Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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09/05/1978 | US4112305 Method of projecting a beam of charged particles |
09/05/1978 | US4111782 Sputtering apparatus |
08/29/1978 | US4110625 Method and apparatus for monitoring the dose of ion implanted into a target by counting emitted X-rays |
08/29/1978 | US4110623 Device for scanning a target with a beam of charged particles |
08/29/1978 | US4110622 Device which makes it possible to effect the programmed tracing of figures which have different shapes |
08/29/1978 | US4110594 Pattern mask generating method and apparatus |
08/29/1978 | US4109922 Sealing device for a vacuum enclosure |
08/29/1978 | CA1037506A1 Workpiece positioning apparatus |
08/22/1978 | US4109157 Apparatus for ion-nitriding |
08/22/1978 | US4109029 High resolution electron beam microfabrication process for fabricating small geometry semiconductor devices |
08/22/1978 | US4108751 Ion beam implantation-sputtering |
08/15/1978 | US4107527 Ion-emission microanalyzer microscope |
08/15/1978 | US4107526 Ion scattering spectrometer with modified bias |
08/15/1978 | CA1036676A1 Self-stabilizing arc heater |
08/08/1978 | US4105890 Device for electron-beam heating of materials |
07/25/1978 | US4103168 Electron beam microfabrication apparatus |
07/25/1978 | US4103042 Hot filament, arc type ion source and method |
07/18/1978 | US4101813 Double deflection system for an electron beam device |
07/18/1978 | US4101778 Rod-shaped specimen holder for an optical corpuscular-beam apparatus |
07/18/1978 | US4101772 Ion-beam etching method and an apparatus therefor |
07/18/1978 | US4101411 Plasma etching apparatus |
07/11/1978 | US4100410 Apparatus for selecting the field of view of a sample |
07/11/1978 | US4100055 Target profile for sputtering apparatus |
07/04/1978 | US4099062 Electron beam lithography process |
07/04/1978 | US4099055 Scanning transmission electron microscope |
07/04/1978 | US4099054 Sem having d-c bias of video signal controlled by maximum and/or minimum of crt beam current |
06/27/1978 | US4097740 Method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope |
06/27/1978 | US4097739 Beam deflection and focusing system for a scanning corpuscular-beam microscope |
06/27/1978 | US4097714 Thermionic heater cathode assembly of electron-beam gun |
06/20/1978 | US4096386 Light reflecting electrostatic electron lens |
06/13/1978 | US4095112 Device for and a method of calibrating electron-optical apparatus |
06/13/1978 | US4095104 Electron microscope |
06/13/1978 | US4095083 Electron-beam apparatus for thermal treatment by electron bombardment |
06/13/1978 | US4094764 Device for cathodic sputtering at a high deposition rate |
06/13/1978 | US4094762 Glow discharge ionization of material, implanting ions in container wall |
06/13/1978 | US4094761 Magnetion sputtering of ferromagnetic material |
06/13/1978 | US4094722 Semiconductors |
05/30/1978 | US4092516 Sealing device for a vacuum enclosure |
05/23/1978 | US4091374 Method for pictorially displaying output information generated by an object imaging apparatus |
05/16/1978 | US4090253 Mobile ion film memory |
05/16/1978 | US4090106 Field emision electron gun with controlled power supply |
05/16/1978 | US4090077 Particle beam device with a deflection system and a stigmator |
05/16/1978 | US4090056 Optical viewing system for an electron beam welder |
05/09/1978 | US4088919 Ion source including a pointed solid electrode and reservoir of liquid material |
05/02/1978 | US4087729 Position finely adjusting apparatus |
05/02/1978 | US4087720 Multi-beam, multi-aperture ion sources of the beam-plasma type |
04/25/1978 | US4086491 Direct measurement of the electron beam of a scanning electron microscope |
04/18/1978 | US4085330 Focused ion beam mask maker |
04/18/1978 | US4085022 Method and apparatus for controlling the removal, by means of ion etching, of a thin layer from a substrate |
