| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 05/08/2013 | CN103091840A Optical apparatus, position detection apparatus, microscope apparatus, and exposure apparatus |
| 05/08/2013 | CN102142348B Supporting membrane of transmission electron microscope sample and manufacturing method for transmission electron microscope sample |
| 05/08/2013 | CN102024694B Plasma processing apparatus |
| 05/08/2013 | CN101878321B Control of arbitrary scan path of a rotating magnetron |
| 05/08/2013 | CN101866808B Plasma processor responsive to multiple RF frequencies |
| 05/07/2013 | US8436326 Ion beam apparatus and method employing magnetic scanning |
| 05/07/2013 | US8436303 Transmission electron microscope micro-grid |
| 05/07/2013 | US8436301 Transmission electron microscope having electron spectrometer |
| 05/02/2013 | WO2013063005A1 Integrated backscattered electron detector with cathodoluminescence collection optics |
| 05/02/2013 | WO2013062158A1 Scanning electron microscope having an electronic beam aligning function, and method for controlling a wien filter for a scanning electron microscope |
| 05/02/2013 | WO2013060415A1 Method for providing sequential power pulses |
| 05/02/2013 | WO2013060355A1 Multidirectional racetrack rotary cathode for pvd array applications |
| 05/02/2013 | WO2013019810A3 Method and device for controlling pattern and structure formation by an electric field |
| 05/02/2013 | WO2012177890A3 High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumped |
| 05/02/2013 | WO2012158708A3 Methods of affecting material properties and applications therefor |
| 05/02/2013 | US20130105706 Double Tilt Transmission Electron Microscope Sample Holder for In-Situ Measurement of Microstructures |
| 05/02/2013 | US20130105691 Pattern measurement apparatus and pattern measurement method |
| 05/02/2013 | US20130105689 Method for adjusting a stem equipped with an aberration corrector |
| 05/02/2013 | US20130105677 Sample Block Holder |
| 05/02/2013 | US20130104804 Batch-Type Remote Plasma Processing Apparatus |
| 05/02/2013 | DE112010005668T5 Plasma-Verarbeitungsvorrichtung Plasma processing apparatus |
| 05/02/2013 | DE112010005246T5 Ladungteilchenstrahlvorrichtung Ladungteilchenstrahlvorrichtung |
| 05/02/2013 | DE102012203052A1 Transparent metallic oxide layer used for electrode for solar cell, touch screen and display apparatus, is obtained by depositing gallium-doped zinc oxide material on substrate, and coating element of specific group on layer |
| 05/02/2013 | DE102012109854A1 Strukturmessgerät und Strukturmessverfahren Structure gauge and structure measurement method |
| 05/02/2013 | CA2853699A1 Method for providing sequential power pulses |
| 05/01/2013 | EP2587519A2 Film formation apparatus and film formation method |
| 05/01/2013 | EP2587518A1 Apparatus and Method for depositing Hydrogen-free ta C Layers on Workpieces and Workpiece |
| 05/01/2013 | EP2587517A1 Electron lens and the electron beam device |
| 05/01/2013 | EP2587516A1 Ion sources and methods of operating an electromagnet of an ion source |
| 05/01/2013 | EP2587515A1 Inspection system by charged particle beam and method of manufacturing devices using the system |
| 05/01/2013 | EP2586052A1 Apparatus for structuring solid surfaces using ion beams from an ion beam spectrum |
| 05/01/2013 | CN202917430U Gas mixing apparatus of vacuum treatment apparatus |
| 05/01/2013 | CN202917429U Ion implanter with extraction slit |
| 05/01/2013 | CN103081054A Navigation and sample processing using an ion source containing both low-mass and high-mass species |
| 05/01/2013 | CN103077878A Device for processing a carrier and a method for processing a carrier |
| 05/01/2013 | CN103077877A Chemical vapor deposition equipment and surface temperature detection method of top board thereof |
| 05/01/2013 | CN103077876A Magnetic focusing unit for electron beam machining equipment and control method thereof |
| 05/01/2013 | CN103072939A Temperature-controlled deep silicon etching method |
| 05/01/2013 | CN101996843B Plasma processing device and focusing ring |
| 05/01/2013 | CN101981650B Electrostatic lens for charged particle radiation |
| 05/01/2013 | CN101939812B Toroidal plasma chamber for high gas flow rate process |
| 05/01/2013 | CN101882567B Plasma processing apparatus and high frequency short-circuit apparatus |
| 05/01/2013 | CN101431854B Plasma processing apparatus |
| 05/01/2013 | CN101233598B Plasma amplifier for plasma treatment plant |
| 04/30/2013 | USRE44179 Charged particle beam writing method |
