| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 06/15/1982 | US4335309 Method and device for the rapid deflection of a particle beam |
| 06/15/1982 | US4335189 Resolution standard for scanning electron microscope comprising palladium spines on a metal substrate |
| 06/15/1982 | US4334844 Replica film of specimen for electron microscopy apparatus |
| 06/15/1982 | CA1125863A1 Sliding vacuum seal means with air inrush reducing seals |
| 06/09/1982 | EP0053225A1 Electron beam system and method |
| 06/09/1982 | EP0053107A1 Process for operating a high stability electron gun for the shaping of materials. |
| 06/08/1982 | US4334156 Method of shadow printing exposure |
| 06/08/1982 | US4334139 Apparatus for writing patterns in a layer on a substrate by means of a beam of electrically charged particles |
| 06/08/1982 | US4333814 Controllable self-bias |
| 06/08/1982 | CA1125441A1 Electron beam exposure system and an apparatus for carrying out the same |
| 06/02/1982 | EP0052621A1 Brightness analyser |
| 06/01/1982 | US4333035 Areal array of tubular electron sources |
| 06/01/1982 | CA1124890A1 Correction for polychromatic aberration in ct images |
| 05/27/1982 | WO1982001787A1 Method for engraving by means of an electron beam |
| 05/25/1982 | US4331875 Shadow casting electron-beam system |
| 05/25/1982 | US4331856 Control system and method of controlling ion nitriding apparatus |
| 05/25/1982 | US4331505 Masking, etching, lithography |
| 05/19/1982 | EP0051733A1 Electron beam projection system |
| 05/19/1982 | EP0051635A1 Sputter target and glow discharge coating apparatus. |
| 05/18/1982 | US4330709 Electronic optical objective |
| 05/18/1982 | US4330708 Electron lens |
| 05/18/1982 | US4330707 Scanning electron microscope |
| 05/18/1982 | US4330182 Method of forming semiconducting materials and barriers |
| 05/11/1982 | US4329563 Glow discharge heating apparatus |
| 05/04/1982 | US4328324 Plasma treated |
| 05/04/1982 | US4328258 Method of forming semiconducting materials and barriers |
| 05/04/1982 | US4328081 Sulfided nickel, tungsten catalyst |
| 05/04/1982 | US4328068 Method for end point detection in a plasma etching process |
| 05/04/1982 | CA1123120A1 Defining a low-density pattern in a photoresist with an electron beam exposure system |
| 04/27/1982 | US4327292 Alignment process using serial detection of repetitively patterned alignment marks |
| 04/27/1982 | US4327273 Method of treating a workpiece with electron beams and apparatus therefor |
| 04/21/1982 | EP0049872A2 Electron beam exposure system |
| 04/13/1982 | US4325084 Semiconductor device and method of manufacturing same, as well as a pick-up device and a display device having such a semiconductor device |
| 04/07/1982 | EP0048864A2 Particle beam blanking system |
| 04/07/1982 | EP0048858A1 Signal processing device for electron beam measuring apparatus |
| 04/07/1982 | EP0048857A1 Arrangement for the stroboscopic measuring of a potential with an electron beam measuring apparatus, and method of operating such an apparatus |
| 04/07/1982 | EP0048856A2 Beam blanking electrode for an electron beam generating system |
| 04/06/1982 | US4323589 Fabrication of intergrated circuits |
| 04/01/1982 | WO1982001016A1 Method and apparatus for surface hardening cams |
| 03/31/1982 | EP0012765B1 Method of operating a raster-scan electron beam lithographic system |
| 03/30/1982 | US4322626 Method of electron beam exposure |
| 03/24/1982 | EP0047989A2 Electron beam exposure system |
| 03/23/1982 | US4321510 Electron beam system |
| 03/23/1982 | US4321470 Electron flood exposure apparatus |
| 03/23/1982 | US4321468 Method and apparatus for correcting astigmatism in scanning electron microscopes and similar equipment |
| 03/18/1982 | WO1982000920A1 Electron microscope |
| 03/17/1982 | EP0047663A2 Microwave plasma etching |
| 03/17/1982 | EP0047395A2 System for reactive ion etching |
| 03/17/1982 | EP0009049B1 Apparatus and method for fabricating microminiature devices |
| 03/16/1982 | CA1120153A1 Two-sided planar magnetron sputtering apparatus |
| 03/10/1982 | EP0047104A1 An electron beam exposure method |
| 03/10/1982 | EP0047002A2 Plasma etching apparatus |
| 03/10/1982 | EP0046945A1 Method and apparatus for treating fluorescent substance |
