| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 12/20/2012 | WO2012172913A1 Charged particle beam lens |
| 12/20/2012 | WO2012172720A1 Charged particle beam device |
| 12/20/2012 | WO2012172304A1 Method and device for manufacturing a barrier layer on a flexible substrate |
| 12/20/2012 | WO2012172285A1 Device for providing a flow of plasma |
| 12/20/2012 | WO2012146647A3 Method and apparatus for processing a substrate with a focussed particle beam |
| 12/20/2012 | US20120319000 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system |
| 12/20/2012 | US20120318978 Monochromator for Charged Particle Beam Apparatus |
| 12/20/2012 | US20120318977 Scanning Electron Microscope Optical Condition Setting Method and Scanning Electron Microscope |
| 12/20/2012 | US20120318976 Pattern measurement apparatus and pattern measurement method |
| 12/20/2012 | DE102011077635A1 Hochspannungsversorgungseinheit für ein Teilchenstrahlgerät High voltage power supply unit for a particle beam |
| 12/19/2012 | EP2535920A2 High-voltage supply unit for a particle beam device |
| 12/19/2012 | EP2534674A1 An adjustable shadow mask assembly for use in solar cell fabrications |
| 12/19/2012 | EP2534667A2 Aberration-correcting dark-field electron microscopy |
| 12/19/2012 | EP2534666A1 Assembly and method for reducing foil wrinkles in a circular arrangement |
| 12/19/2012 | EP2534665A1 Assembly and method for reducing foil wrinkles |
| 12/19/2012 | CN202616187U Faraday shielding device with cooling function and plasma processing equipment |
| 12/19/2012 | CN202616186U Inductive coupling plasma etching chamber |
| 12/19/2012 | CN102834896A Device for supporting a rotatable target and sputtering apparatus |
| 12/19/2012 | CN102834545A Method and device for layer deposition |
| 12/19/2012 | CN102834544A A device for sealing a chamber inlet or a chamber outlet for a flexible substrate |
| 12/19/2012 | CN102832096A Gas supplying device for vacuum treatment devices and gas supplying and switching method of gas supplying device |
| 12/19/2012 | CN102832095A Plasma processing apparatus |
| 12/19/2012 | CN102832094A Ion source and ion implantation apparatus |
| 12/19/2012 | CN102832093A High-voltage supply unit for particle beam device |
| 12/19/2012 | CN102832092A Ion implantation apparatus and ion implantation method |
| 12/19/2012 | CN102169145B Detection and suppression circuit and method of electrical arcing |
| 12/19/2012 | CN102148123B Transmission electron microscope micro-gate and manufacturing method thereof |
| 12/19/2012 | CN102005357B Transmission electron microscope micro-grid |
| 12/19/2012 | CN101720163B Medium barrier glow discharge reactor at atmospheric pressure |
| 12/19/2012 | CN101174096B Mask etch plasma reactor with cathode providing a uniform distribution of etch rate |
| 12/18/2012 | US8334521 Disinfecting chamber adapted to implement disinfecting cycle, each instrument has identification data and in the chamber is associated with means for acquiring identification data of each instrument when it is put in place and when it is removed from the chamber |
| 12/18/2012 | US8334520 Charged particle beam apparatus |
| 12/18/2012 | US8334510 Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment |
| 12/13/2012 | WO2012170622A1 Rotary sputter target assembly |
| 12/13/2012 | WO2012169665A1 Apparatus for controlling digital alignment coils of tem for ped analysis and apparatus for displaying rotation speed and rotation angle of electronic beam |
| 12/13/2012 | WO2012169505A1 Stage device and control method for stage device |
| 12/13/2012 | WO2012169323A1 Charged particle beam device and sample production method |
| 12/13/2012 | WO2012168709A2 Improvements to the application of coating materials |
| 12/13/2012 | WO2012168575A2 Plasma immersion ion implantation machine for low-pressure process |
| 12/13/2012 | WO2012168303A2 Method and device for generating an arc detection signal and arc detection arrangement |
| 12/13/2012 | WO2012168225A1 Ion source, nanofabrication apparatus comprising such source, and a method for emitting ions |
| 12/13/2012 | WO2012167410A1 Scanning and degumming system using radio frequency, dielectric barrier atmospheric pressure glow plasma |
| 12/13/2012 | WO2012143548A3 Network architecture and protocol for cluster of lithography machines |
| 12/13/2012 | WO2012128967A3 Multiple-beam system for high-speed electron-beam inspection |
| 12/13/2012 | US20120312986 Characterization of nanoscale structures using an ultrafast electron microscope |
| 12/13/2012 | DE102011109449B3 Verfahren zum kalibrieren eines laserscanners, verwendung des verfahrens und bearbeitungssystem mit laserscanner A method for calibrating a laser scanner, use the procedure and processing system with laser scanner |
| 12/13/2012 | DE102011077152A1 Verfahren zur Erzeugung eines Arcerkennungssignals und Arcerkennungsanordnung A method for generating a Arcerkennungssignals and Arcerkennungsanordnung |
| 12/12/2012 | EP2533278A2 High accuracy beam placement for local area navigation |
| 12/12/2012 | EP2533269A2 High frequency power distribution device and substrate processing apparatus using same |
| 12/12/2012 | EP2533268A1 Multiple frequency plasma etch reactor |
