| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/30/2011 | US8008631 Method of acquiring offset deflection amount for shaped beam and lithography apparatus |
| 08/30/2011 | US8008622 Electron beam apparatus and method of generating an electron beam irradiation pattern |
| 08/30/2011 | US8008618 Multipole ion guide for providing an axial electric field whose strength increases with radial position, and a method of operating a multipole ion guide having such an axial electric field |
| 08/30/2011 | US8007641 Method of detecting arc discharges in a plasma process |
| 08/30/2011 | US8007633 Surface processing apparatus |
| 08/30/2011 | DE202011103257U1 Plasma-Lichtbogenbrenner Plasma arc torch |
| 08/25/2011 | WO2011102511A1 Circuit-pattern inspection device |
| 08/25/2011 | WO2011102496A1 Image processing method for mass spectrum image, program, and apparatus |
| 08/25/2011 | WO2011102122A1 Vacuum processing device |
| 08/25/2011 | WO2011102077A1 Field-emission electron gun and method for controlling same |
| 08/25/2011 | WO2011101613A1 Method and apparatus for ion beam polishing |
| 08/25/2011 | WO2011101450A1 Substrate support structure, clamp preparation unit, and lithography system |
| 08/25/2011 | WO2011056515A3 Ion implantation system and method |
| 08/25/2011 | WO2010134018A4 Pattern data conversion for lithography system |
| 08/25/2011 | US20110204264 Ion implantation through laser fields |
| 08/25/2011 | US20110204255 Stage device |
| 08/25/2011 | US20110204228 Charged particle beam apparatus |
| 08/25/2011 | US20110204225 ION Beam System and Machining Method |
| 08/25/2011 | US20110204224 Multi-column electron beam lithography apparatus and electron beam trajectory adjustment method for the same |
| 08/25/2011 | DE102010048276A1 Ionentransporter, Ionentransportverfahren, Ionenstrahlstrahler und medizinischer Teilchenstrahlstrahler Ion transporters, ion transport process, ion beam emitters and medical Teilchenstrahlstrahler |
| 08/24/2011 | EP2360713A2 Multi Inductively Coupled Plasma Reactor and Method Thereof |
| 08/24/2011 | EP2360712A2 Particle beam system |
| 08/24/2011 | EP2360292A1 Parallel plate reactor for uniform thin film deposition with reduced tool foot-print |
| 08/24/2011 | EP2359382A1 Ignition apparatus for arc sources |
| 08/24/2011 | EP2238606B1 Scanning charged particle beams |
| 08/24/2011 | EP2167529B1 Protein layers and their use in electron microscopy |
| 08/24/2011 | EP1590826B1 Plasma reactor including helical electrodes |
| 08/24/2011 | EP1190433B1 Electrostatic corrector for eliminating the chromatic aberration of particle lenses |
| 08/24/2011 | CN1937166B Faraday system and ion implanter used same |
| 08/24/2011 | CN1871684B Method, system and device for microscopic examination employing fib-prepared sample grasping element |
| 08/24/2011 | CN102164684A Radiation-cured coatings |
| 08/24/2011 | CN102163606A Charge-detecting chip and manufacturing method thereof |
| 08/24/2011 | CN102163538A Multi inductively coupled plasma reactor and method thereof |
| 08/24/2011 | CN102163530A Plasma processing apparatus |
| 08/24/2011 | CN102163529A Movable diaphragm device for condensing mirror of electron microscope |
| 08/24/2011 | CN101740299B Cathode insulating block for realizing three-face positioning of filament clip |
| 08/23/2011 | US8004197 Method and apparatus for collector sweeping control of an electron beam |
| 08/23/2011 | US8003959 Ion source cleaning end point detection |
| 08/23/2011 | US8003958 Apparatus and method for doping |
| 08/23/2011 | US8003957 Ethane implantation with a dilution gas |
| 08/23/2011 | US8003954 Gas delivery system for an ion source |
| 08/23/2011 | US8003952 Integrated deflectors for beam alignment and blanking in charged particle columns |
| 08/23/2011 | US8003940 Tool-to-tool matching control method and its system for scanning electron microscope |
| 08/23/2011 | US8002947 Plasma treatment system and cleaning method of the same |
| 08/18/2011 | WO2011100434A2 Aberration-correcting dark-field electron microscopy |
| 08/18/2011 | WO2011099490A1 Pattern inspection method, pattern inspection program, and electronic device inspection system |
| 08/18/2011 | WO2011099101A1 Charged particle beam apparatus |
| 08/18/2011 | WO2011098413A1 Magnetron source and method of manufacturing |
| 08/18/2011 | WO2011025998A3 Pattern modification schemes for improved fib patterning |
