Patents
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
09/1977
09/06/1977US4047204 Variable interlace display
09/06/1977US4046666 Device for providing high-intensity ion or electron beam
09/06/1977US4046659 Method for coating a substrate
08/1977
08/30/1977US4045707 System for the power control of high voltage electron beam generators
08/30/1977US4045669 Electron microscope
08/30/1977US4045647 Fluid tight movable passage
08/23/1977US4044266 Apparatus for ion-implantation in elements, especially discs of semi-conducting material
08/23/1977US4044256 Support stand for a corpuscular-beam microscope
08/23/1977US4044255 Corpuscular-beam transmission-type microscope including an improved beam deflection system
08/23/1977US4044254 Scanning corpuscular-beam transmission type microscope including a beam energy analyzer
08/23/1977US4043889 Method of and apparatus for the radio frequency sputtering of a thin film
08/16/1977US4042801 Electron beam apparatus
08/16/1977US4042119 Workpiece positioning apparatus
08/09/1977US4041532 Method of recording wide-band signals on a thermoplastic film by use of a beam of electrons
08/09/1977US4041353 Glow discharge method and apparatus
08/09/1977US4041316 Field emission electron gun with an evaporation source
08/09/1977US4041311 Scanning electron microscope with color image display
08/02/1977US4039829 Stereoscopic measuring apparatus
08/02/1977US4039810 Electron projection microfabrication system
08/02/1977US4039699 Method for making phosphors
08/02/1977US4039416 Gasless ion plating
07/1977
07/26/1977US4038543 Scanning transmission electron microscope including an improved image detector
07/26/1977US4038513 Process for energy beam perforation, especially electron beam perforation, of multi-layered artificial leather
07/26/1977US4038512 Self-stabilizing arc heater
07/26/1977US4038484 Electron beam heating system
07/19/1977US4037101 Method and apparatus for analyzing fine grained substances
07/12/1977US4035655 Method and a device for implantation of particles into a substrate
07/12/1977US4035573 Electron beam heating apparatus having means for sweeping the beam spot
07/05/1977US4034256 Electron gun for heating, fusing and vaporizing
07/05/1977US4034220 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons
06/1977
06/21/1977US4031424 Electrode type glow discharge apparatus
06/21/1977US4031391 Electron microscope including improved means for determining and correcting image drift
06/21/1977US4031390 Method of operating a particle-beam apparatus
06/21/1977US4030996 Electrode type glow discharge method and apparatus
06/07/1977US4028547 X-ray photolithography
06/07/1977US4028523 Energy-beam engraving method and an apparatus for carrying it out
05/1977
05/31/1977US4027093 Ingot gripper assembly
05/31/1977US4026787 Thin film deposition apparatus using segmented target means
05/17/1977US4024402 Specimen cartridge for a particle beam device
05/17/1977US4024399 Method and apparatus for measuring vapor flow in isotope separation
05/03/1977US4021675 System for controlling ion implantation dosage in electronic materials
05/03/1977US4021674 Charged-particle beam optical apparatus for irradiating a specimen in a two-dimensional pattern
05/03/1977US4021636 Beam current control device for a technical corpuscular beam apparatus
04/1977
04/26/1977US4020387 Field emission electron gun
04/26/1977US4020353 Sample analysis apparatus using electron beam irradiation
04/26/1977US4020343 Scanning electron device
04/26/1977US4020318 Electron beam generators
04/19/1977US4019091 Gas discharge electron gun for generating an electron beam by means of a glow discharge
04/19/1977US4019077 Field emission electron gun
04/19/1977US4019064 High intensity ionic bombardment reactor for thermochemical treatment processes
04/19/1977US4019015 Precision tool and workpiece positioning apparatus with ringout detection
04/12/1977US4017403 Ion beam separators
04/05/1977US4016062 Ion milling
04/05/1977US4016061 Method of making resistive films
03/1977
03/29/1977US4014779 Sputtering apparatus
03/22/1977US4013891 Method for varying the diameter of a beam of charged particles
03/22/1977US4013539 Thin film deposition apparatus
03/22/1977US4013533 Volatilization and deposition of a semi-conductor substance and a metallic doping impurity
03/22/1977US4013262 Rotary apparatus for moving workpieces through treatment beam with controlled angle of orientation and ion implanter incorporating such apparatus
03/22/1977US4013261 Device for producing work pieces perforated by means of electron beams
03/08/1977US4011450 Scanning electron device
03/08/1977US4011449 Apparatus for measuring the beam current of charged particle beam
03/01/1977US4010318 Probe forming electron optical column having means for examining magnified image of the probe source
02/1977
02/22/1977US4008683 Machine for treating wafer-form items
02/15/1977US4008402 Method and apparatus for electron beam alignment with a member by detecting X-rays
02/01/1977US4006357 Apparatus for displaying image of specimen
02/01/1977US4006340 Device for the rapid depositing of oxides in thin layers which adhere well to plastic supports
02/01/1977US4006073 Thin film deposition by electric and magnetic crossed-field diode sputtering
01/1977
01/18/1977US4004172 Gas discharge electron gun for generating an electron beam by means of a glow discharge
01/18/1977US4004149 Apparatus for displaying image produced by electrically charged particle beam
01/11/1977US4002912 Electrostatic lens to focus an ion beam to uniform density
01/04/1977US4001582 Local surface analysis
01/04/1977US4001493 Single lens, multi-beam system and method for high resolution recording of information on a moving recording medium and article
12/1976
12/28/1976US4000440 Method and apparatus for controlling brightness and alignment of a beam of charged particles
12/28/1976US4000423 Fast response high temperature evaporation control
12/21/1976US3999097 Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system
12/21/1976US3999032 Current control in an electron beam welder
12/21/1976US3998718 Ion milling apparatus
12/14/1976US3997846 Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
12/14/1976US3996884 Device for processing an organic high molecular weight film
12/07/1976US3996469 Floating convection barrier for evaporation source
12/07/1976US3996468 Electron microscope aperture system
11/1976
11/30/1976US3995266 Device for setting an electric command variable
11/30/1976US3995190 Mobile ion film memory
11/30/1976US3995187 Electrode type glow discharge apparatus
11/30/1976US3995186 Ion-plasma gun for ion-milling machine
11/23/1976US3993905 Electron beam scanning apparatus for the structural analysis of specimens
11/23/1976US3993509 Semiconductor device manufacture
11/16/1976US3992277 Process and apparatus for the manufacture of a gas mixture containing acetylene, ethylene, methane and hydrogen, by thermal cracking of liquid hydrocarbons
11/02/1976US3989975 Ion bombardment apparatus
10/1976
10/26/1976US3988232 Method of making crystal films
10/26/1976US3988153 Method of forming a thin film iris diaphragm for a corpuscular beam apparatus
10/19/1976US3987242 Automatic dc restorer and gain control
10/12/1976US3986027 Stereo scanning microprobe
10/12/1976US3986025 Ion microanalyzer
10/12/1976US3985635 Apparatus for concurrently sputtering different materials
10/05/1976US3984687 Shielded magnetic lens and deflection yoke structure for electron beam column
10/05/1976US3984683 Apparatus and method for analyzing biological cells for malignancy
09/1976
09/28/1976US3983402 Ion implantation apparatus
09/28/1976US3983401 Method and apparatus for target support in electron projection systems