| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 05/02/2012 | CN102439685A Inductive plasma applicator |
| 05/02/2012 | CN102439684A Scan method |
| 05/02/2012 | CN102439683A 离子源 Ion source |
| 05/02/2012 | CN102438391A Adjustable electrodes and coils for plasma density distribution control |
| 05/02/2012 | CN102438390A Antenna unit and inductively coupled plasma processing apparatus |
| 05/02/2012 | CN102437012A Improved dry-process etching cavity |
| 05/02/2012 | CN102437004A Sputtering device |
| 05/02/2012 | CN102437003A Focusing ring assembly and ionization metal plasma (IMP) sputtering device |
| 05/02/2012 | CN102437002A Gas distributing disc for gas suction structure |
| 05/02/2012 | CN102437001A Vacuum processing apparatus, vacuum processing method, and micro-machining apparatus |
| 05/01/2012 | US8168957 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system |
| 05/01/2012 | US8168956 Scanning transmission electron microscope and method of aberration correction therefor |
| 05/01/2012 | US8168950 Charged particle beam apparatus, and image generation method with charged particle beam apparatus |
| 05/01/2012 | US8168947 Electrostatic latent image evaluation device, electrostatic latent image evaluation method, electrophotographic photoreceptor, and image forming device |
| 04/26/2012 | WO2012054390A2 Fault tolerant ion source power system |
| 04/26/2012 | WO2012051980A1 Sputtering sources for high-pressure sputtering with large targets and sputtering method |
| 04/26/2012 | WO2012018800A3 Method for acquiring simultaneous and overlapping optical and charged particle beam images |
| 04/26/2012 | US20120098164 Two-photon stereolithography using photocurable compositions |
| 04/26/2012 | US20120097863 Ion microscope |
| 04/26/2012 | US20120097849 Ion beam stabilization |
| 04/26/2012 | DE102010049062A1 Device for visual control of position adjustment of cathode of electron gun of electron microscope e.g. scanning microscope, has glasses with diametrically arranged apertures formed corresponding to cathode in working position |
| 04/26/2012 | DE102010015495B4 Vorrichtung zum Erzeugen von UV-Licht Apparatus for producing UV-light |
| 04/25/2012 | EP2444991A1 SEM imaging method |
| 04/25/2012 | EP2444990A1 Simplified particle emitter and method of operating thereof |
| 04/25/2012 | EP2443647A2 Pattern data conversion for lithography system |
| 04/25/2012 | EP2443646A2 Workpiece handling system |
| 04/25/2012 | EP2443645A1 Low-interference sensor head for a radiation detector, as well as a radiation detector which contains this low-interference sensor head |
| 04/25/2012 | EP2443644A2 Cooled charged particle systems and methods |
| 04/25/2012 | CN202205701U 一种粉体材料表面低温等离子体处理装置 One kind of powder material surface temperature plasma treatment device |
| 04/25/2012 | CN202205700U 一种颗粒状材料表面低温等离子体处理装置 A particulate material surface temperature plasma treatment device |
| 04/25/2012 | CN202205699U 一种用于等离子体蚀刻室的边环装置部件 A side ring device components for plasma etch chamber |
| 04/25/2012 | CN202205698U Sample carrier and transmission electron microscope |
| 04/25/2012 | CN202205697U 新型电极 New electrode |
| 04/25/2012 | CN102424955A 一种新型匀气结构 A new uniform gas structure |
| 04/25/2012 | CN101866806B 等离子体处理装置 The plasma processing apparatus |
| 04/25/2012 | CN101465283B 等离子体处理装置以及等离子体处理方法 The plasma processing apparatus and plasma processing method |
| 04/25/2012 | CN101419904B 等离子体约束装置及等离子体处理装置 The plasma processing apparatus and plasma confinement apparatus |
| 04/25/2012 | CN101302610B 具有覆盖钇铝层的部件的处理腔 A cover member having a layer of yttrium aluminum processing chamber |
| 04/25/2012 | CN101276775B 载置台的表面处理方法 The surface treatment method of the stage |
| 04/24/2012 | US8164069 Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device |
| 04/24/2012 | US8164068 Mask health monitor using a faraday probe |
| 04/24/2012 | US8164066 Magnetic lens, method for focusing charged particles and charged particle energy analyzer |
| 04/24/2012 | US8164060 System and method for a charged particle beam |
| 04/24/2012 | US8164059 In-chamber electron detector |
| 04/24/2012 | US8164055 Sample plate designs for MALDI and DESI for molecular imaging of coated medical devices on the applied biosystems Qstar/Voyager MALDI mass spectrometer |
| 04/24/2012 | US8163140 Reactive sputtering method and device |
| 04/19/2012 | WO2012051138A2 Use of cryogenic ion chemistry to add a structural characterization capability to mass spectrometry through linear action spectroscopy |
| 04/19/2012 | WO2012050597A1 Method of treating the surface of a soda lime silica glass substrate, surface-treated glass substrate, and device incorporating the same |
| 04/19/2012 | WO2012050018A1 Electron beam device |
| 04/19/2012 | WO2012049110A2 Improvements in and relating to ion guns |
