| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 09/22/2010 | CN201590387U Gun core of electronic gun |
| 09/22/2010 | CN1934288B Plasma CVD equipment |
| 09/22/2010 | CN101842868A Method for manufacturing a treated surface and vacuum plasma sources |
| 09/22/2010 | CN101840850A Apparatus for chemically etching a workpiece |
| 09/22/2010 | CN101837943A Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof |
| 09/22/2010 | CN101459054B Plasma processing apparatus |
| 09/22/2010 | CN101375363B Diamond electron radiation cathode, electron source, electron microscope, and electron beam exposer |
| 09/22/2010 | CN101241844B In-situ dry clean chamber for front end of line fabrication |
| 09/21/2010 | US7800766 Method and apparatus for detecting and adjusting substrate height |
| 09/21/2010 | US7800312 Dual mode ion source for ion implantation |
| 09/21/2010 | US7800082 Electromagnet with active field containment |
| 09/21/2010 | US7800077 Specimen holder for electron microscope |
| 09/21/2010 | US7800076 Electron-optical corrector for aplanatic imaging systems |
| 09/21/2010 | US7800074 Electron-optical corrector for an aplanatic imaging system |
| 09/21/2010 | US7800059 Method of forming a sample image and charged particle beam apparatus |
| 09/21/2010 | US7800012 Electron gun with a focusing anode, forming a window for said gun and application thereof to irradiation and sterilization |
| 09/21/2010 | US7799691 System and method for anisotropically etching a recess in a silicon substrate |
| 09/21/2010 | US7799179 Uniformly depositing thin films of different materials; generates external magnetic field with parallel field lines in substrate plane; circular alignment; having target areas pointing radially outward; producing accurate nonvolatile memory storage devices |
| 09/21/2010 | US7799134 Shower plate having projections and plasma CVD apparatus using same |
| 09/21/2010 | US7797984 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| 09/16/2010 | WO2010102757A1 Method for assembling an electron exit window and an electron exit window assembly |
| 09/16/2010 | WO2010042916A4 High accuracy beam placement for local area navigation |
| 09/16/2010 | WO2010034781A4 Radiation-cured coatings |
| 09/16/2010 | WO2009141655A3 Improved particle beam generator |
| 09/16/2010 | WO2009062929A3 Beam device and system comprising a particle beam device and an optical microscope |
| 09/16/2010 | US20100234948 Methods for improving the bioactivity characteristics of a surface and objects with surfaces improved thereby |
| 09/16/2010 | US20100230617 Charged particle radiation therapy |
| 09/16/2010 | US20100230616 Method of smoothing solid surface with gas cluster lon beam and solid surface smoothing apparatus |
| 09/16/2010 | US20100230609 Sample carrier for sample holder |
| 09/16/2010 | US20100230592 Sample Transfer Unit and Sample Transferring Method |
| 09/16/2010 | US20100230591 Transmission electron microscope |
| 09/16/2010 | US20100230590 Compact Scanning Electron Microscope |
| 09/16/2010 | US20100230584 Method for setting an operating parameter of a particle beam device and a sample holder for performing the method |
| 09/16/2010 | US20100230386 Processing device, electrode, electrode plate, and processing method |
| 09/16/2010 | DE102009013143B3 Device for hardening coating of motor vehicle chassis by electron irradiation, has irradiation chamber with holding device for arranging chassis, where electron sources are arranged in irradiation chamber |
| 09/16/2010 | DE102007010462B4 Verfahren zur Herstellung einer Teilchenstrahlquelle A method for producing a particle beam |
| 09/16/2010 | DE102004063643B4 Ionenimplantationsvorrichtung und Verfahren zum Implantieren von Ionen durch Verwendung derselben An ion implantation apparatus and method for implanting ions by using the same |
| 09/15/2010 | EP2228818A2 Method for monitoring plasma discharges |
| 09/15/2010 | EP2228817A2 Global point spreading function in multi-beam patterning |
| 09/15/2010 | CN201584396U Liner and plasma device adopting same |
| 09/15/2010 | CN201581128U Tooling for supporting silicon chip |
| 09/15/2010 | CN101834109A Semiconductor manufacturing apparatus |
| 09/15/2010 | CN101320680B Anti-arc protection device and its assembling method |
| 09/15/2010 | CN101194338B High frequency-plasma source with plurality of out-of-phase electrodes |
| 09/14/2010 | USRE41665 Object observation apparatus and object observation |
| 09/14/2010 | US7795153 Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of selected chamber parameters |
| 09/10/2010 | WO2010077659A3 Closed drift magnetic field ion source apparatus containing self-cleaning anode and a process for substrate modification therewith |
| 09/09/2010 | US20100227523 Methods for improving the bioactivity characteristics of a surface and objects with surfaces improved thereby |
| 09/09/2010 | US20100227200 Aberration evaluation pattern, aberration evaluation method, aberration correction method, electron beam drawing apparatus, electron microscope, master, stamper, recording medium, and structure |
| 09/09/2010 | US20100224789 Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam |
| 09/09/2010 | US20100224779 Layered scanning charged particle microscope package for a charged particle and radiation detector |
| 09/09/2010 | US20100224778 Layered scanning charged particle apparatus package having an embedded heater |
