| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 05/15/1979 | US4155011 Apparatus for treating substrates with an ion beam |
| 05/15/1979 | CA1054726A1 Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus |
| 05/15/1979 | CA1054682A1 Method and apparatus for controlling brightness and alignment of a beam of charged particles |
| 05/08/1979 | US4153843 Multiple beam exposure system |
| 05/08/1979 | US4153528 Sputter coating |
| 05/08/1979 | US4153005 Multiple electron beam vacuum vapor deposition apparatus |
| 05/08/1979 | CA1053862A1 Vacuum cleaner having automatic filter cleaner |
| 05/01/1979 | US4152599 Method for positioning a workpiece relative to a scanning field or a mask in a charged-particle beam apparatus |
| 05/01/1979 | US4152574 Protective beam catcher for electron beam apparatus |
| 04/24/1979 | US4151422 Electron beam exposure method |
| 04/24/1979 | US4151421 Method for compressing pattern data and data compression processing circuit for radiant beam exposure apparatuses |
| 04/24/1979 | US4151420 Apparatus for the formation of epitaxial layers doped with conductivity-determining impurities by ion deposition |
| 04/24/1979 | US4151418 Multiple crystal holder assembly for wavelength dispersive X-ray spectrometers |
| 04/24/1979 | US4151417 Electron beam exposure apparatus |
| 04/24/1979 | US4151325 Titanium nitride thin films for minimizing multipactoring |
| 04/24/1979 | US4151008 For localized thermal processing |
| 04/17/1979 | US4149923 Apparatus for the treatment of wafer materials by plasma reaction |
| 04/10/1979 | US4149247 Tomographic apparatus and method for reconstructing planar slices from non-absorbed and non-scattered radiation |
| 04/10/1979 | US4149085 Automatic overlay measurements using an electronic beam system as a measurement tool |
| 04/10/1979 | US4149084 Apparatus for maintaining ion bombardment beam under improved vacuum condition |
| 04/10/1979 | US4149074 Detector for a scanning transmission-type electron microscope |
| 04/10/1979 | US4149055 Focusing ion accelerator |
| 04/10/1979 | US4148705 Gas plasma reactor and process |
| 04/04/1979 | EP0001228A1 Improvement in an impulse-modulated electron beam device |
| 04/03/1979 | US4147937 Electron beam exposure system method and apparatus |
| 04/03/1979 | US4147915 Electron-beam apparatus for thermal treatment by electron bombardment |
| 04/03/1979 | CA1052011A2 Stero scanning electron microscopy |
| 03/27/1979 | US4146810 Radiation heated acceleration |
| 03/21/1979 | EP0001042A1 Method and device for corpuscular ray shadow projection exposure |
| 03/20/1979 | US4145615 Electron beam exposure apparatus |
| 03/20/1979 | US4145597 Electron beam lithographic system |
| 03/07/1979 | EP0001030A1 Process for manufacturing a mask according to a given pattern on a support |
| 03/06/1979 | US4143272 Power supply for electron beam guns |
| 03/06/1979 | US4142958 Method for fabricating multi-layer optical films |
| 03/06/1979 | US4142957 Continuous readjustment of glow discharge current based on measurements |
| 02/21/1979 | EP0000843A1 Plasma discharge ion source |
| 02/20/1979 | US4140913 Charged-particle beam optical apparatus for the reduction imaging of a mask on a specimen |
| 02/20/1979 | US4140052 Apparatus for compressing a stack of folded, essentially flat products, especially printed products |
| 02/20/1979 | US4139933 Method for fabricating a scanning electron microscope micrometer scale |
| 02/13/1979 | US4139774 Apparatus for irradiating a specimen by an electron beam |
| 02/13/1979 | US4139772 Plasma discharge ion source |
| 02/13/1979 | US4139668 Film-grid composite substrate for electron microscopy |
| 02/07/1979 | EP0000676A1 Method and apparatus for controlling an electron beam welding generator |
| 02/06/1979 | CA1048163A1 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
| 01/30/1979 | US4137459 Method and apparatus for applying focus correction in E-beam system |
| 01/30/1979 | US4137458 Electron image projection masks |
| 01/30/1979 | US4137457 Method of producing implanted areas in a substrate |
| 01/30/1979 | US4137142 Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylinders |
| 01/23/1979 | US4136285 Method for irradiating a specimen by corpuscular-beam radiation |
