| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 06/19/2013 | CN101253600B Ultraviolet radiation lamp and source module and treatment system containing same |
| 06/18/2013 | US8466439 Electron beam lithography apparatus and electron beam lithography method |
| 06/18/2013 | US8466433 Integrated footwear sanitizing and deodorizing system |
| 06/18/2013 | US8466432 Sample holder providing interface to semiconductor device with high density connections |
| 06/18/2013 | US8466431 Techniques for improving extracted ion beam quality using high-transparency electrodes |
| 06/18/2013 | US8466430 Electrostatic lens |
| 06/18/2013 | US8466416 Electron detecting mechanism and charged particle beam system equipped therewith |
| 06/18/2013 | US8466415 Methods for performing circuit edit operations with low landing energy electron beams |
| 06/18/2013 | US8465620 Hollow anode plasma reactor and method |
| 06/13/2013 | WO2013085929A1 Charged particle beam scanning using deformed high gradient insulator |
| 06/13/2013 | WO2013085885A1 Gas injector apparatus for plasma applicator |
| 06/13/2013 | WO2013085705A1 Apparatus and method for charge neutralization during processing of a workpiece |
| 06/13/2013 | WO2013084651A1 Scanning ion microscope and secondary particle control method |
| 06/13/2013 | WO2013083495A1 Filtered cathodic arc deposition apparatus and method |
| 06/13/2013 | WO2013083238A1 Reactive sputtering process |
| 06/13/2013 | WO2013083205A1 Rotatable sputter target |
| 06/13/2013 | WO2013082738A1 Simulation calculation method for etching morphology of copper target in magnetron sputtering equipment |
| 06/13/2013 | US20130148093 Holding apparatus, drawing apparatus, and method of manufacturing article |
| 06/13/2013 | US20130147340 Device for providing a flow of plasma |
| 06/13/2013 | US20130146784 Specimen holder used for mounting samples in electron microscopes |
| 06/13/2013 | US20130146780 Systems and methods providing electron beam writing to a medium |
| 06/13/2013 | US20130146766 Electron Beam Apparatus |
| 06/13/2013 | US20130146765 Charged Particle Beam Device and Sample Observation Method |
| 06/13/2013 | US20130146764 Incoherent transmission electron microscopy |
| 06/13/2013 | DE102012212199A1 Method for production of micro-or nano-structured components such as optical element, involves irradiating photons and/or electrons according to the structure to be produced, so that full surface material compaction takes place |
| 06/13/2013 | DE102012110651A1 Verfahren und Vorrichtung zum Herstellen einer Lamelle Method and apparatus for manufacturing a lamella |
| 06/13/2013 | DE102011103464B4 Plasmaionenquelle für eine Vakuumbeschichtungsanlage Plasma ion source for vacuum coating plant |
| 06/13/2013 | DE102011088099A1 Vacuum chamber for use during manufacture of substrate, has inner layer which is secured to wall of metallic chamber housing |
| 06/13/2013 | DE102009011960B4 Verfahren zur Überwachung von Plasma-Entladungen A method for monitoring plasma discharges |
| 06/13/2013 | CA2858251A1 Reactive sputtering process |
| 06/12/2013 | EP2602808A2 Inductively-coupled plasma Ion source for use with a focused Ion beam column with selectable Ions |
| 06/12/2013 | EP2602807A1 Adjustment assist tool for charged particle microscope |
| 06/12/2013 | EP2602354A1 Filtered cathodic vacuum arc deposition apparatus and method |
| 06/12/2013 | EP2601975A1 Device and method for sterilization of the internal walls of containers with a reflector device for e-beam |
| 06/12/2013 | EP2601669A2 Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
| 06/12/2013 | EP2601505A2 Methods and devices for preparing microscopy samples |
| 06/12/2013 | EP2601477A2 Method for acquiring simultaneous and overlapping optical and charged particle beam images |
| 06/12/2013 | EP2601327A1 Vacuum substrate treatment system having an emergency cooling device |
| 06/12/2013 | CN202996793U Machine platform for critical dimension scanning electron microscope |
| 06/12/2013 | CN202996767U Specialty gas pipe mounting structure of ion implanter |
| 06/12/2013 | CN103155099A Method and system for modifying photoresist using electromagnetic radiation and ion implantion |
| 06/12/2013 | CN103155090A Method and system for modifying patterned photoresist using multi-step ion implantion |
| 06/12/2013 | CN103155089A Sample device for charged particle beam |
| 06/12/2013 | CN103155088A Fault tolerant ion source power system |
| 06/12/2013 | CN103151235A Device for improving etching uniformity |
| 06/12/2013 | CN103151234A Plasma treatment apparatus and plasma treatment method |
| 06/12/2013 | CN103151233A Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions |
| 06/12/2013 | CN103151232A Digital imaging method and device of transmission electron microscope coupled with side-mounted optical fiber |
| 06/12/2013 | CN103151231A Adherent cell scanning electron microscope carrier and preparation method |
| 06/12/2013 | CN103147049A Process kit and target for substrate processing chamber |
| 06/12/2013 | CN102262996B Comprehensive test sample rod for double-shaft tilting in-situ force and electric property of transmission electron microscope |
