| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 06/05/2013 | CN103137404A Molybdenum foil mesh for transmission microscope and scanning microscope and production method of molybdenum foil mesh |
| 06/05/2013 | CN103137403A Aluminum foil mesh for transmission microscope and scanning microscope and production method of aluminum foil mesh |
| 06/05/2013 | CN103137402A Electrode improvement method and electrode improvement device and machine table for etching |
| 06/05/2013 | CN103137401A Device for scanning suppression electrode |
| 06/05/2013 | CN103135509A Injection machine control system based on virtual instrument |
| 06/05/2013 | CN103132013A Ion bombardment apparatus and method for cleaning of surface of base material using the same |
| 06/05/2013 | CN102290313B Non-metallic vacuum chamber structure |
| 06/05/2013 | CN102290312B Plate electrode fixing structure |
| 06/05/2013 | CN102237246B Exhaust plate and plasma processing equipment |
| 06/05/2013 | CN102110567B Plasma processing device and heating device of reaction chamber of the plasma processing device |
| 06/05/2013 | CN101685772B Substrate processing apparatus and substrate processing method |
| 06/05/2013 | CN101425450B Gas supply device, substrate processing apparatus and substrate processing method |
| 06/04/2013 | US8455848 Ion beam incident angle detection assembly and method |
| 06/04/2013 | US8455847 Mask health monitor using a faraday probe |
| 06/04/2013 | US8455842 Carbon nanotube film composite structure, transmission electron microscope grid using the same, and method for making the same |
| 06/04/2013 | US8455841 Ion microscope |
| 06/04/2013 | US8455840 Gas field ion microscopes having multiple operation modes |
| 06/04/2013 | US8455839 Cleaning of an extraction aperture of an ion source |
| 06/04/2013 | US8455838 Multiple-column electron beam apparatus and methods |
| 06/04/2013 | US8455837 Ion implanter, ion implantation method and program |
| 06/04/2013 | US8455824 Charged particle beam apparatus, and sample processing and observation method |
| 06/04/2013 | US8455823 Charged particle beam device |
| 06/04/2013 | US8455822 Navigation and sample processing using an ion source containing both low-mass and high-mass species |
| 06/04/2013 | US8455821 Method for S/TEM sample analysis |
| 06/04/2013 | US8455820 Composite charged particle beams apparatus |
| 06/04/2013 | US8454794 Antenna for plasma processor and apparatus |
| 05/30/2013 | WO2013077715A1 Electron lens aberration corrector |
| 05/30/2013 | WO2013077555A1 Electron cyclotron resonance ion source apparatus and method for boosting extraction current |
| 05/30/2013 | WO2013077514A1 Auxiliary device for loading samples on grid for tem observation |
| 05/30/2013 | WO2013077483A1 Variable ion guide and electron cyclotron resonance ion source apparatus including same |
| 05/30/2013 | WO2013077217A1 Charged-particle radiation apparatus |
| 05/30/2013 | WO2013076926A1 Image inspection assisting method and image inspection assisting apparatus |
| 05/30/2013 | WO2013075312A1 Polishing device |
| 05/30/2013 | WO2013046050A3 Dry cleaning method for recovering etch process condition |
| 05/30/2013 | WO2013034920A3 Surface polymer coatings |
| 05/30/2013 | WO2012177561A3 Method for generating electron beams in a hybrid laser-plasma accelerator |
| 05/30/2013 | WO2012171664A3 Semiconductor drift detector and corresponding operating method |
| 05/30/2013 | US20130137193 Systems and methods for preparation of samples for sub-surface defect review |
| 05/30/2013 | US20130134890 Arc Extinction Arrangement and Method for Extinguishing Arcs |
| 05/30/2013 | US20130134308 Sample observation apparatus and method of marking |
| 05/30/2013 | US20130134307 Inductively Coupled Plasma Source as an Electron Beam Source for Spectroscopic Analysis |
| 05/29/2013 | EP2597172A1 Ion bombardment apparatus and method for cleaning of surface of base material using the same |
| 05/29/2013 | EP2596517A1 Arc quenching assembly and method for quenching arcs |
| 05/29/2013 | DE102012211698A1 Verfahren zum Erzeugen einer friktionsarmen Beschichtungsschicht A method for generating a low-friction coating layer |
| 05/29/2013 | DE102008001812B4 Positioniereinrichtung für ein Teilchenstrahlgerät Positioning device for a particle beam |
| 05/29/2013 | CN1961402B Plasma processor responsive to multiple RF frequencies |
| 05/29/2013 | CN103125011A Adapter ring for silicon electrode |
| 05/29/2013 | CN102142357B Plasma processing apparatus |
| 05/29/2013 | CN101978241B Microstructure inspection method, microstructure inspection apparatus |
| 05/29/2013 | CN101661863B Plasma processing apparatus and plasma processing method |
