| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/07/2011 | WO2011041223A1 Method for ion source component cleaning |
| 04/07/2011 | WO2011041100A1 Variable energy charged particle systems |
| 04/07/2011 | WO2011040326A1 Rod for electron source, electron source, and electronic appliance |
| 04/07/2011 | WO2011039908A1 Charged-particle microscope device and method for inspecting sample using same |
| 04/07/2011 | WO2011039316A1 Method for coating a substrate and coater |
| 04/07/2011 | WO2011039192A1 Magnet arrangement for a target backing tube and target backing tube comprising the same |
| 04/07/2011 | WO2010135444A3 Simultaneous sample modification and monitoring |
| 04/07/2011 | US20110079732 Sports ball sterilizer |
| 04/07/2011 | DE202010012763U1 Festgeklemmte monolithische Gasverteilungselektrode Clamped monolithic gas distribution electrode |
| 04/06/2011 | EP2306490A1 Magnet arrangement for a target backing tube and target backing tube comprising the same |
| 04/06/2011 | EP2306489A1 Method for coating a substrate and coater |
| 04/06/2011 | EP2304765A1 Method and apparatus for measurement of beam angle in ion implantation |
| 04/06/2011 | EP2304764A2 System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes |
| 04/06/2011 | EP2304763A1 Post-decel magnetic energy filter for ion implantation systems |
| 04/06/2011 | EP2304762A1 Method to produce a field-emitter array with controlled apex sharpness |
| 04/06/2011 | EP2304071A1 A film depositing apparatus and method |
| 04/06/2011 | EP2304070A1 Sputtering system and method including an arc detection system |
| 04/06/2011 | EP2156505B1 Circuit and method for reducing electrical energy stored in a lead inductance for fast extinction of plasma arcs |
| 04/06/2011 | EP1913603B1 Treatment station for particle bombardment of a patient and a particle therapy installation |
| 04/06/2011 | EP1592040B1 Electron source |
| 04/06/2011 | EP1166321B1 Plasma processor with coil having variable rf coupling |
| 04/06/2011 | CN201788937U High-density electrode device for treating plasma surfaces |
| 04/06/2011 | CN201788936U Ceramic ring for accelerating pole of transmission electron microscope |
| 04/06/2011 | CN102007565A Substrate processing system and substrate processing method |
| 04/06/2011 | CN102007564A Ion source with adjustable aperture |
| 04/06/2011 | CN102005362A Calibration system and calibration method for dual-Faraday cup measuring ratios of ion implantation machine |
| 04/06/2011 | CN102005358A Charged particle beam exposure system |
| 04/06/2011 | CN102005357A Transmission electron microscope micro-grid |
| 04/06/2011 | CN101634015B Converting device of silicon wafer loading devices for PECVD |
| 04/06/2011 | CN101572208B Plasma processing apparatus and method |
| 04/06/2011 | CN101510506B Ion implantation method and apparatus |
| 04/06/2011 | CN101281860B Semiconductor manufacturing apparatus and manufacturing method of semiconductor device |
| 04/06/2011 | CN101194337B Particle detector for secondary ions and direct and/ or indirect secondary electrons |
| 04/06/2011 | CN101189696B Technique for ion beam angle spread control |
| 04/06/2011 | CN101176184B Synchronous undersampling for high-frequency voltage and current measurements |
| 04/05/2011 | US7919750 Electron gun, electron beam exposure apparatus, and exposure method |
| 04/05/2011 | US7919749 Energy filter for cold field emission electron beam apparatus |
| 03/31/2011 | WO2011038062A2 Methods of using temperature control devices in electron microscopy |
| 03/31/2011 | WO2011037488A1 Plasma ion source |
| 03/31/2011 | WO2011036103A1 Sensor for measuring plasma parameters |
| 03/31/2011 | WO2011036038A1 Imaging energy filter for electrically charged particles and spectroscope having the same |
| 03/31/2011 | WO2011011133A3 Cleaning device for transmission electron microscopes |
| 03/31/2011 | US20110073780 Optical heater for cryogenic ion implanter surface regeneration |
| 03/31/2011 | DE202010015933U1 Eine Randringanordnung für Plasmaätzkammern An edge ring assembly for plasma etching |
| 03/31/2011 | DE102009044989A1 Bildgebender Energiefilter für elektrisch geladene Teilchen sowie Spektroskop mit einem solchen Imaging energy filter for electrically charged particles and spectroscope with such |
