Patents
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
09/1978
09/05/1978US4112305 Method of projecting a beam of charged particles
09/05/1978US4111782 Sputtering apparatus
08/1978
08/29/1978US4110625 Method and apparatus for monitoring the dose of ion implanted into a target by counting emitted X-rays
08/29/1978US4110623 Device for scanning a target with a beam of charged particles
08/29/1978US4110622 Device which makes it possible to effect the programmed tracing of figures which have different shapes
08/29/1978US4110594 Pattern mask generating method and apparatus
08/29/1978US4109922 Sealing device for a vacuum enclosure
08/29/1978CA1037506A1 Workpiece positioning apparatus
08/22/1978US4109157 Apparatus for ion-nitriding
08/22/1978US4109029 High resolution electron beam microfabrication process for fabricating small geometry semiconductor devices
08/22/1978US4108751 Ion beam implantation-sputtering
08/15/1978US4107527 Ion-emission microanalyzer microscope
08/15/1978US4107526 Ion scattering spectrometer with modified bias
08/15/1978CA1036676A1 Self-stabilizing arc heater
08/08/1978US4105890 Device for electron-beam heating of materials
07/1978
07/25/1978US4103168 Electron beam microfabrication apparatus
07/25/1978US4103042 Hot filament, arc type ion source and method
07/18/1978US4101813 Double deflection system for an electron beam device
07/18/1978US4101778 Rod-shaped specimen holder for an optical corpuscular-beam apparatus
07/18/1978US4101772 Ion-beam etching method and an apparatus therefor
07/18/1978US4101411 Plasma etching apparatus
07/11/1978US4100410 Apparatus for selecting the field of view of a sample
07/11/1978US4100055 Target profile for sputtering apparatus
07/04/1978US4099062 Electron beam lithography process
07/04/1978US4099055 Scanning transmission electron microscope
07/04/1978US4099054 Sem having d-c bias of video signal controlled by maximum and/or minimum of crt beam current
06/1978
06/27/1978US4097740 Method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope
06/27/1978US4097739 Beam deflection and focusing system for a scanning corpuscular-beam microscope
06/27/1978US4097714 Thermionic heater cathode assembly of electron-beam gun
06/20/1978US4096386 Light reflecting electrostatic electron lens
06/13/1978US4095112 Device for and a method of calibrating electron-optical apparatus
06/13/1978US4095104 Electron microscope
06/13/1978US4095083 Electron-beam apparatus for thermal treatment by electron bombardment
06/13/1978US4094764 Device for cathodic sputtering at a high deposition rate
06/13/1978US4094762 Glow discharge ionization of material, implanting ions in container wall
06/13/1978US4094761 Magnetion sputtering of ferromagnetic material
06/13/1978US4094722 Semiconductors
05/1978
05/30/1978US4092516 Sealing device for a vacuum enclosure
05/23/1978US4091374 Method for pictorially displaying output information generated by an object imaging apparatus
05/16/1978US4090253 Mobile ion film memory
05/16/1978US4090106 Field emision electron gun with controlled power supply
05/16/1978US4090077 Particle beam device with a deflection system and a stigmator
05/16/1978US4090056 Optical viewing system for an electron beam welder
05/09/1978US4088919 Ion source including a pointed solid electrode and reservoir of liquid material
05/02/1978US4087729 Position finely adjusting apparatus
05/02/1978US4087720 Multi-beam, multi-aperture ion sources of the beam-plasma type
04/1978
04/25/1978US4086491 Direct measurement of the electron beam of a scanning electron microscope
04/18/1978US4085330 Focused ion beam mask maker
04/18/1978US4085022 Method and apparatus for controlling the removal, by means of ion etching, of a thin layer from a substrate
04/11/1978US4084095 Electron beam column generator for the fabrication of semiconductor devices
04/11/1978US4084077 Cathode assembly of electron beam welding gun
04/11/1978US4084076 Electron beam welding gun
04/04/1978US4082958 Apparatus involving pulsed electron beam processing of semiconductor devices
04/04/1978US4082938 Thermionic heater cathode assembly of electron-beam gun
04/04/1978US4082937 Cathode assembly of electron beam welding gun
03/1978
03/21/1978US4080550 Method and apparatus for projecting solids-containing gaseous media into an arc discharge
03/21/1978US4080546 Beam splitter for electron beam machines
03/21/1978US4080526 Electron beam machining apparatus of the dynamic seal type
02/1978
02/21/1978US4075497 Electron-optically radiatable structure
02/21/1978US4075488 Pattern forming apparatus using quadrupole lenses
02/21/1978US4075302 Apparatus for gripping and holding small workpieces
02/14/1978US4074139 Apparatus and method for maskless ion implantation
02/14/1978US4073990 Apparatus for adjusting a semiconductor wafer by electron beam illumination
02/14/1978US4073669 Plasma etching
02/07/1978US4072844 Apparatus for electron beam machining in vacuum
02/07/1978US4072356 Electron beam welding generators
01/1978
01/31/1978US4071766 Micro-chamber for electron optical examinations particularly for the electron microscopic examination of biological objects
01/31/1978US4071765 Electron microscope
01/31/1978US4071759 Scanning electron device
01/24/1978US4070264 R. F. sputtering method and apparatus
01/17/1978US4068381 Scanning electron microscope micrometer scale and method for fabricating same
01/10/1978US4068123 Scanning electron microscope
01/10/1978US4068112 Valve for an electron bombardment welding machine and machine fitted with such valve
01/03/1978US4066971 Voltage regulator circuit for an electron microscope
01/03/1978US4066905 Particle beam apparatus with zones of different pressure
01/03/1978US4066863 Method and system for automatically correcting aberrations of a beam of charged particles
01/03/1978US4066491 Method of simultaneously etching multiple tapered viaducts in semiconductor material
01/03/1978US4066458 Mask-exposure scheme
12/1977
12/20/1977USRE29500 Scanning charged beam particle beam microscope
12/20/1977US4064352 Electron beam evaporator having beam spot control
12/13/1977US4063103 Electron beam exposure apparatus
12/13/1977US4063091 High speed switching circuit
12/06/1977US4061871 Electron gun for heating, melting and vaporizing purposes, with deflection systems
11/1977
11/29/1977US4060470 Sputtering apparatus and method
11/22/1977US4059783 Field emission apparatus
11/15/1977US4058731 Specimen holder for a corpuscular-beam apparatus
11/15/1977US4058697 Electron beam unit for heat treatment by electron bombardment technique
11/15/1977US4058667 Ion protected linear electron beam metal evaporator
11/08/1977US4057746 Demountable high power electron beam gun
11/08/1977US4057722 Method and apparatus for the generation of distortion-free images with electron microscope
11/01/1977US4056730 Apparatus for detecting registration marks on a target such as a semiconductor wafer
11/01/1977US4056704 Process and apparatus for heating gases
10/1977
10/11/1977US4053808 Electron beam collimator
10/04/1977US4052633 Restorable cold cathode in a gas discharge electron gun
09/1977
09/27/1977US4051405 Method for controlling low-energy high current density electron beams
09/27/1977US4051382 Activated gas reaction apparatus
09/27/1977US4051381 Device for the programmed tracing of designs by particle bombardment
09/13/1977US4048534 Radial flow electron gun
09/13/1977US4048498 Scanning auger microprobe with variable axial aperture
09/13/1977US4047999 Method of making a mobile ion film memory