| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/10/2011 | CN102148115A Manufacturing method for transmission electron microscope micro-gate |
| 08/10/2011 | CN101512717B An electron column using a magnetic lens layer |
| 08/09/2011 | US7995833 Method of alignment for efficient defect review |
| 08/09/2011 | US7995216 Control of the positional relationship between a sample collection instrument and a surface to be analyzed during a sampling procedure with image analysis |
| 08/09/2011 | US7994487 Control of particles on semiconductor wafers when implanting boron hydrides |
| 08/09/2011 | US7994472 Laser-driven deflection arrangements and methods involving charged particle beams |
| 08/09/2011 | US7994031 Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions |
| 08/04/2011 | WO2011093316A1 Ion milling device, sample processing method, processing device, and sample drive mechanism |
| 08/04/2011 | WO2011093043A1 Diffraction microscopy |
| 08/04/2011 | WO2011092771A1 Observation method and observation device |
| 08/04/2011 | WO2011092770A1 Charged particle radiation device |
| 08/04/2011 | WO2011092757A1 Charged particle radiation device |
| 08/04/2011 | WO2011091451A1 Device for closing an opening in a chamber wall |
| 08/04/2011 | US20110189593 Defect repair apparatus and method for EUV mask |
| 08/04/2011 | US20110189450 Formed article, method for producing the same, electronic device member, and electronic device |
| 08/04/2011 | US20110186734 Electron microscope and specimen analyzing method |
| 08/04/2011 | DE102011008924A1 Defekt-Reperaturvorrichtung und Verfahren für EUV Maske Defect repair apparatus and method for EUV mask |
| 08/03/2011 | EP2351101A2 Technique for manufacturing a solar cell |
| 08/03/2011 | EP2351064A1 Method and device for plasma treatment of a flat substrate |
| 08/03/2011 | EP2351063A1 Methods and devices for high throughput crystal structure analysis by electron diffraction |
| 08/03/2011 | EP2351062A2 Measurement and endpointing of sample thickness |
| 08/03/2011 | EP2350623A1 Counting inclusions on alloys by image analysis |
| 08/03/2011 | EP1961031B1 System and method of electron beam writing |
| 08/03/2011 | CN201918355U 钛溅射环、应用该钛溅射环的溅射反应器 Sputtered titanium ring, the application of the titanium sputter sputter reactor ring |
| 08/03/2011 | CN1906026B Yttria-coated ceramic components of semiconductor material processing apparatuses and methods of manufacturing the components |
| 08/03/2011 | CN102144275A Low pressure high frequency pulsed plasma reactor for producing nanoparticles |
| 08/03/2011 | CN102142357A Plasma processing apparatus |
| 08/03/2011 | CN102142351A In-chamber member and substrate mounting table in plasma processing apparatus |
| 08/03/2011 | CN102142350A Method of manufacturing substrate processing device and method of manufacturing focus ring |
| 08/03/2011 | CN102142349A Methods for preventing plasma un-confinement events in a plasma processing chamber |
| 08/03/2011 | CN102142348A Supporting membrane of transmission electron microscope sample and manufacturing method for transmission electron microscope sample |
| 08/03/2011 | CN102142347A Sample chamber of electron microscope |
| 08/03/2011 | CN101770922B Capacitance coupling type radiofrequency plasma source |
| 08/03/2011 | CN101583737B Film deposition of amorphous films by electron cyclotron resonance |
| 08/03/2011 | CN101067993B Particle-optical apparatus with temperature switch |
| 08/02/2011 | US7989784 Ion implantation apparatus and a method |
| 08/02/2011 | US7989778 Charged-particle optical system with dual loading options |
| 08/02/2011 | US7989768 Scanning electron microscope |
| 08/02/2011 | US7989766 Sample inspection apparatus |
| 08/02/2011 | CA2643534C Fragmentation methods for mass spectrometry |
| 08/02/2011 | CA2620392C Modified carbon nanoparticles, method for the production thereof and use thereof |
| 07/28/2011 | WO2011090397A1 Method for plasma deposition of polymer coatings and apparatus |
| 07/28/2011 | WO2011090379A1 Lithography system with lens rotation |
| 07/28/2011 | WO2011089955A1 Charged particle beam apparatus |
| 07/28/2011 | WO2011089913A1 Scanning electron microscope |
| 07/28/2011 | WO2011089911A1 Charged particle beam microscope and method of measurement employing same |
| 07/28/2011 | WO2011089439A2 A miniature low- energy electron beam generator |
| 07/28/2011 | WO2011089298A1 Device and method for manufacturing nanoparticles |
| 07/28/2011 | WO2011089009A1 Method for the application of a conformal nanocoating by means of a low pressure plasma process |
| 07/28/2011 | WO2011043657A4 High voltage shielding arrangement |
