Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
12/1981
12/02/1981EP0040855A1 A method of displaying an image of phase contrast in a scanning transmission electron microscope
12/01/1981US4303866 Method and device for mounting pieces inside the vacuum chamber of an electron microscope
12/01/1981US4303864 Sextupole system for the correction of spherical aberration
12/01/1981US4303860 High resolution radiation detector
12/01/1981US4303694 Method and device of deposition through vacuum evaporation making use _of a modulated electron beam and a screen
12/01/1981CA1113425A1 Ion-nitriding apparatus
11/1981
11/26/1981WO1981003345A1 Magnetically enhanced sputter source
11/18/1981EP0040081A2 Method and apparatus for plasma etching
11/18/1981EP0039688A1 Sextupole system for the correction of spherical aberration.
11/17/1981US4301391 Dual discharge plasma device
11/17/1981US4301371 Holding device for electron-microscope specimens
11/12/1981WO1981003253A1 Electron accelerator
11/12/1981WO1981003239A1 Ion implantation apparatus for semiconductor manufacture
11/11/1981EP0039406A2 Process for plasma oxidizing substrates
11/10/1981US4299678 Magnetic target plate for use in magnetron sputtering of magnetic films
11/04/1981EP0038808A1 Ion beam lithography process and apparatus using step-and repeat exposure.
11/03/1981US4298817 Ion-electron source with channel multiplier having a feedback region
11/03/1981US4298803 Process and apparatus for making fine-scale patterns
11/03/1981US4298443 High capacity etching apparatus and method
11/03/1981US4298419 Dry etching apparatus
11/03/1981CA1111801A1 Negative ion extractor
10/1981
10/27/1981US4297676 Mark signal amplifier
10/27/1981US4297162 Convex shape
10/27/1981CA1111575A1 Apparatus and method for reconstructing data
10/27/1981CA1111573A1 Tomographic apparatus and method for reconstructing planar slices from non-absorbed radiation
10/14/1981EP0037568A2 Cassette retaining device of electron beam apparatus
10/14/1981EP0037455A2 Ion source
10/13/1981US4295072 Field emission electron gun with anode heater and plural exhausts
10/13/1981EP0033345A4 High capacity etching apparatus.
10/13/1981CA1110781A1 Electron microscope (comprising an auxiliary lens)
09/1981
09/30/1981EP0036618A1 Peak current electron source
09/29/1981US4292523 Specimen adjustment method and system for a corpuscular beam apparatus
09/29/1981US4292519 Device for contact-free potential measurements
09/29/1981US4292153 Method for processing substrate materials by means of plasma treatment
09/23/1981EP0036061A1 Process and tubular reactor for vapour-phase deposition and for plasma etching
09/22/1981US4291231 Electron beam exposure system and an apparatus for carrying out the same
09/15/1981US4289598 For conditioning multilayer printed circuits
09/15/1981US4289188 Method and apparatus for monitoring etching
09/15/1981CA1109095A1 Sealing system for a movable vacuum chamber of a charged particle beam machine
09/08/1981US4288716 Ion source having improved cathode
09/08/1981US4287851 Mounting and excitation system for reaction in the plasma state
09/02/1981EP0034706A2 Process and apparatus for ion etching or for plasma C.V.D.
09/02/1981EP0034654A1 An apparatus for coating substrates
08/1981
08/25/1981US4286154 Method of detecting a mark by an electron beam and an apparatus therefor
08/25/1981US4285800 Gas plasma reactor for circuit boards and the like
08/20/1981WO1981002365A1 Electron-optical device for electron-sounding instruments
08/19/1981EP0033805A1 An electrostatic lens assembly for a charged particle beam tube and a method of operating the same
08/18/1981US4284490 R.F. Sputtering apparatus including multi-network power supply
08/18/1981US4284489 Power transfer network
08/12/1981EP0033345A1 High capacity etching apparatus.
08/11/1981US4283632 Electron beam aperture device
08/11/1981US4283631 Bean scanning and method of use for ion implantation
08/11/1981US4283630 Irradiated film
08/11/1981US4283627 Electron microscope
08/11/1981US4282924 Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface
08/05/1981EP0033138A1 A method for correcting deflection distortions in an apparatus for charged particle lithography
08/04/1981US4282437 Charged particle beam lithography
08/04/1981US4282083 For producing semiconductor thin films
08/04/1981US4282077 Uniform plasma etching system
07/1981
07/29/1981EP0032709A2 Apparatus and method for the (patterned) coating of a substrate by cathodic sputtering and use thereof
07/21/1981US4280186 Exposure apparatus using electron beams
07/21/1981US4280054 X-Y Work table
07/21/1981US4280049 X-ray spectrometer
07/15/1981EP0032100A2 High pressure and very high temperature ionized gas generator
07/14/1981US4278890 Method and means of directing an ion beam onto an insulating surface for ion implantation or sputtering
07/14/1981US4278380 Lock and elevator arrangement for loading workpieces into the work chamber of an electron beam lithography system
07/14/1981US4277939 Ion beam profile control apparatus and method
07/14/1981CA1105152A1 Control system for deflecting an electron beam
07/09/1981WO1981001937A1 Device for stabilization of electron beam current
07/08/1981EP0031704A2 Improvements in or relating to apparatus for a reative plasma process
07/08/1981EP0031579A2 Method for determining the optimum operative conditions of the electron gun of an electron beam apparatus
07/08/1981EP0031546A2 Ion implantation apparatus
07/07/1981US4277679 Apparatus and method for contact-free potential measurements of an electronic composition
07/07/1981US4277321 Plasma etching to remove adhesive smears from holes
07/07/1981US4277304 Perpendicular magnetic and electrical fields to ionize gas
06/1981
06/30/1981US4276477 Focusing apparatus for uniform application of charged particle beam
06/30/1981CA1104215A1 Method and apparatus for heat treating by means of electron beam
06/30/1981CA1104093A1 Method for fabricating multi-layer optical films
06/23/1981US4275289 Uniformly cooled plasma etching electrode
06/23/1981US4275288 Apparatus for machining material
06/23/1981CA1103813A1 Apparatus for electron beam lithography
06/17/1981EP0030465A1 Electron beam exposing apparatus
06/17/1981EP0030347A2 Electron beam exposure system and apparatus for carrying out the same
06/16/1981US4274035 Field emission electron gun
06/16/1981US4274004 Ion implanter
06/16/1981EP0020746A4 Process and apparatus for cleaning wall deposits from a film deposition furnace tube.
06/10/1981EP0029857A1 Electron beam projecting system
06/09/1981US4272682 Specimen elevator for an ion milling machine
06/09/1981US4272355 Process of bonding sputtering targets to target electrodes
06/09/1981CA1102931A1 Plasma discharge ion source
06/03/1981EP0029693A1 Electron beam welding machine
06/03/1981EP0029604A2 Electron beam engraving process
06/02/1981US4270999 Method and apparatus for gas feed control in a dry etching process
05/1981
05/26/1981US4269653 For electron beams; surrounding a projection on an etched substrate with a high-melting metal and removing the substrate; accuracy
05/13/1981EP0028585A1 Process and device for corpuscular irradiation
05/12/1981US4267456 Electron beam type exposure apparatus
05/12/1981CA1101129A1 Point scattering detector
05/12/1981CA1101076A1 Multiple electron-beam vapor source assembly
05/05/1981US4266128 Electron microscope with optical microscope
05/05/1981US4266111 Apparatus for transferring work through a region of reduced pressure for the performance of an operation thereon
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