| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 02/12/1980 | CA1071579A1 End point control in plasma etching |
| 02/05/1980 | US4187124 Process for doping semiconductors |
| 01/29/1980 | US4186305 High-temperature microscope |
| 01/23/1980 | EP0007115A1 Metal piece, the surface of which can take an unwanted electrostatic charge, and its application |
| 01/23/1980 | EP0006985A1 Method and device for the determination of the focal length of electrooptical lenses of long focal length |
| 01/22/1980 | CA1070440A1 Electron beam collimator |
| 01/15/1980 | US4184188 Substrate clamping technique in IC fabrication processes |
| 01/15/1980 | US4183797 Two-sided bias sputter deposition method and apparatus |
| 01/09/1980 | EP0006701A1 A process for channelling ion beams |
| 01/09/1980 | EP0006475A1 Apparatus for coating workpieces by cathodic sputtering |
| 01/09/1980 | EP0006437A1 Method and device for adjusting and correcting the aberrations of an electrooptical condensor in a microprojector |
| 01/09/1980 | EP0006275A1 A process for the treatment of aromatic polyamide fibers, which are suitable for use in construction materials and rubbers, as well as so treated fibers and shaped articles strengthened with these fibers |
| 01/08/1980 | US4182958 Method and apparatus for projecting a beam of electrically charged particles |
| 01/01/1980 | US4181860 Radiant beam exposure method |
| 12/25/1979 | US4180738 Astigmatism in electron beam probe instruments |
| 12/25/1979 | US4180450 Planar magnetron sputtering device |
| 12/18/1979 | US4179609 Point scattering detector |
| 12/18/1979 | US4179605 Cold trap for electron microscope |
| 12/18/1979 | US4179604 Electron collector for forming low-loss electron images |
| 12/18/1979 | US4179351 Cylindrical magnetron sputtering source |
| 12/18/1979 | US4179316 Electron beam |
| 12/18/1979 | US4179312 Formation of epitaxial layers doped with conductivity-determining impurities by ion deposition |
| 12/18/1979 | US4178877 Apparatus for plasma treatment of semiconductor materials |
| 12/11/1979 | US4178465 Processes for preparing perfluoropolyether oils of very high purity and low volatility |
| 12/04/1979 | US4177404 Arc detector for glow discharges |
| 12/04/1979 | US4177379 Back-scattered electron detector for use in an electron microscope or electron beam exposure system to detect back-scattered electrons |
| 12/04/1979 | CA1067624A1 System for monitoring the position, intensity, uniformity and directivity of a beam of ionizing radiation |
| 11/28/1979 | EP0005641A1 Method and apparatus for monitoring and controlling sputter deposition processes |
| 11/28/1979 | EP0005460A1 Apparatus for material treatment |
| 11/20/1979 | US4175235 Apparatus for the plasma treatment of semiconductors |
| 11/20/1979 | US4175030 Two-sided planar magnetron sputtering apparatus |
| 11/20/1979 | US4175029 Apparatus for ion plasma coating of articles |
| 11/15/1979 | WO1979000900A1 Low-density pattern in a photoresist |
| 11/13/1979 | CA1066431A1 Semiconductor device manufacture |
| 10/23/1979 | US4172020 Method and apparatus for monitoring and controlling sputter deposition processes |
| 10/23/1979 | CA1064862A1 Gas discharge apparatus |
| 10/17/1979 | EP0004751A2 Electrical discharge heating device and method of heating using such |
| 10/16/1979 | US4171462 Linear electron beam gun evaporator having uniform electron emission |
| 10/16/1979 | CA1064540A1 Sealing device for a vacuum enclosure |
| 10/09/1979 | US4170737 Top-entry transmission electron microscope |
| 09/25/1979 | US4169240 Automatic focussing systems |
| 09/25/1979 | US4169230 Method of exposure by means of corpuscular beam shadow printing |
| 09/25/1979 | US4169229 Apparatus for keying in electron beams |
| 09/25/1979 | US4169031 Magnetron sputter cathode assembly |
| 09/25/1979 | CA1063255A1 Semiconductor wafer alignment marks for use with electron beams |
| 09/19/1979 | EP0004064A2 Apparatus in an ion microprobe for concentrating the primary ion beam |
| 09/18/1979 | US4168434 Long focal length magnetic lens for the optical imaging of a specimen having a large surface area |
| 09/11/1979 | US4167676 Variable-spot scanning in an electron beam exposure system |
| 09/06/1979 | WO1979000645A1 Variable-spot scanning in an electron beam exposure system |
| 09/04/1979 | US4166783 Deposition rate regulation by computer control of sputtering systems |
