| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 06/14/2012 | WO2012078253A1 Measuring and controlling parameters of a plasma generator |
| 06/14/2012 | WO2012077554A1 Charged particle beam apparatus and method of irradiating charged particle beam |
| 06/14/2012 | WO2012077271A1 Charged particle beam apparatus |
| 06/14/2012 | WO2012076630A1 Generating plasmas in pulsed power systems |
| 06/14/2012 | WO2012006558A4 Charged particle beam processing system with visual and infrared imaging |
| 06/14/2012 | WO2011101226A3 High-frequency supply of a load without impedance matching |
| 06/14/2012 | US20120145918 Method of ionization |
| 06/14/2012 | US20120145899 Scanning electron microscope |
| 06/14/2012 | US20120145897 Transmission Electron Microscope Sample Holder with Optical Features |
| 06/14/2012 | US20120145896 Gas delivery in a microscope system |
| 06/14/2012 | US20120145895 Method of Processing of an Object |
| 06/14/2012 | DE102011087955A1 Raster-Elektronen-Mikroskop Scanning electron microscope |
| 06/13/2012 | EP2463890A1 Generating plasmas in pulsed power systems |
| 06/13/2012 | EP2463889A2 Electron beam apparatus and detector arrangement |
| 06/13/2012 | EP2463888A1 Backscatter reduction in thin electron detectors |
| 06/13/2012 | EP2463887A2 Method of making axial alignment of charged particle beam and charged particle beam system |
| 06/13/2012 | EP2463401A1 Apparatus for manufacturing a directional layer by means of cathodic sputtering and its use |
| 06/13/2012 | EP2462953A1 Electron beam sterilizer |
| 06/13/2012 | EP1894221B1 Ion source with multi-piece outer cathode |
| 06/13/2012 | EP1793410B1 Spherical aberration correction electrostatic lens, input lens, electron spectroscopic device, photoelectron microscope, and measurement system |
| 06/13/2012 | EP1516350B1 Plasma processor with electrode simultaneously responsive to plural frequencies |
| 06/13/2012 | EP1177327B1 Electron beam physical vapor deposition method |
| 06/13/2012 | DE202012101674U1 Anordnung zur Kalibrierung eines Pyrometers Arrangement for calibrating a pyrometer |
| 06/13/2012 | DE202012101670U1 Anordnung eines Pyrometers in einer Vakuumbehandlungsanlage Arrangement of a pyrometer in a vacuum treatment plant |
| 06/13/2012 | CN202275797U 大气电浆处理装置 Atmospheric plasma processing apparatus |
| 06/13/2012 | CN1820194B Scanning electron microscope having multiple detectors and a method for multiple detector based imaging |
| 06/13/2012 | CN102496554A Radio frequency power signal source vacuum introduction electrode |
| 06/13/2012 | CN101849275B Plasma electron flood for ion beam implanter |
| 06/13/2012 | CN101661871B Plasma processing device, feedback control method of plasma processing device, and supplying method of high frequency power |
| 06/13/2012 | CN101656200B Multiple frequency plasma etch reactor |
| 06/13/2012 | CN101558469B System for magnetic scanning and correction of an ion beam |
| 06/13/2012 | CN101506927B Electron beam control method, electron beam generating apparatus, apparatus using the same, and emitter |
| 06/13/2012 | CN101313383B Radiation lamp and radiation source module incorporating same |
| 06/13/2012 | CN101231932B Manipulator for rotating and translating a sample holder |
| 06/12/2012 | US8198610 Ion implanter with variable aperture and ion implant method thereof |
| 06/12/2012 | US8198603 Sample preparing device and sample posture shifting method |
| 06/12/2012 | US8198601 Method for producing a multi-beam deflector array device having electrodes |
| 06/12/2012 | US8197638 Semiconductor manufacturing device and method for manufacturing semiconductor devices |
| 06/12/2012 | DE202012101675U1 Anordnung zur Temperaturmessung von Substraten in einer Vakuumbehandlungsanlage Arrangement for measuring the temperature of substrates in a vacuum treatment plant |
| 06/07/2012 | WO2012075182A2 Electron beam column and methods of using same |
| 06/07/2012 | WO2012074889A2 Ion implanter system including remote dopant source, and method comprising same |
| 06/07/2012 | WO2012074292A2 Method for blanking a particle beam in a particle beam column |
| 06/07/2012 | WO2012073424A1 Electronic microscope, electronic-microscope image reconstruction system, and electronic-microscope image reconstruction method |
| 06/07/2012 | WO2012072640A1 Process and apparatus for producing covering electrodes on organic electronic elements |
| 06/07/2012 | WO2012072215A1 Method for producing a carbon-containing layer system and apparatus for implementing the method |
| 06/07/2012 | WO2012071903A1 Plasma processing device |
| 06/07/2012 | WO2012044977A3 Compact rf antenna for an inductively coupled plasma ion source |
| 06/07/2012 | WO2012009543A4 Improved contrast for scanning confocal electron microscope |
| 06/07/2012 | US20120141693 Ion sources, systems and methods |
