Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
07/2012
07/04/2012CN101908459B Loading stage mechanism and plasma processing apparatus using the same
07/04/2012CN101878514B Sputter coating device and coating method
07/04/2012CN101853768B Cylindrical plasma resonant cavity
07/04/2012CN101847559B Faraday device used for detecting implantation dose of plasma
07/04/2012CN101802963B Terminal structures of an ion implanter having insulated conductors with dielectric fins
07/04/2012CN101789354B Plasma treatment device with diffused dissociation
07/04/2012CN101673655B Microwave plasma resonant cavity used for depositing diamond film
07/04/2012CN101609779B Focus ring and plasma processing apparatus
07/04/2012CN101521980B Plasma processing apparatus and plasma processing method
07/04/2012CN101465276B Air-intake device and semiconductor processing equipment applying the same
07/04/2012CN101460002B Method and apparatus for producing uniform processing rates
07/04/2012CN101448357B Plasma processing apparatus
07/04/2012CN101256940B Gas supply system and integrated unit for semiconductor manufacturing device
07/04/2012CN101241087B Apparatus for observing a sample with a particle beam and an optical microscope
07/03/2012US8212227 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
07/03/2012US8212225 TEM grids for determination of structure-property relationships in nanotechnology
07/03/2012US8212224 Charged particle beam device
07/03/2012US8211238 System, method and apparatus for self-cleaning dry etch
06/2012
06/28/2012WO2012086419A1 Charged particle emission gun and charged particle ray apparatus
06/28/2012WO2012084661A1 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012WO2012084660A1 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012WO2012084659A2 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012WO2012084658A1 Microwave power delivery system for plasma reactors
06/28/2012WO2012084657A1 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012WO2012084656A1 Controlling doping of synthetic diamond material
06/28/2012WO2012084655A2 Microwave plasma reactors and substrates for synthetic diamond manufacture
06/28/2012WO2012084363A1 Method and system for monitoring the integrity of an article, and euv optical apparatus incorporating the same
06/28/2012WO2012061621A3 Electron flow generation
06/28/2012WO2012054390A3 Fault tolerant ion source power system
06/28/2012WO2012049110A3 Switchable gas cluster and atomic ion gun, and method of surface processing using the gun
06/28/2012WO2012045187A3 In-situ conditioning for vacuum processing of polymer substrates
06/28/2012US20120161000 Secondary-electron detector and charged particle beam apparatus
06/28/2012DE102010056337A1 Particle beam system for recording of energy loss spectrum, has high voltage source for providing high voltage between two high voltage outputs and control signal
06/28/2012DE102010056321A1 Particle beam microscope for use with optical path, has magnet lens with optical axis and front pole piece, which is arranged in optical path along optical axis with spacing before object plane
06/28/2012DE102009039621B4 Teilchenstrahlbearbeitungsvorrichtung wie eine Elektronenstrahlbearbeitungsvorrichtung Teilchenstrahlbearbeitungsvorrichtung as an electron beam machining apparatus
06/28/2012DE102008023027B4 Elektrodenanordnung für magnetfeldgeführte plasmagestützte Prozesse im Vakuum Electrode assembly for magnetic field guided plasma-assisted processes in vacuum
06/28/2012CA2821624A1 A microwave plasma reactor for manufacturing synthetic diamond material
06/28/2012CA2821621A1 Controlling doping of synthetic diamond material
06/28/2012CA2821617A1 Microwave plasma reactors and substrates for synthetic diamond manufacture
06/27/2012EP2469611A1 Movable jig for silicon-based thin film solar cell
06/27/2012EP2469610A1 Clamping unit for depositing thin film solar cell and signal feed-in method
06/27/2012EP2469577A1 Device for cooling samples during ion beam preparation
06/27/2012EP2468922A1 Deposition box for silicon-based thin film solar cell
06/27/2012EP1858047B1 Electron source manufacturing method
06/27/2012EP1602121B1 Apparatus for generating a plurality of beamlets
06/27/2012CN202285227U Limiting ring serving as part of capacitance coupling plasma treatment chamber
06/27/2012CN1799127B Plasma processing apparatus and plasma processing method
06/27/2012CN102522352A Detection apparatus for stability of ion beam and detection method thereof
06/27/2012CN102522307A Radio-frequency discharge ionization device enhanced by using photoelectric effect
06/27/2012CN102522306A Spray head