| 08/28/1979 | US4166018 Sputtering process and apparatus |
| 08/28/1979 | CA1061477A1 Electron microscope |
| 08/28/1979 | CA1061416A1 Method for varying the diameter of a beam of charged particles |
| 08/22/1979 | EP0003659A2 Apparatus for and method of analysing materials by means of a beam of charged particles |
| 08/22/1979 | EP0003527A2 Method and apparatus for focusing a beam of charged particles onto semiconductor chips |
| 08/21/1979 | US4165395 Process for forming a high aspect ratio structure by successive exposures with electron beam and actinic radiation |
| 08/21/1979 | CA1061008A1 Electron projection microfabrication system |
| 08/14/1979 | US4164658 Charged-particle beam optical apparatus for imaging a mask on a specimen |
| 08/14/1979 | US4164640 Method and apparatus for positioning a charged particle beam |
| 08/07/1979 | US4163900 Composite electron microscope grid suitable for energy dispersive X-ray analysis, process for producing the same and other micro-components |
| 08/07/1979 | US4163889 Device for the simultaneous operation of a number of gas discharge electron guns |
| 07/31/1979 | US4163168 Two-directional piezoelectric driven fine adjusting device |
| 07/31/1979 | US4163155 Defining a low-density pattern in a photoresist with an electron beam exposure system |
| 07/31/1979 | US4163153 Ion beam means |
| 07/31/1979 | US4162954 Uniformity of cathode erosion |
| 07/31/1979 | CA1059656A1 Charged particle beam apparatus |
| 07/31/1979 | CA1059465A1 Vacuum sputtering apparatus and method |
| 07/25/1979 | EP0003073A1 Electron beam welding machine |
| 07/25/1979 | EP0003038A2 Method for overlay measurement using an electronic beam system as a measuring tool |
| 07/24/1979 | US4162403 Method and means for compensating for charge carrier beam astigmatism |
| 07/24/1979 | US4162401 Electron microscopes |
| 07/24/1979 | US4162391 Sliding vacuum seal means |
| 07/12/1979 | WO1979000413A1 Electric arc apparatus and method for treating a flow of material by an electric arc |
| 07/11/1979 | EP0002990A1 Device for implanting strong-current ions, comprising electrostatic deflection plates and magnetic refocussing means |
| 07/11/1979 | EP0002957A2 Electron beam exposure apparatus |
| 07/11/1979 | EP0002832A1 Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylinders |
| 07/11/1979 | EP0002726A2 Process and apparatus for reactive ion etching |
| 07/11/1979 | EP0002688A1 Apparatus for irradiation of a target with ions |
| 07/10/1979 | US4160905 Electron microscopes |
| 07/10/1979 | US4160690 Gas etching method and apparatus |
| 07/03/1979 | US4160162 Method for the pictorial display of a diffraction image in a transmission-type, scanning, corpuscular-beam microscope |
| 07/03/1979 | US4160150 Method and apparatus for energy beam welding |
| 07/03/1979 | US4159909 Cathode target material compositions for magnetic sputtering |
| 06/27/1979 | EP0002623A1 Electric arc apparatus and method for treating a flow of material by an electric arc |
| 06/27/1979 | EP0002472A2 Device and method for growing doped semiconductor material layers on the surface of a semiconductor substrate |
| 06/26/1979 | US4159423 Chemical ionization ion source |
| 06/26/1979 | US4159421 Method and apparatus for suppressing electron generation in a vapor source for isotope separation |
| 06/26/1979 | CA1057422A1 Ion implantation apparatus |
| 06/19/1979 | US4158589 Negative ion extractor for a plasma etching apparatus |
| 06/13/1979 | EP0002409A1 Arrangement for the programmed inscription of patterns having different configurations by bombarding a target by a beam of particles |
| 06/13/1979 | EP0002407A1 Mobile extraction electrode for an ion source |
| 06/13/1979 | EP0002406A1 Ion source, in particular for an ion implantation device |
| 06/13/1979 | EP0002383A1 Method and apparatus for depositing semiconductor and other films |
| 06/12/1979 | US4158141 Process for channeling ion beams |
| 06/12/1979 | US4158140 Electron beam exposure apparatus |
| 05/30/1979 | EP0001985A1 Ion implantation device with a device for maintaining the vacuum condition |
| 05/29/1979 | CA1055264A1 Multiple stage cryogenic pump and method of pumping |
| 05/22/1979 | US4155825 Integrated sputtering apparatus and method |
| 05/22/1979 | CA1055104A1 Apparatus for measuring the beam current of charged particle beam |
| 05/16/1979 | EP0001889A1 Method for surface hardening metals |