavity package design |
| 02/04/2015 | CN204138342U 一种mems体硅湿法加工工艺单面保护装置 One kind of wet-process bulk silicon mems-sided protection |
| 02/04/2015 | CN204138341U 硅衬底上的硅柱阵列 Silicon pillar array on a silicon substrate |
| 02/04/2015 | CN104335687A 可变形装置和方法 Deformable means and methods |
| 02/04/2015 | CN104333838A 微机电系统器件 MEMS devices |
| 02/04/2015 | CN104330841A 一种数值孔径可控的微透镜阵列的电辅助制造方法 Electric auxiliary method of manufacturing a controlled numerical aperture microlens array |
| 02/04/2015 | CN104326441A Soi片过孔内金属焊盘的制作方法 Soi method of making holes through the metal sheet pad |
| 02/04/2015 | CN104326440A 一种精确控制深度的微纳米结构的制作方法 A method of making precise control of the depth of micro and nano structures |
| 02/04/2015 | CN104326439A 一种改进硅微通道板表面形貌的方法 An improved method for silicon microchannel plate surface topography |
| 02/04/2015 | CN104326438A 反应性离子蚀刻 Reactive ion etching |
| 02/04/2015 | CN104326437A 包括设有至少一个微电子或纳米电子系统的流体通道的设备以及用于实现此设备的方法 The method is provided comprising at least one microelectronic or nanofluidic channel of the electronic system, and the apparatus for implementing this |
| 02/04/2015 | CN104326436A 微电子装置及制造方法、微机电封装结构及封装方法 Microelectronic device and method for manufacturing, MEMS package structure and packaging method |
| 02/04/2015 | CN104326435A 具有流体通道的装置以及用于制造该装置的方法 Means having a fluid passageway and a method for manufacturing the same |
| 02/04/2015 | CN104324768A 一种微小三维结构沟道微流芯片的制备方法 Preparation of a tiny three-dimensional structure of the channel microfluidic chip |
| 02/04/2015 | CN102417156B 一种刻蚀金属钼材料的方法 An etching method molybdenum material |
| 02/04/2015 | CN102390803B 一种高过载、可恢复压力传感器及制造方法 A high-overload, a pressure sensor and method of manufacturing a recoverable |
| 02/04/2015 | CN102259822B 压敏传感器的制备方法及在硅片上形成空腔结构的方法 The method for preparing a pressure-sensitive sensor and method for forming a cavity structure on a silicon wafer |
| 02/03/2015 | US8948706 Stiction reduction for MEMS devices |
| 02/03/2015 | US8946864 Systems and methods for preparing films comprising metal using sequential ion implantation, and films formed using same |
| 02/03/2015 | US8946831 Low frequency response microphone diaphragm structures and methods for producing the same |
| 02/03/2015 | US8946786 Semiconductor device and method for manufacturing same |
| 02/03/2015 | US8946090 Method for etching a layer on a silicon semiconductor substrate |
| 02/03/2015 | US8945970 Assembling and applying nano-electro-mechanical systems |
| 02/03/2015 | US8945969 Internal electrical contact for enclosed MEMS devices |
| 02/03/2015 | US8945968 Compliant micro device transfer head with integrated electrode leads |
| 02/03/2015 | US8945700 Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials |
| 02/03/2015 | US8945688 Process of forming a material having nano-particles and a material having nano-particles |
| 01/29/2015 | WO2015010904A1 Process for producing a nanopore for sequencing a biopolymer |
| 01/29/2015 | WO2015010545A1 High-sensitivity terahertz microfluidic channel sensor and manufacturing method thereof |
| 01/29/2015 | US20150031161 Inertial sensor and method of manufacturing the same |
| 01/29/2015 | US20150031160 Cmos compatible mems microphone and method for manufacturing the same |
| 01/29/2015 | US20150031159 MEMS Devices and Methods of Forming the Same |
| 01/29/2015 | US20150028455 Method for varied topographic mems cap process |
| 01/29/2015 | US20150028438 Mems device and process for producing same |
| 01/29/2015 | US20150028435 Method of Packaging Integrated Circuits and a Molded Package |
| 01/29/2015 | US20150028434 Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer |
| 01/29/2015 | US20150028433 Encapsulation structure including a mechanically reinforced cap and with a getter effect |
| 01/29/2015 | US20150028432 Assembly and packaging of mems device |
| 01/29/2015 | DE102014109940A1 Verfahren für MEMS-Kappen-Arbeitsablauf für vielgestaltige Topographie Method for MEMS caps workflow for diverse topography |
| 01/29/2015 | DE102013214341A1 Verfahren zum Herstellen einer Nanopore zum Sequenzieren eines Biopolymers A method of manufacturing a nanopore sequencing a biopolymer |
| 01/28/2015 | EP2829512A1 Reactive ion etching |
| 01/28/2015 | EP2829511A2 Device comprising a fluid channel having at least one micro or nanoelectronic system and method for producing such a device |
| 01/28/2015 | EP2829510A2 Assembly and packaging of a mems device |
| 01/28/2015 | CN204128996U 一种mems气体传感器 One kind of gas sensor mems |
| 01/28/2015 | CN204125161U 一种具有绝热沟槽的mems硅基微热板 A kind of insulation trench silicon mems micro-hotplate |
| 01/28/2015 | CN104321700A 使用化学气相沉积膜控制嵌段共聚物薄膜中的域取向 Film using a chemical vapor deposition film of the block copolymer control domain alignment |
| 01/28/2015 | CN104316575A 全硅mems甲烷传感器及瓦斯检测应用和制备方法 All silicon mems sensors and methane gas detection applications and preparation methods |
