| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 07/18/2013 | US20130180843 Directed multi-deflected ion beam milling of a work piece and determining and controlling extent thereof |
| 07/18/2013 | DE102012200564A1 Drive and power supply device for rotatable cylindrical anode used for vacuum processing system, has rotary vacuum seal, power transmission device, torque transmission device and coolant supply device which are arranged in housing |
| 07/18/2013 | DE102012107282A1 Vorrichtung und verfahren zur plasmabehandlung von oberflächen Apparatus and method for plasma treatment of surfaces |
| 07/18/2013 | DE102012000650A1 Verfahren und vorrichtung zum abrastern einer oberfläche eines objekts mit einem teilchenstrahl Method and apparatus for scanning a surface of an object with a particle beam |
| 07/17/2013 | EP2615620A2 Methods and systems for raster scanning a surface of an object using a particle beam |
| 07/17/2013 | EP2614516A2 Using beam blockers to perform a patterned implant of a workpiece |
| 07/17/2013 | CN203071041U Power supply grading regulator and grid-control electronic gun filament power supply module |
| 07/17/2013 | CN1812683B Plasma reactor for improving plasma uniformity and device damage reduction |
| 07/17/2013 | CN103210467A Ion milling device and ion milling processing method |
| 07/17/2013 | CN103208440A Cavity heating device |
| 07/17/2013 | CN103208420A Etch With Increased Mask Selectivity |
| 07/17/2013 | CN103208410A Plasma processing apparatus |
| 07/17/2013 | CN103208409A Chip carrier |
| 07/17/2013 | CN103205722A Magnetron sputtering chamber wall anti-plating shutter device |
| 07/17/2013 | CN102438391B Device with adjustable electricity conductor and method therefor |
| 07/17/2013 | CN102243976B 等离子体加工设备 The plasma processing equipment |
| 07/17/2013 | CN102187424B Charged particle beam lithography system and target positioning device |
| 07/17/2013 | CN102099890B Method and apparatus for measurement of beam angle in ion implantation |
| 07/17/2013 | CN102034666B Side gas injector for plasma reaction chamber |
| 07/17/2013 | CN101925975B Apparatus, carrier and method for plasma treatment of molds |
| 07/17/2013 | CN101427184B 光刻系统和投影方法 Projection lithography system and method |
| 07/16/2013 | US8487270 Particle beam device and method for use in a particle beam device |
| 07/16/2013 | US8487268 Method for the production of multiplayer electrostatic lens array |
| 07/16/2013 | US8487253 Scanning electron microscope |
| 07/16/2013 | US8487252 Particle beam microscope and method for operating the particle beam microscope |
| 07/16/2013 | US8487250 Method for detecting information of an electronic potential on a sample and charged particle beam apparatus |
| 07/16/2013 | US8486841 Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof |
| 07/11/2013 | WO2013103107A1 Charged particle beam irradiation apparatus |
| 07/11/2013 | WO2013103090A1 Charged particle beam device and inclined observation image display method |
| 07/11/2013 | WO2013055523A3 Closed electron drift ion source and methods of using the same |
| 07/11/2013 | WO2013007389A3 Method for forming a layer on a substrate at low temperatures |
| 07/11/2013 | US20130175453 Drawing apparatus, method of manufacturing article, and information processing apparatus |
| 07/11/2013 | US20130175447 Scanning Electron Microscope |
| 07/11/2013 | US20130175446 Method and apparatus for preparing lamella |
| 07/11/2013 | US20130175445 Microelectronic substrate inspection equipment using helium ion microscopy |
| 07/11/2013 | US20130175444 Isotope ion microscope methods and systems |
| 07/11/2013 | US20130174983 Plasma processor and plasma processing method |
| 07/11/2013 | DE112011102526T5 Strahlvorrichtung für einen Strahl geladener Teilchen Radiating device for a charged particle beam |
| 07/11/2013 | DE102005025130B4 Handhabungsvorrichtung zur Manipulation von Mikrobauteilen Handling device for manipulation of micro-components |
| 07/10/2013 | EP2613338A2 Determination of emission parameters from field emission sources |
| 07/10/2013 | EP2612343A1 Sputtering device with a tubular target |
| 07/10/2013 | EP2612342A2 Navigation and sample processing using an ion source containing both low-mass and high-mass species |
| 07/10/2013 | EP2612168A2 Detection module for detecting radiation |
| 07/10/2013 | CN203055883U Substrate transmission structure of ion injection device |
| 07/10/2013 | CN203055854U Wafer ion implantation system |
| 07/10/2013 | CN203055853U Ion implantation machine |
| 07/10/2013 | CN103201820A In-vacuum beam defining aperture cleaning for particle reduction |
| 07/10/2013 | CN103201819A Pattern determination device and computer program |
| 07/10/2013 | CN103201609A Method of preparing a biological sample for inspection with electron microscopy and fluorescent light microscopy |
