| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 05/16/2013 | WO2013069722A1 Sample positioning apparatus, sample stage, and charged particle beam apparatus |
| 05/16/2013 | WO2013069636A1 Charged particle beam apparatus and method of measuring and correcting landing angle of charged particle beam |
| 05/16/2013 | WO2013069410A1 Cooling device, ion microscope, and observation device or inspection device |
| 05/16/2013 | WO2013068524A1 Assembly for feeding in hf current for tubular cathodes |
| 05/16/2013 | WO2013068321A1 Armored device for electronic scanning microscope |
| 05/16/2013 | WO2013068080A1 Hipims layering |
| 05/16/2013 | WO2013067902A1 Broadband ion beam analyzer |
| 05/16/2013 | WO2013067854A1 Multi-electrode beam focusing regulation device and method |
| 05/16/2013 | WO2013067851A1 Method for modulating arc current balancing of double-filament ion source |
| 05/16/2013 | WO2013039891A4 Glancing angle mill |
| 05/16/2013 | US20130119252 Gas field ion source and method for using same, ion beam device, and emitter tip and method for manufacturing same |
| 05/16/2013 | US20130119251 Method and apparatus for charged particle beam inspection |
| 05/16/2013 | US20130119250 Defect inspection method, and device thereof |
| 05/16/2013 | US20130118686 Temperature controlled chamber liner |
| 05/16/2013 | DE102012109941A1 Verfahren zur Herstellung eines Halbleiterbauelements und Halbleiterfertigungssystem A process for producing a semiconductor device, and semiconductor manufacturing system |
| 05/16/2013 | DE102011086111A1 Anordnung zur Einspeisung von HF-Strom für Rohrkathoden Arrangement for supply of RF power for tube cathodes |
| 05/16/2013 | CA2854976A1 Hipims layering |
| 05/15/2013 | EP2592645A2 Substrate processing apparatus |
| 05/15/2013 | EP2592644A2 Plasma processing apparatus |
| 05/15/2013 | EP2592643A1 Charged particle beam device and sample production method |
| 05/15/2013 | EP2592642A2 Charged particle energy filter |
| 05/15/2013 | EP2592641A1 Scanning transmission type electron microscope |
| 05/15/2013 | EP2591491A1 Magnetron sputtering apparatus |
| 05/15/2013 | EP2591490A2 Charged particle beam processing system with visual and infrared imaging |
| 05/15/2013 | EP2591139A1 Method for treating a surface of a polymeric part by multi-energy ions |
| 05/15/2013 | EP2590802A1 Method and device for atmospheric pressure plasma treatment |
| 05/15/2013 | CN103109344A Magnetron sputtering apparatus |
| 05/15/2013 | CN103109343A Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer or the plasma in situ |
| 05/15/2013 | CN103109342A Techniques for plasma processing a substrate |
| 05/15/2013 | CN103108981A Method for the surface treatment of a fluid product dispensing device |
| 05/15/2013 | CN103108980A Method for treating a surface of a device for dispensing a fluid product |
| 05/15/2013 | CN103108978A Coating substrates with an alloy by means of cathode sputtering |
| 05/15/2013 | CN103107113A Etching apparatus and methods |
| 05/15/2013 | CN103107059A Plasma treatment device |
| 05/15/2013 | CN103107058A Substrate processing apparatus |
| 05/15/2013 | CN103107057A Air guide electrode plate |
| 05/15/2013 | CN103107056A 宽带离子束分析器 Broadband ion beam analyzer |
| 05/15/2013 | CN103107055A Internal split faraday shield for an inductively coupled plasma source |
| 05/15/2013 | CN102263000B Plasma microwave cavity |
| 05/14/2013 | US8440982 Cryo transfer holder for transmission electron microscope |
| 05/14/2013 | US8440981 Compact pyroelectric sealed electron beam |
| 05/14/2013 | US8440969 Method and apparatus for acquiring simultaneous and overlapping optical and charged particle beam images |
| 05/14/2013 | US8440061 System and method for plasma arc detection, isolation and prevention |
| 05/10/2013 | WO2013067317A1 High-throughput ion implanter |
| 05/10/2013 | WO2013065605A1 Solid scintillator and electron beam detector employing same |
| 05/10/2013 | WO2013065531A1 Ion beam etching method for magnetic films and ion beam etching apparatus |
| 05/10/2013 | WO2013065475A1 Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen |
| 05/10/2013 | WO2013065399A1 Scanning electron microscope |
| 05/10/2013 | WO2013064782A1 Method for avoiding charge effects for lithography and electron microscopy |
| 05/10/2013 | WO2013028227A3 Improved uniformity of a scanned ion beam |
| 05/09/2013 | US20130112875 Scanning transmission electron microscope and axial adjustment method thereof |
| 05/09/2013 | US20130112873 Aberration Correction Device and Charged Particle Beam Device Employing Same |
