| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 05/03/1983 | US4382182 Method of displaying an image of phase contrast in a scanning transmission electron microscope |
| 05/03/1983 | US4382100 Application of a layer of carbonaceous material to a surface |
| 05/03/1983 | US4381965 Multi-planar electrode plasma etching |
| 04/27/1983 | EP0077738A1 Ion source having a gas ionization chamber with oscillations of electrons |
| 04/27/1983 | EP0077417A1 Highly stabilized beam generator for charged particles |
| 04/26/1983 | US4381453 System and method for deflecting and focusing a broad ion beam |
| 04/26/1983 | CA1145415A1 Leachable backer for electron beam hole drilling |
| 04/26/1983 | CA1145374A1 Wide ranging inflatable seal |
| 04/20/1983 | EP0076868A1 Electron beam engraving method and apparatus for carrying it out |
| 04/19/1983 | US4380703 Method and device for the regulation of a magnetic deflection system |
| 04/13/1983 | EP0076566A1 Gasborne stage positioner for two directions X and Y |
| 04/06/1983 | EP0076107A2 Scanning electron beam exposure system |
| 04/06/1983 | EP0075949A2 Ion beam processing apparatus and method of correcting mask defects |
| 04/06/1983 | EP0075716A1 Opposing field spectrometer for electron beam measuring |
| 04/06/1983 | EP0075712A2 Electron optical system for producing a shaped electron beam with variable cross-section in particular for producing microstructures |
| 04/06/1983 | EP0075710A1 Scanning method for the determination of a potential in the electron-beam measuring technique |
| 04/06/1983 | EP0075709A2 Spectrometer for detecting secondary electrons produced by an electron probe from a target |
| 04/06/1983 | EP0075708A2 Direct heated cathode with filament heating control in electron beam equipments and method for operating the same |
| 04/06/1983 | EP0067987A4 Planar vacuum seal for isolating an air bearing. |
| 04/05/1983 | US4379231 Electron microscope |
| 04/05/1983 | US4379230 Automatic beam correction in a scanning transmission electron microscope |
| 03/31/1983 | WO1983001075A1 Plasma reactor and method therefor |
| 03/30/1983 | EP0075504A1 Angle limitation device in a charged-particles beam system |
| 03/29/1983 | CA1143839A1 Two magnet asymmetric doubly achromatic beam deflection system |
| 03/22/1983 | US4377436 Plasma-assisted etch process with endpoint detection |
| 03/22/1983 | US4377169 Ion beam sputter-etched ventricular catheter for hydrocephalus shunt |
| 03/17/1983 | WO1983000921A1 Method and apparatus for image formation |
| 03/16/1983 | EP0074238A2 Exposure method utilising an energy beam |
| 03/16/1983 | EP0073963A2 Inductively coupled discharge for plasma etching and resist stripping |
| 03/15/1983 | US4376891 Method and apparatus for producing electron beam diffraction patterns |
| 03/15/1983 | CA1143005A1 Rf sputtering apparatus including multi-network power supply |
| 03/09/1983 | EP0073658A2 Electron beam exposing method |
| 03/09/1983 | EP0073643A1 Sputtering apparatus |
| 03/09/1983 | EP0073235A1 Reregistration system for a charged particle beam exposure system |
| 03/09/1983 | EP0073189A1 A method of fabricating screen lens array plates |
| 03/08/1983 | US4376249 Variable axis electron beam projection system |
| 03/08/1983 | US4376025 Cylindrical cathode for magnetically-enhanced sputtering |
| 03/03/1983 | WO1983000660A1 Gas etching system including end point detection |
| 02/23/1983 | EP0072740A1 Extensible modular vacuum chamber |
| 02/23/1983 | EP0072618A2 A dry etching apparatus |
| 02/22/1983 | US4375051 Automatic impedance matching between source and load |
| 02/22/1983 | US4374722 Cathodic sputtering target including means for detecting target piercing |
| 02/22/1983 | CA1141704A1 Magnetically enhanced sputtering device |
| 02/16/1983 | EP0071753A2 Apparatus for accurately imaging information on a film by acharged particle beam |
| 02/16/1983 | EP0071666A1 Electric travelling support |
| 02/15/1983 | US4374327 Device for indicating specimen stage positions in an electron microscope |
| 02/15/1983 | CA1141481A1 Scanning electron microscope |
| 02/15/1983 | CA1141420A1 Method and apparatus for electrolytic sharpening of a filament |
| 02/09/1983 | EP0071243A2 Process and device to correct the alignment of an electron beam |
| 02/09/1983 | EP0070982A2 Sputtering system |
