| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 01/24/2013 | WO2013012522A1 Permanent magnet lens array |
| 01/24/2013 | WO2013012041A1 Scanning electron microscope and scanning tunneling electron microscope |
| 01/24/2013 | WO2013011792A1 Method for automatically determining inspection conditions and measurement conditions of sample, and scanning microscope |
| 01/24/2013 | WO2013011657A1 Ion beam generating apparatus, and ion beam plasma processing apparatus |
| 01/24/2013 | WO2013011612A1 Electron microscope |
| 01/24/2013 | WO2013011149A1 Method and device for producing low-particle layers on substrates |
| 01/24/2013 | WO2013011147A2 Plasma immersion ion implantation into a non-conductive substrate |
| 01/24/2013 | WO2013010990A1 Apparatus and method for the pretreatment and/or for the coating of an article in a vacuum chamber with a hipims power source |
| 01/24/2013 | WO2012165955A3 Charged particle multi-beamlet apparatus |
| 01/24/2013 | WO2011100434A9 Aberration-correcting dark-field electron microscopy |
| 01/24/2013 | DE19936199B4 Magnetronreaktor zum Bereitstellen einer hochdichten, induktiv gekoppelten Plasmaquelle zum Sputtern von Metallfilmen und Dielektrischen Filmen Magnetronreaktor for providing a high-density, inductively coupled plasma source for sputtering of metal films and Dielectric films |
| 01/24/2013 | DE112010005353T5 Verfahren zum Überlagern und Anzeigen einer elektronenoptischen Abbildung und einer optischen Abbildung A method of storing and displaying an electron-optical imaging and optical imaging |
| 01/24/2013 | DE102011079382A1 Verfahren und Vorrichtung zum Analysieren und zum Beseitigen eines Defekts einer EUV Maske Method and apparatus for analyzing and eliminating a defect of an EUV mask |
| 01/24/2013 | DE102011052029A1 Plasmaimmersions-Ionenimplantation in nicht leitfähiges Substrat Plasma immersion ion implantation in non-conductive substrate |
| 01/24/2013 | CA2842253A1 Method and apparatus for producing low-particle layers on substrates |
| 01/23/2013 | EP2549521A1 Method and device for producing low-particle layers on substrates |
| 01/23/2013 | EP2549520A1 Particle beam generator with improved vacuum |
| 01/23/2013 | EP2548992A1 Vacuum deposition apparatus |
| 01/23/2013 | EP2547805A1 Coating based on nial2o4 in spinel structure |
| 01/23/2013 | CN202695519U Equipment for preparing vertical GaN (gallium nitride) based LED (light emitting-diode) chip by using metal substrate |
| 01/23/2013 | CN202695373U Cam-locked showerhead electrode and assembly thereof |
| 01/23/2013 | CN102891207A Beam conveying system used for solar wafer doping |
| 01/23/2013 | CN102891061A 等离子体处理方法及等离子体灰化装置 The plasma processing method and a plasma ashing apparatus |
| 01/23/2013 | CN102891060A Hot cathode ion source system |
| 01/23/2013 | CN101853765B Plasma processing apparatus and plasma processing method |
| 01/22/2013 | US8357912 Techniques for providing a multimode ion source |
| 01/22/2013 | US8357897 Charged particle beam device |
| 01/22/2013 | US8357895 Defect inspection apparatus, defect inspection method, and semiconductor device manufacturing method |
| 01/22/2013 | CA2629333C Charged particle radiation therapy |
| 01/22/2013 | CA2522058C High-frequency plasma beam source and method for the irradiation of a surface |
| 01/17/2013 | WO2013009941A1 Inductively coupled rf plasma source with magnetic confinement and faraday shielding |
| 01/17/2013 | WO2013008561A1 Charged particle beam device |
| 01/17/2013 | WO2012145751A3 Automated sample preparation |
| 01/17/2013 | US20130017686 Plasma processing apparatus and plasma processing method |
| 01/17/2013 | US20130015350 Electron-Beam Image Reconstruction |
| 01/17/2013 | DE112007003640B4 Vorrichtung zur Erzeugung eines Plasmas mittels einer dielektrischen Barrierenentladung An apparatus for generating a plasma by means of a dielectric barrier discharge |
| 01/17/2013 | DE102012211595A1 Transfervorrichtung zwischen Gaschromatograph und Massenspektrometer Transfer mechanism between gas chromatograph and mass spectrometry |
| 01/17/2013 | DE102012211594A1 Bogenförmige beheizte Ionenübertragungsoptik Arcuate heated ion transfer optics |
| 01/17/2013 | DE102012207512A1 Pyrometeranordnung an einer Vakuumbehandlungsanlage und Verfahren zur Montage desselben The same pyrometer at a vacuum treatment system and method for mounting |
| 01/17/2013 | DE102012207510A1 Pyrometer arrangement for use in vacuum treatment plant, has slide valve arranged in tube outer side of vacuum chamber between chamber wall and pyrometer and vacuum-tightly locking vacuum chamber before pyrometer |
| 01/17/2013 | DE102012201061A1 Method for calibration of pyrometer, involves detecting thermal radiation emitted from measuring object in measuring direction with pyrometer, where pyrometer is aligned on object receiver of measuring object in measuring direction |
| 01/17/2013 | DE102011107371A1 Verfahren zur Bestimmung der Übertragungsfunktion eines signalverarbeitenden Systems ohne bekanntes Eingangssignal Method for determining the transfer function of a signal processing system without a known input signal |
| 01/17/2013 | DE102011079212A1 Preventing litter vapor coatings during sputtering of target, comprises moving substrate through plasma produced by magnetron in vacuum of process chamber, and introducing process gas for sputtering material of targets into process chamber |
