| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 04/21/2011 | WO2011046093A1 Charged particle beam apparatus and film thickness measurement method |
| 04/21/2011 | WO2011011049A3 Method and apparatus for inductive amplification of ion beam energy |
| 04/21/2011 | WO2011009065A3 Charged-particle energy analyzer |
| 04/21/2011 | WO2010134026A4 Dual pass scanning |
| 04/21/2011 | US20110089344 Method for Fracturing a Pattern for Writing with a Shaped Charged Particle Beam Writing System Using Dragged Shots |
| 04/21/2011 | US20110089322 Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator |
| 04/21/2011 | US20110089321 Ion beam apparatus and method employing magnetic scanning |
| 04/21/2011 | DE102009050039A1 Cylindrical ion cyclotron resonance measuring cell for use in Fourier-transformation ion cyclotron resonance mass spectrometry, has cover surface divided into elongate electrodes, where breadth of electrodes is varied along breadth of cell |
| 04/21/2011 | CA2777465A1 Motorized stage |
| 04/20/2011 | EP2312614A2 Plasma resistant processing apparatus |
| 04/20/2011 | EP2312613A2 Showerhead assembly for plasma processing chamber |
| 04/20/2011 | EP2312612A2 Plasma reactor for abating hazardous materials and driving method thereof |
| 04/20/2011 | EP2312611A2 Charged particle beam system having multiple user-selectable operating modes |
| 04/20/2011 | EP2312610A1 Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator |
| 04/20/2011 | EP2312609A1 Method and apparatus of pretreatment of an electron gun chamber |
| 04/20/2011 | EP2312302A1 Apparatus and method for inspecting samples |
| 04/20/2011 | EP2311067A1 Electrode arrangement with movable shield |
| 04/20/2011 | EP2311066A1 Device and method for producing dielectric layers in microwave plasma |
| 04/20/2011 | EP2311065A1 Remote plasma cleaning method and apparatus for applying said method |
| 04/20/2011 | EP2311064A2 Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy |
| 04/20/2011 | EP2311063A2 Increasing current in charged particle sources and systems |
| 04/20/2011 | EP1632006B1 Antenna for producing uniform process rates |
| 04/20/2011 | EP0989202B1 Power supply device for sputtering and sputtering device using the same |
| 04/20/2011 | EP0939972B1 Plasma etch reactor and method of operating it |
| 04/20/2011 | CN201804837U Large-power electron gun |
| 04/20/2011 | CN201804836U Electron gun |
| 04/20/2011 | CN1759203B Hybrid ball-lock attachment apparatus |
| 04/20/2011 | CN102027565A A rotatable sputtering magnetron with high stiffness |
| 04/20/2011 | CN102027564A Device and method for pretreating and coating bodies |
| 04/20/2011 | CN102027563A Reactive sputtering with HIPIMS |
| 04/20/2011 | CN102027562A Specimen holder assembly |
| 04/20/2011 | CN102024694A Plasma processing apparatus |
| 04/20/2011 | CN102024669A Method for reducing reflection power in plasma etching |
| 04/20/2011 | CN102024659A Cleaning method of PVD (Physical Vapor Deposition) equipment |
| 04/20/2011 | CN102024658A Plasma processing equipment and method |
| 04/20/2011 | CN102024657A Ion gun and grating for same |
| 04/20/2011 | CN102024656A System and method for improving beam current intensity distribution after leading ion beam out |
| 04/20/2011 | CN102021524A Device for separating ions of different masses during plasma immersion ion implantation |
| 04/20/2011 | CN101694829B Sensor of electromechanical performance and microscopic structure for transmission electronic microscope and manufacturing method thereof |
| 04/20/2011 | CN101625952B In-chamber member temperature control method and plasma processing apparatus including same |
| 04/20/2011 | CN101542677B Device for the pre-treatment of substrates |
| 04/20/2011 | CN101493396B Method for producing composite type standard sample for detecting distortion of scanning electron microscope |
| 04/20/2011 | CN101461055B Producing soi structure using high-purity ion shower |
| 04/20/2011 | CN101421823B Aberration evaluation pattern,aberration evaluation method,aberration correction method |
| 04/20/2011 | CN101385112B Electromagnet with active field containment |
| 04/20/2011 | CN101308775B Method and system for introducing process fluid through a chamber component |
| 04/20/2011 | CN101233597B Charged beam dump and particle attractor |
| 04/19/2011 | US7930766 Fluid delivery for scanning probe microscopy |
| 04/19/2011 | US7928414 Charged particle beam writing apparatus and charged particle beam writing method |
