| Patents for B81C 1 - Manufacture or treatment of devices or systems in or on a substrate (14,526) |
|---|
| 11/09/2004 | US6815360 Silicon micro-machined projection with duct |
| 11/09/2004 | US6815243 Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate |
| 11/04/2004 | WO2004063089A3 Recessed microstructure device and fabrication method thereof |
| 11/04/2004 | US20040219803 Arrangement for transferring information/structures to wafers |
| 11/04/2004 | US20040219706 System and method of fabricating micro cavities |
| 11/04/2004 | US20040219072 Microfluidic apparatus with integrated porous-substrate/sensor for real-time (bio)chemical molecule detection |
| 11/04/2004 | US20040217447 Method for realizing microchanels in an integrated structure |
| 11/04/2004 | US20040217388 A dual-wafer tunneling gyroscope and an assembly for making same |
| 11/04/2004 | US20040216989 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip |
| 11/04/2004 | DE10310615B3 Production of a bio-chip used in the micro-analysis of liquid streams of droplets with microstructures on a semiconductor chip comprises covering a wafer with a photo-lacquer layer, photo-lithographically structuring and further processing |
| 11/04/2004 | CA2805322A1 Temperature compensation for silicon mems resonator |
| 11/03/2004 | EP1472546A2 Method of manufacturing an accelerometer |
| 11/03/2004 | CN1174237C Method of producing detector belonging to gas sensor, and detector produced in accordance with the method |
| 11/02/2004 | US6813059 Reduced formation of asperities in contact micro-structures |
| 11/02/2004 | US6812810 Bridges for microelectromechanical structures |
| 11/02/2004 | US6811714 Micromachined component and method of manufacture |
| 10/28/2004 | WO2004093162A2 Silicon substrate comprising positive etching profiles with a defined slope angle, and production method |
| 10/28/2004 | WO2004092836A1 Fabrication of nanostructures |
| 10/28/2004 | WO2004092050A1 Method for producing a micromachined layered device |
| 10/28/2004 | WO2004092049A1 Micromechanical component and method for its production |
| 10/28/2004 | WO2004091838A2 Method of soldering or brazing articles having surfaces that are difficult to bond |
| 10/28/2004 | WO2004033364A3 Methods for forming coatings on mems devices |
| 10/28/2004 | US20040214447 Sensor produced using imprint lithography |
| 10/28/2004 | US20040214380 Process for producing microelectromechanical components |
| 10/28/2004 | US20040211754 Method of forming stepped structures employing imprint lithography |
| 10/28/2004 | US20040211753 Method of manufacturing a substrate with concave portions, a substrate with concave portions, a substrate with concave portions for microlenses, a microlens substrate, a transmission screen and a rear projector |
| 10/28/2004 | US20040211511 Joining method |
| 10/28/2004 | DE10316713A1 Production of photomasks used in the production of electronic devices comprises structuring a chromium absorber layer applied on a quartz substrate by etching regions not covered by a photolacquer mask using plasma etching |
| 10/27/2004 | EP1470907A2 Method of manufacturing self-ordered nanochannel-array and method of manufacturing nanodots using the nanochannel-array |
| 10/27/2004 | EP1470449A1 Method of joining a workpiece and a microstructure by light exposure |
| 10/27/2004 | EP1470444A1 Aperture edge in a digital micromirror housing |
| 10/27/2004 | EP1088329B1 Method and apparatus for stabilising a plasma |
| 10/27/2004 | CN1540714A Method of mfg. self-collating nanotube array and nano points |
| 10/27/2004 | CN1173398C Micro-relay |
| 10/26/2004 | US6809392 Micromachined device having electrically isolated components and a method for making the same |
| 10/26/2004 | US6809277 Method for registering a deposited material with channel plate channels, and switch produced using same |
| 10/26/2004 | US6808956 Thin micromachined structures |
| 10/26/2004 | US6808953 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 10/26/2004 | US6808952 Process for fabricating a microelectromechanical structure |
| 10/26/2004 | US6808920 Has first well for chemotactic factors a second well for chemotactic cells and a channel that runs between the wells |
| 10/26/2004 | US6808745 Method of coating micro-electromechanical devices |
| 10/26/2004 | US6808644 Capillary with glass internal surface |
| 10/26/2004 | US6808640 Micromechanical part and method for its manufacture |
| 10/21/2004 | WO2004089812A1 Process for fabricating micromachine |
| 10/21/2004 | WO2004060792A3 Method of forming semiconductor devices through epitaxy |
| 10/21/2004 | WO2003078304A3 Surface relief structures for joining and adhesion |
| 10/21/2004 | US20040209413 Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge |
| 10/21/2004 | US20040209393 Functional device, method of manufacturing therefor and driver circuit |
| 10/21/2004 | US20040207897 Method for fabricating an interference display unit |
| 10/21/2004 | US20040207074 Metal MEMS devices and methods of making same |
| 10/21/2004 | US20040207063 Semiconductor component in a wafer assembly |
| 10/21/2004 | US20040206391 Microfluidic device and manufacture thereof |
| 10/21/2004 | DE102004015237A1 Sensor mit Vorsprung und Verfahren zu dessen Herstellung Sensor with projection and process for its preparation |
