| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 12/29/2010 | CN101930890A Electrode component for plasma treatment, internal components for plasma treatment and manufacturing and separating method thereof |
| 12/29/2010 | CN101930889A Gas input device and plasma processing equipment |
| 12/29/2010 | CN101506885B Drawing method, drawing apparatus, and information recording medium |
| 12/29/2010 | CN101471395B Reaction chamber structure of solar battery edge-engraving machine |
| 12/29/2010 | CN101276748B Plasma doping apparatus |
| 12/28/2010 | US7858937 Mass spectrometer |
| 12/23/2010 | WO2010147997A2 Workpiece handling system |
| 12/23/2010 | WO2010147641A1 Uv sterilization system |
| 12/23/2010 | WO2010147104A1 Charged-particle microscope device, and method of controlling charged-particle beams |
| 12/23/2010 | WO2010146833A1 Charged particle radiation device |
| 12/23/2010 | WO2010146790A1 Charged particle radiation device |
| 12/23/2010 | WO2010146044A1 Low-interference sensor head for a radiation detector, as well as a radiation detector which contains this low-interference sensor head |
| 12/23/2010 | US20100323507 Substrate processing apparatus and producing method of device |
| 12/23/2010 | US20100320396 Sample holder for electron microscope |
| 12/23/2010 | US20100320385 Scanning electron microscope |
| 12/23/2010 | US20100320382 High throughput sem tool |
| 12/23/2010 | US20100319813 Bare aluminum baffles for resist stripping chambers |
| 12/22/2010 | EP2264739A2 Drive system for ion scanning a workpiece |
| 12/22/2010 | EP2264738A1 Electron gun used in a particle beam device |
| 12/22/2010 | EP2263248A1 Gas field ion source with coated tip |
| 12/22/2010 | EP1741124B1 Segmented baffle plate assembly for a plasma processing system |
| 12/22/2010 | EP1642313B1 Detector system for a scanning electron microscope and scanning electron microscope with a corresponding detector system |
| 12/22/2010 | EP1200988B1 Method for milling a target area in a charged particle beam system |
| 12/22/2010 | CN201681788U Reaction chamber part and plasma processing device employing same |
| 12/22/2010 | CN1743859B Detection and suppression circuit and method of electrical arcing |
| 12/22/2010 | CN1715862B Apparatus for evacuating a sample |
| 12/22/2010 | CN101925982A Improved high tilt implant angle performance using in-axis tilt |
| 12/22/2010 | CN101925975A Apparatus, carrier and method for plasma treatment of molds |
| 12/22/2010 | CN101924006A Shield usable in a sputtering plasma reactor |
| 12/22/2010 | CN101924005A Homogeneous beam spot method for electron beam surface treatment |
| 12/22/2010 | CN101924004A Electrode connection structure and plasma device |
| 12/22/2010 | CN101924003A Electrode structure and plasma device |
| 12/22/2010 | CN101924002A Heating device and plasma treatment equipment using same |
| 12/22/2010 | CN101461032B A vacuum treatment apparatus, a bias power supply and a method of operating a vacuum treatment apparatus |
| 12/22/2010 | CN101404242B Method and apparatus for cleaning a substrate |
| 12/22/2010 | CN101379584B Particle-optical component |
| 12/22/2010 | CN101019203B Charged particle beam exposure system |
| 12/22/2010 | CN101019201B Charged particle gun |
| 12/21/2010 | US7855373 Charged particle gun |
| 12/21/2010 | US7855363 Inspection method and apparatus using an electron beam |
| 12/21/2010 | US7854213 Modulated gap segmented antenna for inductively-coupled plasma processing system |
| 12/16/2010 | WO2010144273A2 A masking apparatus for an ion implanter |
| 12/16/2010 | WO2010143479A1 Ion beam irradiation apparatus and method for suppressing ion beam spread |
| 12/16/2010 | WO2010122450A3 A magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus |
| 12/16/2010 | US20100317140 Techniques for forming thin films by implantation with reduced channeling |
| 12/16/2010 | US20100316815 Plasma cvd method |
| 12/16/2010 | US20100314542 Semiconductor device inspection apparatus |
| 12/16/2010 | DE102010023288A1 Verfahren zur Herstellung von Verbundkörpern unter Anwendung einer Diffusionsverbindung A process for the production of composite bodies using a diffusion bonding |
| 12/16/2010 | DE102008062888B4 Teilchenoptische Vorrichtung mit Magnetanordnung Particle-optical apparatus with magnetic arrangement |