06/27/2012CN102522305A Plasma processing apparatus and focus ring assembly
06/27/2012CN102522304A Plasma processing apparatus and plasma processing method
06/27/2012CN102522303A Multi-partition gas conveying apparatus
06/27/2012CN102522302A Manufacturing method for low-energy implantation mode switcher of ion implanter
06/27/2012CN102522301A 800kw high-power electron gun
06/27/2012CN102522300A Charged particle beam lithography system and target positioning device
06/27/2012CN102521445A Simulation computation method for etching morphology of copper target in magnetron sputtering equipment
06/27/2012CN102021524B Device for separating ions of different masses during plasma immersion ion implantation
06/27/2012CN101982868B Electrode structure
06/27/2012CN101777481B Hybrid magnetic/electrostatic deflector for ion implantation systems
06/27/2012CN101651078B Focus ring, plasma processing apparatus and plasma processing method
06/27/2012CN101499398B Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus
06/27/2012CN101276737B Susbtrate processing apparatus and substrate processing method
06/27/2012CN101103417B Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
06/27/2012CN101088139B Electrically enhancing the confinement of plasma
06/26/2012US8209766 Scanning probe microscope capable of measuring samples having overhang structure
06/26/2012US8207499 Variable rate scanning in an electron microscope
06/26/2012US8207498 Electron beam apparatus and electron beam inspection method
06/26/2012US8207431 Transmission electron microscope micro-grid and method for manufacturing the same
06/26/2012US8206562 Apparatus and method for the application of a material layer to display devices
06/26/2012US8205572 Vacuum treatment installation for the production of a disk-shaped workpiece based on a dielectric substrate
06/26/2012CA2501070C High velocity method for deposing diamond films from a gaseous phase in shf discharge plasma and a plasma reactor for carrying out said method
06/21/2012WO2012082438A2 Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate
06/21/2012WO2012081428A1 Scanning electron microscope and length measuring method using the same
06/21/2012WO2012081422A1 Charged particle beam applied apparatus, and irradiation method
06/21/2012WO2012080278A1 Lithography system and method of processing substrates in such a lithography system
06/21/2012WO2012051138A3 Use of cryogenic ion chemistry to add a structural characterization capability to mass spectrometry through linear action spectroscopy
06/21/2012US20120153147 Corrector
06/21/2012US20120153146 Charged particle beam apparatus including aberration corrector
06/21/2012US20120153145 Scanning electron microscope and sample observation method
06/21/2012US20120153144 System and method for producing and using multiple electron beams with quantized orbital angular momentum in an electron microscope
06/21/2012DE112010002918T5 Vorrichtung für einen Strahl geladener Teichen und Abbildungsanzeigeverfahren Device for a beam of charged ponds and image display method
06/21/2012DE112009005052T5 Verfahren und Vorrichtung zum Schutz von Plasmakammerflächen Method and apparatus for protecting plasma chamber surfaces
06/21/2012DE102010063685A1 Magnetronanordnung mit einem Hohltarget Magnetron with a hollow target
06/21/2012DE102010054858A1 Verfahren und Vorrichtung zur Herstellung einer reflexionsmindernden Beschichtung Method and apparatus for producing a reflection-reducing coating
06/21/2012DE102010054541A1 Korrektor Proofreader
06/21/2012CA2764215A1 Ozone generating apparatus
06/20/2012EP2466614A2 Arc source and magnet assembly
06/20/2012EP2466613A2 Corrector
06/20/2012CN202282324U 一种场发射半裸磁扫描电镜用样品台 A field emission scanning electron microscope with a half-naked magnetic sample stage
06/20/2012CN102509689A Objective anastigmator of electronic microscope
06/20/2012CN101866802B Ion source loading and unloading device
06/20/2012CN101645387B Process endpoint detection in processing chambers
06/20/2012CN101517691B Ecr plasma source
06/20/2012CN101473404B Apparatus and method for cleaning, etching, activation and subsequent treatment of glass surfaces, glass surfaces coated by metal oxides, and surfaces of other SiO2-coated materials
06/20/2012CN101308784B Plasma immersion ion implantation with highly uniform chamber seasoning process for a toroidal source reactor
06/19/2012US8203119 Charged particle beam device with retarding field analyzer
06/19/2012US8202467 Propylene-based polymer article
06/19/2012CA2465195C Electrode assembly for the removal of surface oxides by electron attachment
06/14/2012WO2012078339A1 Method of ionization
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