Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
09/2012
09/27/2012US20120244704 Method for removing oxides
09/27/2012US20120241648 Heat lip seal for cryogenic processing
09/27/2012US20120241612 Electron Beam Biprism Device and Electron Beam Device
09/27/2012US20120241611 Electron Microscope
09/27/2012US20120241609 Electron Detecting Mechanism and Charged Particle Beam System Equipped Therewith
09/27/2012US20120241608 Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
09/27/2012US20120241607 Microfluidic blotless cryo tem device and method
09/27/2012US20120241605 Method and system for enhancing resolution of a scanning electron microscope
09/26/2012EP2503587A2 Apparatus for generating a plurality of beamlets
09/26/2012EP2503586A2 Electron detecting mechanism and charged particle beam system equipped therewith
09/26/2012EP2503023A2 Processing gas supply member for a microwave plasma processing device
09/26/2012EP2502256A1 Tuning hardware for plasma ashing apparatus and methods of use thereof
09/26/2012EP2502255A1 Coil section assembly for simulating circular coils for vacuum devices
09/26/2012EP2502254A1 Apparatus and method for controllably implanting workpieces
09/26/2012EP2501837A1 Method of plasma etching and plasma chamber cleaning using f2 and cof2
09/26/2012EP2501836A1 Device and method for coating a substrate
09/26/2012CN102696091A System and method for manipulating an ion beam
09/26/2012CN102693893A Method for improving uniformity of high-frequency discharge plasma through frequency modulation
09/26/2012CN102693892A Plasma processing apparatus and plasma processing method
09/26/2012CN101908460B Plasma processing apparatus and plasma processing method
09/26/2012CN101563749B Terminal structure of an ion implanter
09/26/2012CN101466873B Etching process
09/26/2012CN101174097B Mask etch plasma reactor with variable process gas distribution
09/26/2012CN101069260B Ion beam milling of a work piece and determining and controlling extent thereof
09/25/2012US8274046 Monochromator for charged particle beam apparatus
09/25/2012US8273211 Flat panel display manufacturing apparatus
09/20/2012WO2012126006A1 Systems and methods for charging solar cell layers
09/20/2012WO2012125560A2 Method and apparatus for plasma dicing a semi-conductor wafer
09/20/2012WO2012125285A1 Apparatus and method for maskless patterned implantation
09/20/2012WO2012124324A1 Charged particle beam lens and exposure apparatus using the same
09/20/2012WO2012124322A1 Charged particle beam lens and exposure apparatus using the same
09/20/2012WO2012124320A1 Charged particle beam lens and exposure apparatus using the same
09/20/2012WO2012124319A1 Charged particle beam lens and exposure apparatus using the same
09/20/2012WO2012124318A1 Method for manufacturing charged particle beam lens
09/20/2012WO2012123217A1 Device for analysing samples by means of x-ray spectroscopy
09/20/2012WO2012123216A1 X-ray spectroscopy device
09/20/2012US20120235035 Transmission Electron Microscope and Sample Observation Method
09/20/2012DE102012204109A1 Vorrichtung und Verfahren zum Herstellen einer Festkörper-Immersionslinse unter Verwendung einer binären Bitmap Abtragungsschablone Apparatus and method for manufacturing a solid immersion lens using a binary bitmap mask removal
09/20/2012DE102011014399A1 Phasenkontrasteinheit Phase contrast unit
09/20/2012DE102011013822A1 Verfahren zur Modifizierung einer Oberfläche eines Substrats durch Ionenbeschuss A method for modifying a surface of a substrate by ion bombardment
09/20/2012DE102010060762A9 Plasmabearbeitungsvorrichtung The plasma processing apparatus
09/19/2012EP2499654A1 Device for generating plasma by means of microwaves
09/19/2012EP2499653A2 Method and apparatus for cleaning residue from an ion source component
09/19/2012CN202443946U Electron gun for electron beam furnaces
09/19/2012CN1816893B RF pulsing of a narrow gap capacitively coupled reactor
09/19/2012CN1684224B Methods and array for creating a mathematical model of a plasma processing system
09/19/2012CN102687233A Charged particle multi-beamlet lithography system with modulation device
09/19/2012CN102687232A Modulation device and charged particle multi-beamlet lithography system
09/19/2012CN102687231A High voltage shielding arrangement
