| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 06/03/2011 | WO2011064960A1 Charged-particle microscope and method for controlling the charged-particle microscope |
| 06/03/2011 | WO2011064084A1 Device for generating plasma by means of microwaves |
| 06/03/2011 | WO2011043657A3 High voltage shielding arrangement |
| 06/03/2011 | WO2010126958A9 Voltage contrast imaging |
| 06/02/2011 | US20110129617 Plasma system and method of producing a functional coating |
| 06/02/2011 | US20110127427 Specimen holder used for mounting |
| 06/01/2011 | EP2328168A1 Charged particle beam apparatus and geometric aberration measuring method employed therein |
| 06/01/2011 | EP2089894B1 A plasma system and measurement method |
| 06/01/2011 | EP1269165B1 Plasma processing device with integrated full wavelength spectrometer for wafer processing |
| 06/01/2011 | EP1177112B1 Remote plasma generator |
| 06/01/2011 | EP1153425B1 Method for plasma etching with pulsed substrate electrode power |
| 06/01/2011 | DE102009047220A1 Vorrichtung und Verfahren zur Erzeugung eines gepulsten Anisothermen Atmosphärendruck-Plasmas Apparatus and method for generating a pulsed anisothermal atmospheric-pressure plasma |
| 06/01/2011 | DE102004006849B4 Vorrichtung zum Beschichten von Substraten Apparatus for coating substrates |
| 06/01/2011 | CN1728916B Ultra high speed uniform plasma processing system |
| 06/01/2011 | CN102082064A Silicon wafer pressure setting and applying clamp for plasma etcher |
| 06/01/2011 | CN102082063A Electrode plate and reaction chamber for medium and low frequency plasma processing equipment |
| 06/01/2011 | CN101675493B Ion acceleration column connection mechanism with integral shielding electrode |
| 06/01/2011 | CN101140847B An ion beam guide tube |
| 05/31/2011 | US7953511 System and method for reducing processing errors during wafer fabrication employing a 2D wafer scribe and monitoring system |
| 05/31/2011 | US7952074 Method and apparatus for inspecting integrated circuit pattern |
| 05/31/2011 | US7952072 Test apparatus |
| 05/31/2011 | US7951303 Method of fabricating grabbing face of sample grabbing portion |
| 05/31/2011 | CA2418922C Device for amplifying the current of an abnormal electrical discharge and system for using an abnormal electrical discharge comprising one such device |
| 05/26/2011 | WO2011062945A1 Apparatus and method for controllably implanting workpieces |
| 05/26/2011 | WO2011062810A2 High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture |
| 05/26/2011 | WO2011062610A1 Tuning hardware for plasma ashing apparatus and methods of use thereof |
| 05/26/2011 | WO2011061288A1 Device and method for coating a substrate |
| 05/26/2011 | WO2011060847A1 Coil section assembly for simulating circular coils for vacuum devices |
| 05/26/2011 | WO2011041418A9 Optical heater for cryogenic ion implanter surface regeneration |
| 05/26/2011 | WO2009015615A8 A device providing a live three-dimensional image of a specimen |
| 05/26/2011 | US20110124144 Substrate processing system and substrate processing method |
| 05/26/2011 | US20110120653 Antenna for plasma processor and apparatus |
| 05/26/2011 | DE10358036B4 Verfahren zum Charakterisieren einer Tiefenstruktur in einem Substrat A method for characterizing a deep structure in a substrate |
| 05/26/2011 | DE102009054060A1 Vorrichtung und Verfahren zum Beschichten eines Substrates Apparatus and method for coating a substrate |
| 05/26/2011 | DE102009046211A1 Detektionsvorrichtung und Teilchenstrahlgerät mit Detektionsvorrichtung Detection device and particle beam with detection device |
| 05/25/2011 | EP2325863A2 Corrector for axial aberrations of a particle-optical lens |
| 05/25/2011 | EP2325862A1 Corrector for axial aberrations of a particle-optical lens |
| 05/25/2011 | EP2325350A1 Anode rod for a sputtering system |
| 05/25/2011 | EP1875484B1 Magnet system for a sputtering cathode |
| 05/25/2011 | EP1738391B1 Correction lens system for a particle beam projection device |
| 05/25/2011 | EP1435071B1 System and method for point pushing to render polygons in environments with changing levels of detail |
| 05/25/2011 | CN201845738U Electrostatic probe for neutral beam ion source |
| 05/25/2011 | CN201845737U Calibrating device for ion source of ion implantation machine |
| 05/25/2011 | CN1802724B High frequency plasma jet source and method for irradiating a surface |
| 05/25/2011 | CN102077377A System and method to fabricate magnetic random access memory |
| 05/25/2011 | CN102074446A Magnetron with adjustable compound trace |
| 05/25/2011 | CN102074445A Apparatus for processing substrate |
| 05/25/2011 | CN102074444A Method for preparing microporous membrane for transmittance analysis |