| 12/15/2010 | EP2261948A2 Plasma discharge film-forming apparatus and method |
| 12/15/2010 | EP2261947A1 Diffraction image capturing method and charged particle beam device |
| 12/15/2010 | EP2261393A2 Plasma uniformity control by gas diffuser hole design |
| 12/15/2010 | EP2261387A1 Electron beam vapor deposition apparatus for depositing multi-layer coating |
| 12/15/2010 | EP2260500A1 Method of fabricating microchannel plate devices with multiple emissive layers |
| 12/15/2010 | EP2260499A1 Projection lens arrangement |
| 12/15/2010 | EP2260286A1 Specimen holder used for mounting samples in electron microscopes |
| 12/15/2010 | CN1914351B Selectable dual position magnetron |
| 12/15/2010 | CN1822305B Scanning electron microscope |
| 12/15/2010 | CN101919022A Deposition of active films |
| 12/15/2010 | CN101917165A Electron beam system, image generator, and amplifier of high-speed driving inductor |
| 12/15/2010 | CN101916740A In-situ dry clean chamber for front end of line fabrication |
| 12/15/2010 | CN101916715A In-situ dry clean chamber for front end of line fabrication |
| 12/15/2010 | CN101916706A Sample platform of scanning electronic microscope and scanning electronic microscope |
| 12/15/2010 | CN101248505B Apparatus and method for controlled particle beam manufacturing |
| 12/14/2010 | US7851773 Ion beam apparatus and method employing magnetic scanning |
| 12/14/2010 | US7851772 Ion implantation apparatus and ion implantation method |
| 12/14/2010 | US7851755 Apparatus for detecting backscattered electrons in a beam apparatus |
| 12/14/2010 | US7850819 Plasma reactor with high productivity |
| 12/14/2010 | US7850174 Plasma processing apparatus and focus ring |
| 12/14/2010 | US7849815 Plasma processing apparatus |
| 12/14/2010 | US7849814 Plasma generating device |
| 12/09/2010 | WO2010140649A1 Charged particle beam device and evaluation method using the charged particle beam device |
| 12/09/2010 | WO2010139788A1 Plasma generation device with electron cyclotron resonance |
| 12/09/2010 | US20100310180 Pattern Inspection Method and Pattern Inspection System |
| 12/09/2010 | US20100308237 Optical element processing method |
| 12/09/2010 | US20100308236 Masking apparatus for an ion implanter |
| 12/09/2010 | US20100308215 System and Method for Ion Implantation with Improved Productivity and Uniformity |
| 12/09/2010 | US20100307687 Internal member of a plasma processing vessel |
| 12/09/2010 | DE102009022912A1 Korrelative optische und Teilchenstrahl-Mikroskopie Correlative optical and particle-beam microscopy |
| 12/08/2010 | EP2259663A2 Plasma generator, plasma control method and method of producing substrate |
| 12/08/2010 | EP2257964A1 Reactive sputtering with hipims |
| 12/08/2010 | EP2257963A2 Specimen holder assembly |
| 12/08/2010 | EP2257962A2 Microchannel plate devices with multiple emissive layers |
| 12/08/2010 | EP2257853A2 Method for processing an object with miniaturized structures |
| 12/08/2010 | EP1949406B1 Plasma etching method and etching chamber |
| 12/08/2010 | EP1797746B1 Microwave plasma apparatus with vorticular gas flow |
| 12/08/2010 | EP1695370B1 Apparatus and method for plasma processing |
| 12/08/2010 | EP1557885B1 Image pickup device |
| 12/08/2010 | CN1961401B Reciprocating drive for scanning a workpiece through an ion beam |
| 12/08/2010 | CN1894763B Method and apparatus for prolonging normal operation time of equipment in ion implantation process |
| 12/08/2010 | CN1879188B Method and apparatus for rapid sample preparation in a focused ion beam microscope |
| 12/08/2010 | CN101911245A Ion source gas reactor |
| 12/08/2010 | CN101908496A Substrate transmitting device and semiconductor processing equipment |
| 12/08/2010 | CN101908473A Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions and negative ions |
| 12/08/2010 | CN101908461A Ion beam surface treatment equipment and method for suppressing secondary electron emission |
| 12/08/2010 | CN101908460A Plasma processing apparatus and plasma processing method |
| 12/08/2010 | CN101908459A Loading stage mechanism and plasma processing apparatus using the same |
| 12/08/2010 | CN101908458A Rectangular etching ion gun |
| 12/08/2010 | CN101609771B Method for preparing transmission electron microscope micro-grids |
| 12/08/2010 | CN101584018B Ion implantation device with a dual pumping mode and method thereof |