Patents
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
09/1976
09/21/1976US3981791 Vacuum sputtering apparatus
09/14/1976US3980044 Apparatus for depositing thin coats by vaporization under the simultaneous action of an ionized gas
09/07/1976US3979590 Electron microscope comprising an energy analyzer
09/07/1976US3978686 Or handling of a cold tissue section especially obtained from an ultramicrotome and arrangements for practice of the process
08/1976
08/31/1976US3978338 Illumination system in a scanning electron microscope
08/31/1976US3977955 Method for cathodic sputtering including suppressing temperature rise
08/24/1976US3976908 Electron beam generator with linear cathode
08/17/1976US3975613 Electron beam-generating system
08/10/1976US3974381 Method of electron beam welding with X-ray detection
08/10/1976US3974059 High vacuum ion plating device
08/03/1976US3973125 Corpuscular-ray apparatus with a cryogenically cooled specimen space
08/03/1976US3972436 Safety closure cap
07/1976
07/27/1976US3971936 Corpuscular beam microscope, particularly electron microscope, with adjusting means for changing the position of the object to be imaged or the image of the object
07/20/1976US3970892 Ion plasma electron gun
07/20/1976US3970854 High speed ion beam switching arrangement for use in the production of determinate solid body dopings by means of ion implantation
07/20/1976US3970849 Device for mass analysis and structure analysis of a surface layer by means of ion scattering
07/13/1976US3969646 Electron-bombardment ion source including segmented anode of electrically conductive, magnetic material
06/1976
06/29/1976US3967127 Sample introducer
06/29/1976US3967125 Method and apparatus for making phosphors
06/29/1976US3966999 Method of processing an organic high molecular weight film
06/22/1976US3965326 Welding by electron bombardment
06/15/1976US3963923 Ion microprobes
06/08/1976US3962530 High-voltage liquid-cooled apparatus and supply leads therefor
06/01/1976US3961190 Voltage contrast detector for a scanning electron beam instrument
06/01/1976US3961103 Glow discharge ion source, vacuum deposition
06/01/1976US3961102 Thin film electron resists
06/01/1976US3960605 Method of implantation of boron ions utilizing a boron oxide ion source
05/1976
05/25/1976US3959651 Electron microscope
05/25/1976US3958848 Method of fabricating field desorption ion source
05/18/1976US3958124 Method and apparatus for sem specimen coating and transfer
05/11/1976US3956652 Device on a metallic gas-discharge vessel for current lead-in through its wall
05/11/1976US3956635 Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns
05/11/1976US3956093 Planar magnetron sputtering method and apparatus
05/04/1976US3955118 Cold-cathode ion source
05/04/1976US3954954 Plasma method and apparatus for carrying out high temperature chemical reactions
04/1976
04/20/1976US3952255 Linear acceleration system for high energy electrons with preacceleration and main acceleration means
04/20/1976US3952215 Stepwise fine adjustment
04/20/1976US3952203 Object adjustment device for a charged particle beam apparatus
04/20/1976US3952198 Electron lens
04/20/1976US3952146 Electron beam recording of wide-band signals on thermoplastic film
04/20/1976US3951695 Automatic end station for ion implantation system
04/13/1976US3950610 Image analysers
04/13/1976US3950176 Semiconducting glasses and the method of preparation thereof
04/06/1976US3949228 Method for controlling an electron beam
04/06/1976US3949187 Electron-beam evaporation apparatus
03/1976
03/23/1976US3946268 Field emission gun improvement
03/23/1976US3945698 Method of stabilizing emitted electron beam in field emission electron gun
03/16/1976US3944873 Hollow cathode type ion source system including anode screen electrodes
03/16/1976US3944866 Thermionic emitter of lanthanum strontium vanadates
03/16/1976US3944829 Method and apparatus for processing a video signal from a scanning electron microscope
03/16/1976US3944825 Method and apparatus for the separation of isotopes
03/02/1976US3942017 Apparatus for irradiation with electron beam
03/02/1976US3942005 Electron scanning apparatus
02/1976
02/24/1976US3940615 Wide angle isotope separator
02/17/1976US3939353 Electron microscope specimen mounting apparatus
02/17/1976US3939344 Prefilter-ionizer apparatus for use with quadrupole type secondary-ion mass spectrometers
02/10/1976US3938001 Protection circuit for electron gun
02/10/1976US3937959 Method and apparatus for automatically focusing
02/10/1976US3937958 Charged particle beam apparatus
02/03/1976US3936756 Field emission electron gun having automatic current control
02/03/1976US3936690 Mobile ion film memory
01/1976
01/13/1976US3932749 Electron gun
01/13/1976US3932232 Suppression of X-ray radiation during sputter-etching
01/06/1976US3931542 Method and apparatus for energizing materials in an electric arc
01/06/1976US3931519 Field emission electron gun
01/06/1976US3931517 Field emission electron gun