| 01/16/1979 | US4135097 Ion implantation apparatus for controlling the surface potential of a target surface |
| 01/16/1979 | US4134817 Electronic components, semiconductors |
| 01/02/1979 | US4132898 Overlapping boundary electron exposure system method and apparatus |
| 01/02/1979 | US4132892 Raster scanning ion microscope with quadrupole mass filter |
| 01/02/1979 | US4132614 Etching by sputtering from an intermetallic target to form negative metallic ions which produce etching of a juxtaposed substrate |
| 01/02/1979 | US4132613 Glow discharge method and apparatus |
| 01/02/1979 | US4132612 Glow discharge method and apparatus |
| 12/26/1978 | US4131753 Multiple electron-beam vapor source assembly |
| 12/19/1978 | US4130762 Arrangement for the automatic heating and adjustment of a treatment temperature for the treatment of workpieces by means of glow discharge |
| 12/19/1978 | US4130761 Electron beam exposure apparatus |
| 12/19/1978 | CA1044818A1 Stereo scanning electron microscopy |
| 12/05/1978 | US4128765 Ion beam machining techniques and apparatus |
| 12/05/1978 | CA1043912A1 Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns |
| 12/05/1978 | CA1043874A1 Floating convection current barrier for evaporation source melts |
| 11/21/1978 | US4126811 Electron gun with linear thermionic cathode for electron-beam heating |
| 11/21/1978 | US4126530 Method and apparatus for sputter cleaning and bias sputtering |
| 11/14/1978 | US4125772 Scanning electron microscope with eddy-current compensation |
| 11/14/1978 | US4125418 Utilization of a substrate alignment marker in epitaxial deposition processes |
| 11/14/1978 | CA1042517A1 Device for producing work pieces perforated by means of electron beams |
| 11/07/1978 | US4124802 Disposal of radioactive waste gases |
| 11/07/1978 | US4124199 Process and apparatus for case hardening of ferrous metal work pieces |
| 10/31/1978 | US4123663 Gas-etching device |
| 10/31/1978 | US4123661 Contrast enhancement of electron beam alignment marks |
| 10/31/1978 | US4123655 Arrangement for preventing the alteration of the primary beam by unwanted particles, such as sputter products, charged ions and electrons and their secondary processes |
| 10/31/1978 | US4123316 Plasma processor |
| 10/24/1978 | US4122347 Ion source |
| 10/24/1978 | CA1041220A1 Field emitting device and method of making same |
| 10/24/1978 | CA1041216A1 Automatic gain control |
| 10/24/1978 | CA1041178A1 Method and apparatus for controlling brightness and alignment of a beam of charges particles |
| 10/17/1978 | US4121128 Collective ion accelerator with foil-less beam extraction window |
| 10/17/1978 | US4121100 Electron microscope |
| 10/10/1978 | US4119881 Ion beam generator having concentrically arranged frustoconical accelerating grids |
| 10/10/1978 | US4119876 Electrode structure for an electric discharge device |
| 10/10/1978 | US4119857 System for programmed drawing by particle bombardment |
| 10/10/1978 | US4119854 Electron beam exposure system |
| 10/10/1978 | US4119688 Electro-lithography method |
| 10/10/1978 | CA1040275A1 Method and system for automatically correcting aberrations of a beam of charged particles |
| 10/03/1978 | US4118630 Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface |
| 10/03/1978 | CA1039860A1 Double chamber ion source |
| 09/26/1978 | US4117340 Electron beam exposure system |
| 09/26/1978 | US4117339 Double deflection electron beam generator for employment in the fabrication of semiconductor and other devices |
| 09/26/1978 | US4117323 Electron microscopes |
| 09/26/1978 | US4117322 Ion scattering spectrometer including cylindrical mirror analyzer and ion gun axially positioned therewithin |
| 09/26/1978 | US4116806 Two-sided planar magnetron sputtering apparatus |
| 09/26/1978 | US4116794 Glow discharge method and apparatus |
| 09/26/1978 | US4116793 Glow discharge method and apparatus |
| 09/26/1978 | US4116791 Method and apparatus for forming a deposit by means of ion plating using a magnetron cathode target as source of coating material |
| 09/26/1978 | CA1039363A1 Ion-plasma gun for ion-milling machine |
| 09/26/1978 | CA1039051A1 Nozzle for energy beam |
| 09/19/1978 | US4115653 Electron beam vaporizer |
| 09/19/1978 | US4115184 Method of plasma etching |