| 12/12/2012 | CN202601554U Radio frequency (RF) combined device and plasma processing equipment |
| 12/12/2012 | CN202601553U Reel-to-reel glow discharge generating device for modifying surface of flexible material |
| 12/12/2012 | CN202591170U Normal-pressure dual RF radio frequency electrode plasma free radical cleaning spray gun |
| 12/12/2012 | CN102822938A Target for spark vaporization with physical limiting of the propogation of the spark |
| 12/12/2012 | CN102822742A Method for controlling the electronic beam exposure of wafers and masks using proximity correction |
| 12/12/2012 | CN102821873A Method for the application of a conformal nanocoating by means of a low pressure plasma process |
| 12/12/2012 | CN102820204A Scanning and photoresist removing system using radiofrequency and dielectric-barrier atmospheric-pressure glow plasmas |
| 12/12/2012 | CN102820199A Methods and apparatus for igniting low pressure plasma |
| 12/12/2012 | CN102820198A High frequency power distribution device and substrate processing apparatus using same |
| 12/12/2012 | CN102820197A Plasma treatment system |
| 12/12/2012 | CN102820196A Sample rod for transmission electron microscope added with magnetic field |
| 12/12/2012 | CN102819199A Lithography system |
| 12/12/2012 | CN102231355B Isolation device for observation room of electron microscope |
| 12/12/2012 | CN102231354B Ventilating device for electron gun of electron microscope |
| 12/12/2012 | CN102142347B Sample chamber of electron microscope |
| 12/12/2012 | CN101800149B 等离子体处理装置 The plasma processing apparatus |
| 12/12/2012 | CN101752173B Vacuum processing apparatus, vacuum processing system and processing method |
| 12/12/2012 | CN101361156B Charged particle radiation therapy |
| 12/11/2012 | US8332784 Semiconductor device |
| 12/11/2012 | US8330128 Implant mask with moveable hinged mask segments |
| 12/11/2012 | US8330125 Ion beam tuning |
| 12/11/2012 | US8330104 Pattern measurement apparatus and pattern measurement method |
| 12/11/2012 | US8330102 Method and device for visualizing distribution of local electric field |
| 12/11/2012 | US8328939 Diffuser plate with slit valve compensation |
| 12/11/2012 | US8327878 Chamber isolation valve RF grounding |
| 12/11/2012 | CA2791249A1 Method and system for ion beam delayering of a sample and control thereof |
| 12/06/2012 | WO2012165955A2 Charged particle multi-beamlet apparatus |
| 12/06/2012 | WO2012165293A1 Electron microscope and image capturing method using electron beam |
| 12/06/2012 | WO2012164050A1 Apparatus and method for coating and/or for removing material by means of pecvd/cde |
| 12/06/2012 | WO2012163860A2 Methods and systems for material characterization |
| 12/06/2012 | WO2012163518A1 Apparatus and method for investigating an object |
| 12/06/2012 | WO2012162929A1 Sample rod for comprehensively testing in-situ stress and electric performance for transmission electron microscope with two axes inclined |
| 12/06/2012 | US20120305769 Electron microscope and sample holder |
| 12/06/2012 | US20120305767 Pattern Inspection Method, Pattern Inspection Program, and Electronic Device Inspection System |
| 12/06/2012 | US20120305766 Linear motor, movable stage and electron microscope |
| 12/06/2012 | US20120305765 Particle beam device and method for use in a particle beam device |
| 12/06/2012 | US20120305764 Method of determining the concavity and convexity on sample surface, and charged particle beam apparatus |
| 12/06/2012 | DE112010004053T5 Gasfeldionisations-Ionenquelle und Ionenstrahlvorrichtung Gasfeldionisations ion source and ion beam apparatus |
| 12/06/2012 | DE112010003115T5 Ionenätzvorrichtung Ion etching |
| 12/06/2012 | DE102011103464A1 Plasma ion source for vacuum deposition system, has metal that is provided in region of electrical insulating element made of ceramic material |
| 12/06/2012 | DE102011076893A1 Verfahren und Teilchenstrahlgerät zum Fokussieren eines Teilchenstrahls Method and particle beam for focusing a particle beam |
| 12/06/2012 | DE102011076740A1 Method for manufacturing electrical contact e.g. aluminum back surface field (BSF) contact, involves forming electrically conductive connection between semiconductor layers |
| 12/06/2012 | DE102011002265B4 Verfahren zur Herstellung von Ausgangsmaterial für einen Technetium-Generator A process for the preparation of starting material for a technetium generator |
| 12/06/2012 | DE102004030344B4 Vorrichtung zum Beschichten optischer Gläser mittels plasmaunterstützter chemischer Dampfabscheidung (CVD) An apparatus for coating optical glasses by means of plasma enhanced chemical vapor deposition (CVD) |
| 12/05/2012 | EP2530700A2 Method for preparing thin samples for TEM imaging |
| 12/05/2012 | EP2530699A1 Charged particle beam microscope and method of measurement employing same |
| 12/05/2012 | EP2530483A1 System and method for compensating for magnetic noise |
| 12/05/2012 | EP2530459A1 Diffraction microscopy |
| 12/05/2012 | EP2530182A1 Film-forming method, film-forming apparatus, and apparatus for controlling the film-forming apparatus |
| 12/05/2012 | EP2530112A1 Surface-treatment method for a fluorine resin molded body, and fluorine resin molded body |