| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/22/2013 | US20130214156 Charged particle detector |
| 08/22/2013 | US20130214155 Charged particle beam device with dynamic focus and method of operating thereof |
| 08/22/2013 | US20130213576 Plasma processes at atmospheric pressure |
| 08/22/2013 | US20130213439 Holder Assembly for Cooperating with an Environmental Cell and an Electron Microscope |
| 08/22/2013 | DE112011103677T5 Ionenätzvorrichtung Ion etching |
| 08/22/2013 | DE112011102731T5 Elektronenstrahlvorrichtung Electron beam device |
| 08/22/2013 | DE102013101665A1 Proben-Vorbereitungsverfahren und Einrichtung Sample preparation method and device |
| 08/22/2013 | DE102012202611A1 Manufacturing a micro-system by deep reactive-ion etching, comprises e.g.: providing an etching tool for deep reactive-ion etching, carrying out multiple repeating-processing intervals of the deep ion etching including an etching step |
| 08/22/2013 | DE102012101364A1 Vacuum duct for guiding and sealing of component i.e. heating lamp, has pressure plates formed at front sides of sealing disk, and fitted screws running through passage openings in plates and disk, where screws are provided with nuts |
| 08/21/2013 | EP2629318A2 A holder assembly for cooperating with an environmental cell and an electron microscope |
| 08/21/2013 | EP2629317A1 Charged particle beam device with dynamic focus and method of operating thereof |
| 08/21/2013 | EP2629316A1 Particle source and manufacturing method thereof |
| 08/21/2013 | EP2627614A1 Method of treating the surface of a soda lime silica glass substrate, surface-treated glass substrate, and device incorporating the same |
| 08/21/2013 | CN203150515U Adherent cell scanning electron microscope (SEM) carrier |
| 08/21/2013 | CN103262203A E-PETRI dishes, devices, and systems |
| 08/21/2013 | CN103261879A Deconvolution of time-gated cathodoluminescence images |
| 08/21/2013 | CN103258729A Fabrication of a silicon structure and deep silicon etch with profile control |
| 08/21/2013 | CN103258710A Carborundum sealing ring part machining method through atmosphere plasma formed electrode |
| 08/21/2013 | CN103258709A Multi-electrode air plasma processing method for silicon carbide sealing ring part |
| 08/21/2013 | CN103258708A Device for processing microstructure sealing ring part with air plasma shaped electrode |
| 08/21/2013 | CN103258707A Substrate processing apparatus and substrate processing method |
| 08/21/2013 | CN103258706A Plasma processing apparatus and plasma monitoring method |
| 08/21/2013 | CN103258705A A holder assembly for cooperating with an environmental cell and an electron microscope |
| 08/21/2013 | CN103257528A Electron beam writing apparatus and electron beam writing method |
| 08/21/2013 | CN103257067A Sample preparation method and apparatus |
| 08/21/2013 | CN103255382A Magnetron sputtering source and magnetron sputtering apparatus |
| 08/21/2013 | CN102280342B Plasma treatment device |
| 08/21/2013 | CN101800161B Plasma etching method and plasma etching apparatus |
| 08/20/2013 | US8516610 High-frequency rheology system |
| 08/20/2013 | US8513620 Auxiliary stage and method of utilizing auxiliary stage |
| 08/20/2013 | US8513619 Non-planar extractor structure for electron source |
| 08/20/2013 | US8513603 In-situ determination of thin film and multilayer structure and chemical composition using x-ray fluorescence induced by grazing incidence electron beams during thin film growth |
| 08/20/2013 | US8513602 Focused ion beam apparatus |
| 08/20/2013 | US8513137 Plasma processing apparatus and plasma processing method |
| 08/20/2013 | US8512510 Plasma processing method and apparatus |
| 08/15/2013 | WO2013120097A1 Compact, filtered ion source |
| 08/15/2013 | WO2013119612A1 Electron microscope |
| 08/15/2013 | WO2013056831A3 Drill having a coating |
| 08/15/2013 | US20130209740 Apparatus and Method of Cleaving Thin Layer from Bulk Material |
| 08/15/2013 | US20130206999 Charged particle beam lens and charged particle beam exposure apparatus |
| 08/15/2013 | US20130206987 Transmission Electron Microscope |
| 08/15/2013 | US20130206986 Charged particle beam apparatus |
| 08/15/2013 | US20130206985 3d backscatter imaging system |
| 08/15/2013 | US20130206984 Specimen holder used for mounting samples in electron microscopes |
| 08/15/2013 | US20130206983 Positioning system and method for precise stage and pattern used thereof |
| 08/15/2013 | US20130206594 Plasma reactor with tiltable overhead rf inductive source |
| 08/14/2013 | EP2626887A1 Online adjustable magnet bar |
| 08/14/2013 | EP2626886A2 Forming a vitrified sample for an electron microscopy |
| 08/14/2013 | EP2626885A1 Forming a vitrified sample for an electron microscopy |
| 08/14/2013 | EP2626884A1 Microfluidic chip for high resolution transmission electron microscopy |