| 03/31/2011 | DE102008064696A1 Teilchenoptische Vorrichtung mit Magnetanordnung Particle-optical apparatus with magnetic arrangement |
| 03/30/2011 | EP2302664A1 Multicolumn electron beam exposure apparatus and magnetic field generating apparatus |
| 03/30/2011 | EP2302659A2 Method for fracturing and forming a pattern using curvilinear characters with charged particle beam lithography |
| 03/30/2011 | EP2302460A2 Lithography system |
| 03/30/2011 | EP2302459A2 Lithography system |
| 03/30/2011 | EP2302458A2 Lithography system |
| 03/30/2011 | EP2302457A2 Lithography system |
| 03/30/2011 | EP2302349A1 Gas charge container, atom probe apparatus, and method for analyzing hydrogen position in material |
| 03/30/2011 | EP2302093A1 Manufacturing method for vapor deposition device and thin-film device |
| 03/30/2011 | EP2302092A1 Bias sputtering apparatus |
| 03/30/2011 | EP2301309A2 Clamped showerhead electrode assembly |
| 03/30/2011 | EP2301308A2 Clamped monolithic showerhead electrode |
| 03/30/2011 | EP2301067A1 Showerhead electrode assemblies for plasma processing apparatuses |
| 03/30/2011 | EP2301060A1 A rotatable sputtering magnetron with high stiffness |
| 03/30/2011 | EP2301059A1 Imaging system |
| 03/30/2011 | EP2301058A1 Ion sources, systems and methods |
| 03/30/2011 | EP2301057A2 Electron beam emitter with slotted gun |
| 03/30/2011 | EP2301056A1 Ion sources, systems and methods |
| 03/30/2011 | EP2300632A2 Magnetron with electromagnets and permanent magnets |
| 03/30/2011 | EP2300389A1 Glass product |
| 03/30/2011 | EP2122657B1 Method for controlling ion energy in radio frequency plasmas |
| 03/30/2011 | EP1727406B1 Plasma generator |
| 03/30/2011 | EP1556882B1 High-power pulsed magnetically enhanced plasma processing |
| 03/30/2011 | CN201780981U Movable fixture for solar battery |
| 03/30/2011 | CN101999155A Mono-energetic neutral beam activated chemical processing system and method of using |
| 03/30/2011 | CN101997057A Method and equipment for manufacturing solar cell |
| 03/30/2011 | CN101996843A Plasma processing device and focusing ring |
| 03/30/2011 | CN101996842A Plasma etching device |
| 03/30/2011 | CN101996841A Appratus for treating substrate |
| 03/30/2011 | CN101996840A Plasma processing equipment and method and method for washing chamber |
| 03/30/2011 | CN101996839A Particle beam apparatus, aperture unit and method for setting a beam current in a particle beam apparatus |
| 03/30/2011 | CN101996838A Container |
| 03/30/2011 | CN101764056B Novel plasma shower set |
| 03/30/2011 | CN101461029B Methods and apparatus for downstream dissociation of gases |
| 03/30/2011 | CN101449354B New and improved ion source |
| 03/30/2011 | CN101243536B Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD films |
| 03/29/2011 | US7915584 TEM with aberration corrector and phase plate |
| 03/29/2011 | US7915583 Method and system for ultrafast photoelectron microscope |
| 03/29/2011 | US7915582 Method for estimation of probe shape in charged particle beam instruments |
| 03/29/2011 | US7915581 Methods for sample preparation and observation, charged particle apparatus |
| 03/29/2011 | US7913752 Cooling device for vacuum treatment device |
| 03/24/2011 | WO2011035260A2 Distributed ion source acceleration column |
| 03/24/2011 | WO2011034428A1 Charged particle optical system with multiple beams |
| 03/24/2011 | WO2011034158A1 Stage device |
| 03/24/2011 | WO2011034086A1 Electron gun and vacuum processing device |
| 03/24/2011 | WO2011034020A1 Electron microscope |
| 03/24/2011 | WO2011033989A1 Electron source, method for producing electron source, and electron emission method |
| 03/24/2011 | WO2011033268A1 Production of nanoparticles |
| 03/24/2011 | WO2011033266A1 Production of nanoparticles |
| 03/24/2011 | WO2011033098A1 Methods and systems for using phase plates |
| 03/24/2011 | WO2011033097A1 Methods and systems for tomographic reconstruction of coherent radiation images |
| 03/24/2011 | WO2011032819A1 System for mechanical characterization of materials and biological samples in the sub-millinewton force range |
| 03/24/2011 | WO2010008469A3 System and method of controlling broad beam uniformity |
| 03/24/2011 | US20110068267 Electron beam inspection method and electron beam inspection apparatus |
| 03/24/2011 | US20110068087 Plasma processing apparatus and method |