Patents
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
09/1983
09/20/1983US4405861 Secondary-electron detector for analyzing irradiated samples for scanning electron microscopes and microprobes
09/20/1983US4405436 Magnetic pole shields and target of same ferromagnetic material
09/20/1983US4405406 With dichlorofluoromethane
09/14/1983EP0088663A1 Focusing solenoid, its application and manufacturing process
09/14/1983EP0088463A1 Magnetron cathode sputtering system
09/14/1983EP0088457A2 Charged particle beam apparatus
09/14/1983EP0088396A2 Method and apparatus for adjusting the optical axis of an electron microscope
09/14/1983EP0088074A1 Plasma reactor and method therefor
09/13/1983US4404233 Ion implanting method
09/13/1983US4404077 Integrated sputtering apparatus and method
09/13/1983CA1153733A1 Magnetically enhanced sputtering device including means for sputtering magnetically permeable targets
09/07/1983EP0087767A2 Stroboscopic scanning electron microscope
08/1983
08/31/1983EP0087196A1 Charged particle beam exposure device incorporating beam splitting
08/31/1983EP0087152A2 Secondary electron spectrometer and method of using the same
08/31/1983EP0086816A1 Plasma etching apparatus and method including end point detection.
08/30/1983US4401546 Ferromagnetic high speed sputtering apparatus
08/30/1983US4401539 Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure
08/30/1983US4401507 Method and apparatus for achieving spatially uniform externally excited non-thermal chemical reactions
08/30/1983US4401054 Plasma deposition apparatus
08/30/1983CA1153131A1 Automatic beam correction in a scanning transmission electron microscope
08/24/1983EP0086431A2 Particle beam-generating system and method of using it
08/23/1983US4400622 Electron lens equipment
08/17/1983EP0086120A1 Electron-optical apparatus comprising pyrolytic graphite elements
08/17/1983EP0085745A2 Fine rotation mechanism
08/16/1983US4399365 Ion implant chamber for ion implantation system
08/16/1983US4399360 Transmission electron microscope employing sequential pixel acquistion for display
08/16/1983US4399016 Plasma device comprising an intermediate electrode out of contact with a high frequency electrode to induce electrostatic attraction
08/16/1983US4399014 Plasma reactor and method therefor
08/10/1983EP0085323A2 Electromagnetic lens polepiece structure
08/09/1983US4398132 Electron beam current stabilizing device
08/09/1983US4398079 Machine for working metals using electron beams
08/09/1983US4397885 Method and apparatus for treating fluorescent substance
08/09/1983US4397724 Apparatus and method for plasma-assisted etching of wafers
08/03/1983EP0084971A2 A method for reactive bias sputtering
08/03/1983EP0084970A2 Magnetically enhanced plasma process and apparatus
08/03/1983EP0084850A2 Apparatus for irradiation with charged particle beams
08/03/1983EP0084653A2 Composite concentric-gap magnetic lens
08/02/1983US4396901 Method for correcting deflection distortion in an apparatus for charged particle lithography
08/02/1983US4396861 High voltage lead-through
08/02/1983US4396478 Method of control of chemico-thermal treatment of workpieces in glow discharge and a device for carrying out the method
08/02/1983CA1151320A1 Metal wire cathode for electron beam apparatus
07/1983
07/26/1983US4395691 Beam deflection system
07/26/1983US4395323 Apparatus for improving a sputtering process
07/26/1983CA1150861A1 Apparatus for writing patterns in a layer on a substrate by means of a beam of electrically charged particles
07/19/1983US4394245 Electrode surface plate of soft magnetic material such as iron or an iron alloy
07/19/1983US4394236 Magnetron cathode sputtering apparatus
07/13/1983EP0083413A1 Autofocus arrangement for electron-beam lithographic systems
07/12/1983US4393333 Microwave plasma ion source
07/12/1983US4393312 Variable-spot scanning in an electron beam exposure system
07/12/1983US4393311 Method and apparatus for surface characterization and process control utilizing radiation from desorbed particles
07/12/1983US4393310 Method of and device for adjusting a shaped-electron-beam working device
07/12/1983US4393309 Method and apparatus for controlling the objective lens in a scanning electron microscope or the like
07/12/1983US4393308 High current electron source
07/12/1983US4393295 Apparatus and method for engraving with an electron beam
07/12/1983US4393294 Electron beam working apparatus for cylindrical members
07/12/1983US4392939 Magnetron cathode sputtering system
07/12/1983US4392938 Radio frequency etch table with biased extension member
07/12/1983US4392932 Semiconductors etched with plasma
07/12/1983US4392931 Reactive deposition method and apparatus
07/08/1983EP0073189A4 A method of fabricating screen lens array plates.
07/08/1983EP0069728A4 Parallel charged particle beam exposure system.
07/06/1983EP0083246A2 Scanning electron beam exposure system
07/05/1983US4392058 Electron beam lithography
07/05/1983US4392054 Method and apparatus for compensating for astigmatism in electron beam devices
07/05/1983US4391697 High rate magnetron sputtering of high permeability materials
07/04/1983EP0073235A4 Reregistration system for a charged particle beam exposure system.
06/1983
06/29/1983EP0082640A2 Ion implantation method
06/29/1983EP0082639A2 Processing method using a focused ion beam
06/28/1983US4390789 Electron beam array lithography system employing multiple parallel array optics channels and method of operation
06/28/1983US4390788 Electron beam patterning method and apparatus with correction of deflection distortion
06/28/1983CA1149086A1 Variable-spot raster scanning in an electron beam exposure system
06/22/1983EP0082089A2 Method and apparatus for generating a plasma
06/21/1983US4389573 Pulsed electron beam device comprising a cathode having through holes
06/21/1983US4389572 Two magnet asymmetric doubly achromatic beam deflection system
06/21/1983US4389571 Multiple sextupole system for the correction of third and higher order aberration
06/21/1983US4389299 Sputtering device
06/15/1983EP0081331A1 Vacuum sputtering apparatus
06/15/1983EP0081283A2 Electron beam exposure method and apparatus
06/15/1983EP0081176A1 Apparatus for cathode sputtering of a metal
06/14/1983US4388560 Filament dispenser cathode
06/08/1983EP0080526A1 Method and apparatus for improving the uniformness of patterns generated by electron beam lithography
06/07/1983US4387433 High speed data interface buffer for digitally controlled electron beam exposure system
06/07/1983US4387013 Plasma discharge, cryogenic pump
06/01/1983EP0080170A1 Field-emission-type ion source
06/01/1983EP0079931A1 Focused ion beam microfabrication column.
05/1983
05/31/1983US4385979 Bonding means such as a silver-epoxy mixture
05/31/1983US4385946 Rapid alteration of ion implant dopant species to create regions of opposite conductivity
05/24/1983US4385317 Specimen image display apparatus
05/24/1983US4385238 Reregistration system for a charged particle beam exposure system
05/24/1983US4384938 Reactive ion etching chamber
05/17/1983US4384208 Electron lens equipped with three magnetic pole pieces
05/11/1983EP0078579A2 Method of using an electron beam
05/11/1983EP0078578A2 Method of using an electron beam
05/10/1983US4383180 Particle beam accelerator
05/10/1983US4383178 System for driving rotary member in vacuum
05/10/1983US4383177 Multipole implantation-isotope separation ion beam source
05/10/1983US4383176 Objective lens for electron microscope
05/10/1983US4382739 Light actuating force elevator drive mechanism
05/04/1983EP0020746B1 Process and apparatus for cleaning wall deposits from a film deposition furnace tube
05/03/1983US4382186 Process and apparatus for converged fine line electron beam treatment of objects