Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
10/2012
10/17/2012CN102737945A Plasma processing apparatus, and plasma processing method
10/17/2012CN102737944A Plasma processing apparatus and plasma generation antenna
10/17/2012CN102737943A Plasma processing apparatus
10/17/2012CN102737942A Substrate processing method
10/17/2012CN102737941A Plasma processing apparatus and plasma processing method
10/17/2012CN102737940A Plasma processing apparatus
10/17/2012CN102737939A Plasma processing equipment and working method thereof
10/17/2012CN102737938A Wide aperature wien exb mass filter
10/17/2012CN102737937A Method of protecting radiation detector in charged particle instrument
10/17/2012CN102737936A Electrode lead-out device of vacuum chamber
10/17/2012CN102737935A Micro grid of transmission electron microscope
10/17/2012CN102737934A Radio-frequency shielding device for plasma processing reaction chamber
10/17/2012CN102737933A Distortion free stigmation of a tem
10/17/2012CN102737932A Aberration-corrected wien exb mass filter with removal of neutrals from the beam
10/17/2012CN102737928A Magnetic pole component, magnetron provided with magnetic pole component, sputtering chamber apparatus, and substrate processing device
10/17/2012CN102736648A Temperature controlling method and plasma processing system
10/17/2012CN102732857A Erosion resistant yttrium comprising metal with oxidized coating for plasma chamber components
10/16/2012US8289384 Electron beam displacement measuring method, electron beam displacement measuring device, and electron beam recording apparatus
10/16/2012US8288741 Apparatus and method for three dimensional ion processing
10/16/2012US8288723 Transmission electron microscope micro-grid and method for making the same
10/16/2012US8288722 Electron beam inspection method and electron beam inspection apparatus
10/16/2012US8286581 High frequency power source and its control method, and plasma processing apparatus
10/11/2012WO2012139138A1 System and method for plasma monitoring using microwaves
10/11/2012WO2012138966A1 Indirectly heated cathode cartridge design
10/11/2012WO2012138738A2 Method for extracting frozen specimens and manufacture of specimen assemblies
10/11/2012WO2012138498A1 Improved method of controlling lithium uniformity
10/11/2012WO2012138482A1 Apparatus and method for multiple slot ion implantation
10/11/2012WO2012137787A1 Neutral beam formation device, surface analysis device, neutral beam formation method, and surface analysis method
10/11/2012WO2012136993A1 Methods, apparatuses and computer programs for crystallography
10/11/2012WO2012136583A1 Apparatus for treating two opposed surfaces by ion bombardment
10/11/2012WO2012135883A1 Tubular target having a protective device
10/11/2012US20120256087 Scanning Electron Microscope
10/11/2012US20120256085 Method of protecting a radiation detector in a charged particle instrument
10/11/2012US20120256084 Electron beam drift detection device and method for detecting electron beam drift
10/11/2012DE102011016681A1 Kohlenstofffunkenverdampfung Carbon arc vaporization
10/10/2012EP2509100A2 Integrated anode and activated reactive gas source for use in a magnetron sputtering device
10/10/2012EP2509099A2 Electron beam exposure apparatus and electron beam exposure method
10/10/2012EP2509098A1 Method of protecting a radiation detector in a charged particle instrument
10/10/2012EP2509097A1 Method of protecting a radiation detector in a charged particle instrument
10/10/2012EP2508903A2 Inspection device using secondary charged particle detection
10/10/2012CN102725817A Multi-channel radio frequency generator
10/10/2012CN102725439A Inline coating installation
10/10/2012CN102723253A Exhaust interlocking and time delay system for ion implantation device and method thereof
10/10/2012CN102723252A Ion implantation method and ion implantation apparatus
10/10/2012CN102721832A Preparation method and application of metal tungsten nano-probe
10/10/2012CN101935827B Device and method for precipitating film layer of thin-film solar cell
10/10/2012CN101754563B Shell and injection-type plasma system thereof
10/10/2012CN101688291B Cooling shield for substrate processing chamber
10/10/2012CN101662880B Portable microwave plasma generator capable of generating plasma with low electric power
