Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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09/20/1983 | US4405861 Secondary-electron detector for analyzing irradiated samples for scanning electron microscopes and microprobes |
09/20/1983 | US4405436 Magnetic pole shields and target of same ferromagnetic material |
09/20/1983 | US4405406 With dichlorofluoromethane |
09/14/1983 | EP0088663A1 Focusing solenoid, its application and manufacturing process |
09/14/1983 | EP0088463A1 Magnetron cathode sputtering system |
09/14/1983 | EP0088457A2 Charged particle beam apparatus |
09/14/1983 | EP0088396A2 Method and apparatus for adjusting the optical axis of an electron microscope |
09/14/1983 | EP0088074A1 Plasma reactor and method therefor |
09/13/1983 | US4404233 Ion implanting method |
09/13/1983 | US4404077 Integrated sputtering apparatus and method |
09/13/1983 | CA1153733A1 Magnetically enhanced sputtering device including means for sputtering magnetically permeable targets |
09/07/1983 | EP0087767A2 Stroboscopic scanning electron microscope |
08/31/1983 | EP0087196A1 Charged particle beam exposure device incorporating beam splitting |
08/31/1983 | EP0087152A2 Secondary electron spectrometer and method of using the same |
08/31/1983 | EP0086816A1 Plasma etching apparatus and method including end point detection. |
08/30/1983 | US4401546 Ferromagnetic high speed sputtering apparatus |
08/30/1983 | US4401539 Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure |
08/30/1983 | US4401507 Method and apparatus for achieving spatially uniform externally excited non-thermal chemical reactions |
08/30/1983 | US4401054 Plasma deposition apparatus |
08/30/1983 | CA1153131A1 Automatic beam correction in a scanning transmission electron microscope |
08/24/1983 | EP0086431A2 Particle beam-generating system and method of using it |
08/23/1983 | US4400622 Electron lens equipment |
08/17/1983 | EP0086120A1 Electron-optical apparatus comprising pyrolytic graphite elements |
08/17/1983 | EP0085745A2 Fine rotation mechanism |
08/16/1983 | US4399365 Ion implant chamber for ion implantation system |
08/16/1983 | US4399360 Transmission electron microscope employing sequential pixel acquistion for display |
08/16/1983 | US4399016 Plasma device comprising an intermediate electrode out of contact with a high frequency electrode to induce electrostatic attraction |
08/16/1983 | US4399014 Plasma reactor and method therefor |
08/10/1983 | EP0085323A2 Electromagnetic lens polepiece structure |
08/09/1983 | US4398132 Electron beam current stabilizing device |
08/09/1983 | US4398079 Machine for working metals using electron beams |
08/09/1983 | US4397885 Method and apparatus for treating fluorescent substance |
08/09/1983 | US4397724 Apparatus and method for plasma-assisted etching of wafers |
08/03/1983 | EP0084971A2 A method for reactive bias sputtering |
08/03/1983 | EP0084970A2 Magnetically enhanced plasma process and apparatus |
08/03/1983 | EP0084850A2 Apparatus for irradiation with charged particle beams |
08/03/1983 | EP0084653A2 Composite concentric-gap magnetic lens |
08/02/1983 | US4396901 Method for correcting deflection distortion in an apparatus for charged particle lithography |
08/02/1983 | US4396861 High voltage lead-through |
08/02/1983 | US4396478 Method of control of chemico-thermal treatment of workpieces in glow discharge and a device for carrying out the method |
08/02/1983 | CA1151320A1 Metal wire cathode for electron beam apparatus |
07/26/1983 | US4395691 Beam deflection system |
07/26/1983 | US4395323 Apparatus for improving a sputtering process |
07/26/1983 | CA1150861A1 Apparatus for writing patterns in a layer on a substrate by means of a beam of electrically charged particles |
07/19/1983 | US4394245 Electrode surface plate of soft magnetic material such as iron or an iron alloy |
07/19/1983 | US4394236 Magnetron cathode sputtering apparatus |
07/13/1983 | EP0083413A1 Autofocus arrangement for electron-beam lithographic systems |
07/12/1983 | US4393333 Microwave plasma ion source |
07/12/1983 | US4393312 Variable-spot scanning in an electron beam exposure system |