04/11/1978 | US4084095 Electron beam column generator for the fabrication of semiconductor devices |
04/11/1978 | US4084077 Cathode assembly of electron beam welding gun |
04/11/1978 | US4084076 Electron beam welding gun |
04/04/1978 | US4082958 Apparatus involving pulsed electron beam processing of semiconductor devices |
04/04/1978 | US4082938 Thermionic heater cathode assembly of electron-beam gun |
04/04/1978 | US4082937 Cathode assembly of electron beam welding gun |
03/21/1978 | US4080550 Method and apparatus for projecting solids-containing gaseous media into an arc discharge |
03/21/1978 | US4080546 Beam splitter for electron beam machines |
03/21/1978 | US4080526 Electron beam machining apparatus of the dynamic seal type |
02/21/1978 | US4075497 Electron-optically radiatable structure |
02/21/1978 | US4075488 Pattern forming apparatus using quadrupole lenses |
02/21/1978 | US4075302 Apparatus for gripping and holding small workpieces |
02/14/1978 | US4074139 Apparatus and method for maskless ion implantation |
02/14/1978 | US4073990 Apparatus for adjusting a semiconductor wafer by electron beam illumination |
02/14/1978 | US4073669 Plasma etching |
02/07/1978 | US4072844 Apparatus for electron beam machining in vacuum |
02/07/1978 | US4072356 Electron beam welding generators |
01/31/1978 | US4071766 Micro-chamber for electron optical examinations particularly for the electron microscopic examination of biological objects |
01/31/1978 | US4071765 Electron microscope |
01/31/1978 | US4071759 Scanning electron device |
01/24/1978 | US4070264 R. F. sputtering method and apparatus |
01/17/1978 | US4068381 Scanning electron microscope micrometer scale and method for fabricating same |
01/10/1978 | US4068123 Scanning electron microscope |
01/10/1978 | US4068112 Valve for an electron bombardment welding machine and machine fitted with such valve |
01/03/1978 | US4066971 Voltage regulator circuit for an electron microscope |
01/03/1978 | US4066905 Particle beam apparatus with zones of different pressure |
01/03/1978 | US4066863 Method and system for automatically correcting aberrations of a beam of charged particles |
01/03/1978 | US4066491 Method of simultaneously etching multiple tapered viaducts in semiconductor material |
01/03/1978 | US4066458 Mask-exposure scheme |
12/20/1977 | USRE29500 Scanning charged beam particle beam microscope |
12/20/1977 | US4064352 Electron beam evaporator having beam spot control |
12/13/1977 | US4063103 Electron beam exposure apparatus |
12/13/1977 | US4063091 High speed switching circuit |
12/06/1977 | US4061871 Electron gun for heating, melting and vaporizing purposes, with deflection systems |
11/29/1977 | US4060470 Sputtering apparatus and method |
11/22/1977 | US4059783 Field emission apparatus |
11/15/1977 | US4058731 Specimen holder for a corpuscular-beam apparatus |
11/15/1977 | US4058697 Electron beam unit for heat treatment by electron bombardment technique |
11/15/1977 | US4058667 Ion protected linear electron beam metal evaporator |
11/08/1977 | US4057746 Demountable high power electron beam gun |
11/08/1977 | US4057722 Method and apparatus for the generation of distortion-free images with electron microscope |
11/01/1977 | US4056730 Apparatus for detecting registration marks on a target such as a semiconductor wafer |
11/01/1977 | US4056704 Process and apparatus for heating gases |
10/11/1977 | US4053808 Electron beam collimator |
10/04/1977 | US4052633 Restorable cold cathode in a gas discharge electron gun |
09/27/1977 | US4051405 Method for controlling low-energy high current density electron beams |
09/27/1977 | US4051382 Activated gas reaction apparatus |
09/27/1977 | US4051381 Device for the programmed tracing of designs by particle bombardment |
09/13/1977 | US4048534 Radial flow electron gun |
09/13/1977 | US4048498 Scanning auger microprobe with variable axial aperture |
09/13/1977 | US4047999 Method of making a mobile ion film memory |