| 05/29/2013 | CN101572207B Pattern invariant focusing of a charged particle beam |
| 05/28/2013 | USRE44240 Electron beam exposure system |
| 05/28/2013 | US8450685 Electron probe microanalyzer and data processing method implemented therein |
| 05/28/2013 | US8450683 Image processing apparatus, an image generating method, and a system |
| 05/28/2013 | US8449715 Internal member of a plasma processing vessel |
| 05/23/2013 | WO2013074597A1 Toroidal plasma channel with varying cross-section areas along the channel |
| 05/23/2013 | WO2013074523A1 Ion implant apparatus and a method of implanting ions |
| 05/23/2013 | WO2013074211A1 Method and apparatus for deposition using an atmospheric pressure plasma |
| 05/23/2013 | WO2013073694A1 Method and device for drawing patterns |
| 05/23/2013 | WO2013072580A1 Device for analysing a radiating material using a microprobe |
| 05/23/2013 | US20130126750 Charged particle device |
| 05/23/2013 | US20130126733 Charged Particle Beam Microscope |
| 05/23/2013 | US20130126732 Charged particle beam device |
| 05/23/2013 | US20130126731 Charged Particle Microscope and Ion Microscope |
| 05/23/2013 | US20130126730 Sequential radial mirror analyser |
| 05/23/2013 | US20130126729 Scanning Transmission Electron Microscopy for Polymer Sequencing |
| 05/23/2013 | US20130126728 Method for determining the performance of a photolithographic mask |
| 05/23/2013 | US20130126332 Plasma whirl reactor apparatus and methods of use |
| 05/23/2013 | DE112011100264B4 Verfahren zur steuerung der elektronenstrahl-belichtung von wafern und masken mit proximity-korrektur Method for controlling the electron beam exposure of wafers and masks with proximity-correction |
| 05/23/2013 | DE102011119164A1 Method for preparation of needle tip for atom probe tomography, involves guiding through hole of planar drain electrode into measuring position based on measured coordinates of sample for performing tomography by manipulator |
| 05/23/2013 | DE102011086974A1 Temperature measuring probe adjusts temperature of holding device based on the difference of temperature determined by temperature sensors |
| 05/23/2013 | CA2853177A1 Device for analysing a radiating material using a microprobe |
| 05/23/2013 | CA2850354A1 Method and apparatus for deposition using an atmospheric pressure plasma |
| 05/22/2013 | EP2595172A1 Image processing method, image processing system, and x-ray computed tomography system |
| 05/22/2013 | EP2594660A1 An apparatus for performing a plasma chemical vapour deposition process |
| 05/22/2013 | EP2593959A2 Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer of the plasma in situ |
| 05/22/2013 | EP2593958A2 Improved contrast for scanning confocal electron microscope |
| 05/22/2013 | EP2593957A2 Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus |
| 05/22/2013 | CN202945315U Efficient dynamically coupled magnetic control arc source device |
| 05/22/2013 | CN1868029B Kinematic ion implanter electrode mounting |
| 05/22/2013 | CN103119688A Ion beam tuning |
| 05/22/2013 | CN103119687A Compact rf antenna for an inductively coupled plasma ion source |
| 05/22/2013 | CN103119195A Unit for the treatment of an object, in particular the surface of a polymer object |
| 05/22/2013 | CN103119191A End-block and sputtering installation |
| 05/22/2013 | CN103117203A Device and method for plasma etching process treatment |
| 05/22/2013 | CN103117202A Endpoint detection device and method of plasma treatment process |
| 05/22/2013 | CN103117201A Plasma enhanced chemical vapor deposition (PECVD) device and forming method of semiconductor component |
| 05/22/2013 | CN102424955B Novel gas-homogenizing structure |
| 05/22/2013 | CN102254775B Magnetic field reinforced type linear ion source |
| 05/22/2013 | CN102089848B Remote plasma cleaning method and apparatus for applying said method |
| 05/22/2013 | CN102027564B Device and method for pretreating and coating bodies |
| 05/22/2013 | CN101546685B Plasma processing apparatus and plasma etching method |
| 05/21/2013 | US8445871 Pattern measurement apparatus |
| 05/21/2013 | US8445870 Charged particle beam system having multiple user-selectable operating modes |
| 05/21/2013 | US8445869 Projection lens arrangement |
| 05/21/2013 | US8445862 Apparatus of plural charged particle beams with multi-axis magnetic lens |
| 05/21/2013 | US8445846 Beam optical component having a charged particle lens |
| 05/21/2013 | US8444806 Plasma generator, plasma control method and method of producing substrate |
| 05/16/2013 | WO2013071110A1 Magnetic field reduction apparatus and magnetic plasma flood system for ion beam processing |
| 05/16/2013 | WO2013070416A1 Pressure control valve assembly of plasma processing chamber and rapid alternating process |