| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/04/2013 | US20130082175 Method and particle beam device for producing an image of an object |
| 04/04/2013 | DE69428698C5 System und vorrichtung zur elektronenstrahlbehandlung während einer operation System and device for electron beam treatment during surgery |
| 04/04/2013 | CA2849938A1 Method of fabricating nano-tips with controlled profile |
| 04/03/2013 | EP2575159A1 Particle beam system and method for operating the same |
| 04/03/2013 | EP2575144A1 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/03/2013 | EP2575143A1 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/03/2013 | CN202855705U Wireless electronic microscope |
| 04/03/2013 | CN103026452A Arc quenching assembly and method for quenching arcs |
| 04/03/2013 | CN103026451A Reactor box chamber cleaning using molecular fluorine |
| 04/03/2013 | CN103026450A Versatile beam glitch detection system |
| 04/03/2013 | CN103023452A Filter circuit and dual-frequency plasma processing device including same |
| 04/03/2013 | CN103022272A Device preparing non-crystalline silicon/non-crystalline germanium-silicon laminated solar cell thin films |
| 04/03/2013 | CN103021922A Cover plate, loading device as well as plasma processing device |
| 04/03/2013 | CN103021912A Semiconductor etching device and etching method of semiconductor structure |
| 04/03/2013 | CN103021834A Etching method, etching apparatus, and storage medium |
| 04/03/2013 | CN103021784A Hollow cathode graft polymerization and plasma treatment unit for large-area film material |
| 04/03/2013 | CN103021783A Etching method of semiconductor structure |
| 04/03/2013 | CN103021782A Ion implantation system |
| 04/03/2013 | CN103021781A Apparatus for measuring a set of electrical characteristics in a plasma |
| 04/03/2013 | CN103021780A EB (electron beam) gun air flow rate control method during EB furnace smelting process |
| 04/03/2013 | CN103021779A 等离子体反应器 Plasma reactor |
| 04/03/2013 | CN103021778A Airflow balancing plate, chamber device and substrate processing device |
| 04/03/2013 | CN103021777A Ion implantation method and device |
| 04/03/2013 | CN103021776A Transmission electron microscope with near-field optical scanning function |
| 04/03/2013 | CN103021775A A beam monitoring device, method and system |
| 04/03/2013 | CN103021774A Rapid automatic precision radio frequency matching device |
| 04/03/2013 | CN103021773A Porous composite ceramic portion, preparing method thereof and plasma treating cavity |
| 04/03/2013 | CN103021772A Electrode frame and charged particle beam generator with the same |
| 04/03/2013 | CN103014677A Plasma monitoring and minimizing stray capacitance |
| 04/03/2013 | CN102169912B Mo/Ag laminated metal matrix composite for solar cell interconnected sheet and preparation process thereof |
| 04/03/2013 | CN102027563B Reactive sputtering with HIPIMS |
| 04/03/2013 | CN101681781B Ion sources and methods of operating an electromagnet of an ion source |
| 04/02/2013 | US8410459 Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions |
| 04/02/2013 | US8410439 X-ray detector for electron microscope |
| 04/02/2013 | US8409400 Inductive plasma chamber having multi discharge tube bridge |
| 03/28/2013 | WO2013043794A2 Liquid metal ion source, system and method |
| 03/28/2013 | WO2013043749A1 Method and apparatus for high brightness superconducting radio frequency (rf) photoinjector gun cavity (srf gun) |
| 03/28/2013 | WO2013042425A1 Charged particle beam device, method for adjusting charged particle beam device, and method for observing sample or inspecting sample |
| 03/28/2013 | WO2013041569A1 Method and apparatus for predicting a growth rate of deposited contaminants |
| 03/28/2013 | WO2013041413A1 Method and alignment of a phase plate in an electron microscope |
| 03/28/2013 | WO2012174173A3 Multi-color nanoscale imaging based on nanoparticle cathodoluminescence |
| 03/28/2013 | WO2011100434A8 Aberration-correcting dark-field electron microscopy |
| 03/28/2013 | US20130075606 Composite charged particle beam apparatus |
| 03/28/2013 | US20130075604 Particle beam system having a hollow light guide |
| 03/28/2013 | DE102011087159B3 Haftgrundvorbereitung für das Kaltgasspritzen und Kaltgasspritzvorrichtung Primer preparation for the cold gas spraying and cold spraying device |
| 03/28/2013 | DE102004059664B4 Gerät zur automatischen Fokussierung und Verfahren dazu Device for automatic focus and method therefor |
| 03/27/2013 | EP2573798A2 Microwave processing apparatus and method for processing object |
| 03/27/2013 | EP2573797A2 Microwave processing apparatus and method for processing object to be processed |
| 03/27/2013 | EP2573796A1 Particle beam system having a hollow light guide |
| 03/27/2013 | EP2573795A1 Scanning electron microscope |