| 09/09/2010 | US20100224777 Layered scanning charged particle microscope with differential pumping aperture |
| 09/09/2010 | US20100224592 Charged particle beam processing |
| 09/09/2010 | DE102010002617A1 High-voltage direct current generator for e.g. transmission electron microscope, has amplifier connected with capacitive power splitter for receiving detected variations of smoothed high voltage, and voltage supply connected with amplifier |
| 09/09/2010 | DE102009011102A1 Electrostatically operating optical element e.g. drift tubes, for use in ion mobility spectrometer, has mechanical assembly part, where potential is produced by resistance path on mechanical assembly part |
| 09/08/2010 | EP2226832A1 Substrate plasma treatment using side tabs |
| 09/08/2010 | EP2226831A1 Electron microscope |
| 09/08/2010 | EP2226830A2 Charged particle beam processing |
| 09/08/2010 | CN101828246A Method of treating a surface of at least one part by means of individual sources of an electron cyclotron resonance plasma |
| 09/08/2010 | CN101826435A Plasma etching method, plasma etching apparatus and computer-readable storage medium |
| 09/08/2010 | CN101826434A Plasma processing apparatus and electrode for same |
| 09/08/2010 | CN101443878B Electrode systems and methods of using electrodes |
| 09/08/2010 | CN101355004B Plasma reactor with reduced electrical skew using electrical bypass elements |
| 09/08/2010 | CN101217096B A quick RF automatic impedance matching method |
| 09/08/2010 | CN101128911B System and process for high-density, low-energy plasma enhanced vapor phase epitaxy |
| 09/08/2010 | CN101026078B Ion injection device |
| 09/08/2010 | CN101006545B Method for reciprocating a workpiece through an ion beam |
| 09/07/2010 | US7791281 two spaced electrodes, wherein at least one plasma pulse comprising an absolute pulse maximum, is generated by applying an AC plasma energizing voltage to such electrodes causing a plasma current and a displacement current |
| 09/07/2010 | US7791050 Method and apparatus for specimen fabrication |
| 09/07/2010 | US7791049 Ion implantation apparatus |
| 09/07/2010 | US7791047 Method and apparatus for extracting ions from an ion source for use in ion implantation |
| 09/07/2010 | US7791043 Stage mechanism, electron microscope having the stage mechanism and method of controlling positioning of stage mechanism |
| 09/07/2010 | US7791041 Ion source, ion implantation apparatus, and ion implantation method |
| 09/07/2010 | US7791024 Method of measuring dimension of film constituting element and apparatus therefor |
| 09/07/2010 | US7791022 Scanning electron microscope with length measurement function and dimension length measurement method |
| 09/07/2010 | US7791020 Multistage gas cascade amplifier |
| 09/07/2010 | US7791005 Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions |
| 09/02/2010 | WO2010098779A1 Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator |
| 09/02/2010 | WO2010097861A1 Charged particle beam device |
| 09/02/2010 | WO2010097860A1 Charged particle beam device and method for correcting position with respect to charged particle beam |
| 09/02/2010 | WO2010097858A1 Electron microscope, and specimen holding method |
| 09/02/2010 | US20100223036 Apparatus, Method and Simulation Objects for Simulation of the Image Formation in a Transmission Electron Microscope |
| 09/02/2010 | US20100219357 System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission |
| 09/02/2010 | US20100218722 High velocity method for depositing diamond films from a gaseous phase in SHF discharge plasma and a plasma reactor for carrying out said method |
| 09/02/2010 | DE212007000107U1 Ringförmige Plasmakammer für Prozesse mit hohen Gasdurchflussraten Annular plasma chamber for processes with high gas flow rates |
| 09/02/2010 | DE202010009379U1 Vorrichtung zur Strukturierung von Festkörperflächen mit Ionenstrahlen aus einem Ionenstrahlspektrum Device for patterning of solid surfaces with ion beams from an ion beam spectrum |
| 09/02/2010 | DE19740807B4 Verfahren zum Nachweis geladener Teilchen A method of detecting charged particles |
| 09/02/2010 | DE102009014039A1 Spray head is provided with vacuum housing, in which electron source is arranged, and has spray finger, which is connected with vacuum housing and has discharge port at distal end |
| 09/01/2010 | EP2224468A1 Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method |
| 09/01/2010 | EP2224465A2 Method and device for creating image contrast with the use of phase shifting |
| 09/01/2010 | EP2224464A1 Corpuscular optical image-forming system |
| 09/01/2010 | EP2223328A1 A method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source |
| 09/01/2010 | EP2223327A2 Methods and systems for removing a material from a sample |
| 09/01/2010 | EP2223326A2 Directed-energy systems and methods for disrupting electronic circuits |
| 09/01/2010 | EP2095392B1 Method for operating a plasma process and plasma system |
| 09/01/2010 | CN1998062B Methods for stable and repeatable plasma ion implantation |
| 09/01/2010 | CN1796966B Clamp for preparing detection sample in use for electron microscope |
| 09/01/2010 | CN1714422B Method for the production of a substrate with a magnetron sputter coating and unit for the same |
| 09/01/2010 | CN1531012B Plasma treating method and treater |