| 08/18/2011 | US20110201134 Capacitively coupled plasma reactor with magnetic plasma control |
| 08/18/2011 | US20110198983 Composite produced from intermetallic phases and metal |
| 08/18/2011 | US20110198514 Use of pattern recognition to align patterns in a downstream process |
| 08/18/2011 | US20110198497 Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method |
| 08/18/2011 | US20110197759 Method of treating a gas stream |
| 08/18/2011 | DE102010007777A1 Teilchenstrahlsystem Particle beam |
| 08/17/2011 | EP2357658A2 Apparatus of electron cyclotron resonance ion source and manufacturing method thereof |
| 08/17/2011 | EP2356890A1 Method and system for increasing the lifespan of a plasma |
| 08/17/2011 | EP2356889A1 Arc recovery with over-voltage protection for plasma-chamber power supplies |
| 08/17/2011 | EP2355856A1 A method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure |
| 08/17/2011 | EP2142959B1 Triangulating design data and encoding design intent for microlithographic printing |
| 08/17/2011 | EP1497635B1 Specimen holding apparatus |
| 08/17/2011 | EP1371751B1 Film forming device |
| 08/17/2011 | EP1243016B1 Method and apparatus for ionized physical vapor deposition |
| 08/17/2011 | CN201936840U 一种用于扫描电镜分析的样品座 A sample holder for scanning electron microscope analysis |
| 08/17/2011 | CN102160141A Device and method for producing dielectric layers in microwave plasma |
| 08/17/2011 | CN102160140A Plasma power supply arrangement |
| 08/17/2011 | CN102160139A Adjustable deflection optics for ion implantation |
| 08/17/2011 | CN102157423A Substrate mounting table and method for manufacturing the same, and substrate processing apparatus |
| 08/17/2011 | CN102157372A Plasma processing apparatus and method |
| 08/17/2011 | CN102157345A Plasma reactor and etching method using the same |
| 08/17/2011 | CN102157327A Gas supply structure of substrate processing apparatus |
| 08/17/2011 | CN102157326A Device for reducing wall emerge loss for substrate processing apparatus |
| 08/17/2011 | CN102157325A Plasma processing apparatus and plasma processing method |
| 08/17/2011 | CN102157324A Ion beam source |
| 08/17/2011 | CN101770933B Plasma process equipment and gas distribution device thereof |
| 08/17/2011 | CN101599407B Array type microfaraday cage |
| 08/17/2011 | CN101383266B Reaction cavity |
| 08/17/2011 | CN101369515B Reaction cavity |
| 08/17/2011 | CN101351076B Apparatus for processing plasma |
| 08/17/2011 | CN101295629B Methods to eliminate M-shape etch rate profile in inductively coupled plasma reactor |
| 08/17/2011 | CN101256935B Method and apparatus for controlling gas flow to a processing chamber |
| 08/17/2011 | CN101140859B Etching apparatus and etching method using the same |
| 08/16/2011 | US8000939 Charged particle beam apparatus |
| 08/16/2011 | US7999240 Method and apparatus for specimen fabrication |
| 08/16/2011 | US7998426 Plasma-based gas treatment system integrated in a vacuum pump |
| 08/11/2011 | WO2011096227A1 Charged particle microscope and ion microscope |
| 08/11/2011 | WO2011095846A1 Parallel plate reactor for uniform thin film deposition with reduced tool foot-print |
| 08/11/2011 | US20110192987 Transmission electron microscope micro-grid |
| 08/10/2011 | EP2355128A2 Apparatus for transmission of energy and/or for transportation of an ion as well as a particle beam device having an apparatus such as this |
| 08/10/2011 | EP2355126A2 Hard material layer |
| 08/10/2011 | EP2355125A2 Particle beam device and method for operation of a particle beam device |
| 08/10/2011 | EP2353347A1 Device and method for producing and/or confining a plasma |
| 08/10/2011 | EP1913624B1 Sputtering target with slow-sputter layer under target material |
| 08/10/2011 | EP1849175B1 Charged-particle exposure apparatus |
| 08/10/2011 | EP1842220B1 Microelectronic multiple electron beam emitting device |
| 08/10/2011 | CN102148126A Substrate processing apparatus with window heating structure |
| 08/10/2011 | CN102148125A Plasma processing apparatus |
| 08/10/2011 | CN102148124A Micro-grid of transmission electron microscope |
| 08/10/2011 | CN102148123A Transmission electron microscope micro-gate and manufacturing method thereof |
| 08/10/2011 | CN102148122A Small laminated low-aberration converging lens for transmission electron microscope |