| 03/09/1982 | CA1119554A1 Deposition process monitoring and control system |
| 03/03/1982 | EP0039688A4 Sextupole system for the correction of spherical aberration. |
| 03/02/1982 | US4317983 Setting the electron gun cathode heating current of an electron beam machine |
| 02/24/1982 | EP0046154A1 Apparatus for coating substrates by high-rate cathodic sputtering, as well as sputtering cathode for such apparatus |
| 02/23/1982 | US4317022 Electron beam welding machine |
| 02/23/1982 | US4316791 Device for chemical dry etching of integrated circuits |
| 02/23/1982 | CA1118715A1 Assembly and method to extend useful life of sputtering targets |
| 02/17/1982 | EP0045858A2 Plasma etching electrode |
| 02/17/1982 | EP0045844A1 Arrangement for focusing a beam of charged particles with variable focus |
| 02/17/1982 | EP0045822A1 Cylindrical magnetron sputtering cathode |
| 02/16/1982 | US4316090 Microwave plasma ion source |
| 02/16/1982 | US4316087 Method of photographing electron microscope images on a single photographic plate and apparatus therefor |
| 02/16/1982 | CA1118180A1 Process of and apparatus for cold-cathode electron-beam generation for sterilization of surfaces and similar applications |
| 02/09/1982 | US4315195 High-voltage supply for power electron-beam guns |
| 02/09/1982 | US4315152 Electron beam apparatus |
| 02/09/1982 | US4315131 Electron discharge heating devices |
| 02/09/1982 | CA1118055A1 Method and apparatus for controlling an electron beam welding generator |
| 02/03/1982 | EP0044926A1 Resolution standard for scanning electron microscope and method of producing such a standard |
| 02/02/1982 | US4314182 System for controlling the power of a high-voltage electron beam generator |
| 02/02/1982 | CA1117609A1 Glow discharge heating apparatus |
| 01/26/1982 | US4313056 Scanning electron microscope with a chamber which can be broken down, particularly for observing pieces of relatively large dimensions |
| 01/26/1982 | US4312732 Method for the optical monitoring of plasma discharge processing operations |
| 01/26/1982 | US4312731 Magnetically enhanced sputtering device and method |
| 01/26/1982 | EP0038808A4 Ion beam lithography process and apparatus using step-and repeat exposure. |
| 01/20/1982 | EP0043863A1 Process for compensating the proximity effect in electron beam projection devices |
| 01/13/1982 | EP0043789A2 Method for the chemical-discharge treatment of sensitive workpieces by means of a glow discharge |
| 01/12/1982 | US4310764 Electron beam irradiation apparatus |
| 01/12/1982 | US4310743 Hydroscopic salt particles; emergency breating cannisters for mineers |
| 01/07/1982 | WO1982000075A1 Vacuum arc plasma device |
| 01/06/1982 | EP0043351A2 Electrostatic blanking system for one particle beam moving in a plane or a plurality of static particle beams arranged in a plane |
| 01/05/1982 | US4309589 Method and apparatus for electron beam welding |
| 01/05/1982 | US4309267 Reactive sputter etching apparatus |
| 01/05/1982 | US4309266 For producing uniform thin films |
| 01/05/1982 | US4308756 Vacuum sample introduction unit |
| 12/29/1981 | US4308457 Device for the detection of back-scattered electrons from a sample in an electron microscope |
| 12/24/1981 | WO1981003707A1 Method and apparatus for material analysis |
| 12/22/1981 | US4307283 Plasma etching apparatus II-conical-shaped projection |
| 12/15/1981 | US4306149 Electron microscope (comprising an auxiliary lens) |
| 12/15/1981 | US4305591 Inflatable seals |
| 12/10/1981 | WO1981003592A1 Brightness analyser |
| 12/10/1981 | WO1981003580A1 Sample chamber for electron-sounding instrument |
| 12/10/1981 | WO1981003579A1 High stability electron gun for the shaping of materials |
| 12/09/1981 | EP0041228A2 Manufacturing process of an electron beam output window |
| 12/08/1981 | US4305000 Process of and apparatus for cold-cathode electron-beam generation for sterilization of surfaces and similar applications |
| 12/08/1981 | US4304983 Plasma etching device and process |
| 12/08/1981 | US4304979 Method and apparatus for electron beam welding at elevated pressures |
| 12/08/1981 | CA1113757A1 Device for material machining using electromagnetic or corpuscular beams |