| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 07/20/2011 | CN101133682B Method for etching having a controlled distribution of process results |
| 07/19/2011 | US7982197 Ion implantation apparatus and a method for fluid cooling |
| 07/19/2011 | US7982196 Method for modifying a material layer using gas cluster ion beam processing |
| 07/19/2011 | US7982194 Single nanoparticle tracking spectroscopic microscope |
| 07/19/2011 | US7982192 Beam processing apparatus |
| 07/19/2011 | US7982188 Apparatus and method for wafer pattern inspection |
| 07/19/2011 | US7982183 Ion transfer tube with spatially alternating DC fields |
| 07/19/2011 | US7981216 Vacuum processing apparatus |
| 07/14/2011 | WO2011085220A2 Method and apparatus for high resolution photon detection based on extraordinary optoconductance (eoc) effects |
| 07/14/2011 | WO2011035260A4 Distributed ion source acceleration column |
| 07/14/2011 | US20110172810 Ultraviolet Sanitization in Pharmacy Environments |
| 07/14/2011 | US20110168923 Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatus |
| 07/14/2011 | US20110168911 Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatus |
| 07/14/2011 | US20110168888 Weak-lens coupling of high current electron sources to electron microscope columns |
| 07/14/2011 | US20110168887 Charged particle filter |
| 07/14/2011 | US20110168886 Charged-particle energy analyzer |
| 07/14/2011 | DE202011050047U1 Vorrichtung zur Formierung von Dachionenpulsen aus Elektronenstrahlionenquellen Apparatus for formation of roof ion pulses from electron beam ion sources |
| 07/13/2011 | EP2343728A2 Method and device for evaluating the light emitted by a plasma to regulate plasma-supported processes |
| 07/13/2011 | EP2343727A1 Method for observing sample and electronic microscope |
| 07/13/2011 | EP2343726A2 Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method |
| 07/13/2011 | EP2342734A2 Aligning charged particle beams |
| 07/13/2011 | EP2342733A1 Device for generating an ion beam with cryogenic trap |
| 07/13/2011 | EP2342732A1 Device for generating an ion beam with magnetic filter |
| 07/13/2011 | CN201898113U Spray header electrode with centralized positioning characteristic and spray header electrode assembly |
| 07/13/2011 | CN102124539A Apparatus and method for wafer level arc detection |
| 07/13/2011 | CN102124538A System and method of controlling broad beam uniformity |
| 07/13/2011 | CN102122599A Substrate processing system and substrate processing method |
| 07/13/2011 | CN101556911B Substrate processer |
| 07/13/2011 | CN101523592B High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation |
| 07/13/2011 | CN101261933B Vacuum container, pressure-resisting containing and sealing method thereof |
| 07/13/2011 | CN101256936B Method and apparatus for controlling gas flow to a processing chamber |
| 07/13/2011 | CN101238538B Beam stop and beam tuning methods |
| 07/12/2011 | US7977654 Writing apparatus and writing method |
| 07/12/2011 | US7977653 Semiconductor device fabrication method and fabrication apparatus using a stencil mask |
| 07/12/2011 | US7977652 Optical heater for cryogenic ion implanter surface regeneration |
| 07/12/2011 | US7977632 Scanning electron microscope |
| 07/12/2011 | US7977630 Electron microscope |
| 07/12/2011 | US7976861 Irradiated implantable bone material |
| 07/12/2011 | US7976673 RF pulsing of a narrow gap capacitively coupled reactor |
| 07/07/2011 | WO2011082163A1 System and method for controlling deflection of a charged particle beam within a graded electrostatic lens |
| 07/07/2011 | WO2011081927A1 Techniques for generating uniform ion beam |
| 07/07/2011 | WO2011081463A2 Lens control apparatus of tem for easily obtaining ped pattern |
| 07/07/2011 | WO2011081087A1 Scanning electron microscope |
| 07/07/2011 | WO2011080659A1 Inline coating installation |
| 07/07/2011 | WO2011018544A3 Magnetron device and method for the uniform erosion of a target using such a device |
| 07/07/2011 | US20110162802 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method |
| 07/06/2011 | EP2341525A2 Plasma source for charged particle beam system |
| 07/06/2011 | EP2340549A1 Adjustable deflection optics for ion implantation |
| 07/06/2011 | EP2080424B1 Device and method for producing microwave plasma with a high plasma density |
| 07/06/2011 | EP1955357B1 Ion implantation beam angle calibration |
| 07/06/2011 | EP1917674B1 Optical emission interferometry for pecvd using a gas injection hole |