| 01/17/2013 | DE102009025422B4 Verfahren und Anordnung zur Steuerung eines RF-Generators für Magnetrons in Vakuumbeschichtungsanlagen Method and apparatus for controlling an RF generator for magnetron vacuum coating systems |
| 01/17/2013 | DE10143719B4 Plasmaätzanlage mit einer Lagerungsvorrichtung für einen Wafer Plasma etching with a storage device for a wafer |
| 01/16/2013 | EP2546863A1 Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (IPC) ion source |
| 01/16/2013 | EP2546862A1 Particle source and apparatus using particle source |
| 01/16/2013 | EP2546638A2 Clustering of multi-modal data |
| 01/16/2013 | EP2546385A1 Sputtering device |
| 01/16/2013 | EP2545978A1 Exhaust-gas treatment system |
| 01/16/2013 | EP2545580A1 Image processing method |
| 01/16/2013 | EP2545579A2 Device for holding electron microscope grids and other materials |
| 01/16/2013 | EP2545196A1 Method and device for plasma-treating workpieces |
| 01/16/2013 | CN102884607A Throughput enhancement for scanned beam ion implanters |
| 01/16/2013 | CN102881551A Plasma processing system with airflow limiting mechanism and method using same |
| 01/16/2013 | CN102881550A Vapor deposition apparatus, vapor deposition method, and method of manufacturing organic light-emitting display apparatus |
| 01/16/2013 | CN102881549A Plasma treatment method, plasma treatment apparatus, and semiconductor device manufacturing method |
| 01/16/2013 | CN102881548A Vapor deposition apparatus and method, and method of manufacturing organic light emitting display apparatus |
| 01/16/2013 | CN102881547A Positioning device for rotating part in vacuum cavity |
| 01/16/2013 | CN102881546A Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source |
| 01/16/2013 | CN102184829B Ventilation device of high-voltage box for electron microscope |
| 01/16/2013 | CN101903969B Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 01/15/2013 | US8354655 Method and system for controlling critical dimension and roughness in resist features |
| 01/15/2013 | US8354654 Apparatus and method for ion beam implantation using scanning and spot beams with improved high dose beam quality |
| 01/15/2013 | US8354653 Techniques for manufacturing solar cells |
| 01/10/2013 | WO2013005490A1 Phase plate, and electron microscope |
| 01/10/2013 | WO2013004514A1 Field emission cathode structure and driving method thereof |
| 01/10/2013 | WO2013004440A1 Plasma treatment of hollow bodies |
| 01/10/2013 | WO2013004439A1 Device and method for plasma treatment of surfaces |
| 01/10/2013 | WO2012074889A3 Ion implanter system including remote dopant source, and method comprising same |
| 01/10/2013 | US20130009073 Transmission electron microscope micro-grid |
| 01/10/2013 | US20130009072 Specimen box for electron microscope |
| 01/10/2013 | US20130009071 Specimen box for electron microscope |
| 01/10/2013 | US20130009058 Electron microscope |
| 01/10/2013 | US20130009057 Electron Beam Irradiation Method and Scanning Electron Microscope |
| 01/10/2013 | US20130009056 Integrable magnetic field compensation for use in scanning and transmission electron microscopes |
| 01/10/2013 | DE112010004286T5 Ladungsteilchenmikroskop Charged particle |
| 01/10/2013 | DE102011106433A1 Integrierbare Magnetfeldkompensation für den Einsatz an Raster- und Transmissionselektronenmikroskopen Integrable magnetic field compensation for use in scanning and transmission electron microscopes |
| 01/09/2013 | EP2544223A1 Thin film forming apparatus |
| 01/09/2013 | EP2544215A2 Protective device for electrode holders in CVD reactors |
| 01/09/2013 | EP2544214A2 Integrating magnetic field compensation for use in scanning and transmission electron microscopes |
| 01/09/2013 | EP2544026A1 Silicon Drift Detector for use in a charged particle apparatus |
| 01/09/2013 | EP2544025A1 Silicon Drift Detector for use in a charged particle apparatus |
| 01/09/2013 | CN202663641U Upper electrode structure of dry-etching machine |
| 01/09/2013 | CN202660132U Gas supply device and connecting piece thereof |
| 01/09/2013 | CN102870383A Substrate support structure, clamp preparation unit, and lithography system |
| 01/09/2013 | CN102867910A Method of manufacturing magnetoresistive device and apparatus for manufacturing the same |
| 01/09/2013 | CN102867727A Vacuum plasma processor including control in response to DC bias voltage |
| 01/09/2013 | CN102867726A Plasma confinement ring assemblies having reduced polymer deposition characteristics |
| 01/09/2013 | CN102867725A Antenna, dielectric window, plasma processing apparatus and plasma processing method |
| 01/09/2013 | CN102867724A Plasma processing apparatus |
| 01/09/2013 | CN102867723A Plasma processing device loading table and corresponding plasma processing device |
| 01/09/2013 | CN102867722A Device for detecting ion beam section density distribution and uniform ion beam distribution in real time |
| 01/09/2013 | CN102867721A Power control system with banded beam current ion source |
| 01/09/2013 | CN102867720A Specimen box for electron microscope |
| 01/09/2013 | CN102867719A Ion source insulation device |
| 01/09/2013 | CN102867718A Filament clamping and power supply structure for ion shower |
| 01/09/2013 | CN102866628A Method for closed-loop control of power input |
| 01/09/2013 | CN101681820B Techniques for forming shallow junctions |
| 01/09/2013 | CN101523357B Apparatus and method for substrate clamping in a plasma chamber |