| 07/28/2011 | WO2010147997A3 Workpiece handling system |
| 07/28/2011 | US20110183521 Methods and systems of material removal and pattern transfer |
| 07/28/2011 | US20110180722 Aligning charged particle beams |
| 07/28/2011 | US20110180708 Test Apparatus |
| 07/28/2011 | DE202011100570U1 Beschichtungsschutz für Schutzrohre an Mikrowellenantennen Protective coating for protection tubes of microwave antennas |
| 07/28/2011 | CA2786855A1 Method for the application of a conformal nanocoating by means of a low pressure plasma process |
| 07/27/2011 | EP2347439A2 Front end of line plasma mediated ashing processes and apparatus |
| 07/27/2011 | EP2347427A2 Vhf assembly |
| 07/27/2011 | EP2095395B1 Method for identifying an arc discharge in a plasma process and arc discharge identification apparatus |
| 07/27/2011 | EP1596418B1 Electron gun |
| 07/27/2011 | EP1546434B1 Device for carrying out a plasma-assisted process |
| 07/27/2011 | CN201910395U Cation source device |
| 07/27/2011 | CN201910394U High-power electron gun |
| 07/27/2011 | CN1987490B Method and device for detecting arcs |
| 07/27/2011 | CN1809910B Thin magnetron structures for plasma generation in ion implantation systems |
| 07/27/2011 | CN102136407A Guide rack of dry etcher |
| 07/27/2011 | CN102136406A Small condenser for electron microscope |
| 07/27/2011 | CN101667534B Plasma processing apparatus and plasma processing method |
| 07/27/2011 | CN101667532B Plasma processing apparatus |
| 07/27/2011 | CN101573469B Deposition of amorphous silicon films by electron cyclotron resonance |
| 07/27/2011 | CN101374381B Method and system for matching radio frequency impedance |
| 07/27/2011 | CN101373694B Ion implantation apparatus |
| 07/27/2011 | CN101233792B Plasma generator and film deposit method employing same |
| 07/27/2011 | CN101222814B Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
| 07/26/2011 | US7985958 Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program |
| 07/26/2011 | US7985957 Methods for concealing surface defects |
| 07/21/2011 | WO2011086186A1 Plasma- or ion-based system for producing coatings on fluoropolymers, said coatings having good adhesion |
| 07/21/2011 | WO2011085719A1 Method for controlling the electron beam exposure of wafers and masks using proximity correction |
| 07/21/2011 | WO2011049735A3 Method for fracturing a pattern for writing with a shaped charged particle beam writing system using dragged shots |
| 07/21/2011 | WO2011041418A3 Optical heater for cryogenic ion implanter surface regeneration |
| 07/21/2011 | WO2011038062A3 Methods of using temperature control devices in electron microscopy |
| 07/21/2011 | US20110177320 Material and Method for Producing the Same |
| 07/21/2011 | US20110174975 Charged particle beam scanning method and charged particle beam apparatus |
| 07/21/2011 | US20110174974 Method and apparatus for processing a microsample |
| 07/21/2011 | US20110174971 Phase contrast imaging and preparing a tem therefor |
| 07/21/2011 | US20110174221 Surface processing apparatus |
| 07/21/2011 | DE102010004939A1 Verfahren zur Steuerung der Elektronenstrahl-Belichtung von Wafern und Masken mit Proximity-Korrektur Method for controlling the electron beam exposure of wafers and masks with proximity correction |
| 07/21/2011 | DE102010000940A1 Device for plasma-treating a container for inner coating of the container, comprises an evacuatable treatment chamber, an electrode to generate plasma in the container, and a transport unit to move the container into the treatment chamber |
| 07/20/2011 | EP2345750A1 Thin film-forming sputtering device |
| 07/20/2011 | EP2345312A1 Apparatus and method for treating an object |
| 07/20/2011 | EP2345058A1 Simultaneous measurement of beams in lithography system |
| 07/20/2011 | EP1074025B1 X-ray concentrator and x-ray diagnostic system |
| 07/20/2011 | CN201904299U Gun core for high-power electronic gun |
| 07/20/2011 | CN1940546B Check out test set and method for manufacturing components |
| 07/20/2011 | CN1845292B Magnetic field assistant self glow plasma ion implantation device |
| 07/20/2011 | CN102129971A Method and system for etching graphical sapphire substrate |
| 07/20/2011 | CN102128844A Quantitative analysis method for detecting boron content by electron probe |
| 07/20/2011 | CN101770923B Method for loading plasma enhanced chemical vapor deposition equipment and glass panel |
| 07/20/2011 | CN101577211B Reaction chamber component resisting plasma corrosion, preparation method thereof and plasma reaction chamber comprising same |
| 07/20/2011 | CN101379585B Device for sustaining differential vacuum degrees for electron column |