| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 11/12/1985 | CA1196599A1 Magnetically enhanced plasma process and apparatus |
| 11/07/1985 | WO1985004983A1 Process and arrangement to irradiate solid state materials with ions |
| 11/06/1985 | EP0160365A1 Method of making amorphous semiconductor alloys and devices using microwave energy |
| 11/06/1985 | EP0160034A1 Method and apparatus for fabricating devices using reactive ion etching |
| 11/05/1985 | US4551844 Demodulation of vapor density |
| 11/05/1985 | US4551650 Field-emission ion source with spiral shaped filament heater |
| 11/05/1985 | US4551625 Spectrometer objective for particle beam measurement technique |
| 11/05/1985 | US4551599 Combined electrostatic objective and emission lens |
| 11/05/1985 | US4551221 Consumable electrode, specifically designed solenoid |
| 11/05/1985 | US4550578 Apparatus for low-temperature plasma treatment of a textile product |
| 10/29/1985 | US4550258 Aperture structure for charged beam exposure |
| 10/29/1985 | US4550257 Narrow line width pattern fabrication |
| 10/29/1985 | CA1195951A1 Shaped field magnetron electrode |
| 10/24/1985 | WO1985004757A1 Secondary electron detector |
| 10/24/1985 | EP0151588A4 Electron emission system. |
| 10/23/1985 | EP0159214A1 Electron beam installation for the working of metals |
| 10/23/1985 | EP0158972A2 Method and apparatus for the vaporisation of a material in a vacuum chamber by an arc discharge |
| 10/23/1985 | EP0158970A1 Nonthermionic hollow anode gas discharge electron beam source |
| 10/23/1985 | EP0158800A2 Vacuum-to-vacuum entry system apparatus |
| 10/22/1985 | US4549082 Synthetic plasma ion source |
| 10/16/1985 | EP0158483A2 Tank for use in specimen treatment apparatus |
| 10/16/1985 | EP0158139A1 Error-corrected corpuscular beam lithography |
| 10/15/1985 | US4547669 Electron beam scanning device |
| 10/15/1985 | US4547279 Preventing bumping or boiling of target material; magnetron type |
| 10/15/1985 | US4547248 Automatic shutoff valve |
| 10/15/1985 | US4547247 Single wafer, planar electrode type |
| 10/15/1985 | US4546897 Inert atmosphere transfer vessel |
| 10/09/1985 | EP0157457A2 Electron image projector |
| 10/09/1985 | EP0156913A1 Ion microbeam implanting apparatus |
| 10/08/1985 | US4546260 System of aligning a scanning beam to a pattern |
| 10/08/1985 | US4546258 Charged particle beam apparatus |
| 10/08/1985 | US4546254 Charged particle energy analyzer |
| 10/08/1985 | US4545882 Providing a coating of detectable material underlying coating material |
| 10/08/1985 | US4545328 Plasma vapor deposition film forming apparatus |
| 10/02/1985 | EP0156473A2 Electron-impact type of ion source |
| 10/02/1985 | EP0156007A1 Particle accelerating electrode |
| 10/02/1985 | EP0156006A1 Process for automatically adjusting the operating point of corpuscular radiation-measuring apparatuses during signal structure measurement |
| 10/02/1985 | EP0156005A1 Process for automatically adjusting the voltage-resolution of a corpuscular radiation-measuring apparatus, and device therefor |
| 10/02/1985 | EP0060257B1 Method for surface hardening cams |
| 10/01/1985 | US4544847 Multi-gap magnetic imaging lens for charged particle beams |
| 10/01/1985 | US4544846 Variable axis immersion lens electron beam projection system |
| 10/01/1985 | US4544845 Electron gun with a field emission cathode and a magnetic lens |
| 10/01/1985 | US4544317 Vacuum-to-vacuum entry system apparatus |
| 10/01/1985 | CA1194617A1 Grooved gas gate |
| 09/26/1985 | WO1985004250A1 Method and apparatus for precision sem measurements |
| 09/25/1985 | EP0155875A1 Device for producing ions of a specified kind, using energy selection for separating them from other ions; application to ion implantation |
| 09/25/1985 | EP0155700A2 Apparatus for quantitative secondary ion mass spectrometry |
| 09/25/1985 | EP0155687A2 Method of forming inspection patterns |
| 09/25/1985 | EP0155283A1 Focused ion beam column. |
| 09/24/1985 | US4543512 Electron beam exposure system |
| 09/24/1985 | US4543509 Off-axis electron gun |