| 07/06/2011 | EP1564794B1 Method and device for generating uniform high- frequency plasma over large surface area |
| 07/06/2011 | CN201893315U Coil connecting component, upper electrode device and LED etcher |
| 07/06/2011 | CN1989587B Blocker plate bypass to distribute gases in a chemical vapor deposition system |
| 07/06/2011 | CN1716512B Particle-optical apparatus provided with lenses with permanent-magnetic material |
| 07/06/2011 | CN1673410B Showerhead mounting to accommodate thermal expansion |
| 07/06/2011 | CN102117733A Substrate processing apparatus and cleaning method thereof |
| 07/06/2011 | CN102117726A Focusing ring of plasma processing apparatus and plasma processing apparatus equipped with focusing ring |
| 07/06/2011 | CN101762751B GLITCH detection circuit |
| 07/06/2011 | CN101743620B Sealing between vacuum chambers |
| 07/06/2011 | CN101322216B Technique for providing a segmented electrostatic lens in an ion implanter |
| 07/06/2011 | CN101257944B Beam neutralization in low-energy high-current ribbon-beam implanters |
| 07/06/2011 | CN101111121B Etching machine electrode structure and manufacturing method thereof |
| 07/06/2011 | CN101040061B An elongated gas ditribution system |
| 07/05/2011 | US7973293 Implantation quality improvement by xenon/hydrogen dilution gas |
| 07/05/2011 | US7973282 Charged particle beam apparatus and dimension measuring method |
| 07/05/2011 | US7972467 Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor |
| 07/05/2011 | US7972440 Monitoring and control of a fabrication process |
| 06/30/2011 | WO2011078544A2 Ion injector, mass spectrometer comprising the same and method for focusing ions using the same |
| 06/30/2011 | WO2011077122A1 Charged particle beam system |
| 06/30/2011 | WO2011076430A2 Method and apparatus for forming a dielectric layer on a substrate |
| 06/30/2011 | US20110155906 Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image |
| 06/30/2011 | DE102010056020A1 Verfahren und Vorrichtung zum Ausbilden einer dielektrischen Schicht auf einem Substrat Method and apparatus for forming a dielectric layer on a substrate |
| 06/30/2011 | DE102009055271A1 Verfahren zur Erzeugung einer Darstellung eines Objekts mittels eines Teilchenstrahls sowie Teilchenstrahlgerät zur Durchführung des Verfahrens A method for generating a representation of an object by means of a particle beam and charged particle beam device for carrying out the method |
| 06/29/2011 | EP2339899A1 Compact charged particle generation source |
| 06/29/2011 | EP2339608A1 Electrostatic corrector |
| 06/29/2011 | EP2339046A1 Cylindrical sputtering target, and method for manufacturing same |
| 06/29/2011 | EP2338318A1 Low-power gaseous plasma source |
| 06/29/2011 | EP1412964B1 Sputtering magnetron arrangements with adjustable magnetic field strength |
| 06/29/2011 | CN201887013U Plasma processing device |
| 06/29/2011 | CN201887012U Silicon slice constant-pressure application clamp of plasma etcher |
| 06/29/2011 | CN102113083A Writing strategy |
| 06/29/2011 | CN102110574A Plasma processing apparatus |
| 06/29/2011 | CN102110573A Plasma processing apparatus |
| 06/29/2011 | CN102110572A Plasma process apparatus |
| 06/29/2011 | CN102110571A Plasma processing device |
| 06/29/2011 | CN102110570A Method and apparatus for modifying ribbon-shaped ion beam |
| 06/29/2011 | CN102110569A Device for mechanically scanning workpiece |
| 06/29/2011 | CN102110568A Beam transmission system and method |
| 06/29/2011 | CN102110567A Heating device of reaction chamber and plasma device using same |
| 06/29/2011 | CN101657875B Surface emission type electron source and drawing device |
| 06/28/2011 | US7969581 Determining endpoint in a substrate process |
| 06/28/2011 | US7969095 Method of and arrangement for removing contaminants from a substrate surface using an atmospheric pressure glow plasma |
| 06/28/2011 | US7968857 Apparatus and method for partial ion implantation using atom vibration |
| 06/28/2011 | US7968843 Method and apparatus for simultaneous SEM and optical examination |
| 06/23/2011 | WO2011074962A2 Support and positioning structure, semiconductor equipment system and method for positioning |
| 06/23/2011 | WO2011074178A1 Charged particle beam device and sample observation method |
| 06/23/2011 | WO2011074088A1 Room-temperature molten salt, electrode, battery, charge-up prevention agent, and method for observing a sample |
| 06/23/2011 | WO2011073093A1 Method for operating an industrial process |
| 06/23/2011 | WO2011026607A3 Particle beam processing device such as an electron beam processing device |