| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 10/22/2013 | US8563952 Charged particle beam writing apparatus |
| 10/22/2013 | US8563950 Energy beam drawing apparatus and method of manufacturing device |
| 10/22/2013 | US8563944 Ion beam device |
| 10/22/2013 | US8563926 Method of making axial alignment of charged particle beam and charged particle beam system |
| 10/17/2013 | WO2013154811A1 Method to determine the thickness of a thin film during plasma deposition |
| 10/17/2013 | WO2013153891A1 Charged particle beam apparatus |
| 10/17/2013 | WO2013152805A1 Method and system for production and additive manufacturing of metals and alloys |
| 10/17/2013 | WO2013092981A3 Method for protecting the surface of an optical component and device for processing work pieces |
| 10/17/2013 | US20130270996 Ultraviolet Pretreatment Device |
| 10/17/2013 | US20130270450 Double ended electrode manipulator |
| 10/17/2013 | US20130270439 Multi channel detector, optics therefor and method of operating thereof |
| 10/17/2013 | US20130270438 Switchable multi perspective detector, optics therefor and method of operating thereof |
| 10/17/2013 | US20130270437 Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method |
| 10/17/2013 | US20130270435 Electron beam device |
| 10/17/2013 | DE112011104714T5 Rasterelektronenmikroskop Scanning electron microscope |
| 10/17/2013 | DE102012103254A1 Method for transferring substrate e.g. glass pane into vacuum treatment plant, involves transporting substrate composite into transfer chamber and reducing spacing within substrate composite in transport direction of substrates |
| 10/17/2013 | DE102008019681B4 Mittels aerostatischer Lagerelemente geführter Tisch für Vakuumanwendung By means of aerostatic bearing elements led table for vacuum application |
| 10/16/2013 | EP2650902A2 Method for correcting electronic proximity effects using Voigt scattering functions |
| 10/16/2013 | EP2650901A1 Charged particle beam apparatus and method of irradiating charged particle beam |
| 10/16/2013 | CN203242597U Segmental type focus ring assembly |
| 10/16/2013 | CN203233843U Dual-net structure for treating seeds in ion injection manner |
| 10/16/2013 | CN103354946A A microwave plasma reactor for manufacturing synthetic diamond material |
| 10/16/2013 | CN103354202A Plasma processing apparatus |
| 10/16/2013 | CN103354201A Lithography system, sensor and measuring method |
| 10/16/2013 | CN102400088B Glow large-beam low-voltage plasma activation process for flexible metal substrate |
| 10/16/2013 | CN102324383B Ion implantation method and method for adjusting ion beam scanning rate |
| 10/16/2013 | CN102047548B Bipolar pulse power source and power source device formed by connecting a plurality of bipolar pulse power sources in parallel |
| 10/15/2013 | US8559697 Mask inspection apparatus and image generation method |
| 10/15/2013 | US8558196 Charged particle lithography system with aperture array cooling |
| 10/15/2013 | US8558192 Gas delivery system with voltage gradient for an ion microscope |
| 10/15/2013 | US8558190 Charged particle beam column and method of operating same |
| 10/15/2013 | US8558171 Charged particle beam apparatus including aberration corrector |
| 10/10/2013 | WO2013152028A1 Apparatus and methods for high-resolution electron beam imaging |
| 10/10/2013 | WO2013151073A1 Electron microscope, method for setting observation conditions for electron microscope, and method for observation using electron microscope |
| 10/10/2013 | WO2013150861A1 Gas field ion source and ion beam device |
| 10/10/2013 | WO2013150847A1 Charged particle beam device |
| 10/10/2013 | WO2013149723A1 Method and device for production of acetylene using plasma technology |
| 10/10/2013 | WO2013149482A1 New normal-pressure dual radio frequency electrode plasma free radical cleaning spray gun |
| 10/10/2013 | US20130266894 Charged particle beam deflection method with separate stage tracking and stage positional error signals |
| 10/10/2013 | US20130264499 Acquisition method of charged particle beam deflection shape error and charged particle beam writing method |
| 10/10/2013 | US20130264497 Drawing apparatus, drawing method, and method of manufacturing article |
| 10/10/2013 | US20130264491 Method for dual energy implantation for ultra-shallow junction formation of mos devices |
| 10/10/2013 | US20130264480 Pattern measurement method and pattern measurement apparatus |
| 10/10/2013 | US20130264479 Method and apparatus for measuring displacement between patterns and scanning electron microscope installing unit for measuring displacement between patterns |
| 10/10/2013 | US20130264477 Particle-beam column corrected for both chromatic and spherical aberration |
| 10/10/2013 | US20130264476 Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
| 10/10/2013 | DE112011104697T5 Rasterelektronenmikroskop Scanning electron microscope |
| 10/10/2013 | DE112011104668T5 Gerät für einen Strahl von geladenen Teilchen und Verfahren zum Korrigieren eines detektierten Signals desselben Of the same device for a beam of charged particles and methods for correcting a detected signal |
| 10/10/2013 | DE112011104535T5 Emissionskanone für geladene Teilchen und Gerät für Strahl von geladenen Teilchen Emission gun for charged particles and apparatus for charged particle beam |
