| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 09/06/1977 | US4047204 Variable interlace display |
| 09/06/1977 | US4046666 Device for providing high-intensity ion or electron beam |
| 09/06/1977 | US4046659 Method for coating a substrate |
| 08/30/1977 | US4045707 System for the power control of high voltage electron beam generators |
| 08/30/1977 | US4045669 Electron microscope |
| 08/30/1977 | US4045647 Fluid tight movable passage |
| 08/23/1977 | US4044266 Apparatus for ion-implantation in elements, especially discs of semi-conducting material |
| 08/23/1977 | US4044256 Support stand for a corpuscular-beam microscope |
| 08/23/1977 | US4044255 Corpuscular-beam transmission-type microscope including an improved beam deflection system |
| 08/23/1977 | US4044254 Scanning corpuscular-beam transmission type microscope including a beam energy analyzer |
| 08/23/1977 | US4043889 Method of and apparatus for the radio frequency sputtering of a thin film |
| 08/16/1977 | US4042801 Electron beam apparatus |
| 08/16/1977 | US4042119 Workpiece positioning apparatus |
| 08/09/1977 | US4041532 Method of recording wide-band signals on a thermoplastic film by use of a beam of electrons |
| 08/09/1977 | US4041353 Glow discharge method and apparatus |
| 08/09/1977 | US4041316 Field emission electron gun with an evaporation source |
| 08/09/1977 | US4041311 Scanning electron microscope with color image display |
| 08/02/1977 | US4039829 Stereoscopic measuring apparatus |
| 08/02/1977 | US4039810 Electron projection microfabrication system |
| 08/02/1977 | US4039699 Method for making phosphors |
| 08/02/1977 | US4039416 Gasless ion plating |
| 07/26/1977 | US4038543 Scanning transmission electron microscope including an improved image detector |
| 07/26/1977 | US4038513 Process for energy beam perforation, especially electron beam perforation, of multi-layered artificial leather |
| 07/26/1977 | US4038512 Self-stabilizing arc heater |
| 07/26/1977 | US4038484 Electron beam heating system |
| 07/19/1977 | US4037101 Method and apparatus for analyzing fine grained substances |
| 07/12/1977 | US4035655 Method and a device for implantation of particles into a substrate |
| 07/12/1977 | US4035573 Electron beam heating apparatus having means for sweeping the beam spot |
| 07/05/1977 | US4034256 Electron gun for heating, fusing and vaporizing |
| 07/05/1977 | US4034220 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
| 06/21/1977 | US4031424 Electrode type glow discharge apparatus |
| 06/21/1977 | US4031391 Electron microscope including improved means for determining and correcting image drift |
| 06/21/1977 | US4031390 Method of operating a particle-beam apparatus |
| 06/21/1977 | US4030996 Electrode type glow discharge method and apparatus |
| 06/07/1977 | US4028547 X-ray photolithography |
| 06/07/1977 | US4028523 Energy-beam engraving method and an apparatus for carrying it out |
| 05/31/1977 | US4027093 Ingot gripper assembly |
| 05/31/1977 | US4026787 Thin film deposition apparatus using segmented target means |
| 05/17/1977 | US4024402 Specimen cartridge for a particle beam device |
| 05/17/1977 | US4024399 Method and apparatus for measuring vapor flow in isotope separation |
| 05/03/1977 | US4021675 System for controlling ion implantation dosage in electronic materials |
| 05/03/1977 | US4021674 Charged-particle beam optical apparatus for irradiating a specimen in a two-dimensional pattern |
| 05/03/1977 | US4021636 Beam current control device for a technical corpuscular beam apparatus |
| 04/26/1977 | US4020387 Field emission electron gun |
| 04/26/1977 | US4020353 Sample analysis apparatus using electron beam irradiation |
| 04/26/1977 | US4020343 Scanning electron device |
| 04/26/1977 | US4020318 Electron beam generators |
| 04/19/1977 | US4019091 Gas discharge electron gun for generating an electron beam by means of a glow discharge |
| 04/19/1977 | US4019077 Field emission electron gun |
| 04/19/1977 | US4019064 High intensity ionic bombardment reactor for thermochemical treatment processes |
| 04/19/1977 | US4019015 Precision tool and workpiece positioning apparatus with ringout detection |
