| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 03/05/2015 | WO2015031017A1 Method and apparatus for plasma dicing a semi-conductor wafer |
| 03/05/2015 | WO2015030271A1 Sample stage for multipurpose three-dimensional imaging and precision control device of sample holder in transmission electron microscope |
| 03/05/2015 | WO2015029542A1 Weak signal detection system and electron microscope equipped with same |
| 03/05/2015 | WO2015029201A1 Spin detector, charged particle beam device and photoemission spectroscopic device |
| 03/05/2015 | WO2015029200A1 Charged particle beam lens module and charged particle beam device equipped with same |
| 03/05/2015 | WO2015028753A1 Method for the correction of electron proximity effects |
| 03/05/2015 | US20150064924 Method for etching organic film and plasma etching device |
| 03/05/2015 | US20150064923 Plasma processing device and plasma processing method |
| 03/05/2015 | US20150064922 Method of selectively removing a region formed of silicon oxide and plasma processing apparatus |
| 03/05/2015 | US20150064920 System, Method and Apparatus for Generating Pressure Pulses in Small Volume Confined Process Reactor |
| 03/05/2015 | US20150064888 Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method |
| 03/05/2015 | US20150064887 Ion implantation apparatus and ion implantation method |
| 03/05/2015 | US20150064879 Separation of Chips on a Substrate |
| 03/05/2015 | US20150064814 Mechanisms for monitoring ion beam in ion implanter system |
| 03/05/2015 | US20150064810 Low Contamination Chamber for Surface Activation |
| 03/05/2015 | US20150064364 Deposition System And Method Of Forming A Metalloid-Containing Material Therewith |
| 03/05/2015 | US20150064056 Tantalum sputtering target, method for manufacturing same, and barrier film for semiconductor wiring formed by using target |
| 03/05/2015 | US20150062710 Transparent body for use in a touch panel and its manufacturing method for apparatus |
| 03/05/2015 | US20150061496 System for Generating High Speed Flow of an Ionized Gas |
| 03/05/2015 | US20150060704 Writing data correcting method, writing method, and manufacturing method of mask or template for lithography |
| 03/05/2015 | US20150060701 Method and Apparatus for Predicting a Growth Rate of Deposited Contaminants |
| 03/05/2015 | US20150060695 Charged particle beam apparatus |
| 03/05/2015 | US20150060694 Charged particle beam device |
| 03/05/2015 | US20150060691 Semiconductor process pumping arrangements |
| 03/05/2015 | US20150060690 Charged particle beam writing apparatus, and charged particle beam writing method |
| 03/05/2015 | US20150060670 System and Method for Controlling Charge-up in an Electron Beam Apparatus |
| 03/05/2015 | US20150060669 Three-Dimensional Semiconductor Image Reconstruction Apparatus and Method |
| 03/05/2015 | US20150060668 Charged particle beam apparatus |
| 03/05/2015 | US20150060667 Charged particle beam apparatus |
| 03/05/2015 | US20150060666 Specimen observation method and device using secondary emission electron and mirror electron detection |
| 03/05/2015 | US20150060665 System and Method for Controlling Charge-up in an Electron Beam Apparatus |
| 03/05/2015 | US20150060662 Apparatus of plural charged particle beams with multi-axis magnetic lens |
| 03/05/2015 | US20150060660 Method for coincident alignment of a laser beam and a charged particle beam |
| 03/05/2015 | US20150060654 Charged particle beam device and arithmetic device |
| 03/05/2015 | US20150060404 System, Method and Apparatus for Coordinating Pressure Pulses and RF Modulation in a Small Volume Confined Process Reactor |
| 03/05/2015 | US20150060265 Dual discharge modes operation for remote plasma |
| 03/05/2015 | US20150060263 Vacuum film deposition device and vacuum film deposition method |
| 03/05/2015 | US20150060262 Sputtering systems for liquid target materials |
| 03/05/2015 | US20150060261 Target adapted to an indirect cooling device |
| 03/05/2015 | US20150060013 Tunable temperature controlled electrostatic chuck assembly |
| 03/05/2015 | US20150059981 Hot wall reactor with cooled vacuum containment |
| 03/05/2015 | US20150059980 Plasma processing apparatus |
| 03/05/2015 | US20150059979 Plasma processing apparatus for vapor phase etching and cleaning |
| 03/05/2015 | US20150059910 Plasma cvd apparatus, method for forming film and dlc-coated pipe |
| 03/05/2015 | DE112013003048T5 Tischvorrichtung und Probenbetrachtungsvorrichtung Table apparatus and sample viewing device |
| 03/05/2015 | DE112013003012T5 Kryo-Probenhalter und Dewargefäß Cryogenic sample holder and Dewar |
| 03/05/2015 | DE102013109413A1 Magnetronsputtervorrichtung und Verfahren zum Betreiben einer Magnetronsputtervorrichtung Magnetron sputtering apparatus and method for operating a magnetron sputtering |