| 10/10/2013 | DE102013103466A1 Strukturmessverfahren und Strukturmessgerät Structure measuring method and structure gauge |
| 10/10/2013 | DE102012103023A1 Device for sterilizing containers e.g. plastic bottles in beverage manufacturing industry, has control device whose image pickup device receives image of exit region in which charge carrier emerges from chamber |
| 10/09/2013 | EP2648209A1 A power supply device for plasma processing |
| 10/09/2013 | EP2648208A2 Charged-particle microscope providing depth-resolved imagery |
| 10/09/2013 | EP2648207A1 Charged-particle microscope providing depth-resolved imagery |
| 10/09/2013 | EP2648206A1 Electronic microscope, electronic-microscope image reconstruction system, and electronic-microscope image reconstruction method |
| 10/09/2013 | EP2647737A1 Planar or tubular sputter target and method for producing the same |
| 10/09/2013 | EP2647036A2 Ion implanter system including remote dopant source, and method comprising same |
| 10/09/2013 | EP2646596A1 Method for producing a carbon-containing layer system and apparatus for implementing the method |
| 10/09/2013 | CN103348440A Electron beam interference device and electron beam interference method |
| 10/09/2013 | CN103348439A Electron microscope sample holder and sample observation method |
| 10/09/2013 | CN103348438A Combination computed and direct radiography system and method |
| 10/09/2013 | CN103348437A 带电粒子束装置 Charged particle beam apparatus |
| 10/09/2013 | CN103346058A Cavity lining of plasma etching equipment |
| 10/09/2013 | CN102412144B Plasma etching method, device thereof and plasma etching method for diffusion barrier layers |
| 10/09/2013 | CN102354647B Device for prolonging service life of filament of scanning electron microscope |
| 10/09/2013 | CN101884016B Lithography system, method of clamping and wafer table |
| 10/08/2013 | US8552398 Converter of orbital momentum into spin momentum for the polarization of particle beams |
| 10/08/2013 | US8552373 Charged particle beam device and sample observation method |
| 10/08/2013 | US8552372 Method and system of evaluating distribution of lattice strain on crystal material |
| 10/03/2013 | WO2013148463A1 Ion implantation system and method of processing a substrate |
| 10/03/2013 | WO2013148462A1 Technique for processing a substrate |
| 10/03/2013 | WO2013148287A1 Hybrid electrostatic lens for improved beam transmission |
| 10/03/2013 | WO2013148286A1 Method and apparatus for generating a high current negative hydrogen ion beam |
| 10/03/2013 | WO2013145926A1 Ion milling apparatus |
| 10/03/2013 | WO2013145924A1 Scanning electron microscope |
| 10/03/2013 | WO2013144350A1 Current generator and method for generating current pulses |
| 10/03/2013 | WO2013143615A1 Transparent body for use in a touch panel and its manufacturing method and apparatus |
| 10/03/2013 | WO2013143531A1 Method for determining beam parameters of a charge carrier beam, measuring device, and charge carrier beam device |
| 10/03/2013 | WO2012168575A3 Plasma immersion ion implantation machine for low-pressure process |
| 10/03/2013 | US20130261369 Target for generating ion and treatment apparatus using the same |
| 10/03/2013 | US20130258301 Test Structures and Methods |
| 10/03/2013 | US20130257301 Compact, configurable power supply for energizing ozone-producing cells |
| 10/03/2013 | US20130256558 Apparatus for contaminants being deposited thereon |
| 10/03/2013 | US20130256532 Ion sources, systems and methods |
| 10/03/2013 | US20130256531 Charged particle optical equipment and method for measuring lens aberration |
| 10/03/2013 | US20130256529 Surface-modified fluorescent carbon nanotubes for product verification |
| 10/03/2013 | US20130256528 Method and apparatus for detecting buried defects |
| 10/03/2013 | US20130256526 Hybrid electrostatic lens for improved beam transmission |
| 10/03/2013 | US20130256519 Charged particle beam writing apparatus and charged particle beam writing method |
| 10/03/2013 | US20130255881 Internal member of a plasma processing vessel |
| 10/02/2013 | EP2645402A2 Automated ion beam idle |
| 10/02/2013 | EP2645401A2 Method for setting a position of a supporting element in a particle beam device |
| 10/02/2013 | EP2643844A1 Combination computed and direct radiography system and method |
| 10/02/2013 | DE102012205317A1 Verfahren zur Einstellung einer Position eines Trägerelements in einem Teilchenstrahlgerät A method of adjusting a position of a carrier element in a particle beam |
| 10/02/2013 | DE102012102608A1 Verfahren zur Ermittlung von Strahlparametern eines Ladungsträgerstrahls, Messeinrichtung sowie Ladungsträgerstrahlvorrichtung A method for determining beam parameters of a charged particle beam measurement device, as well as charged particle beam device |
| 10/02/2013 | CN203225233U Ceramic side gas injector |
| 10/02/2013 | CN103339707A A microwave plasma reactor for manufacturing synthetic diamond material |
| 10/02/2013 | CN103337444A Reaction chamber of dry plasma etcher |
| 10/02/2013 | CN101882551B Ion sources, systems and methods |
| 10/01/2013 | US8546962 Mark structure and method for measuring alignment accuracy between former layer and latter layer |