| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 02/24/2011 | DE102009028182B3 High frequency-photoelectron source has semiconducting cavity resonator system that has cathode, choke cell and gun cell |
| 02/23/2011 | EP2287886A1 Plasma treatment system |
| 02/23/2011 | EP2287885A2 Vacuum plasma processor including control in response to DC bias voltage |
| 02/23/2011 | EP2287884A2 Gas flow sputter source |
| 02/23/2011 | EP2287883A2 Apparatus and method for investigating or modifying a surface with a beam of charged particles |
| 02/23/2011 | EP2287356A1 Sputter target, method and apparatus for manufacturing sputter targets |
| 02/23/2011 | EP2286643A1 Device and method for high-performance pulsed gas flow sputtering |
| 02/23/2011 | EP2286436A1 Method and apparatus for plasma surface treatment of moving substrate |
| 02/23/2011 | EP2286275A1 Sensor head for an x-ray detector and x-ray detector containing said sensor head |
| 02/23/2011 | EP2286001A1 Method of coating inner and outer surfaces of pipes for thermal solar and other applications |
| 02/23/2011 | EP1612853B1 Cooling device for vacuum treatment device |
| 02/23/2011 | EP0913074B1 Plasma etch reactor and method of etching a wafer |
| 02/23/2011 | CN201751976U Processing device with plasma |
| 02/23/2011 | CN1967224B Spectrometer for surface analysis and method therefor |
| 02/23/2011 | CN101981651A XRF system having multiple excitation energy bands in highly aligned package |
| 02/23/2011 | CN101981650A Electrostatic lens for charged particle radiation |
| 02/23/2011 | CN101979706A Vaporizer |
| 02/22/2011 | US7893411 Charged-particle beam writing apparatus and charged-particle beam writing method |
| 02/22/2011 | US7892357 Gas distribution plate assembly for plasma reactors |
| 02/17/2011 | WO2011019276A1 Method of manufacturing a micro unit and a micro unit for use in a microscope |
| 02/17/2011 | WO2011018932A1 Charged particle beam device and image display method |
| 02/17/2011 | US20110039403 Method for Implanting Ions In Semiconductor Device |
| 02/17/2011 | US20110037000 Method And Apparatus for Uniformly Implanting A Wafer With An Ion Beam |
| 02/17/2011 | DE202010015818U1 Vorrichtung zum Behandeln eines Substrats mittels eines Plasmas An apparatus for treating a substrate by means of a plasma |
| 02/17/2011 | DE202010014805U1 Heissrandring mit geneigter oberer Oberfläche Hot edge ring with an inclined upper surface |
| 02/16/2011 | EP2284864A1 Electron beam lithography system and method for electron beam lithography |
| 02/16/2011 | EP2284524A2 Microcalorimetry for X-ray spectroscopy |
| 02/16/2011 | EP2283511A1 A system for analysing plasma |
| 02/16/2011 | EP2283510A1 Plasma treatment apparatus and method for plasma-assisted treatment of substrates |
| 02/16/2011 | EP2283509A1 Control of particles on semiconductor wafers when implanting boron hydrides |
| 02/16/2011 | EP1784932B1 Integrated ewp-stm spin resonance microscope |
| 02/16/2011 | EP1235251B1 Electron beam apparatus |
| 02/16/2011 | CN1777974B Critical dimension variation compensation across a wafer by means of local wafer temperature control |
| 02/16/2011 | CN101978461A Method for controlling ion energy in radio frequency plasmas |
| 02/16/2011 | CN101978241A Microstructure inspection method, microstructure inspection apparatus, and microstructure inspection program |
| 02/16/2011 | CN101974735A Inductively coupled plasma processing apparatus |
| 02/16/2011 | CN101410931B Coating apparatus |
| 02/16/2011 | CN101390186B Aberration-correcting cathode lens microscopy instrument |
| 02/15/2011 | US7888662 Ion source cleaning method and apparatus |
| 02/15/2011 | US7888661 Methods for in situ surface treatment in an ion implantation system |
| 02/15/2011 | US7888660 Controlling the characteristics of implanter ion-beams |
| 02/15/2011 | US7888652 Ion implantation apparatus |
| 02/15/2011 | US7888642 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
| 02/15/2011 | US7888641 Electron microscope with electron spectrometer |
| 02/15/2011 | US7888640 Scanning electron microscope and method of imaging an object by using the scanning electron microscope |
| 02/15/2011 | US7888639 Method and apparatus for processing a micro sample |
| 02/15/2011 | US7887637 Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning |
| 02/10/2011 | WO2011017618A1 Cold implant for optimized silicide formation |
| 02/10/2011 | WO2011017314A2 Closed drift ion source with symmetric magnetic field |
| 02/10/2011 | WO2011016208A1 Scanning electron microscope and sample observation method |