| 03/27/2013 | EP2573794A1 Scanning electron microscope |
| 03/27/2013 | EP2573793A1 Electron microscope |
| 03/27/2013 | EP2573792A1 Electron microscope, and method for adjusting optical axis of electron microscope |
| 03/27/2013 | EP2572013A1 Non-continuous bonding of sputtering target to backing material |
| 03/27/2013 | CN202839719U Ion implantation device for crystalline silicon solar cell production |
| 03/27/2013 | CN202839532U Plasma processing system possessing airflow limitation mechanism |
| 03/27/2013 | CN202839531U Plasma processing device and Faraday shielding device thereof |
| 03/27/2013 | CN202839530U Magnetic lens focusing device of e type electronic gun |
| 03/27/2013 | CN202839529U Dustproof vacuum plasma chamber |
| 03/27/2013 | CN202830168U Reactant gas supply device |
| 03/27/2013 | CN103003915A Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system |
| 03/27/2013 | CN103003914A Method and system for modifying substrate patterned features using ion implantation |
| 03/27/2013 | CN103003913A Device for generating plasma by means of microwaves |
| 03/27/2013 | CN103003912A Dose measurement device for plasma-immersion ion implantation |
| 03/27/2013 | CN103003911A Detector for energetic secondary electrons |
| 03/27/2013 | CN103000482A Etching method and apparatus |
| 03/27/2013 | CN103000481A Apparatus for monitoring ion implantation |
| 03/27/2013 | CN103000480A Transmission electron microscope sample rod capable of being added with optical fibers |
| 03/27/2013 | CN103000479A Novel electronic gun |
| 03/27/2013 | CN101971289B A method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source |
| 03/27/2013 | CN101740336B Cavity window and plasma process cavity |
| 03/27/2013 | CN101378007B Plasma processing apparatus |
| 03/27/2013 | CN101303956B Ion beam detection device, ion beam detection method, semiconductor manufacturing device and ion source device |
| 03/27/2013 | CN101151701B A method for operating a pulsed arc evaporation source and a vacuum processing equipment with the pulsed arc evaporation source |
| 03/27/2013 | CN101002294B Ion beam scanning systems and methods for improved ion implantation uniformity |
| 03/26/2013 | US8405054 Multi-source plasma focused ion beam system |
| 03/26/2013 | US8405053 Method and apparatus for specimen fabrication |
| 03/26/2013 | US8405052 Ion implanter provided with beam deflector and asymmetrical einzel lens |
| 03/26/2013 | US8405043 Charged particle extraction device and method of design there for |
| 03/26/2013 | US8404050 Plasma processing apparatus and method |
| 03/21/2013 | WO2013040369A1 Technique for ion implanting a target |
| 03/21/2013 | WO2013039891A1 Glancing angle mill |
| 03/21/2013 | WO2013039386A1 Assembly and a method for lifting a module of a lithography system in vertical direction and a lithography system comprising such assembly |
| 03/21/2013 | WO2013038961A1 Scanning electron microscope |
| 03/21/2013 | WO2013038910A1 Sample heating holder for microscope or analysis equipment that uses electron beam, and sample heating method that uses sample heating holder |
| 03/21/2013 | WO2013037788A1 Method for correcting the effects of electronic proximity using the deconvolution of the pattern to be exposed by means of a probabilistic method |
| 03/21/2013 | WO2013037486A2 Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assembly |
| 03/21/2013 | WO2013037423A1 Vacuum substrate treatment system having an emergency cooling device |
| 03/21/2013 | WO2012168709A3 Improvements to the application of coating materials |
| 03/21/2013 | WO2012168303A3 Method and device for generating an arc detection signal and arc detection arrangement |
| 03/21/2013 | WO2012161874A3 Contour-based defect detection using an inspection apparatus |
| 03/21/2013 | WO2012158805A3 Plasma attentuation for uniformity control |
| 03/21/2013 | US20130072002 Batch-Type Remote Plasma Processing Apparatus |
| 03/21/2013 | US20130071297 Arrays of metal and metal oxide microplasma devices with defect free oxide |
| 03/21/2013 | US20130068949 Charged particle beam device provided with automatic aberration correction method |
| 03/21/2013 | US20130068947 Pattern inspection apparatus and pattern inspection method |
| 03/21/2013 | DE112011101910T5 Reduzieren von Kupfer- oder Spurenmetallverunreinigungen bei elektrolytischen Plasmaoxidationsbeschichtungen Reducing copper or trace metal contamination in electrolytic plasma oxidation coatings |
| 03/21/2013 | DE102012108823A1 Zusammengesetzte Ladungsteilchenstrahlvorrichtung Compound A charged |
| 03/21/2013 | DE102012108788A1 Zusammengesetzte Ladungsteilchenstrahlvorrichtung Compound A charged |
| 03/21/2013 | DE102011113645A1 Verfahren zur Ausrichtung einer Phasenplatte in einem Elektronenmikroskop A method of aligning a phase plate in an electron microscope |