07/12/1983 | US4393311 Method and apparatus for surface characterization and process control utilizing radiation from desorbed particles |
07/12/1983 | US4393310 Method of and device for adjusting a shaped-electron-beam working device |
07/12/1983 | US4393309 Method and apparatus for controlling the objective lens in a scanning electron microscope or the like |
07/12/1983 | US4393308 High current electron source |
07/12/1983 | US4393295 Apparatus and method for engraving with an electron beam |
07/12/1983 | US4393294 Electron beam working apparatus for cylindrical members |
07/12/1983 | US4392939 Magnetron cathode sputtering system |
07/12/1983 | US4392938 Radio frequency etch table with biased extension member |
07/12/1983 | US4392932 Semiconductors etched with plasma |
07/12/1983 | US4392931 Reactive deposition method and apparatus |
07/08/1983 | EP0073189A4 A method of fabricating screen lens array plates. |
07/08/1983 | EP0069728A4 Parallel charged particle beam exposure system. |
07/06/1983 | EP0083246A2 Scanning electron beam exposure system |
07/05/1983 | US4392058 Electron beam lithography |
07/05/1983 | US4392054 Method and apparatus for compensating for astigmatism in electron beam devices |
07/05/1983 | US4391697 High rate magnetron sputtering of high permeability materials |
07/04/1983 | EP0073235A4 Reregistration system for a charged particle beam exposure system. |
06/29/1983 | EP0082640A2 Ion implantation method |
06/29/1983 | EP0082639A2 Processing method using a focused ion beam |
06/28/1983 | US4390789 Electron beam array lithography system employing multiple parallel array optics channels and method of operation |
06/28/1983 | US4390788 Electron beam patterning method and apparatus with correction of deflection distortion |
06/28/1983 | CA1149086A1 Variable-spot raster scanning in an electron beam exposure system |
06/22/1983 | EP0082089A2 Method and apparatus for generating a plasma |
06/21/1983 | US4389573 Pulsed electron beam device comprising a cathode having through holes |
06/21/1983 | US4389572 Two magnet asymmetric doubly achromatic beam deflection system |
06/21/1983 | US4389571 Multiple sextupole system for the correction of third and higher order aberration |
06/21/1983 | US4389299 Sputtering device |
06/15/1983 | EP0081331A1 Vacuum sputtering apparatus |
06/15/1983 | EP0081283A2 Electron beam exposure method and apparatus |
06/15/1983 | EP0081176A1 Apparatus for cathode sputtering of a metal |
06/14/1983 | US4388560 Filament dispenser cathode |
06/08/1983 | EP0080526A1 Method and apparatus for improving the uniformness of patterns generated by electron beam lithography |
06/07/1983 | US4387433 High speed data interface buffer for digitally controlled electron beam exposure system |
06/07/1983 | US4387013 Plasma discharge, cryogenic pump |
06/01/1983 | EP0080170A1 Field-emission-type ion source |
06/01/1983 | EP0079931A1 Focused ion beam microfabrication column. |
05/31/1983 | US4385979 Bonding means such as a silver-epoxy mixture |
05/31/1983 | US4385946 Rapid alteration of ion implant dopant species to create regions of opposite conductivity |
05/24/1983 | US4385317 Specimen image display apparatus |
05/24/1983 | US4385238 Reregistration system for a charged particle beam exposure system |
05/24/1983 | US4384938 Reactive ion etching chamber |
05/17/1983 | US4384208 Electron lens equipped with three magnetic pole pieces |
05/11/1983 | EP0078579A2 Method of using an electron beam |
05/11/1983 | EP0078578A2 Method of using an electron beam |
05/10/1983 | US4383180 Particle beam accelerator |
05/10/1983 | US4383178 System for driving rotary member in vacuum |
05/10/1983 | US4383177 Multipole implantation-isotope separation ion beam source |
05/10/1983 | US4383176 Objective lens for electron microscope |
05/10/1983 | US4382739 Light actuating force elevator drive mechanism |
05/04/1983 | EP0020746B1 Process and apparatus for cleaning wall deposits from a film deposition furnace tube |
05/03/1983 | US4382186 Process and apparatus for converged fine line electron beam treatment of objects |