| 07/10/2013 | CN103198996A Vacuum device for controlling high frequency alternating magnetic field of high current electron beam |
| 07/10/2013 | CN103198995A Capillary discharge extreme ultraviolet lithography light source plasmoid detecting system realized through adoption of LuAG-Ce fluorescent screen |
| 07/10/2013 | CN103198994A Transmission electron microscope objective lens diaphragm |
| 07/10/2013 | CN103198993A Gas spray head used for plasma processing device |
| 07/10/2013 | CN102647847B 等离子体处理装置 The plasma processing apparatus |
| 07/10/2013 | CN102254774B Generating device of active gas flow and method for generating active gas flow |
| 07/10/2013 | CN101874283B Low impedance plasma |
| 07/09/2013 | US8481969 Effective algorithm for warming a twist axis for cold ion implantations |
| 07/09/2013 | US8481968 Electron microscope specimen and method for preparing the same |
| 07/09/2013 | US8481966 Microplasma ion source for focused ion beam applications |
| 07/09/2013 | US8481964 Charged particle beam drawing apparatus and method |
| 07/09/2013 | US8481963 Ion slicer with accelleration and decelleration optics |
| 07/09/2013 | US8481959 Apparatus and method for multi-directionally scanning a beam of charged particles |
| 07/09/2013 | US8481936 Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system |
| 07/09/2013 | US8481935 Scanning electron microscope |
| 07/09/2013 | US8481934 Method for inspecting and measuring sample and scanning electron microscope |
| 07/09/2013 | US8481933 Method and device for examining a surface of an object |
| 07/09/2013 | US8481932 Charged particle beam analyzer and analysis method |
| 07/09/2013 | US8481931 Electron spectroscopy |
| 07/09/2013 | US8480913 Plasma processing method and apparatus with control of plasma excitation power |
| 07/09/2013 | US8480850 Plasma treatment system |
| 07/04/2013 | WO2013102064A1 Sample holder for electron microscopy for low-current, low-noise analysis |
| 07/04/2013 | WO2013101379A1 Apparatus for collection of cathodoluminescence signals |
| 07/04/2013 | WO2012125560A3 Method and apparatus for plasma dicing a semi-conductor wafer |
| 07/04/2013 | US20130174301 Method and apparatus for in situ preparation of serial planar surfaces for microscopy |
| 07/04/2013 | US20130174105 Method and apparatus for plasma processing |
| 07/04/2013 | US20130168549 Method of Evacuating Sample Holder, Pumping System, and Electron Microscope |
| 07/04/2013 | US20130168020 Etching device and focus ring |
| 07/04/2013 | DE102012113145A1 Device, used for loading and unloading substrates to be treated in batch process, includes processing chamber, and a lock chamber, where processing and lock chambers are bounded via chamber walls and comprise substrate transporting device |
| 07/04/2013 | DE10196150B4 Magnetron-Sputtervorrichtung und Verfahren zum Steuern einer solchen Vorrichtung A magnetron sputtering apparatus and method for controlling such a device |
| 07/03/2013 | EP2610891A1 Charged particle beam device and sample observation method |
| 07/03/2013 | EP2610890A1 Specimen holder for charged-particle device |
| 07/03/2013 | EP2610889A2 Drift control in a charged particle beam system |
| 07/03/2013 | EP2610888A2 Cooled charged particle systems and methods |
| 07/03/2013 | EP2609614A1 Reactor box chamber cleaning using molecular fluorine |
| 07/03/2013 | EP2609613A1 Method and device for treating a substrate by means of a plasma |
| 07/03/2013 | EP2609611A1 Control grid design for an electron beam generating device |
| 07/03/2013 | CN203038892U Hollow cathode grafting polymerization plasma treatment equipment for large area thin film material |
| 07/03/2013 | CN203038891U Plasma processing chamber and electrode |
| 07/03/2013 | CN203038890U Field emission electron gun power supply shell |
| 07/03/2013 | CN203030580U Ordinary pressure plasma free radical washing device |
| 07/03/2013 | CN103189957A In-situ conditioning for vacuum processing of polymer substrates |
| 07/03/2013 | CN103189956A Method for extending lifetime of an ion source |
| 07/03/2013 | CN103189541A Coating based on NiAl2O4 in spinel structure |
| 07/03/2013 | CN103187267A In-situ photoresist strip during plasma etching of active hard mask |
| 07/03/2013 | CN103187242A Device and method of improving etching CD uniformity of wafer |
| 07/03/2013 | CN103187236A Plasma etcher design with effective no-damage in-situ ash |
| 07/03/2013 | CN103187235A Discharging component, cavity device and plasma enhanced chemical vapor deposition (PECVD) device of substrate processing device |
| 07/03/2013 | CN103187234A Adjustable constraint device used for plasma processing device |
| 07/03/2013 | CN103187233A Focus control device of multiple-magnetic-pole beam |
| 07/03/2013 | CN103187232A Focusing ring for reducing polymer generated on back of chip |