| 10/20/2004 | EP1469599A2 Air gap type FBAR, duplexer using the FBAR, and fabricating methods thereof |
| 10/20/2004 | EP1468467A1 A component for electromagnetic waves and a method for manufacturing the same |
| 10/20/2004 | EP1467946A1 "low power silicon thermal sensors and microfluidic devices based on the use of porous silicon sealed air cavity technology or microchannel technology" |
| 10/20/2004 | CN1538934A Method for fabrication of suspended porous silicon microstructures and application in gas sensors |
| 10/19/2004 | US6806993 Method for lubricating MEMS components |
| 10/19/2004 | US6806543 Microfluidic apparatus with integrated porous-substrate/sensor for real-time (bio)chemical molecule detection |
| 10/19/2004 | US6806205 Stiction-free microstructure releasing method for fabricating MEMS device |
| 10/19/2004 | US6805809 Decal transfer microfabrication |
| 10/19/2004 | US6805433 Integrated side shooter inkjet architecture with round nozzles |
| 10/19/2004 | US6805008 Accelerometer with folded beams |
| 10/14/2004 | WO2004087563A2 Barrier layers for microelectromechanical systems |
| 10/14/2004 | WO2004037712A8 Method for producing a packaged integrated circuit with a microcavity |
| 10/14/2004 | US20040203238 Process for producing an etching mask on a microstructure, in particular a semiconductor structure with trench capacitors, and corresponding use of the etching mask |
| 10/14/2004 | US20040203186 Metal wiring method for an undercut |
| 10/14/2004 | US20040201013 Method of fabricating multi layer mems and microfluidic devices |
| 10/14/2004 | US20040201012 Method of fabricating vertical integrated circuits |
| 10/14/2004 | US20040200411 Apparatus for fabricating nanoscale patterns in light curable compositions using an electric field |
| 10/14/2004 | US20040200368 Mold structures, and method of transfer of fine structures |
| 10/14/2004 | DE10314447A1 Method of manufacturing a structured or stochastic microstructured surface of a component e.g. hydraulic drive or fuel injection system of vehicle, involves forming recesses in the surface by forced cavitation |
| 10/14/2004 | DE10311855A1 Appliance for transfer of information or structures onto wafer, using stamp with raised structures produced by suitable method, e.g. photolithography in conjunction with etching |
| 10/12/2004 | US6803637 Micromechanical component with different doping types so that one type is anodized into porous silicon |
| 10/07/2004 | WO2004086461A2 Methods for nanoscale structures from optical lithography and subsequent lateral growth |
| 10/07/2004 | WO2004086460A2 Method and systems for single- or multi-period edge definition lithography |
| 10/07/2004 | WO2004085700A1 Method for the manufacture of a freestanding substrate |
| 10/07/2004 | WO2004062899A3 Method for manufacturing of polymer micro needle array with liga process |
| 10/07/2004 | WO2003092048B1 Micro electro-mechanical system method |
| 10/07/2004 | US20040198064 Small scale wires with microelectromechanical devices |
| 10/07/2004 | US20040197953 Method for protecting encapsulated sensor structures using stack packaging |
| 10/07/2004 | US20040196058 Method for fabricating a probe pin for testing electrical characteristics of an apparatus |
| 10/07/2004 | US20040195638 Micromechanical component as well as a method for producing a micromechanical component |
| 10/07/2004 | US20040195096 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors |
| 10/07/2004 | DE10312202A1 Verfahren zum Herstellen einer Ätzmaske auf einer Mikrostruktur, insbesondere einer Halbleiterstruktur mit Grabenkondensatoren, und entsprechende Verwendung der Ätzmaske A method of manufacturing an etching mask on a microstructure, in particular a semiconductor structure with grave capacitors and corresponding use of the etching mask |
| 10/06/2004 | EP1464615A2 Method for protecting encapsulated sensor structures using stack packaging |
| 10/06/2004 | EP1463684A2 Method for producing a protective covering for a component |
| 10/06/2004 | EP1171378B1 A method of manufacturing a thermal bend actuator |
| 10/06/2004 | CN1533980A Integrated circuit component element and manufacturing method of micro electromechanical system |
| 10/05/2004 | US6800503 MEMS encapsulated structure and method of making same |
| 10/05/2004 | US6799839 Structure provided with through hole, method of manufacture therefor, and liquid discharge head |
| 09/30/2004 | WO2004083111A1 A method for manfacturing a membrane in a (111) surface of a (100) silicium wafer |
| 09/30/2004 | WO2004036264A3 Polymers, methods of use thereof, and methods of decomposition thereof |
| 09/30/2004 | US20040191937 Barrier layers for microelectromechanical systems |
| 09/30/2004 | US20040190377 Method and means for isolating elements of a sensor array |
| 09/30/2004 | US20040188808 Structural element having a porous region and its use as well as method for setting the thermal conductivity of a porous region |
| 09/30/2004 | US20040188783 Micromechanical device and method of manufacture thereof |
| 09/30/2004 | US20040188381 Positive tone bi-layer imprint lithography method |
| 09/30/2004 | US20040187592 Physical quantity sensor having protrusion and method for manufacturing the same |
| 09/30/2004 | DE102004008024A1 Verfahren zur Herstellung von mikrotechnischen Bauteilen und damit erzeugte Anordnung A process for the production of micro-components, and assembly thus produced |