| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 09/12/2013 | WO2013133012A1 Specimen observation method and specimen pretreatment method |
| 09/12/2013 | WO2013132906A1 Liquid sample holder for electron microscope and method for manufacturing same |
| 09/12/2013 | WO2013132064A2 Charged particle lithography system with alignment sensor and beam measurement sensor |
| 09/12/2013 | WO2013131508A1 Device and method for plasma-coating elongated cylindrical components |
| 09/12/2013 | WO2013034411A3 Vacuum coating apparatus |
| 09/12/2013 | US20130237053 Film forming method and film forming apparatus |
| 09/12/2013 | US20130234040 Method of handling a substrate support structure in a lithography system |
| 09/12/2013 | US20130234036 Ion source, heavy particle beam irradiation apparatus, ion source driving method, and heavy particle beam irradiation method |
| 09/12/2013 | US20130234024 Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method |
| 09/12/2013 | US20130234023 Characterization of nanoscale structures using an ultrafast electron microscope |
| 09/12/2013 | US20130234022 Photon induced near field electron microscope and biological imaging system |
| 09/12/2013 | US20130234020 Pattern inspection apparatus and method |
| 09/12/2013 | US20130234019 Global alignment using multiple alignment pattern candidates |
| 09/12/2013 | US20130234011 Method for setting an operating parameter of a particle beam device and a sample holder for performing the method |
| 09/12/2013 | DE102012110840A1 Device for analysis of structure of CAD data and REM image, has signal processor producing REM image, and controller synchronizing design data with REM image by adjusting design data and/or REM image based on distortion amount data |
| 09/12/2013 | DE102011086974B4 Temperaturmesssonde und Verfahren zur Messung einer Oberflächentemperatur Temperature measuring probe and method for measuring a surface temperature |
| 09/11/2013 | EP2636054A1 Apparatus for treatment of substrates |
| 09/11/2013 | CN203192748U Scanning electron microscope sample stage |
| 09/11/2013 | CN103299390A Device for producing an electron beam |
| 09/11/2013 | CN103298969A Method and device for transporting vacuum arc plasma |
| 09/11/2013 | CN103298968A Apparatus for coating substrates using the EB/PVD method |
| 09/11/2013 | CN103295870A Plasma etching equipment and etching method |
| 09/11/2013 | CN103295869A Treatment apparatus for flat substrates |
| 09/11/2013 | CN103295868A Plasma processing apparatus and plasma processing method |
| 09/11/2013 | CN103295867A Plasma boundary limiter unit and apparatus for treating substrate |
| 09/11/2013 | CN103295866A Impedance-based adjustment of power and frequency |
| 09/11/2013 | CN103295865A Frequency enhanced impedance dependent power control for multi-frequency rf pulsing |
| 09/11/2013 | CN103295864A Ion beam concentration detection method and ion beam detection system |
| 09/11/2013 | CN103295863A Drawing apparatus, and method of manufacturing article |
| 09/11/2013 | CN103295862A Electromagnetic deflection device for electron beam trajectory control and application thereof |
| 09/11/2013 | CN103290377A Magnetron sputtering method, magnetron sputtering electrode and device thereof |
| 09/11/2013 | CN103288453A Graphite member for beam-line internal member of ion implantation apparatus |
| 09/11/2013 | CN101978461B Method for controlling ion energy in radio frequency plasmas |
| 09/11/2013 | CN101924003B 电极结构及等离子体设备 Electrode structure and plasma equipment |
| 09/10/2013 | US8530867 Electron generation and delivery system for contamination sensitive emitters |
| 09/10/2013 | US8530865 Gas field ion source, charged particle microscope, and apparatus |
| 09/10/2013 | US8530858 Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image |
| 09/10/2013 | US8530856 Beam device system comprising a particle beam device and an optical microscope |
| 09/10/2013 | US8530837 Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen |
| 09/10/2013 | US8530836 Electron-beam dimension measuring apparatus and electron-beam dimension measuring method |
| 09/10/2013 | US8529783 Method for backside polymer reduction in dry-etch process |
| 09/06/2013 | WO2013127786A1 Coated cutting tool |
| 09/05/2013 | US20130230806 Lithography apparatus, and article manufacturing method |
| 09/05/2013 | US20130230805 Drawing apparatus, reference member, and method of manufacturing article |
| 09/05/2013 | US20130228708 Ion Beam Sample Preparation Apparatus and Methods |
| 09/05/2013 | US20130228700 Method and apparatus for a porous electrospray emitter |
| 09/05/2013 | US20130228686 Charged particle beam apparatus |
| 09/05/2013 | US20130228684 Detector and inspecting apparatus |
| 09/05/2013 | US20130228683 Charged-Particle Microscope Providing Depth-Resolved Imagery |
