| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/18/2013 | US20130092837 Pattern inspection device and pattern inspection method |
| 04/18/2013 | US20130092836 Transmission Electron Microscope and Method of Operating a Transmission Electron Microscope |
| 04/18/2013 | DE102011115913A1 Fügen und Trennen von Werkstücken mit einem Elektronenstrahl im Nicht-Vakuum Joining and Cutting of workpieces with an electron beam in the non-vacuum |
| 04/18/2013 | DE102011109449B9 Verfahren zum kalibrieren eines laserscanners, verwendung des verfahrens und bearbeitungssystem mit laserscanner A method for calibrating a laser scanner, use the procedure and processing system with laser scanner |
| 04/18/2013 | DE102011107371A9 Verfahren zur Bestimmung der Übertragungsfunktion eines signalverarbeitenden Systems ohne bekanntes Eingangssignal Method for determining the transfer function of a signal processing system without a known input signal |
| 04/18/2013 | CA2850799A1 Dual image method and system for generating a multi-dimensional image of a sample |
| 04/17/2013 | EP2581949A1 Surface feed-in electrode for deposition of thin film solar battery and signal feed-in method thereof |
| 04/17/2013 | EP2581948A1 Discharge electrode plate array for film solar cell disposition |
| 04/17/2013 | EP2581925A2 Plasma reactor for removal of contaminants |
| 04/17/2013 | EP2581096A1 Device and method for sterilising containers with load carrier source introduced into the containers |
| 04/17/2013 | CN202881369U Plasma cleaning electrode |
| 04/17/2013 | CN103050393A Plasma etching method of atomic layer level |
| 04/17/2013 | CN103050386A Ion implantation apparatus and ion implantation method |
| 04/17/2013 | CN103050364A Circuit for increasing temperature of substrate in plasma treatment cavity |
| 04/17/2013 | CN103050363A Symmetric plasma process chamber |
| 04/17/2013 | CN103050362A Symmetric plasma process chamber |
| 04/17/2013 | CN103050361A Particle beam system and method for operating the same |
| 04/17/2013 | CN103050360A Method and tool for monitoring uniformity and stability of ion implanter |
| 04/17/2013 | CN103050359A Beam irradiation system and energy transfer mechanism of work |
| 04/17/2013 | CN103050358A Planar magnetron sputtering cathode |
| 04/17/2013 | CN102099891B Plasma process and reactor for treating metallic pieces |
| 04/17/2013 | CN102017054B Low contamination, low energy beamline architecture for high current ion implantation |
| 04/17/2013 | CN101461030B Abrasion resistant and etching-resistant coating |
| 04/16/2013 | US8421028 Device for deflecting or guiding in a particle beam |
| 04/16/2013 | US8421008 Pattern check device and pattern check method |
| 04/11/2013 | WO2013052344A1 Transformer-coupled rf sources for plasma processing tool |
| 04/11/2013 | WO2013051467A1 Electron beam lithography device and lithographic method |
| 04/11/2013 | WO2013051357A1 Inspection or observation device and specimen inspection or observation method |
| 04/11/2013 | WO2013050670A1 Control module for an ion implanter in the plasma immersion mode |
| 04/11/2013 | WO2013026537A3 Device and method for measuring the beam deflection by means of frequency analysis |
| 04/11/2013 | WO2013024298A3 Time-dependent label |
| 04/11/2013 | WO2013022917A3 Method for processing samples held by a nanomanipulator |
| 04/11/2013 | US20130087706 Flexible cathodoluminescence detection system and microscope employing such a system |
| 04/11/2013 | US20130087704 Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method |
| 04/11/2013 | US20130087703 Electron microscope |
| 04/11/2013 | DE102008023248B4 Ionenquelle mit substrukturiertem Emissionsspalt Ion source with substrukturiertem emission slit |
| 04/10/2013 | EP2579292A1 Transmission interference microscope |
| 04/10/2013 | EP2579274A1 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/10/2013 | EP2579273A2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/10/2013 | EP2579272A1 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/10/2013 | EP2579271A2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/10/2013 | EP2579270A2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/10/2013 | EP2579269A2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/10/2013 | EP2579268A1 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| 04/10/2013 | EP2578722A1 Ion bombardment treatment device, and method for cleaning of surface of base material using the treatment device |
| 04/10/2013 | EP2577709A2 Detector for energetic secondary electrons |
| 04/10/2013 | EP2577708A1 Dose measurement device for plasma-immersion ion implantation |
| 04/10/2013 | EP2577707A1 Adjustable cathodoluminescence detection system and microscope employing such a system |