| 02/10/2011 | WO2011016182A1 Charged-particle microscope |
| 02/10/2011 | US20110033788 Charged particle beam drawing apparatus and method |
| 02/10/2011 | US20110031657 Electron Beam Irradiation of Bulk Material Solids |
| 02/10/2011 | US20110031397 Method for stem sample inspection in a charged particle beam instrument |
| 02/10/2011 | US20110031395 Transmission electron microscope and method for observing specimen image with the same |
| 02/10/2011 | US20110031387 Charged particle beam writing apparatus and method thereof |
| 02/10/2011 | US20110030898 Plasma Processing Apparatus and the Upper Electrode Unit |
| 02/10/2011 | DE202010014528U1 Einrichtung zur visuellen Kontrolle der Positionsjustierung der Kathode einer elektronischen Kanone für ein Elektronenmikroskop (Rastermikroskop) Means for visually checking the position adjustment of the cathode of an electronic gun for an electron microscope (microscope) |
| 02/10/2011 | DE19816914B4 Abtastmikroskop Scanning tunneling microscope |
| 02/10/2011 | DE102008057342B4 Gasentladungskammer mit Glühkathode und Polschuhlinse Gas discharge chamber with hot cathode and Polschuhlinse |
| 02/09/2011 | EP2282197A2 Particle beam systems and methods |
| 02/09/2011 | EP2281296A2 Beamlet blanker arrangement |
| 02/09/2011 | EP2178631B1 Methods and apparatus for the production of group iv nanoparticles in a flow-through plasma reactor |
| 02/09/2011 | EP1790201B1 Plasma nozzle array for providing uniform scalable microwave plasma generation |
| 02/09/2011 | EP1754243B1 Device and method for sputtering with the aid of a displaceable planar target |
| 02/09/2011 | EP1287548B1 Plasma etching equipment |
| 02/09/2011 | CN201741661U Ion implantation dosage detection controller of plasma immersion implanter |
| 02/09/2011 | CN1969365B Charge neutralization device |
| 02/09/2011 | CN1838386B Plasma processing device |
| 02/09/2011 | CN1342340B Power supplies having protection circuit |
| 02/09/2011 | CN101971714A Method and generator circuit for production of plasmas by means of radio-frequency excitation |
| 02/09/2011 | CN101971289A A method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source |
| 02/09/2011 | CN101971288A Plasma system |
| 02/09/2011 | CN101971287A Electrode arrangement with movable shield |
| 02/09/2011 | CN101971286A In-vacuum protective liners |
| 02/09/2011 | CN101969016A Plasma processing apparatus and plasma processing method |
| 02/09/2011 | CN101685753B Ion source with gas buffer balancing function |
| 02/09/2011 | CN101488391B Composite magnet with edge field amendment |
| 02/08/2011 | US7884336 Sponge sanitizing enclosure |
| 02/08/2011 | US7884321 Method and system for non-destructive distribution profiling of an element in a film |
| 02/08/2011 | US7884302 Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece |
| 02/08/2011 | US7883831 Method for translating a structured beam of energetic particles across a substrate in template mask lithography |
| 02/08/2011 | US7883779 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| 02/08/2011 | US7883633 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 02/08/2011 | US7883630 FIB milling of copper over organic dielectrics |
| 02/08/2011 | US7883602 Electrode assembly for the removal of surface oxides by electron attachment |
| 02/08/2011 | US7882800 Ring mechanism, and plasma processing device using the ring mechanism |
| 02/03/2011 | WO2011014779A1 A mask health monitor using a faraday probe |
| 02/03/2011 | WO2011013650A1 Charged-particle-beam device |
| 02/03/2011 | WO2011013342A1 Pattern evaluation method, device therefor, and electron beam device |
| 02/03/2011 | WO2011013323A1 Scanning electron microscope |
| 02/03/2011 | WO2011013311A1 Ion milling device |
| 02/03/2011 | WO2011012255A1 Plasma stamp and method for plasma treating a surface |
| 02/03/2011 | WO2011012185A1 Cleaning of a process chamber |
| 02/03/2011 | WO2010144273A3 A masking apparatus for an ion implanter |
| 02/03/2011 | US20110029117 Ion implanter, ion implantation method and program |
| 02/03/2011 | US20110025340 Semiconductor device analyzer and semiconductor device analysis method |
| 02/03/2011 | US20110024622 System and method for material analysys of a microscopic element |
| 02/03/2011 | US20110024621 Scanning electron microscope control device, control method, and program |
| 02/03/2011 | DE102009033319A1 Partikelstrahl-Mikroskopiesystem und Verfahren zum Betreiben desselben Of the same particle beam microscopy system and method for operating |