| 03/04/2015 | EP2844043A2 Plasma generator (variants) |
| 03/04/2015 | EP2843780A1 Electron-beam-supported production of electrical components |
| 03/04/2015 | EP2843398A1 Electron source and X-ray fluorescence analyser using an electron source |
| 03/04/2015 | EP2842152A1 Apparatus and methods for high-resolution electron beam imaging |
| 03/03/2015 | US8970114 Temperature controlled window of a plasma processing chamber component |
| 03/03/2015 | US8969837 Multi charged particle beam writing method, and multi charged particle beam writing apparatus |
| 03/03/2015 | US8969836 Method and apparatus for electron beam lithography |
| 03/03/2015 | US8969835 Particle beam system including a supply of process gas to a processing location |
| 03/03/2015 | US8969828 Scanning electron microscope with a table being guided by rolling friction elements |
| 03/03/2015 | US8969801 Scanning electron microscope |
| 03/03/2015 | US8969212 Dry-etch selectivity |
| 03/03/2015 | US8969210 Plasma etching apparatus, plasma etching method, and semiconductor device manufacturing method |
| 03/03/2015 | US8968838 Plasma processing in a capacitively-coupled reactor with trapezoidal-waveform excitation |
| 03/03/2015 | US8968668 Arrays of metal and metal oxide microplasma devices with defect free oxide |
| 03/03/2015 | US8968538 Sputtering device and sputtering method |
| 03/03/2015 | US8968537 PVD sputtering target with a protected backing plate |
| 03/03/2015 | US8968536 Sputtering target having increased life and sputtering uniformity |
| 03/03/2015 | US8968535 Ion beam source |
| 03/03/2015 | US8968514 Gas distributing device and substrate processing apparatus including the same |
| 03/03/2015 | US8968513 Plasma processing apparatus |
| 03/03/2015 | US8968512 Temperature adjusting mechanism and semiconductor manufacturing apparatus using temperature adjusting mechanism |
| 03/03/2015 | US8968474 Substrate processing apparatus and method of disassembling and assembling the same |
| 03/03/2015 | US8968438 Methods and apparatus for the in situ collection of nucleated particles |
| 03/03/2015 | US8967080 Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method |
| 02/26/2015 | WO2015027188A1 Variable-illumination fourier ptychographic imaging devices, systems, and methods |
| 02/26/2015 | WO2015026824A1 Methods and systems for fabricating platelets of a monochromator for x-ray photoelectron spectroscopy |
| 02/26/2015 | WO2015025545A1 Diaphragm mounting member and charged particle beam device |
| 02/26/2015 | WO2015025032A1 Method and device for detecting a plasma ignition |
| 02/26/2015 | US20150058814 Method and system for obtaining optical proximity correction model calibration data |
| 02/26/2015 | US20150056381 Method for forming conductive film |
| 02/26/2015 | US20150056380 Ion source of an ion implanter |
| 02/26/2015 | US20150056373 Deposition method and deposition apparatus |
| 02/26/2015 | US20150056366 Ion implanter, magnetic field measurement device, and ion implantation method |
| 02/26/2015 | US20150056095 Low energy electron sterilization |
| 02/26/2015 | US20150054405 Plasma generating device |
| 02/26/2015 | US20150053867 Pattern formation method, mask for pattern formation, method for manufacturing mask, and pattern formation apparatus |
| 02/26/2015 | US20150053866 Repair Apparatus |
| 02/26/2015 | US20150053857 Stage apparatus, and charged particle beam apparatus using same |
| 02/26/2015 | US20150053856 Protein Layers And Their Use In Electron Microscopy |
| 02/26/2015 | US20150053855 Charged particle beam apparatus and method of correcting landing angle of charged particle beam |
| 02/26/2015 | US20150053794 Heated showerhead assembly |
| 02/26/2015 | US20150053645 Plasma processing apparatus and plasma processing method |
| 02/26/2015 | US20150053644 Methods for Selectively Modifying RF Current Paths in a Plasma Processing System |
| 02/26/2015 | US20150053553 Plasma processing apparatus |
| 02/26/2015 | US20150053548 Tem sample preparation |
| 02/26/2015 | US20150053348 Plasma processing apparatus |
| 02/26/2015 | US20150053346 Plasma processing apparatus and plasma processing method |
| 02/26/2015 | US20150053331 Thin film transistor |
| 02/26/2015 | US20150053135 Strap for plasma processing apparatus and plasma processing apparatus having the same |
| 02/26/2015 | US20150052776 Drying apparatus for use in a lithography system |
| 02/26/2015 | DE112013002842T5 Probenhalter und Verfahren zum Befestigen einer Untersuchungsprobe Sample holder and method for fixing a test sample |
| 02/26/2015 | DE102014112044A1 Reperaturvorrichtung Repair device |
| 02/26/2015 | DE102013109078A1 Prozessanordnung und Verfahren zum Betreiben einer Prozessanordnung Process arrangement and method for operating a process arrangement |