| 02/01/1983 | US4371787 Ion-nitriding apparatus |
| 02/01/1983 | US4371774 High power linear pulsed beam annealer |
| 02/01/1983 | US4371412 Dry etching apparatus |
| 01/26/1983 | EP0070574A1 Film forming method |
| 01/26/1983 | EP0070351A2 Conductive sample holder for analysis in the secondary ion mass spectrometry |
| 01/25/1983 | US4370554 Alignment system for particle beam lithography |
| 01/25/1983 | US4370217 Target assembly comprising, for use in a magnetron-type sputtering device, a magnetic target plate and permanent magnet pieces |
| 01/25/1983 | CA1140269A1 Sextupole system for the correction of spherical aberration |
| 01/25/1983 | CA1140197A1 Unipotential lens assembly for charged particle beam tubes and method for applying correction potentials thereto |
| 01/19/1983 | EP0069823A1 Process and apparatus for the mutual positioning (registration) of objects in X-ray and ion beam lithography |
| 01/19/1983 | EP0069750A1 Emission-electron microscope. |
| 01/19/1983 | EP0069728A1 Parallel charged particle beam exposure system |
| 01/18/1983 | US4369370 Method for producing nuclear traces or microholes originating from nuclear traces of an individual ion |
| 01/18/1983 | CA1139897A1 High resolution radiation detector |
| 01/14/1983 | EP0060257A4 Method for surface hardening cams. |
| 01/11/1983 | US4368092 A coil of a material such as silver or copper, and interior cylinder walls of polished plating such as silver |
| 01/11/1983 | US4367914 Microscope equipped with a micro manipulator |
| 01/11/1983 | CA1139457A1 Detector for a electron microscope |
| 01/05/1983 | EP0068896A2 Image distortion-free, image rotation-free electron microscope |
| 01/05/1983 | EP0068791A2 Electron beam control device for electron microscopes |
| 01/05/1983 | EP0068636A1 Insulator for glow discharge apparatus |
| 01/05/1983 | EP0068600A2 A method of forming an aligned assembly of a plurality of planar members and an aligned assembly produced thereby |
| 01/05/1983 | EP0068155A2 Etch end point detector in reactive ion etching systems |
| 01/05/1983 | EP0067987A1 Planar vacuum seal for isolating an air bearing |
| 01/04/1983 | US4367429 Alloys for liquid metal ion sources |
| 01/04/1983 | US4367412 Process of and apparatus for cold-cathode electron-beam generation for sterilization of surfaces and similar applications |
| 01/04/1983 | US4367411 Unitary electromagnet for double deflection scanning of charged particle beam |
| 01/04/1983 | US4367114 High speed plasma etching system |
| 12/28/1982 | US4366383 Electron beam type pattern transfer apparatus |
| 12/23/1982 | WO1982004498A1 Semiconductor processing involving ion implantation |
| 12/22/1982 | EP0067705A2 Wafer transport system |
| 12/22/1982 | EP0067450A2 Power source device for arc discharge ion sources |
| 12/21/1982 | US4365163 Pattern inspection tool - method and apparatus |
| 12/15/1982 | EP0066883A2 Exposure method with electron beam exposure apparatus |
| 12/15/1982 | EP0066882A2 Electron beam exposure system |
| 12/15/1982 | EP0066705A1 Single crystal lanthanum hexaboride cathode suitable for thermionic emission of a shaped electron beam with uniform intensity distribution |
| 12/15/1982 | EP0066685A1 Ion beam Sputter-etched ventricular catheter for hydrocephalus shunt |
| 12/14/1982 | US4363995 Cathode of single crystal lanthanum hexaboride |
| 12/14/1982 | US4363953 Electron beam scribing method |
| 12/14/1982 | CA1137633A1 Mark signal amplifier |
| 12/14/1982 | CA1137268A1 Process for the treatment of aromatic polyamide fibers, which are suitable for use in construction materials and rubbers, as well as so treated fibers and shaped articles strengthened with these fibers |
| 12/09/1982 | WO1982004351A1 Focused ion beam microfabrication column |
| 12/09/1982 | WO1982004350A1 Filament dispenser cathode |
| 12/08/1982 | EP0066474A2 Dispenser for ion source |
| 12/08/1982 | EP0066409A1 Charged particle source |
| 12/08/1982 | EP0066404A2 Multi-channel electron beam accessed lithography apparatus and method of operating the same |
| 12/08/1982 | EP0066288A1 Method for ion-implanting metal elements |
| 12/08/1982 | EP0066243A2 Electron-beam image transfer device |
| 12/08/1982 | EP0066175A1 Ion implanter |
| 12/08/1982 | EP0066088A2 Perforated anode for use in reactive ion etching apparatus |