09/19/2012CN102683250A Crystalline silicon solar cell coating equipment
09/19/2012CN102683182A Systems and methods providing electron beam writing to a medium
09/19/2012CN102683148A Plasma processing apparatus
09/19/2012CN102683147A Ion implantation device
09/19/2012CN102683146A Four-dimensional electronic shadow imaging device
09/19/2012CN102683145A Y-axis tilting device of specimen microscope stage for piezoelectric ceramics driven transmission electron microscope
09/19/2012CN102683144A Slit electrode and charged particle beam generation device having slit electrode
09/19/2012CN102683143A Slit electrode and charged particle beam generation device having slit electrode
09/19/2012CN102677008A Online preparation of coating of electric conduction electrode of solar battery
09/19/2012CN101892463B Methods for stable and repeatable plasma ion implantation
09/19/2012CN101853770B Substrate processing apparatus and substrate processing method using same
09/19/2012CN101117706B Ganged scanning of multiple magnetrons, especially two level folded magnetrons
09/18/2012US8269190 Method and system for achieving optimal UV water disinfection
09/18/2012US8269188 Charged particle beam apparatus and sample processing method
09/18/2012US8269167 Method and system for non-destructive distribution profiling of an element in a film
09/18/2012US8268225 Medical device manufacturing method and medical device assembly
09/18/2012US8268181 Plasma ashing apparatus and endpoint detection process
09/18/2012US8267040 Plasma processing apparatus and plasma processing method
09/13/2012WO2012121267A1 Vacuum feedthrough
09/13/2012WO2012120728A1 Electron microscope sample holder and sample observation method
09/13/2012WO2012120726A1 Electron-microscope sample holder and sample-observation method
09/13/2012WO2012120576A1 Scanning electron microscope
09/13/2012WO2012119700A1 Device and method for the plasma-assisted treatment of at least two substrates
09/13/2012US20120231553 Substrate processing apparatus and fabrication process of a semiconductor device
09/13/2012DE112009005052T9 Verfahren und Vorrichtung zum Schutz von Plasmakammerflächen Method and apparatus for protecting plasma chamber surfaces
09/13/2012CA2828967A1 Electrostatic lenses and systems including the same
09/12/2012EP2498271A2 Charged particle beam device with aperture
09/12/2012CN202434490U Fixture base of plasma etcher
09/12/2012CN202434478U Tray for improving uniformity of film prepared by dry etching
09/12/2012CN202434463U Semiconductor backscattered electron detector
09/12/2012CN202434462U Large-power electronic gun with maximum power of 800kW
09/12/2012CN102668016A Ion implantation system and method
09/12/2012CN102668015A Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof
09/12/2012CN102668014A Charged-particle microscope and method for controlling the charged-particle microscope
09/12/2012CN102668013A Scanning electron microscope
09/12/2012CN102005358B Charged particle beam exposure system
09/11/2012US8263952 Lead free barium sulfate electrical insulator and method of manufacture
09/11/2012US8263943 Ion beam device
09/11/2012US8263934 Method for detecting information of an electric potential on a sample and charged particle beam apparatus
09/11/2012US8263933 Device and method for analyzing an organic sample
09/11/2012US8262869 Work piece processing by pulsed electric discharges in solid-gas plasma
09/11/2012US8262848 Plasma processing apparatus and method
09/11/2012US8262846 Plasma processing apparatus and method thereof
09/11/2012US8261692 Substrate processing apparatus and reaction container
09/07/2012WO2012119114A2 E-petri dishes, devices, and systems
09/07/2012WO2012119009A2 Electron beam source system and method
09/07/2012WO2012118938A1 Microtome utilizing a movable knife in a retardation field scanning electron microscope and a retardation field scanning electron microscope including the same
09/07/2012WO2012117998A1 Electron microscope
09/07/2012WO2012117171A1 Device for producing nanoparticles at high efficiency, use of said device and method of depositing nanoparticles
09/07/2012WO2012082438A3 Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate
09/07/2012WO2012073009A3 Nanopore devices
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