10/10/2012CN101437354B Plasma processing apparatus
10/09/2012US8283642 Ion beam sample preparation apparatus and methods
10/09/2012US8283641 Positioning device for a particle beam apparatus
10/09/2012US8282997 Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating
10/09/2012US8282794 Filtered cathodic arc deposition method and apparatus
10/09/2012US8281738 Cathode and counter-cathode arrangement in an ion source
10/04/2012WO2012134601A1 Method and apparatus for improved uniformity control with dynamic beam shaping
10/04/2012WO2012134600A1 Improved uniformity of a scanned ion beam
10/04/2012WO2012133961A1 Combined probe capable of electrochemical and raman spectroscopic monitoring, scanning, and feedback stimulation
10/04/2012WO2012132494A1 Ion beam device and machining method
10/04/2012WO2012132230A1 Electron microscope
10/04/2012WO2012132228A1 Multipole and charged particle beam apparatus using same
10/04/2012WO2012075182A3 Electron beam column and methods of using same
10/04/2012US20120248978 Antenna for plasma processor and apparatus
10/04/2012US20120248332 Sports ball sterilizer
10/04/2012US20120247680 Plasma stabilization method and plasma apparatus
10/04/2012DE112010003102T5 Abtastelektronenmikroskop Scanning
10/04/2012DE102011006588A1 Teilchenstrahlgerät mit Detektoranordnung Particle beam with detector array
10/04/2012DE102011006462A1 Channeling vacuum process systems, comprises feeding air in a lock chamber of the vacuum process system until pressure is equally large within and outside of the lock chamber, and opening the lock chamber to atmosphere
10/03/2012EP2506285A1 Particle beam device having a detector arrangement
10/03/2012EP2505686A1 Cu-Ga-based alloy powder with low oxygen content, Cu-Ga-based alloy target material and method for producing the target material
10/03/2012CN202473834U Connection bayonet for inductance coupling plasma processing device
10/03/2012CN102714126A ECR plasma source with coating protection and use of the coating protection
10/03/2012CN102714125A Ion milling device, sample processing method, processing device, and sample drive mechanism
10/03/2012CN102714124A Optical heater for cryogenic ion implanter surface regeneration
10/03/2012CN102713374A Device for closing an opening in a chamber wall
10/03/2012CN102713000A Method of plasma etching and plasma chamber cleaning using F2 and COF2
10/03/2012CN102709208A Determination method, control method, determination apparatus, pattern forming system and program
10/03/2012CN102709145A Plasma processing apparatus
10/03/2012CN102709144A Plasma processing apparatus
10/03/2012CN102709143A Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
10/03/2012CN102709142A Nanopore-based electric beam field emitting device
10/03/2012CN101414534B 电子束曝光系统 Electron beam exposure system
10/03/2012CN101303965B Method and apparatus for eliminating migration of etching pattern
10/03/2012CN101128909B A housing for a micro-column
10/03/2012CN101053063B Apparatus and plasma ashing process for increasing photoresist removal rate
10/02/2012US8278634 System and method for ion implantation with improved productivity and uniformity
10/02/2012US8278632 Vessel sterilization apparatus
10/02/2012US8278628 Apparatus and process for sterilization and preservation of objects
10/02/2012US8278623 High-vacuum variable aperture mechanism and method of using same
10/02/2012US8278195 Plasma CVD apparatus
10/02/2012US8277738 Mobile type electron accelerator
10/02/2012US8277604 Antenna for plasma processor and apparatus
10/02/2012US8276604 Peripherally engaging electrode carriers and assemblies incorporating the same
09/2012
09/27/2012WO2012128967A2 Multiple-beam system for high-speed electron-beam inspection
09/27/2012WO2012128821A1 Fluid distribution members and/or assemblies
09/27/2012WO2012127963A1 Enclosure and method for handling electron gun or ion gun
09/27/2012WO2012127901A1 Charged particle ray apparatus and pattern measurement method
09/27/2012WO2012126839A1 Phase contrast unit
09/27/2012WO2012126792A1 Electron beam apparatus
09/27/2012WO2011153228A3 Reduction of copper or trace metal contaminants in plasma electrolytic oxidation coatings
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