| 09/24/1985 | US4543487 Procedure and means for creating an electron curtain with adjustable intensity distribution |
| 09/24/1985 | US4543465 Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase |
| 09/24/1985 | US4543267 Method of making a non-single-crystalline semi-conductor layer on a substrate |
| 09/24/1985 | CA1194082A1 Cathode ray tube with semiconductor cathode having deflection electrodes |
| 09/24/1985 | CA1193998A1 Magnetron cathode sputtering system |
| 09/18/1985 | EP0155247A2 A method for microphotometering microscope specimens |
| 09/18/1985 | EP0155178A2 A coating film and method and apparatus for producing the same |
| 09/18/1985 | EP0154859A1 Apparatus for vacuum deposition |
| 09/18/1985 | EP0154824A2 Ion Source |
| 09/17/1985 | US4542321 Inverted magnetron ion source |
| 09/17/1985 | US4542298 Methods and apparatus for gas-assisted thermal transfer with a semiconductor wafer |
| 09/17/1985 | US4542293 Process and apparatus for changing the energy of charged particles contained in a gaseous medium |
| 09/17/1985 | US4541890 Hall ion generator for working surfaces with a low energy high intensity ion beam |
| 09/17/1985 | CA1193755A1 Electron-emmiting semiconductor device |
| 09/17/1985 | CA1193494A1 Method of and apparatus for the vapor deposition of material upon a substrate |
| 09/12/1985 | WO1985004046A1 Scan controller for ion implanter device |
| 09/12/1985 | WO1985003954A1 Controlled vacuum arc material deposition, method and apparatus |
| 09/11/1985 | EP0154160A1 Method and apparatus for making electrophotographic devices |
| 09/11/1985 | EP0154078A2 Plasma treatment apparatus |
| 09/11/1985 | EP0153963A1 Device for the observation of diffracted electrons |
| 09/10/1985 | US4540885 Spectrometer objective having parallel objective fields and spectrometer fields for the potential measuring technique |
| 09/10/1985 | US4539934 Plasma vapor deposition film forming apparatus |
| 09/10/1985 | US4539835 Calibration apparatus for capacitance height gauges |
| 09/10/1985 | CA1193227A1 Magnetron sputtering apparatus |
| 09/04/1985 | EP0153864A2 A method of electron beam exposure |
| 09/03/1985 | US4539477 Method and apparatus for suppressing disturbances in the measurement of signals with a particle probe |
| 09/03/1985 | US4539217 Dose control method |
| 09/03/1985 | US4539089 Desorption of atoms from tip to substrate under strong electric field |
| 08/29/1985 | WO1985003803A1 Film forming method and apparatus |
| 08/28/1985 | EP0152511A1 Apparatus and method for plasma treatment of resin material |
| 08/28/1985 | EP0152502A1 Device for the examination of crystal surfaces according to the LEED-technique |
| 08/28/1985 | EP0152501A1 Device for measuring the angular distribution of charged particles diffracted on a sample surface |
| 08/28/1985 | EP0152472A1 Rotatable sputtering apparatus |
| 08/27/1985 | US4538232 Electron-beam lithographic apparatus |
| 08/27/1985 | US4538127 Magnetic quadripole |
| 08/27/1985 | US4538069 Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus |
| 08/27/1985 | US4538067 Single grid focussed ion beam source |
| 08/27/1985 | US4538065 Stroboscopic scanning electron microscope |
| 08/27/1985 | US4537795 Method for introducing sweep gases into a glow discharge deposition apparatus |
| 08/27/1985 | US4537794 Method of coating ceramics |
| 08/27/1985 | US4537477 Scanning electron microscope with an optical microscope |
| 08/27/1985 | US4537244 Method for optimum conductive heat transfer with a thin flexible workpiece |
| 08/21/1985 | EP0151947A2 Method of plasma etching |
| 08/21/1985 | EP0151811A2 Method for maskless ion implantation |
| 08/21/1985 | EP0151588A1 Electron emission system. |
| 08/20/1985 | US4536657 Process and apparatus for obtaining beams of particles with a spatially modulated density |
| 08/20/1985 | US4536640 High pressure, non-logical thermal equilibrium arc plasma generating apparatus for deposition of coatings upon substrates |
| 08/20/1985 | US4535835 Optimum surface contour for conductive heat transfer with a thin flexible workpiece |
| 08/20/1985 | US4535834 Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system |