| 04/19/2011 | US7928411 Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 04/19/2011 | US7928406 Method and system for extracting ion beams composed of molecular ions (cluster ion beam extraction system) |
| 04/19/2011 | US7928404 Variable-ratio double-deflection beam blanker |
| 04/19/2011 | US7928403 Multiple lens assembly and charged particle beam device comprising the same |
| 04/19/2011 | US7928381 Coaxial charged particle energy analyzer |
| 04/19/2011 | US7928379 Phase plate, imaging method, and electron microscope |
| 04/19/2011 | US7928378 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| 04/19/2011 | US7928376 Element mapping unit, scanning transmission electron microscope, and element mapping method |
| 04/19/2011 | US7927466 Pulsed magnetron sputtering deposition with preionization |
| 04/14/2011 | WO2011043668A1 Enhanced integrity projection lens assembly |
| 04/14/2011 | WO2011043657A2 High voltage shielding arrangement |
| 04/14/2011 | WO2011043391A1 Charged particle radiation device |
| 04/14/2011 | WO2011043353A1 Filament for electron gun and method for producing same |
| 04/14/2011 | WO2011006109A3 High efficiency low energy microwave ion/electron source |
| 04/14/2011 | WO2010132221A4 Gas field ion microscopes having multiple operation modes |
| 04/14/2011 | DE202009015934U1 Spannungsversorgung mit AC-Eingang und AC-Ausgang für eine Plasmabehandlung Power supply with AC input and AC output for a plasma treatment |
| 04/14/2011 | DE102007019981B4 Anode für die Bildung eines Plasmas durch Ausbildung elektrischer Bogenentladungen Anode for the formation of a plasma by forming electrical arc discharges |
| 04/13/2011 | EP2309530A2 Charged particle beam alignment method and charged particle beam apparatus |
| 04/13/2011 | EP2309459A1 Methods and systems for tomographic reconstruction of coherent radiation images |
| 04/13/2011 | EP2308552A1 Dc dielectric barrier discharge electron irradiation apparatus and electrotherapy device |
| 04/13/2011 | EP2308075A2 Particle trap for a plasma source |
| 04/13/2011 | EP2308074A2 Capacitance displacement and rotation sensor |
| 04/13/2011 | EP2308060A1 Application specific implant system and method for use in solar cell fabrications |
| 04/13/2011 | EP1625605B1 Downstream plasma treatment device |
| 04/13/2011 | CN201796853U Plasma equipment |
| 04/13/2011 | CN1713078B Bare aluminum baffles for resist stripping chambers |
| 04/13/2011 | CN102017057A Plasma treatment apparatus and method for plasma-assisted treatment of substrates |
| 04/13/2011 | CN102017056A Plasma processing apparatus and method for the plasma processing of substrates |
| 04/13/2011 | CN102017055A Method for manufacturing workpieces with ion-etched surface |
| 04/13/2011 | CN102017054A Low contamination, low energy beamline architecture for high current ion implantation |
| 04/13/2011 | CN102017053A Projection lens arrangement |
| 04/13/2011 | CN102017052A Projection lens arrangement |
| 04/13/2011 | CN102013387A Metal disc winding for etching equipment and assembly method thereof |
| 04/13/2011 | CN102013379A Method and apparatus for cross-section processing and observation |
| 04/13/2011 | CN101589449B Technique for improving the performance and extending the lifetime of an ion source with gas dilution |
| 04/13/2011 | CN101490791B Beam angle adjustment in ion implanters |
| 04/13/2011 | CN101490789B Ion sources |
| 04/13/2011 | CN101381861B Film formation method |
| 04/13/2011 | CN101320676B Evacuation method and storage medium |
| 04/13/2011 | CN101023508B Improved method and apparatus for the etching of microstructures |
| 04/12/2011 | US7924544 Low voltage modular room ionization system |
| 04/12/2011 | US7923703 Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus |
| 04/12/2011 | US7923700 Sample inspection apparatus, sample inspection method and sample inspection system |
| 04/12/2011 | US7923699 Tracking control method and electron beam writing system |
| 04/12/2011 | US7923686 Transmission electron microscope |
| 04/12/2011 | US7923685 Electron beam device |
| 04/12/2011 | US7923684 Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles |
| 04/12/2011 | US7923374 Method and apparatus for production of metal film or the like |
| 04/12/2011 | US7922865 Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator |
| 04/12/2011 | US7922862 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 04/07/2011 | WO2011041418A2 Optical heater for cryogenic ion implanter surface regeneration |