| 04/19/2012 | US20120092804 Low Voltage Modular Room Ionization System |
| 04/19/2012 | US20120091633 Method To Minimize Chain Scission And Monomer Generation In Processing of Poly(L-Lactide) Stent |
| 04/19/2012 | US20120091362 Charged particle radiation device |
| 04/19/2012 | US20120091339 Charged-particle microscope device, and method of controlling charged-particle beams |
| 04/19/2012 | US20120091338 Environmental cell for a particle-optical apparatus |
| 04/19/2012 | US20120091337 Charged particle beam devices |
| 04/19/2012 | US20120091336 Sem actuated levitation devices |
| 04/19/2012 | US20120090785 Antenna unit for generating plasma and substrate processing apparatus including the same |
| 04/18/2012 | EP2442346A1 Improvements in and relating to charged particle beam devices |
| 04/18/2012 | EP2441857A2 Vacuum processing apparatus |
| 04/18/2012 | EP1483426B1 Apparatus and method for applying diamond-like carbon coatings |
| 04/18/2012 | CN1890034B 经处理以清除自由碳的半导体衬底加工装置的碳化硅部件 Silicon carbide component to remove free-carbon of the treated semiconductor substrate processing apparatus |
| 04/18/2012 | CN1822745B Plasma generation apparatus |
| 04/18/2012 | CN102422380A Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber |
| 04/18/2012 | CN102422198A 使用光学显微镜和粒子束显微镜的序列对对象进行显微检查 Using an optical microscope and a particle beam microscope, microscopic examination of the sequence of objects |
| 04/18/2012 | CN102421237A Plasma generating apparatus, plasma processing apparatus and plasma processing method |
| 04/18/2012 | CN102420579A Method and system for automatically realizing radio frequency power matching |
| 04/18/2012 | CN102420156A 处理装置和其维修方法 Processing apparatus and method for their maintenance |
| 04/18/2012 | CN102420092A Sputtering cathode having a non-bonded semiconducting target |
| 04/18/2012 | CN102420091A 一种复合式磁控溅射阴极 A composite cathode magnetron sputtering |
| 04/18/2012 | CN102420090A Plasma processing apparatus and plasma processing method |
| 04/18/2012 | CN102420089A Electrode plate for plasma etching and plasma etching apparatus |
| 04/18/2012 | CN102418073A Sputtering chamber, pre-cleaning chamber and plasma processing equipment |
| 04/18/2012 | CN101853769B 等离子体处理设备和用于等离子体处理设备的电极构件 The plasma processing apparatus and an electrode member for a plasma processing apparatus |
| 04/18/2012 | CN101471257B 等离子体蚀刻方法和等离子体蚀刻装置 The plasma etching method and a plasma etching apparatus |
| 04/17/2012 | US8159118 Electron gun |
| 04/17/2012 | US8158954 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens |
| 04/17/2012 | US8158940 Magnetic domain imaging system |
| 04/17/2012 | US8158939 High resolution gas field ion column |
| 04/12/2012 | WO2012048256A1 Inductively coupled plasma flood gun using an immersed low inductance rf coil and multicusp magnetic arrangement |
| 04/12/2012 | WO2012046775A1 Sample device for charged particle beam |
| 04/12/2012 | WO2012046396A1 Method for examining specimen floating on surface of liquid with scanning electron microscope |
| 04/12/2012 | WO2012045846A1 Apparatus and method for supporting a liquid sample for measuring scattering of electromagnetic radiation |
| 04/12/2012 | WO2012045291A1 Scintillation detection unit for the detection of back- scattered electrons electron or ion microscopes |
| 04/12/2012 | WO2012045187A2 In-situ conditioning for vacuum processing of polymer substrates |
| 04/12/2012 | WO2012009543A3 Improved contrast for scanning confocal electron microscope |
| 04/12/2012 | WO2012006558A3 Charged particle beam processing system with visual and infrared imaging |
| 04/12/2012 | US20120085941 Ion implantation apparatus and method |
| 04/12/2012 | US20120085924 Method and apparatus for specimen fabrication |
| 04/12/2012 | US20120085898 Time-of-flight mass spectrometry of surface |
| 04/12/2012 | DE112008004247T5 Lichtbogenverdampfer und Verfahren zum Betreiben des Verdampfers Arc evaporator and methods of operating the evaporator |
| 04/12/2012 | DE102010049521B3 Vorrichtung zum Erzeugen eines Elektronenstrahls An apparatus for generating an electron beam |
| 04/11/2012 | EP2439772A1 Conveying system having endless drive medium and conveying method |
| 04/11/2012 | EP2439763A2 Magentron device and method for pulsed operation of a magnetron device |
| 04/11/2012 | EP2438801A1 Plasma generation device with electron cyclotron resonance |
| 04/11/2012 | EP1989723B1 Phase plate, image producing method and electron microscope |
| 04/11/2012 | EP1964150B1 Improved sputter target utilization |
| 04/11/2012 | EP1537595B1 Secondary electron detector, especially in a scanning electron microscope |
| 04/11/2012 | EP1472703B1 Beam delivery system |
| 04/11/2012 | CN102414781A Substrate support structure, clamp preparation unit, and lithography system |