| 04/12/1977 | US4017403 Ion beam separators |
| 04/05/1977 | US4016062 Ion milling |
| 04/05/1977 | US4016061 Method of making resistive films |
| 03/29/1977 | US4014779 Sputtering apparatus |
| 03/22/1977 | US4013891 Method for varying the diameter of a beam of charged particles |
| 03/22/1977 | US4013539 Thin film deposition apparatus |
| 03/22/1977 | US4013533 Volatilization and deposition of a semi-conductor substance and a metallic doping impurity |
| 03/22/1977 | US4013262 Rotary apparatus for moving workpieces through treatment beam with controlled angle of orientation and ion implanter incorporating such apparatus |
| 03/22/1977 | US4013261 Device for producing work pieces perforated by means of electron beams |
| 03/08/1977 | US4011450 Scanning electron device |
| 03/08/1977 | US4011449 Apparatus for measuring the beam current of charged particle beam |
| 03/01/1977 | US4010318 Probe forming electron optical column having means for examining magnified image of the probe source |
| 02/22/1977 | US4008683 Machine for treating wafer-form items |
| 02/15/1977 | US4008402 Method and apparatus for electron beam alignment with a member by detecting X-rays |
| 02/01/1977 | US4006357 Apparatus for displaying image of specimen |
| 02/01/1977 | US4006340 Device for the rapid depositing of oxides in thin layers which adhere well to plastic supports |
| 02/01/1977 | US4006073 Thin film deposition by electric and magnetic crossed-field diode sputtering |
| 01/18/1977 | US4004172 Gas discharge electron gun for generating an electron beam by means of a glow discharge |
| 01/18/1977 | US4004149 Apparatus for displaying image produced by electrically charged particle beam |
| 01/11/1977 | US4002912 Electrostatic lens to focus an ion beam to uniform density |
| 01/04/1977 | US4001582 Local surface analysis |
| 01/04/1977 | US4001493 Single lens, multi-beam system and method for high resolution recording of information on a moving recording medium and article |
| 12/28/1976 | US4000440 Method and apparatus for controlling brightness and alignment of a beam of charged particles |
| 12/28/1976 | US4000423 Fast response high temperature evaporation control |
| 12/21/1976 | US3999097 Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system |
| 12/21/1976 | US3999032 Current control in an electron beam welder |
| 12/21/1976 | US3998718 Ion milling apparatus |
| 12/14/1976 | US3997846 Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus |
| 12/14/1976 | US3996884 Device for processing an organic high molecular weight film |
| 12/07/1976 | US3996469 Floating convection barrier for evaporation source |
| 12/07/1976 | US3996468 Electron microscope aperture system |
| 11/30/1976 | US3995266 Device for setting an electric command variable |
| 11/30/1976 | US3995190 Mobile ion film memory |
| 11/30/1976 | US3995187 Electrode type glow discharge apparatus |
| 11/30/1976 | US3995186 Ion-plasma gun for ion-milling machine |
| 11/23/1976 | US3993905 Electron beam scanning apparatus for the structural analysis of specimens |
| 11/23/1976 | US3993509 Semiconductor device manufacture |
| 11/16/1976 | US3992277 Process and apparatus for the manufacture of a gas mixture containing acetylene, ethylene, methane and hydrogen, by thermal cracking of liquid hydrocarbons |
| 11/02/1976 | US3989975 Ion bombardment apparatus |
| 10/26/1976 | US3988232 Method of making crystal films |
| 10/26/1976 | US3988153 Method of forming a thin film iris diaphragm for a corpuscular beam apparatus |
| 10/19/1976 | US3987242 Automatic dc restorer and gain control |
| 10/12/1976 | US3986027 Stereo scanning microprobe |
| 10/12/1976 | US3986025 Ion microanalyzer |
| 10/12/1976 | US3985635 Apparatus for concurrently sputtering different materials |
| 10/05/1976 | US3984687 Shielded magnetic lens and deflection yoke structure for electron beam column |
| 10/05/1976 | US3984683 Apparatus and method for analyzing biological cells for malignancy |
| 09/28/1976 | US3983402 Ion implantation apparatus |
| 09/28/1976 | US3983401 Method and apparatus for target support in electron projection systems |