| 09/05/2013 | DE112011103599T5 Laserionenquelle Laser Ion Source |
| 09/05/2013 | DE102013003797A1 Ionenquelle Ion source |
| 09/05/2013 | DE102013003501A1 lONENQUELLE ion source |
| 09/04/2013 | EP2634285A1 Coated cutting tool |
| 09/04/2013 | EP2633545A1 Modulation device and charged particle multi-beamlet lithography system using the same |
| 09/04/2013 | EP2633544A1 Lithography system, modulation device and method of manufacturing a fiber fixation substrate |
| 09/04/2013 | EP2633543A1 Device for producing an electron beam |
| 09/04/2013 | CN203179834U 等离子处理装置 The plasma processing apparatus |
| 09/04/2013 | CN103282996A Spark detection in coating installations |
| 09/04/2013 | CN103280415A Platen for reducing particle contamination on a substrate |
| 09/04/2013 | CN102117733B Substrate processing apparatus and cleaning method thereof |
| 09/04/2013 | CN102017052B Projection lens arrangement |
| 09/04/2013 | CN101916706B Sample platform of scanning electronic microscope and scanning electronic microscope |
| 09/03/2013 | US8525134 Lithography system |
| 09/03/2013 | US8525123 Charging-free electron beam cure of dielectric material |
| 09/03/2013 | US8525112 Variable pixel density imaging |
| 09/03/2013 | DE202013007063U1 Elektrode zur Verwendung in Plasmaspritzdüsen An electrode for use in plasma spraying nozzles |
| 09/03/2013 | CA2669626C Apparatus and method for generating femtosecond electron beam |
| 08/29/2013 | WO2013037486A3 Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assembly |
| 08/29/2013 | WO2011110162A8 Method and device for plasma-treating workpieces |
| 08/29/2013 | US20130224662 Charged particle beam apparatus, drawing apparatus, and method of manufacturing article |
| 08/29/2013 | US20130221218 Electron microscope system using augmented reality |
| 08/29/2013 | US20130220806 Ion milling device |
| 08/29/2013 | DE112011103986T5 Elektronenstrahlsäule und Verfahren zur Benutzung der Elektronenstrahlsäule Electron beam column, and methods of use of the electron beam column |
| 08/29/2013 | DE102013003449A1 Laserionenquelle Laser Ion Source |
| 08/29/2013 | DE102013002757A1 Chromatic aberration correcting device for correcting electron-optical system, has two multipole lenses for generating quadrupole fields, which are arranged on opposite sides of two relay lenses, each with certain focal length |
| 08/29/2013 | DE102012203152A1 Verfahren und Vorrichtung zum reaktiven Magnetronsputtern einer transparenten Metalloxidschicht Method and device for reactive magnetron sputtering a transparent metal oxide layer |
| 08/28/2013 | EP2631929A1 A holder assembly for cooperating with an environmental cell and an electron microscope |
| 08/28/2013 | EP2631328A1 Composite target and method for manufacturing the same |
| 08/28/2013 | EP2630650A1 Sputtering sources for high-pressure sputtering with large targets and sputtering method |
| 08/28/2013 | EP2630649A2 Fault tolerant ion source power system |
| 08/28/2013 | EP1640474B1 Thin film forming device |
| 08/28/2013 | CN203165850U Graphene semiconductor preparation apparatus |
| 08/28/2013 | CN203165849U Vacuum apparatus used for controlling high-current electron beam high frequency alternating magnetic field |
| 08/28/2013 | CN103268850A Solar battery piece ion implanter |
| 08/28/2013 | CN102194633B Microgrid of transmissive electron microscope |
| 08/28/2013 | CN102157423B Substrate mounting table and method for manufacturing the same, and substrate processing apparatus |
| 08/28/2013 | CN101589450B Arc suppression and pulsing in high power impulse magnetron sputtering (hipims) |
| 08/27/2013 | US8519363 Wafer handling method and ion implanter |
| 08/27/2013 | US8519334 Scanning electron microscope and sample observation method |
| 08/27/2013 | US8519333 Charged particle system for reticle/wafer defects inspection and review |
| 08/27/2013 | US8519332 Semiconductor inspecting apparatus |
| 08/27/2013 | US8518211 System and method for controlling plasma with an adjustable coupling to ground circuit |
| 08/27/2013 | US8518162 Method of treating a gas stream |
| 08/22/2013 | WO2013123140A1 Alternate materials and mixtures to minimize phosphorus buildup in implant applications |
| 08/22/2013 | WO2013122986A1 Carbon dopant gas and co-flow for implant beam and source life performance improvement |
| 08/22/2013 | WO2013120920A1 Online adjustable magnet bar |
| 08/22/2013 | US20130216959 Charged particle beam apparatus, and article manufacturing method |
| 08/22/2013 | US20130216954 Drawing apparatus, and method of manufacturing article |
| 08/22/2013 | US20130214458 Sample preparation method and apparatus |
| 08/22/2013 | US20130214172 Electron beam writing apparatus and electron beam writing method |