| 04/10/2013 | EP2577706A1 Flexible cathodoluminescence detection system and microscope employing such a system |
| 04/10/2013 | EP2576872A2 Reduction of copper or trace metal contaminants in plasma electrolytic oxidation coatings |
| 04/10/2013 | EP2576857A1 Device for plasma treatment of workpieces |
| 04/10/2013 | CN202871758U Safety cooling gas delivery device |
| 04/10/2013 | CN202871741U Reaction chamber of plasma etching machine |
| 04/10/2013 | CN202871740U Dc plasma system |
| 04/10/2013 | CN202871739U Transmission electron microscope imaging and scanning system based on IP (imaging plate) |
| 04/10/2013 | CN202871738U Levelness calibration system for beam extraction electrode of injection machine |
| 04/10/2013 | CN202871737U Plasma treatment apparatus and Faraday shielding device included by same |
| 04/10/2013 | CN103038994A Ignition circuit for igniting a plasma fed with alternating power |
| 04/10/2013 | CN103038856A 带电粒子检测器 Charged particle detector |
| 04/10/2013 | CN103038855A Electron lens and the electron beam device |
| 04/10/2013 | CN103038854A Gas cluster ion beam system with rapid gas switching apparatus |
| 04/10/2013 | CN103038399A Reduction of copper or trace metal contaminants in plasma electrolytic oxidation coatings |
| 04/10/2013 | CN103035470A Semiconductor etching device and semiconductor etching method |
| 04/10/2013 | CN103035469A Symmetric plasma process chamber |
| 04/10/2013 | CN103035468A Radical passing device and substrate processing apparatus |
| 04/10/2013 | CN103035467A Apparatuses, systems and methods for treating substrate |
| 04/10/2013 | CN103035466A Precleaning method and plasma device |
| 04/10/2013 | CN103035465A Vacuum casing for critical dimension scanning electron microscopy (CD-SEM) |
| 04/10/2013 | CN103035464A Hollow cathode tube with water-cooling effect |
| 04/10/2013 | CN103028357A Plasma reactor for removal of contaminants |
| 04/10/2013 | CN102201321B Ion implantation system and method |
| 04/10/2013 | CN102194636B Ion implantation system and method |
| 04/09/2013 | US8415644 Processing system |
| 04/09/2013 | US8415122 Processing biomass |
| 04/09/2013 | US8413604 Slotted electrostatic shield modification for improved etch and CVD process uniformity |
| 04/04/2013 | WO2013049700A1 Plasma tuning rods in microwave resonator plasma sources |
| 04/04/2013 | WO2013049694A1 Plasma tuning rods in microwave processing systems |
| 04/04/2013 | WO2013049641A1 Testing assembly including a multiple degree of freedom stage |
| 04/04/2013 | WO2013047920A1 Scanning electron microscope and method for measuring current of primary electrons, using same |
| 04/04/2013 | WO2013047919A1 Scanning electron microscope equipped with back scattered electron detection function |
| 04/04/2013 | WO2013047688A1 Electrostatic lens and charged particle beam device using same |
| 04/04/2013 | WO2013047397A1 Electric field discharge-type electron source |
| 04/04/2013 | WO2013047047A1 Cross-sectional shape estimating method and cross-sectional shape estimated device |
| 04/04/2013 | WO2013046843A1 Charged particle beam apparatus that performs image classification assistance |
| 04/04/2013 | WO2013046277A1 Electron microscope and sample observation method |
| 04/04/2013 | WO2013046120A1 Systems and methods for electromagnetic acceleration or compression of particles |
| 04/04/2013 | WO2013045596A2 Inorganic materials, methods and apparatus for making same, and uses thereof |
| 04/04/2013 | WO2013045493A1 Method for magnetron sputtering with compensation of the target erosion |
| 04/04/2013 | WO2013045111A1 Method and apparatus for producing a reflection‑reducing layer on a substrate |
| 04/04/2013 | WO2013044814A1 Neutral particle beam producing device and method |
| 04/04/2013 | WO2013044810A1 Device and method for generating neutral particle beam |
| 04/04/2013 | WO2013044402A1 Process of coating a substrate with a thin film of metal or semiconductor compound |
| 04/04/2013 | WO2013044352A1 Method of fabricating nano-tips with controlled profile |
| 04/04/2013 | WO2013019425A3 Sputter-etch tool and liners |
| 04/04/2013 | WO2013013669A3 Method and apparatus for protecting passive components connected to a radio-frequency generator |
| 04/04/2013 | WO2012165955A4 Charged particle multi-beamlet apparatus |
| 04/04/2013 | WO2011127394A8 Improved ion source |
| 04/04/2013 | US20130084491 Ambient temperature molten salt, electrode, battery, agent for preventing charge-up, and method for observing sample |
| 04/04/2013 | US20130082177 Circuit pattern inspection apparatus and circuit pattern inspection method |
| 04/04/2013 | US20130082176 Composite charged particle beam apparatus |