| 06/12/2013 | CN102183509B Plasma monitoring method and plasma monitoring device |
| 06/12/2013 | CN102142349B Methods for preventing plasma un-confinement events in a plasma processing chamber |
| 06/12/2013 | CN101750874B Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask |
| 06/12/2013 | CN101189699B Technique for ion beam angle process control |
| 06/11/2013 | US8461553 Masked ion implant with fast-slow scan |
| 06/11/2013 | US8460842 Defect repair apparatus and method for EUV mask using a hydrogen ion beam |
| 06/06/2013 | WO2013082496A1 High throughput tem preparation processes and hardware for backside thinning of cross-sectional view lamella |
| 06/06/2013 | WO2013082252A1 System and method for sample analysis by three dimensional cathodoluminescence |
| 06/06/2013 | WO2013082080A1 Compact high-voltage electron gun |
| 06/06/2013 | WO2013081647A1 Automatic control system for selection and optimization of co-gas flow levels |
| 06/06/2013 | WO2013080543A1 Ion beam generator |
| 06/06/2013 | WO2013079108A1 Closed loop control |
| 06/06/2013 | WO2013078909A1 Radio frequency power source having precise power detector |
| 06/06/2013 | US20130140987 Ion implantation with charge and direction control |
| 06/06/2013 | US20130140459 System and method for sample analysis by three dimensional cathodoluminescence |
| 06/06/2013 | US20130140458 Specimen Holder for Charged-Particle Beam Apparatus |
| 06/06/2013 | US20130140457 Defect observation method and defect observation device |
| 06/06/2013 | DE112011102643T5 Gasfeld-Ionenquelle und Verfahren zur Verwendung derselben, Ionenstrahl-Vorrichtung und Ermitterspitze sowie Verfahren zur Herstellung derselben Gas field ion source and methods of using the same, the ion beam device and method of making same as well as Ermitterspitze |
| 06/06/2013 | DE102012201061B4 Verfahren und Anordnung zur Kalibrierung eines Pyrometers Method and apparatus for calibrating a pyrometer |
| 06/06/2013 | DE102011120157A1 Vacuum processing device comprises vacuum chamber, beam generator, and workpiece holding device in which workpiece to be machined is inserted, and which is rotatably mounted in tubular body, where first drive and second drive are provided |
| 06/06/2013 | DE102011087807A1 Output network for plasma supply device used for supplying plasma for manufacturing thin film for e.g. flat display screen, has output transformers which are provided for outputting the specific power at specific frequency |
| 06/06/2013 | DE102008023248B9 Ionenquelle mit substrukturiertem Emissionsspalt Ion source with substrukturiertem emission slit |
| 06/05/2013 | EP2600384A2 A device for applying electromagnetic microwave radiation in a plasma inside a hollow glass substrate tube, and method for manufacturing an optical preform. |
| 06/05/2013 | EP2600383A1 Stage apparatus |
| 06/05/2013 | EP2600382A1 Aberration correction device and charged particle beam device employing same |
| 06/05/2013 | EP2600381A2 System for attachment of an electrode into an inductively coupled plasma source |
| 06/05/2013 | EP2600380A1 Inductively coupled plasma source as an electron beam source for spectroscopic analysis |
| 06/05/2013 | EP2600379A1 Scanning transmission electron microscope and axial adjustment method thereof |
| 06/05/2013 | EP2599892A1 Sputtering target and/or coil and process for producing same |
| 06/05/2013 | EP2599891A2 Method for the deposition of insulating layers. |
| 06/05/2013 | EP2599209A2 Ignition circuit for igniting a plasma fed with alternating power |
| 06/05/2013 | EP2599103A2 Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and x-ray detector employing same |
| 06/05/2013 | EP2599102A1 Improved cryogenic specimen holder |
| 06/05/2013 | CN202978850U Plasma treatment chamber and radiofrequency matching circuit thereof |
| 06/05/2013 | CN202977357U Electronic microscope with satellite positioning function |
| 06/05/2013 | CN103137521A Air inlet device |
| 06/05/2013 | CN103137468A Apparatus and method for manufacturing semiconductor devices |
| 06/05/2013 | CN103137416A Device for applying electromagnetic microwave radiation in a plasma inside a hollow glass substrate tube, and method for manufacturing an optical preform |
| 06/05/2013 | CN103137415A Apparatus and method for manufacturing semiconductor devices |
| 06/05/2013 | CN103137414A Semiconductor chip etching device |
| 06/05/2013 | CN103137413A Ion implanter control system |
| 06/05/2013 | CN103137412A Modularized control system of ion implanter |
| 06/05/2013 | CN103137411A Source high vacuum automatic establishment method of ion implanter |
| 06/05/2013 | CN103137410A Embedded type implanter control system based on ARM |
| 06/05/2013 | CN103137409A Simple beam detecting system |
| 06/05/2013 | CN103137408A Radio-frequency power supply with precision power detector |
| 06/05/2013 | CN103137407A Multi-electrode beam focus regulating device |
| 06/05/2013 | CN103137406A Nickel foil mesh for transmission microscope and scanning microscope and production method of nickel foil mesh |
| 06/05/2013 | CN103137405A Tungsten foil mesh for transmission microscope and scanning microscope and production method of tungsten foil mesh |