| 05/25/2011 | CN102074443A Atmospheric transmission chamber and change method of inner airflow thereof and plasma processing equipment |
| 05/25/2011 | CN102071408A Plasma processing equipment |
| 05/25/2011 | CN101383278B Plasma body restraint apparatus and plasma body processing device |
| 05/25/2011 | CN101071752B High current ionic current implanted system and improved device and insulator thereof |
| 05/24/2011 | US7947976 Controlled alignment of catalytically grown nanostructures in a large-scale synthesis process |
| 05/24/2011 | US7947953 Charged particle detection apparatus and detection method |
| 05/24/2011 | US7947951 Multi-beam ion/electron spectra-microscope |
| 05/24/2011 | US7947129 Rare earth gas supply; removing dielectric from electrode by sputtering |
| 05/19/2011 | WO2011060258A1 System and method for manipulating an ion beam |
| 05/19/2011 | WO2011060141A1 An integrated beam modifying assembly for use with a proton beam therapy machine |
| 05/19/2011 | WO2011060133A1 Beam modifying devices for use with particle beam therapy systems |
| 05/19/2011 | WO2011059504A2 Method and apparatus for cleaning residue from an ion source component |
| 05/19/2011 | WO2011058950A1 Sample observation method using electron beams and electron microscope |
| 05/19/2011 | WO2011035260A3 Distributed ion source acceleration column |
| 05/19/2011 | WO2011005469A4 Charged particle detectors |
| 05/19/2011 | US20110115637 Charged corpuscular ray apparatus |
| 05/19/2011 | US20110115589 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 05/19/2011 | US20110114852 Corrector for Axial Aberrations of a Particle-Optical Lens |
| 05/18/2011 | EP2323158A2 Lithography system and projection method |
| 05/18/2011 | EP2322689A1 Process and device to produce a cathodic magnetron sputtering target |
| 05/18/2011 | EP2322309A1 Method and device for thermal processing of workpieces with an electron beam and gas |
| 05/18/2011 | EP2322271A1 A micro-reactor for observing particles in a fluid |
| 05/18/2011 | EP1340241B1 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| 05/18/2011 | CN102067272A Projection lens arrangement |
| 05/18/2011 | CN102067271A Beamlet blanker arrangement |
| 05/18/2011 | CN102067270A Low-inertia multi-axis multi-directional mechanically scanned ion implantation system |
| 05/18/2011 | CN102067269A System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes |
| 05/18/2011 | CN102067268A Post-decel magnetic energy filter for ion implantation systems |
| 05/18/2011 | CN102064077A Method for improving focused ion beam machining accuracy by synchronous controllable electron beam |
| 05/18/2011 | CN102064076A Eccentricity-variable magnetron |
| 05/18/2011 | CN102064075A Intracavity electronic beam machining method for cavity parts |
| 05/18/2011 | CN102064074A Corrector for axial aberrations of a particle-optical lens |
| 05/18/2011 | CN101578682B Technique for reducing magnetic fields at an implant location |
| 05/18/2011 | CN101155460B Frequency monitoring to detect plasma process abnormality |
| 05/17/2011 | US7945965 Sensor for observations in liquid environments and observation apparatus for use in liquid environments |
| 05/17/2011 | US7945962 Information memory apparatus using probe |
| 05/17/2011 | US7943903 Defect inspection method and its system |
| 05/17/2011 | US7942111 Method and device for vacuum-coating a substrate |
| 05/12/2011 | WO2011056598A2 Membrane filter system and apparatus |
| 05/12/2011 | WO2011056515A2 Ion implantation system and method |
| 05/12/2011 | WO2011055521A1 Charged particle microscope |
| 05/12/2011 | WO2011055520A1 Electron microscope |
| 05/12/2011 | WO2011055102A1 Electrode, decontamination apparatus and method |
| 05/12/2011 | US20110111581 Deposition apparatus and manufacturing method of thin film device |
| 05/12/2011 | US20110108737 Particle beam irradiation apparatus |
| 05/12/2011 | DE102009052464A1 Welding together tapes of different materials by electron-beam along its longitudinal sides, comprises automatically controlling the position of melt bath and weld seam depth and positioning the transfer field over guidance position |
| 05/12/2011 | DE102009052436A1 Device for electric arc treatment i.e. electric arc plasma cleaning, of surface of metal product in vacuum in e.g. iron industry, has electrode arranged at distance from product surface, where distance lies in range within free path length |
| 05/11/2011 | EP2320217A2 SACP method and particle optical system for performing method |
| 05/11/2011 | EP2319065A1 Gas discharge electron source |
| 05/11/2011 | EP1915769B1 Method of treating a gas stream |
| 05/11/2011 | EP1651794B1 Method of manufacturing vacuum plasma treated workpieces |
| 05/11/2011 | EP1057206B1 Low pressure inductively coupled high density plasma reactor |