| 08/14/2013 | EP2626446A1 Power lance and plasma-assisted coating with the input of a high frequency |
| 08/14/2013 | EP2626445A1 Hollow cathode gas lance for internally coating containers |
| 08/14/2013 | EP2626444A2 Copper or copper alloy target/copper alloy backing plate assembly |
| 08/14/2013 | EP2625706A2 In-situ conditioning for vacuum processing of polymer substrates |
| 08/14/2013 | DE112011103860T5 Ionenätzvorrichtung und lonenätzbearbeitungsverfahren Ion etching and lonenätzbearbeitungsverfahren |
| 08/14/2013 | DE112011103712T5 Vorrichtung mit einem Strahl geladener Teilchen A device with a beam of charged particles |
| 08/14/2013 | DE112011103393T5 Probenaufnahmevorrichtung für einen Strahl geladener Teilchen Sample-receiving device for a charged particle beam |
| 08/14/2013 | DE112011103384T5 Verfahren zum Betrachten einer auf einer Flüssigkeitsoberfläche schwimmenden Probe im Rasterelektronenmikroskop A method of viewing a floating on a liquid surface sample in the scanning electron microscope |
| 08/14/2013 | DE112010000743T5 Vorrichtung für einen Strahl geladener Teilchen An apparatus for a beam of charged particles |
| 08/14/2013 | DE102013101261A1 TEM-Probe-Vorbereitungsverfahren TEM sample preparation method |
| 08/14/2013 | DE102013101257A1 Verfahren zum Vorbereiten einer Probe zur TEM-Beobachtung A method for preparing a sample for TEM observation |
| 08/14/2013 | CN203134754U Dry etching device and lower electrode thereof |
| 08/14/2013 | CN203134753U Air inlet apparatus used for semiconductor reaction chamber |
| 08/14/2013 | CN203134752U Side-installed fiber coupling TEM digital imaging apparatus |
| 08/14/2013 | CN203134751U Multifunctional scanning electron microscope (SEM) sample table |
| 08/14/2013 | CN203134750U 600kW gas discharge electron gun |
| 08/14/2013 | CN203134749U Dry etching device and lower electrode thereof |
| 08/14/2013 | CN103250228A Inductively coupled plasma flood gun using an immersed low inductance RF coil and multicusp magnetic arrangement |
| 08/14/2013 | CN103247716A Method for manufacturing a solar cell and apparatus for manufacturing the same |
| 08/14/2013 | CN103247522A Ion implantation method, transporting container and ion implantation apparatus |
| 08/14/2013 | CN103247511A Substrate processing apparatus |
| 08/14/2013 | CN103247510A Inductively coupled plasma processing method and inductively coupled plasma processing apparatus |
| 08/14/2013 | CN103247509A Plasma processing equipment |
| 08/14/2013 | CN103247508A Analyzer for detecting pollution of ion source |
| 08/14/2013 | CN103247507A Compound plasma focusing ring and method for replacing same |
| 08/14/2013 | CN103247506A Forming a vitrified sample for an electron microscopy |
| 08/14/2013 | CN103247505A Indirectly heated broadband beam ion source for ion beam system and broadband ion beam system |
| 08/14/2013 | CN103247504A Dual-frequency ion source |
| 08/14/2013 | CN101990630B Ionization gauge with operational parameters and geometry designed for high pressure operation |
| 08/13/2013 | US8507858 Pattern measurement apparatus and pattern measurement method |
| 08/13/2013 | US8507855 Inductive modulation of focusing voltage in charged beam system |
| 08/13/2013 | US8507854 Particle beam microscopy system and method for operating the same |
| 08/13/2013 | US8507853 Method and system for determining depth profiling |
| 08/13/2013 | US8506771 Bipolar pulsed power supply and power supply apparatus having plurality of bipolar pulsed power supplies connected in parallel with each other |
| 08/08/2013 | WO2013116594A1 Methods of forming layers |
| 08/08/2013 | WO2013115945A1 Ribbon antenna for versatile operation and efficient rf power coupling |
| 08/08/2013 | WO2013115644A1 Spark ablation device |
| 08/08/2013 | WO2013045596A3 Inorganic materials, methods and apparatus for making same, and uses thereof |
| 08/08/2013 | US20130200280 Methods of forming layers |
| 08/08/2013 | US20130200271 Charged particle beam device |
| 08/08/2013 | US20130200270 Drift control in a charged particle beam system |
| 08/08/2013 | US20130200262 Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus |
| 08/08/2013 | US20130200255 Three-dimensional mapping using scanning electron microscope images |
| 08/08/2013 | US20130199719 Drawing apparatus, and method of manufacturing article |
| 08/08/2013 | DE102012100929A1 Substratbearbeitungsanlage Substrate processing system |
| 08/08/2013 | DE102012100927A1 Prozessmodul Process module |
| 08/07/2013 | EP2624279A1 Charged particle beam device, thin film forming method, defect correction method and device fabrication method |
| 08/07/2013 | EP2624278A1 Phase plate |
| 08/07/2013 | EP2624277A1 Photo-cathode high-frequency electron-gun cavity apparatus |
| 08/07/2013 | EP2622627A1 Systems and methods for forming a layer of sputtered material |