| 04/30/2013 | US8431913 Charged particle beam processing method |
| 04/30/2013 | US8431897 Transmission electron microscope |
| 04/30/2013 | US8431895 Pattern measuring apparatus and pattern measuring method |
| 04/30/2013 | US8431893 Electron beam apparatus and electron beam inspection method |
| 04/30/2013 | US8431065 Polyolefin-based crosslinked articles |
| 04/30/2013 | CA2621301C Ultraviolet radiation lamp and source module and treatment system containing same |
| 04/25/2013 | WO2013058077A1 Scanning electron microscope |
| 04/25/2013 | WO2013057390A1 Method of controlling an ion implanter in plasma immersion mode |
| 04/25/2013 | WO2013056286A1 Tubular target |
| 04/25/2013 | WO2013006433A3 Use of ion beam tails to manufacture a workpiece |
| 04/25/2013 | WO2012161745A3 Mass analysis variable exit aperture |
| 04/25/2013 | US20130099134 Manipulator carrier for electron microscopes |
| 04/25/2013 | US20130099117 Scanning transmission type electron microscope |
| 04/25/2013 | US20130099116 Integrated Backscattered Electron Detector with Cathodoluminescence Collection Optics |
| 04/25/2013 | US20130099115 Microfabricated high-bandpass foucault aperture for electron microscopy |
| 04/25/2013 | US20130099114 Detector for use in a charged particle apparatus |
| 04/25/2013 | US20130098274 Sample stage device |
| 04/25/2013 | DE102012109961A1 Vorrichtung mit fokussiertem Ionenstrahl Focused ion beam device with |
| 04/25/2013 | DE102011084829A1 Mikroskopie mehrerer Proben mit optischer Mikroskopie und Teilchenstrahlmikroskopie Microscopy of multiple samples with optical microscopy and Teilchenstrahlmikroskopie |
| 04/25/2013 | CA2853137A1 Drill having a coating |
| 04/24/2013 | EP2584586A1 Charged particle device |
| 04/24/2013 | EP2584585A2 Method for adjusting a STEM equipped with an aberration corrector |
| 04/24/2013 | EP2584584A1 Method for adjusting a STEM equipped with an aberration corrector |
| 04/24/2013 | EP2584583A2 Internal split faraday shield for an inductively coupled plasma source |
| 04/24/2013 | EP2584363A1 Scanning method for scanning a sample with a probe |
| 04/24/2013 | EP2584362A1 Scanning method for scanning a sample with a probe |
| 04/24/2013 | CN202905663U Deposition clamp used for uniform film plating of amorphous silicon thin film |
| 04/24/2013 | CN202905662U Ion implanter for movable target |
| 04/24/2013 | CN202905661U Scanning electron microscope sample table |
| 04/24/2013 | CN202905660U Structure for implanting ions into ion source on Quantum equipment |
| 04/24/2013 | CN202905659U Matching device and plasma processing equipment |
| 04/24/2013 | CN202893212U Reactive gas mixing device and plasma processing equipment comprising same |
| 04/24/2013 | CN103069537A Sputter target feed system |
| 04/24/2013 | CN103069536A Charged particle detection system and multi-beamlet inspection system |
| 04/24/2013 | CN103069534A Laser ion source |
| 04/24/2013 | CN103069533A Control grid design for an electron beam generating device |
| 04/24/2013 | CN103065918A Electrode introducing structure |
| 04/24/2013 | CN103065917A Method for adjusting a stem equipped with an aberration corrector |
| 04/24/2013 | CN102237243B Ion implantation system and method |
| 04/24/2013 | CN102148124B Micro-grid of transmission electron microscope |
| 04/24/2013 | CN102074443B Atmospheric transmission chamber and change method of inner airflow thereof and plasma processing equipment |
| 04/24/2013 | CN101964295B Impedance matching method and plasma processing equipment |
| 04/24/2013 | CN101770973B Plasma process equipment and static chuck device |
| 04/24/2013 | CN101743610B Treatment system for flat substrates |
| 04/23/2013 | US8426833 Gantry for medical particle therapy facility |
| 04/23/2013 | US8426829 Ion implantation apparatus |
| 04/23/2013 | US8426812 Microscope system, method for operating a charged-particle microscope |
| 04/23/2013 | US8426808 Method of mass spectrometry |
| 04/18/2013 | WO2013055876A1 Dual image method and system for generating a multi-dimensional image of a sample |
| 04/18/2013 | WO2013055627A1 Method of creating two dimensional doping patterns in solar cells |
| 04/18/2013 | WO2013055523A2 Ion source apparatus and methods of using the same |
| 04/18/2013 | WO2013054937A1 Mass spectrometer |
| 04/18/2013 | WO2013054799A1 Ion source and ion beam device using same |
| 04/18/2013 | WO2013019432A3 Method for uninterrupted production of a polyatomic boron molecular ion beam with self-cleaning |
| 04/18/2013 | US20130094022 Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer or the plasma in situ |