| 06/07/2012 | US20120139407 System And Manufacturing A Cathodoluminescent Lighting Device |
| 06/07/2012 | US20120138796 Signal Processing Method for Charged Particle Beam Device, and Signal Processing Device |
| 06/07/2012 | US20120138795 Specimen observation method |
| 06/07/2012 | US20120138793 Method of Making Axial Alignment of Charged Particle Beam and Charged Particle Beam System |
| 06/07/2012 | US20120138792 Optical probing in electron microscopes |
| 06/07/2012 | US20120138472 Method of forming a process chamber component having electroplated yttrium containing coating |
| 06/06/2012 | EP2461348A1 Detector system for use with transmission electron microscope spectroscopy |
| 06/06/2012 | EP2461347A1 Detector system for transmission electron microscope |
| 06/06/2012 | EP2461346A2 Particle beam apparatus with deflection system |
| 06/06/2012 | EP2460174A1 Plasma stamp and method for plasma treating a surface |
| 06/06/2012 | EP2460173A1 A mask health monitor using a faraday probe |
| 06/06/2012 | EP2459767A1 Cleaning of a process chamber |
| 06/06/2012 | EP1964149B1 Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems |
| 06/06/2012 | EP1535324B1 Method of manufacturing cmos devices by the implantation of n- and p-type cluster ions and negative ions |
| 06/06/2012 | DE102010053194A1 Teilchenstrahlgerät mit Ablenksystem Particle beam deflection with |
| 06/06/2012 | DE102009004392B4 Datenerzeugungsverfahren für Halbleitervorrichtung und Elektronenstrahlbelichtungssystem Data forming method for the semiconductor device and electron beam exposure system |
| 06/06/2012 | CN202268337U Loading device and plasma processing equipment with loading device |
| 06/06/2012 | CN1682339B Method and apparatus for an improved baffle plate in a plasma processing system |
| 06/06/2012 | CN102487029A Electrostatic chuck and plasma device therewith |
| 06/06/2012 | CN102486986A 等离子清洁装置 Plasma cleaning device |
| 06/06/2012 | CN102486985A Ion source device |
| 06/06/2012 | CN102013387B Metal disc winding for etching equipment and assembly method thereof |
| 06/05/2012 | US8193515 Sports ball sterilizer |
| 06/05/2012 | US8193494 Transmission electron microscope and method for observing specimen image with the same |
| 06/05/2012 | US8193491 Structure and method for determining a defect in integrated circuit manufacturing process |
| 06/05/2012 | US8191505 Process gas introducing mechanism and plasma processing device |
| 05/31/2012 | WO2012071583A1 Combination computed and direct radiography system and method |
| 05/31/2012 | WO2012070517A1 Ion milling device and ion milling processing method |
| 05/31/2012 | WO2012069943A1 Plasma processing apparatus |
| 05/31/2012 | WO2012045291A4 Scintillation detection unit for the detection of back- scattered electrons electron or ion microscopes |
| 05/31/2012 | WO2012024173A3 Mechanism and method for aligning a workpiece to a shadow mask |
| 05/31/2012 | WO2012018860A3 Methods and devices for preparing microscopy samples |
| 05/31/2012 | US20120136196 Mobile imaging unit with environmental containment |
| 05/31/2012 | US20120135155 Process chamber component having yttrium-aluminum coating |
| 05/31/2012 | US20120132828 Holder for an electron microscopy sample carrier |
| 05/31/2012 | US20120132802 Gas field ionization ion source apparatus and scanning charged particle microscope equipped with same |
| 05/31/2012 | US20120132801 Method and an apparatus of an inspection system using an electron beam |
| 05/31/2012 | DE102010052341A1 Protection device on tube target in vacuum process chamber, useful for detecting its minimum cross-sectional minimum diameter predetermined by diameter, comprises radially directed capillary line running from interior of the tube target |
| 05/30/2012 | EP2458618A2 Processing apparatus |
| 05/30/2012 | EP2458617A1 Electron microscope with assistive locating apparatus |
| 05/30/2012 | EP2458616A2 Holder for an electron microscopic sample carrier |
| 05/30/2012 | EP2457247A2 Cleaning device for transmission electron microscopes |
| 05/30/2012 | EP2457078A1 Nanofluidic cell |
| 05/30/2012 | EP2174338B1 Method for operation of a plasma supply device and a plasma supply device |
| 05/30/2012 | EP1637624B1 Thin film forming apparatus |
| 05/30/2012 | CN202259153U Etching cavity of dry-etching hard inorganic material substrate inductively coupled plasma (ICP) etching machine |
| 05/30/2012 | CN202259152U Structure of online plasma cleaning reaction bin for lead frame |
| 05/30/2012 | CN202259151U Electron microscope capable of focusing automatically |
| 05/30/2012 | CN202259150U Sample table for scanning electron microscope |
| 05/30/2012 | CN102484167A Masked ion implant with fast-slow scan |
| 05/30/2012 | CN102484028A 离子源清净终点侦测 Ion source clean endpoint detection |