| 01/28/2015 | CN104310305A 基于飞秒激光的大规模阵列石墨烯纳机电谐振器制备方法 Based on large-scale arrays of graphite ene femtosecond laser NEMS resonators preparation |
| 01/28/2015 | CN104310304A 可控尺寸及表面结构的纳米柱阵列制备方法 Nano-pillar array preparation method of controlled size and surface structure |
| 01/28/2015 | CN104310303A 一种微机电系统复合牺牲层的处理方法 A method of processing complex MEMS sacrificial layer |
| 01/28/2015 | CN104310302A 一种超滑表面的制作方法 A method of making ultra-smooth surface |
| 01/28/2015 | CN104310301A 一种集成微垫片的mems可调光衰减器芯片及其制作方法 An integrated micro pads mems variable optical attenuator chip and its manufacturing method |
| 01/28/2015 | CN104310300A 集成像元级聚光透镜的红外探测器及其制备方法 Pixel-level condenser lens integrated infrared detector and its preparation method |
| 01/28/2015 | CN104307097A 一种柔性基底金属微针阵列的制作方法 A method of making a flexible substrate metal microneedle array |
| 01/28/2015 | CN103115704B 高温压力传感器制备方法 Preparation of high temperature pressure sensor |
| 01/28/2015 | CN103076676B 闪耀角可调微机械光栅的制作方法 Blaze angle adjustable method of making micro-mechanical grating |
| 01/28/2015 | CN102897709B 一种低成本微纳一体化结构的制作方法 A method of making a low-cost method for the integration of micro-nano structures |
| 01/28/2015 | CN102730629B 一种微透镜的制备方法及其产品 Method for preparing a microlens and its products |
| 01/28/2015 | CN102695978B 振动反射镜元件及振动反射镜元件的制造方法 Method for producing vibrating mirror element and the oscillating mirror element |
| 01/28/2015 | CN102674241B 一种基于无掩模灰度光刻的变高度微流道制作方法 A variable height microfluidic channel production methods based maskless lithography gray |
| 01/28/2015 | CN102583217B 微机电系统元件及用于其中的防止变形结构及其制作方法 MEMS components and which prevents the deformation structure and method for making |
| 01/28/2015 | CN101832831B 一种压阻传感器芯片及其制作方法 One kind of piezoresistive sensor chip and its manufacturing method |
| 01/28/2015 | CN101746709B 用于在衬底上形成微观结构的方法 The method of forming a microscopic structure on a substrate for |
| 01/27/2015 | US8941247 Stacked die package for MEMS resonator system |
| 01/27/2015 | US8941193 Method for manufacturing a hybrid integrated component |
| 01/27/2015 | US8941152 Semiconductor device |
| 01/27/2015 | US8940639 Methods and structures for using diamond in the production of MEMS |
| 01/27/2015 | US8940241 Photostructured chemical devices and methods for making same |
| 01/22/2015 | WO2015009688A1 Microfluidic chip for analysis of cell motility and methods for using same |
| 01/22/2015 | US20150024536 MEMS Device and Method of Manufacturing a MEMS Device |
| 01/22/2015 | US20150024534 Two degree of freedom dithering platform for mems sensor calibration |
| 01/22/2015 | US20150024533 Method of forming a semiconductor device |
| 01/22/2015 | US20150021745 Reactive ion etching |
| 01/22/2015 | US20150021723 Mechanisms for forming micro-electro mechanical system device |
| 01/22/2015 | US20150021721 Integrated circuit package and method |
| 01/22/2015 | US20150021720 Device comprising a fluid channel fitted with at least one microelectronic or nanoelectronic system, and method for manufacturing such a device |
| 01/22/2015 | US20150021718 Apparatus and method for reduced strain on mems devices |
| 01/22/2015 | US20150021717 Reducing microelectromechanical systems stiction by formation of a silicon carbide layer |
| 01/22/2015 | US20150020590 Optomechanical accelerometer |
| 01/22/2015 | DE102014214154A1 Ein MEMS-Bauelement A MEMS device |
| 01/22/2015 | DE102014212695A1 Verfahren zur Herstellung von Kavitäten mit nanoskaligen Blenden Process for the preparation of cavities with nanoscale apertures |
| 01/22/2015 | DE102014109913A1 Halbleitervorrichtung, mikro-elektromechanischen Resonator und Verfahren zur Herstellung einer Halbleitervorrichtung A semiconductor device, micro-electro-mechanical resonator and method for making a semiconductor device |
| 01/22/2015 | DE102014109571A1 Verfahren zum packaging integrierter schaltungen und ein geformtes substrat mit in eine formmasse eingebetteten nicht funtionalen platzhaltern A method for packaging integrated circuits and a molded substrate with not a molding material embedded space holders funtionalen |
| 01/22/2015 | DE102013211970A1 Mikro-elektromechanischer Resonator und Verfahren zum Herstellen eines mikro-elektromechanischen Resonators Micro-electro-mechanical resonator and method for producing a micro-electromechanical resonator, |
| 01/22/2015 | DE102012103720B4 Verfahren und Vorrichtung für ein Mikrospritzgusswerkzeug Method and apparatus for a micro injection mold |
| 01/22/2015 | DE102011103516B4 Verfahren zum Befüllen eines Hohlraums mit einer Atmosphäre Method for filling a cavity with an atmosphere |
| 01/21/2015 | EP2825500A2 Method of manufacture for a miniaturized drug delivery device |
| 01/21/2015 | EP2825499A2 Surface treatment of microfluidic devices |