| 05/09/2013 | US20130112872 Inspection method for semiconductor wafer and apparatus for reviewing defects |
| 05/09/2013 | US20130112871 Inspection Method and Device |
| 05/09/2013 | US20130112666 Plasma processing apparatus |
| 05/08/2013 | EP2590205A2 Transmission electron microscope and method of observing TEM images |
| 05/08/2013 | EP2590204A1 Charged-particle microscopy |
| 05/08/2013 | EP2590203A2 Charged particle beam system aperture |
| 05/08/2013 | EP2589680A1 Apparatus for the deposition of diamondlike carbon as protective coating on an inner surface of a shaped object |
| 05/08/2013 | EP2589542A1 Device for sterilising plastic containers by means of media-controlled electron beams |
| 05/08/2013 | EP2589063A1 Handling beam glitches during ion implantation of workpieces |
| 05/08/2013 | EP2588642A2 Method for the surface treatment of a fluid product dispensing device |
| 05/08/2013 | EP2588641A2 Method for the surface treatment of a fluid product dispensing device |
| 05/08/2013 | EP2588640A2 Method for treating a surface of a device for dispensing a fluid product |
| 05/08/2013 | EP2588639A2 Method for the surface treatment of a fluid product dispensing device |
| 05/08/2013 | EP2588638A2 Method for treating an elastomeric surface of a device for dispensing a fluid product |
| 05/08/2013 | DE112012000015T5 Vorrichtung für die Anregung eines Hochfrequenz-Gasplasmas Device for the excitation of a high-frequency gas plasma |
| 05/08/2013 | DE102011085888A1 Coating a substrate with a mixing layer or an alloy layer by magnetron sputtering, by depositing two tube magnetrons that are arranged next to each other in a coating chamber, whose outer surfaces comprise a sputterable target material |
| 05/08/2013 | DE102011085789A1 Plant, useful for continuous vacuum coating of substrates, comprises vacuum chamber, and transport device that is arranged in chamber, is configured for transporting substrate along transport path by chamber and comprises transport rollers |
| 05/08/2013 | CN202930354U Plasma supply device |
| 05/08/2013 | CN202930353U SEM sample bench allowing same-plane testing of samples with different thickness |
| 05/08/2013 | CN103098167A Method for improving implant uniformity during photoresist outgassing |
| 05/08/2013 | CN103097573A Method for the surface treatment of a fluid product dispensing device |
| 05/08/2013 | CN103097572A Method for treating an elastomeric surface of a device for dispensing a fluid product |
| 05/08/2013 | CN103097571A Method for the surface treatment of a fluid product dispensing device |
| 05/08/2013 | CN103094143A Ion implantation monitoring method |
| 05/08/2013 | CN103094080A Ion layer preparation method and device of graphene semiconductor |
| 05/08/2013 | CN103094053A Charged particle energy filter |
| 05/08/2013 | CN103094048A Device capable of adjusting magnetron displacements |
| 05/08/2013 | CN103094047A Inductively coupled plasma processing apparatus |
| 05/08/2013 | CN103094046A Plasma processing apparatus and top panel for the same |
| 05/08/2013 | CN103094045A Symmetric plasma process chamber |
| 05/08/2013 | CN103094044A Symmetric plasma process chamber |
| 05/08/2013 | CN103094043A Plasma processing unit |
| 05/08/2013 | CN103094042A Substrate Processing Device And Impedance Matching Method |
| 05/08/2013 | CN103094041A Methods For Mixed Acid Cleaning Of Showerhead Electrodes |
| 05/08/2013 | CN103094040A Systems comprising silicon coated gas supply conduits and methods for applying coatings |
| 05/08/2013 | CN103094039A Plasma processing apparatus and plasma processing method |
| 05/08/2013 | CN103094038A Plasma processing apparatus and plasma processing method |
| 05/08/2013 | CN103094037A Holding device and plasma processing device using the same |
| 05/08/2013 | CN103094036A Method and device of broadband bundle beam current detecting |
| 05/08/2013 | CN103094035A Method and device of broadband bundle uniformity controlling |
| 05/08/2013 | CN103094034A Ion source uniform air supply structure device |
| 05/08/2013 | CN103094033A Double-filament ion source arc current balance adjustment method |
| 05/08/2013 | CN103094032A Device and method of multi-electrode beam focusing adjusting |
| 05/08/2013 | CN103094031A Charged particle beam system aperture |
| 05/08/2013 | CN103094029A Ion Beam Extraction Electrode And Ion Source |
| 05/08/2013 | CN103094028A Cleaning apparatus of ion source extraction electrode system |
| 05/08/2013 | CN103094027A Extraction electrode system and slit electrodes |
| 05/08/2013 | CN103094021A Negative electrode preparation pretreatment device and cleaning method |